JPH10268354A - Liquid crystal display device and its open-circuit reparing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide the liquid crystal display device and its opencircuit reparing method which make it possible to repair a linear display defect while suppressing an increase in parasitic capacitance due to wiring for repair without spoiling the portability of the liquid crystal display device, and can improve the reliability and yield and suppress a decrease in throughput in an open-circuit repairing process. SOLUTION: The liquid crystal display device consists of a 1st insulating substrate 1, a matrix substrate consisting of scanning wires 2, signal wires 3, switching elements, pixel electrodes, and a 1st repair wire 6 crossing the scanning wires or signal wires, a counter substrate consisting of a 2nd insulating substrate 9 provided with a 2nd repair wire 7, and a display material sandwiched between the matrix substrate and counter substrate; and the scanning wires 2 and signal wires 3 are divided into blocks each consisting of several wires, and one 1st repair wire 6 crosses each block.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a liquid crystal display device having improved display reliability and improved yield in a manufacturing process, and a method for repairing a disconnection thereof.

[0002]

2. Description of the Related Art A conventional liquid crystal display device, for example, a matrix type liquid crystal display device in which a plurality of pixels are provided in a matrix, includes a matrix substrate, a counter substrate, and a liquid crystal sandwiched between the matrix substrate and the counter substrate. And display materials.

The matrix substrate includes a first insulating substrate, a plurality of scanning wirings provided in parallel with each other on the first insulating substrate, and a first insulating covering the plurality of scanning wirings. A film, a plurality of signal wirings orthogonal to the plurality of scanning wirings via the first insulating film, and switching provided at each intersection of the plurality of scanning wirings and the plurality of signal wirings. And a plurality of pixel electrodes connected to each switching element and arranged in a matrix. As the switching element, for example, a thin film transistor (hereinafter, referred to as “TFT”) is used. An electric signal for selectively turning on a TFT is input to the plurality of scanning lines, and an electric signal input to the signal line via the turned-on TFT is input to a pixel electrode.

The counter substrate includes a second insulating substrate, a color filter provided on the second insulating substrate (in the case of a color display liquid crystal display device), and a color filter provided on the second insulating substrate. It is provided with a common electrode provided and faces the matrix substrate.

[0005] The display material is driven in accordance with a potential difference between the pixel electrode and the common electrode.

When a disconnection occurs in the scanning line or the signal line, an electric signal input from one end of the disconnected scanning line or the signal line is applied to the scanning line at the disconnection portion. Alternatively, it does not reach the other end of the signal wiring, and as a result, a linear display defect occurs.

As an example of a method of repairing such a display defect, there is a method disclosed in, for example, Japanese Patent Application Laid-Open No. 4-42215, which will be described with reference to FIG.

FIG. 3 is an explanatory plan view showing an example of a matrix substrate of a conventional matrix type liquid crystal display device. FIG.
, 1 is a first insulating substrate, 2 is a scanning wiring, 3
Is a signal wiring, 4 is a wiring pad connected to one end of the scanning wiring 2 and the signal wiring 3, 5 is a display section provided with a plurality of pixel electrodes in a matrix, and 16 is a display section. 5 shows a repair wiring provided on the outer peripheral portion of the section 5 and intersecting the scanning wiring 2 and the signal wiring 3 via an insulating film (not shown). FIG. 3 shows only five scanning wirings and signal wirings among all the scanning wirings and signal wirings formed on the matrix substrate.

As shown in FIG. 3, when a disconnection occurs between the g portion and the h portion of one signal wire 3, the electric signal input to the signal wire 3 via the wiring pad 4 , G
When the liquid crystal display device is driven, a line defect is generated without being transmitted between the portion and the portion f. Therefore, the insulating films at the portions a and f at the intersections with the signal wiring 3 are broken by a laser or the like, and the repairing wiring 6 and the disconnected signal wiring 3 are electrically connected. Further, the repair wiring 6 is irradiated by laser irradiation at the k and m portions between the intersections of the signal wires 3 and the repair wires 6 adjacent to the disconnected signal wires 3 and the a and f portions. Disconnect. As a result, a detour passing through the portions a, f, and g is formed.
Therefore, the electric signal input to the signal wiring 3 having the disconnection via the wiring pad 4 is transmitted between the g part and the f part, and no line defect occurs when the liquid crystal display device is driven.

However, due to the high definition and large area of the display section of the liquid crystal display device, the scanning wiring 2 and the signal wiring 3
Increases, the number of intersections between the repair wiring 6 and the scanning wiring 2 or the signal wiring 3 increases, and the parasitic capacitance generated at the intersection increases. As a result, when the liquid crystal display device is driven, a delay in an electric signal or a decrease in the voltage of the electric signal occurs in the scanning wiring 2 or the signal wiring 3, and the display quality of the liquid crystal display device deteriorates. Occur.

Further, the scanning wiring 2 and the signal wiring 3
When the number of lines increases, the number of scanning lines 2 and signal lines 3 having a disconnection increases, and the number of repair lines 6 necessary for repairing the disconnection increases. Therefore, it is necessary to increase the area for arranging the repair wiring 6 on the matrix substrate, which causes a problem of preventing the liquid crystal display device from being portable.

Next, another example of a method for repairing a disconnection of a conventional matrix type liquid crystal display device will be described.

[0013] Disconnection that can suppress the parasitic capacitance generated at the intersection of the repair wiring and the scanning wiring or the signal wiring, and save the area for arranging the repair wiring on the matrix substrate. As an example of a repair method, there is a method of repairing a disconnection using a repair wiring at least partially disposed on an opposite substrate. As an example of such a method, there is a method disclosed in JP-A-5-265018, which will be described with reference to FIG.

FIG. 4 is an explanatory plan view showing another example of a matrix substrate of a conventional matrix type liquid crystal display device. 4, the same parts as those in FIG. 3 are denoted by the same reference numerals, 9 is a second insulating substrate, 12 is a conductive paste (hereinafter, simply referred to as “conductive paste”),
Reference numeral 13 denotes an insulating film provided on the signal wiring 3 (hereinafter, referred to as “signal insulating film”), and reference numeral 26 denotes a repair wiring provided on the counter substrate 9. Instead of the conductive paste 12, a sealing material (a sealing material used for bonding the matrix substrate and the counter substrate) mixed with a conductive spacer may be used.

As shown in FIG. 4, for example, when a disconnection occurs between the g portion and the h portion of one signal wire 3,
The conductive paste 12 is applied to a portion of the signal wiring 3 where the disconnection intersects with the repair wiring 26, that is, the intersections a and f, and the signal wiring 3 and the repair wiring 26 where the disconnection occurs are electrically connected. , A linear display defect can be repaired.

However, the interval between the signal wires 3 is generally as narrow as about 0.1 mm, and it is difficult to apply the conductive paste 12 to only one signal wire 3. Therefore, it is necessary to form the signal insulating film 13 on the signal wiring 3 other than the signal wiring 3 in which the disconnection has occurred, and to maintain the insulation between the signal wiring 3 and the repair wiring 26. for that reason,
It is necessary to add a process such as formation of the signal insulating film 13 using the anodic oxidation method to the manufacturing process of the matrix type liquid crystal display device, which is disadvantageous in reducing the manufacturing cost of the matrix type liquid crystal display device. Further, there is a problem that it cannot be repaired after the matrix substrate and the counter substrate are bonded together.

Next, still another example of a conventional method for repairing a disconnection of a matrix type liquid crystal display device will be described.

A method of repairing a disconnection using a repair wiring formed on a counter substrate using a matrix type liquid crystal display device formed by a conventional manufacturing method is disclosed in JP-A-7-301812.
This is disclosed in Japanese Unexamined Patent Publication (Kokai) No. H11-205, and will be described with reference to FIG. FIG.
FIG. 4 is an explanatory plan view showing still another example of the matrix substrate of the conventional matrix type liquid crystal display device. 5, the same parts as those in FIGS. 3 and 4 are denoted by the same reference numerals, 11 is a common electrode, 17 is a second repair wiring formed on the counter substrate side, and 36 is formed on the matrix substrate side. 1 shows a repaired first repair wiring. In addition, 18 is the first
1 denotes a first connection terminal connected to the repair wiring 36, and 20 denotes a second connection terminal connected to the second repair wiring 17.

The first repair wiring 36 is formed along the outer periphery of the display section 5 of the first insulating substrate 1. The first repair wiring 36 is formed on the scanning wiring 2 or the signal wiring 3 via an insulating film (not shown), and the first repair wiring 36 and the scanning wiring 2 or the signal wiring 3 are formed. Insulation between the wiring 3 for use is maintained. Further, the second repair wiring 17 is formed along the outer periphery of the display section of the second insulating substrate. The common electrode 11 is connected to a common wiring (not shown) in order to supply a voltage to the common electrode from a driving unit provided outside the matrix type liquid crystal display device. Since the second repair wiring 17 is formed after an insulating film (not shown) covering the common electrode and the common wiring is formed, the second repair wiring 17 is formed.
The insulation between the repair wiring 17 and the common electrode or the common wiring is maintained.

The first repair wiring 36 has connection portions b and e.
Are electrically connected to each other. Further, the connection portions c and d are connected to the second repair wiring 17.
, The two second connection terminals 20 are electrically connected.

As shown in FIG. 5, for example, when a disconnection occurs between the g portion and the h portion of one signal wire 3,
The portion of the signal wiring 3 where the disconnection has occurred intersects with the first repair wiring 36, that is, the insulating film at the intersections a and f is broken by a method such as laser irradiation, and the signal wiring 3 where the disconnection has occurred. The first repair wiring 36 is electrically connected. further,
The signal wiring 3 provided on the side opposite to the first connection terminal 18 of the two signal wirings 3 adjacent to the signal wiring 3 in which the disconnection has occurred, and the signal wiring 3 in which the disconnection has occurred. The first repair wiring 36 is cut by laser irradiation at the k and m portions between the portions. Further, in order to cut unnecessary portions of the first repair wiring 36, laser irradiation is performed on the i-portion and the j-portion. Next, the matrix substrate and the counter substrate are attached to each other, and the first connection terminal 18 and the second connection terminal 20 are electrically connected via a conductive paste or the like. As a result, the electric signal input to the wiring pad of the signal wiring 3 in which the disconnection has occurred has the intersection a, the connection b, c,
It can be transmitted along a detour passing through d, e, intersections f and g, and can repair linear display defects.

[0022]

In the conventional liquid crystal display device and the method for repairing the disconnection thereof, in the case of the matrix type liquid crystal display device shown in FIG. 3, two lasers are used for repairing the disconnection of one signal line. Irradiation work is required, and in the case of the matrix type liquid crystal display device shown in FIG. 5, 4 to 6 laser irradiation work is required to repair disconnection of one signal wiring, and the throughput in the disconnection repair process is increased. (Work efficiency) is reduced. FIG.
In the case of the matrix type liquid crystal display device shown in (1), it is necessary to add a process such as formation of a signal insulating film using an anodic oxidation method to the manufacturing process of the matrix type liquid crystal display device, and the manufacturing cost of the matrix type liquid crystal display device There is a problem that increases.

The present invention solves such a problem and makes it possible to repair a linear display defect while suppressing an increase in parasitic capacitance due to repair wiring without hindering the portability of a matrix type liquid crystal display device. It is an object of the present invention to provide a liquid crystal display device capable of improving reliability and yield and suppressing a decrease in throughput in a disconnection repair process, and a disconnection repair method thereof.

[0024]

According to the present invention, there is provided a liquid crystal display device comprising: a first insulating substrate; a plurality of scanning wirings provided in parallel with each other on the first insulating substrate; A first insulating film covering the scanning wiring, a plurality of signal wirings orthogonal to the plurality of scanning wirings via the first insulating film,
A switching element provided at each intersection of the plurality of scanning lines and the plurality of signal lines; a pixel electrode connected to the switching element; and a plurality of scanning lines and the plurality of signal lines. A matrix substrate, a second insulating substrate, and a second repairing substrate provided above the second insulating substrate, the matrix substrate including at least one of the first repairing wires intersecting via the second insulating film; A liquid crystal display device comprising a wiring, and a display material facing the matrix substrate, and a display material sandwiched between the matrix substrate and the counter substrate, wherein the plurality of scanning wires and the plurality of signals are provided. Each of the wirings is divided into a plurality of blocks, and one first repair wiring crosses each block.

Also, a plurality of first connection terminals are provided on the matrix substrate, the first connection terminals are connected to the first repair wiring, and a plurality of second connection terminals are provided on the counter substrate. And the second connection terminal is connected to the second repair wiring.

The method for repairing disconnection of a liquid crystal display device according to the present invention
A first insulating substrate, a plurality of scanning wirings provided in parallel with each other on the first insulating substrate, a first insulating film covering the plurality of scanning wirings, A plurality of signal wirings orthogonal to the plurality of scanning wirings via a film, a switching element provided at each intersection of the plurality of scanning wirings and the plurality of signal wirings, and a connection to the switching element A matrix substrate comprising a pixel electrode and a first repair wiring crossing at least one of the plurality of scanning wirings and the plurality of signal wirings via a second insulating film; A counter substrate facing the matrix substrate, and a display material sandwiched between the matrix substrate and the counter substrate, comprising a substrate, and a second repair wiring provided above the second insulating substrate. Liquid crystal display device A method for repairing a disconnection of the plurality of scanning wires and the plurality of signal wires, wherein the plurality of scanning wires and the plurality of signal wires are divided into a plurality of blocks, respectively. One of the first repair wires is crossed for each block, and the first
Providing a first connection terminal connected to the repair wiring, and providing a second connection terminal connected to the second repair wiring,
When disconnection occurs in at least one of the plurality of scanning wirings and the plurality of signal wirings, the second insulating film is broken, and the plurality of scanning wirings and the plurality of signal wirings are broken. At least one is electrically connected to the first repair wiring, and the first connection terminal and the second connection terminal are electrically connected to each other via a conductive paste. .

The material of the first repair wiring, the second repair wiring, the first connection terminal and the second connection terminal may be made of chromium, aluminum, tantalum, molybdenum or indium oxide. It is one of.

Further, the conductive paste contains silver.

Further, when the second insulating film is broken,
A YAG laser is used.

[0030]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, an embodiment of a liquid crystal display device and a method for repairing a disconnection thereof according to the present invention will be described with reference to the drawings. Note that a matrix-type liquid crystal display device will be described as an example of a liquid crystal display device as in the related art.

First, the liquid crystal display of the present invention will be described.

In the liquid crystal display device according to the present invention, the plurality of scanning lines and the plurality of signal lines are each divided into a plurality of blocks, and one block is provided for each block.
The first repair wires of the book intersect. A second insulating film is formed between the first repair wiring and the scanning wiring or the signal wiring, and a first repair wiring,
Insulation between the scanning wiring and the signal wiring is maintained. Further, a second repair wiring is provided on the counter substrate.

FIG. 1 is an explanatory plan view showing one embodiment of a liquid crystal display device and a method for repairing a disconnection thereof according to the present invention. Note that, similarly to the related art, the embodiment will be described with reference to a matrix type liquid crystal display device as an example of a liquid crystal display device. In FIG. 1, 1 is a first insulating substrate,
2 is a scanning wiring, 3 is a signal wiring, 4 is a scanning wiring 2
Or a wiring pad connected to one end of the signal wiring 3,
Reference numeral 5 denotes a display unit, 6 denotes a first repair wiring, 7 denotes a second repair wiring, 8 denotes a first connection terminal connected to the first repair wiring 6, and 9 denotes a second insulating substrate. Reference numeral 10 denotes a second connection terminal connected to the second repair wiring 7, and reference numeral 11 denotes a common electrode provided on a second insulating substrate on which a color filter is formed.

For the sake of simplicity, the first insulating substrate 1 and the second insulating substrate 9 are shown obliquely shifted from each other.
When the second insulating substrate 9 and the second insulating substrate 9 are bonded to each other, the first connecting terminal and the second connecting terminal connected by a broken line face each other. FIG. 1 does not show all the scanning wires 2 and the signal wires 3, but shows only five scanning wires 2.
The signal wiring 3 is shown for 2 blocks, and 4 for each block.
Only the book is shown. FIG. 1 is a view of the first insulating substrate 1 and the second insulating substrate 9 as viewed from the second insulating substrate 9 side, and shows a second repair wiring 7 and a second connection terminal. 1
1 is provided on the surface of the second insulating substrate 9 on the first insulating substrate 1 side, but for the sake of simplicity, the second repair wiring 7 and the second connection terminal 11 are represented by solid lines. Only two sets are shown.

The scanning wiring 2 and the signal wiring 3 are made of chromium or aluminum. Further, the first repair wiring and the first connection terminal are preferably formed on the outside of the display unit 5 using a material having good conductivity, for example, chromium, aluminum, tantalum, molybdenum, or indium oxide. Consists of Further, the second repair wiring and the second connection terminal are preferably formed using a material having good conductivity outside the counter electrode 11, for example, chromium, aluminum, tantalum, molybdenum, or indium oxide. Consists of When the counter substrate includes a color filter, the second repair wiring is formed by using a conductive material such as chromium or indium oxide among the materials used for forming the color filter. And forming a second connection terminal.

Next, a method for repairing a disconnection of a liquid crystal display device according to the present invention will be described.

FIG. 2 is an explanatory plan view showing that the signal wiring of the liquid crystal display device shown in FIG. 1 is disconnected. 2, the same parts as those in FIG. 1 are denoted by the same reference numerals. In order to particularly illustrate the parts necessary for the description in an enlarged manner, FIG.
Only the book is shown, and only the first repair wiring, the first connection terminal, the second repair wiring, and the second connection terminal are shown for one block.

As shown in FIG. 2, when a break occurs between the g and h portions of the signal wire 3, the intersection a between the broken signal wire 3 and the first repair wire 6. About 5 in f
By irradiating a laser having a diameter of 10 μm to 10 μm, the first insulating film formed between the signal wiring 3 where the disconnection has occurred and the first repair wiring 6 is broken. Therefore, the disconnected signal wiring 3 and the first repair wiring 6 can be electrically connected. The laser is YAG (Yttrium)
(Aluminum Garnet) laser is preferable because it is small, easy to use, and easy to maintain.

Finally, when bonding the matrix substrate and the counter substrate together, the first connection terminal 8 and the second connection terminal 1
And 0 are electrically connected via a conductive paste. As a result, the voltage applied to the wiring pad 4 of the signal wiring 3 in which the disconnection has occurred is caused by the first repair wiring 6, the first connection terminal 8, the second repair wiring 7, and the second connection terminal. 1
0 is input to the entire signal wiring 3 where the disconnection has occurred, and no linear display defect occurs when the liquid crystal display device is driven.

It is preferable that the conductive paste contains silver, since a conductive paste that does not cause a delay of an electric signal can be obtained.

According to the liquid crystal display device of the present invention, since a part of the repair wiring is arranged on the counter substrate side, the space required for providing the repair wiring on the matrix substrate can be reduced. Therefore, the liquid crystal display device of the present invention
This is advantageous for realizing a portable liquid crystal display device. Further, the number of intersections between the scanning wiring or the signal wiring and the repair wiring can be reduced, so that the parasitic capacitance between the scanning wiring or the signal wiring and the repair wiring can be reduced. The conductive paste is applied by applying a transfer electrode provided on the matrix substrate side to apply a predetermined voltage to the common electrode provided on the counter substrate side by using a conductive paste on the common electrode. Can be performed simultaneously when electrically connected to the power supply. Therefore, there is no need to provide a new process for applying the paste. Further, since two laser irradiation positions are provided for repairing one signal wiring, the throughput in the disconnection repair process is improved.

In this specification, a method of repairing a disconnection in the case where a disconnection has occurred in the signal wiring has been described. However, the present invention can be carried out in the case where a disconnection has occurred in the scanning wiring. The effect is obtained.

[0043]

According to the present invention, the repair of the disconnected wiring (the scanning wiring and the signal wiring) can be performed by repairing the disconnected wiring and the first wiring.
It is only necessary to add an operation for connecting to the repair wiring. Therefore, work such as destruction of the repair wiring is eliminated, and a decrease in throughput in the disconnection repair process can be suppressed. In addition, since the first repair wiring is provided independently for each block, the number of blocks or the number of the first repair wiring per block is increased, so that the repairable wiring is increased. The number can be increased. Furthermore, it is possible to cope with the increase in the number of scanning lines and signal lines due to the higher resolution of the liquid crystal display device.
The yield can be improved. In addition, since the second repair wiring is formed on the opposite substrate, the size of the matrix substrate can be reduced, and the parasitic capacitance between the scanning wiring or signal wiring and the first repair wiring can be reduced. Thus, a liquid crystal display device having excellent display performance can be obtained.

The application of the conductive paste is as follows.
Since it can be performed simultaneously when the transfer electrode is electrically connected to the common electrode, there is no need to provide a new process for applying the paste.

Further, since the disconnection is repaired by laser irradiation, the disconnection can be repaired even after the matrix substrate and the counter substrate are bonded.

[Brief description of the drawings]

FIG. 1 is an explanatory plan view showing one embodiment of a liquid crystal display device and a method for repairing a disconnection thereof according to the present invention.

FIG. 2 is an explanatory plan view showing a state where a signal wire of the liquid crystal display device shown in FIG. 1 is disconnected.

FIG. 3 is an explanatory plan view showing an example of a matrix substrate of a conventional matrix type liquid crystal display device.

FIG. 4 is an explanatory plan view showing another example of the matrix substrate of the conventional matrix type liquid crystal display device.

FIG. 5 is an explanatory plan view showing still another example of the matrix substrate of the conventional matrix type liquid crystal display device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 1st insulating board 2 scanning wiring 3 signal wiring 6 1st repair wiring 7 2nd repair wiring 8 1st connection terminal 9 2nd insulating board 10 2nd connection terminal

Claims (7)

[Claims] A first insulating substrate, a plurality of scanning wirings provided in parallel with each other on the first insulating substrate, a first insulating film covering the plurality of scanning wirings, A plurality of signal wirings orthogonal to the plurality of scanning wirings via the first insulating film; a switching element provided at each intersection of the plurality of scanning wirings and the plurality of signal wirings; A matrix substrate comprising: a pixel electrode connected to the switching element; and a first repair wiring crossing at least one of the plurality of scanning wirings and the plurality of signal wirings via a second insulating film. A second insulating substrate;
A liquid crystal display device comprising: a second repair wiring provided above the insulating substrate; a counter substrate facing the matrix substrate; and a display material sandwiched between the matrix substrate and the counter substrate. The liquid crystal display device, wherein the plurality of scanning wirings and the plurality of signal wirings are each divided into a plurality of blocks, and one first repair wiring intersects each block. 2. A plurality of first connection terminals are provided on the matrix substrate, the first connection terminals are connected to the first repair wiring, and a plurality of second connection terminals are provided on the counter substrate. The liquid crystal display device according to claim 1, wherein the second connection terminal is provided, and the second connection terminal is connected to the second repair wiring. 3. A first insulating substrate, a plurality of scanning wirings provided in parallel with each other on the first insulating substrate, a first insulating film covering the plurality of scanning wirings, A plurality of signal wirings orthogonal to the plurality of scanning wirings via the first insulating film; a switching element provided at each intersection of the plurality of scanning wirings and the plurality of signal wirings; A matrix substrate comprising: a pixel electrode connected to the switching element; and a first repair wiring crossing at least one of the plurality of scanning wirings and the plurality of signal wirings via a second insulating film. A second insulating substrate;
A liquid crystal display device comprising: a second repair wiring provided above the insulating substrate; a counter substrate facing the matrix substrate; and a display material sandwiched between the matrix substrate and the counter substrate. A method for repairing a disconnection of the plurality of scanning wires and the plurality of signal wires, wherein the plurality of scanning wires and the plurality of signal wires are divided into a plurality of blocks, respectively. One first repair wire is crossed for each block, a first connection terminal connected to the first repair wire is provided, and a second connection terminal connected to the second repair wire is provided.
When a disconnection occurs in at least one of the plurality of scanning wirings and the plurality of signal wirings, the second insulating film is broken, and the plurality of scanning wirings and the plurality of scanning wirings are provided. At least one of the plurality of signal wirings is electrically connected to the first repair wiring, and the first connection terminal and the second connection terminal are electrically connected via a conductive paste. For repairing the disconnection of a liquid crystal display device connected to a computer. 4. The material of the first repair wiring and the first connection terminal is made of chromium, aluminum, tantalum,
4. The method according to claim 3, wherein the method is one of molybdenum and indium oxide. 5. The material of the second repair wiring and the second connection terminal is made of chromium, aluminum, tantalum,
4. The method according to claim 3, wherein the method is one of molybdenum and indium oxide. 6. The method according to claim 3, wherein the conductive paste contains silver. 7. The method according to claim 7, wherein when the second insulating film is broken, YA
4. The method according to claim 3, wherein a G laser is used.