JPH10227988A - レーザ描画装置 - Google Patents

レーザ描画装置

Info

Publication number
JPH10227988A
JPH10227988A JP9044749A JP4474997A JPH10227988A JP H10227988 A JPH10227988 A JP H10227988A JP 9044749 A JP9044749 A JP 9044749A JP 4474997 A JP4474997 A JP 4474997A JP H10227988 A JPH10227988 A JP H10227988A
Authority
JP
Japan
Prior art keywords
scanning direction
sub
laser beam
laser
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP9044749A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10227988A5 (enExample
Inventor
Takashi Okuyama
隆志 奥山
Toshinori Inomata
俊徳 猪俣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pentax Corp
Original Assignee
Asahi Kogaku Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Kogaku Kogyo Co Ltd filed Critical Asahi Kogaku Kogyo Co Ltd
Priority to JP9044749A priority Critical patent/JPH10227988A/ja
Publication of JPH10227988A publication Critical patent/JPH10227988A/ja
Publication of JPH10227988A5 publication Critical patent/JPH10227988A5/ja
Withdrawn legal-status Critical Current

Links

Landscapes

  • Facsimile Scanning Arrangements (AREA)
  • Dot-Matrix Printers And Others (AREA)
  • Laser Beam Printer (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP9044749A 1997-02-13 1997-02-13 レーザ描画装置 Withdrawn JPH10227988A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9044749A JPH10227988A (ja) 1997-02-13 1997-02-13 レーザ描画装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9044749A JPH10227988A (ja) 1997-02-13 1997-02-13 レーザ描画装置

Publications (2)

Publication Number Publication Date
JPH10227988A true JPH10227988A (ja) 1998-08-25
JPH10227988A5 JPH10227988A5 (enExample) 2004-12-02

Family

ID=12700105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9044749A Withdrawn JPH10227988A (ja) 1997-02-13 1997-02-13 レーザ描画装置

Country Status (1)

Country Link
JP (1) JPH10227988A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005043555A (ja) * 2003-07-25 2005-02-17 Pentax Corp パターン描画装置
KR100611238B1 (ko) 2005-09-23 2006-08-10 한국기계연구원 모니터링이 가능한 패턴 형성 장치 및 이를 이용한 기판의패턴 형성 방법
CN102189737A (zh) * 2010-03-04 2011-09-21 海德堡印刷机械股份公司 用于复制仪的扫描或记录机构的驱动系统
KR20230031774A (ko) * 2021-08-27 2023-03-07 가부시키가이샤 스크린 홀딩스 묘화 장치, 묘화 방법, 및 기억 매체에 기록된 프로그램

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005043555A (ja) * 2003-07-25 2005-02-17 Pentax Corp パターン描画装置
KR100611238B1 (ko) 2005-09-23 2006-08-10 한국기계연구원 모니터링이 가능한 패턴 형성 장치 및 이를 이용한 기판의패턴 형성 방법
CN102189737A (zh) * 2010-03-04 2011-09-21 海德堡印刷机械股份公司 用于复制仪的扫描或记录机构的驱动系统
KR20230031774A (ko) * 2021-08-27 2023-03-07 가부시키가이샤 스크린 홀딩스 묘화 장치, 묘화 방법, 및 기억 매체에 기록된 프로그램

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