JPH10245122A5 - - Google Patents

Info

Publication number
JPH10245122A5
JPH10245122A5 JP1997049186A JP4918697A JPH10245122A5 JP H10245122 A5 JPH10245122 A5 JP H10245122A5 JP 1997049186 A JP1997049186 A JP 1997049186A JP 4918697 A JP4918697 A JP 4918697A JP H10245122 A5 JPH10245122 A5 JP H10245122A5
Authority
JP
Japan
Prior art keywords
wafer
tweezers
semiconductor manufacturing
transfer device
wafer transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997049186A
Other languages
English (en)
Japanese (ja)
Other versions
JP3874876B2 (ja
JPH10245122A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP4918697A priority Critical patent/JP3874876B2/ja
Priority claimed from JP4918697A external-priority patent/JP3874876B2/ja
Publication of JPH10245122A publication Critical patent/JPH10245122A/ja
Publication of JPH10245122A5 publication Critical patent/JPH10245122A5/ja
Application granted granted Critical
Publication of JP3874876B2 publication Critical patent/JP3874876B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP4918697A 1997-03-04 1997-03-04 ウェーハ移載装置のツィーザ傾き確認治具 Expired - Fee Related JP3874876B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4918697A JP3874876B2 (ja) 1997-03-04 1997-03-04 ウェーハ移載装置のツィーザ傾き確認治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4918697A JP3874876B2 (ja) 1997-03-04 1997-03-04 ウェーハ移載装置のツィーザ傾き確認治具

Publications (3)

Publication Number Publication Date
JPH10245122A JPH10245122A (ja) 1998-09-14
JPH10245122A5 true JPH10245122A5 (cg-RX-API-DMAC10.html) 2004-10-07
JP3874876B2 JP3874876B2 (ja) 2007-01-31

Family

ID=12824012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4918697A Expired - Fee Related JP3874876B2 (ja) 1997-03-04 1997-03-04 ウェーハ移載装置のツィーザ傾き確認治具

Country Status (1)

Country Link
JP (1) JP3874876B2 (cg-RX-API-DMAC10.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100575450B1 (ko) 2004-12-16 2006-05-03 삼성전자주식회사 포크 플레이트의 높이정렬 부재 및 이를 포함하는 반도체기판의 이송 장치
CN108315695B (zh) * 2018-05-04 2023-11-17 苏州东福来机电科技有限公司 一种智能真空镀膜机构
CN112563173B (zh) * 2020-12-22 2025-09-02 北京华卓精科科技股份有限公司 硅片传送工装

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