JPH10227585A - Heat spreader and cooler employing the same - Google Patents

Heat spreader and cooler employing the same

Info

Publication number
JPH10227585A
JPH10227585A JP2900397A JP2900397A JPH10227585A JP H10227585 A JPH10227585 A JP H10227585A JP 2900397 A JP2900397 A JP 2900397A JP 2900397 A JP2900397 A JP 2900397A JP H10227585 A JPH10227585 A JP H10227585A
Authority
JP
Japan
Prior art keywords
heat
heat pipe
metallic body
spreader
heat spreader
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2900397A
Other languages
Japanese (ja)
Other versions
JP3403307B2 (en
Inventor
Masaaki Yamamoto
雅章 山本
Jun Niekawa
潤 贄川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Priority to JP02900397A priority Critical patent/JP3403307B2/en
Priority to DE19805930A priority patent/DE19805930A1/en
Priority to US09/023,372 priority patent/US6082443A/en
Publication of JPH10227585A publication Critical patent/JPH10227585A/en
Priority to US09/544,313 priority patent/US6269866B1/en
Application granted granted Critical
Publication of JP3403307B2 publication Critical patent/JP3403307B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

PROBLEM TO BE SOLVED: To cope with a case in which the heat generating density of a semi- conductor element and the like to be cooled is high, and various arrangement method by a method wherein a heat conductive metallic body is provided at a part, to which a part to be cooled is connected thermally, while the circumferential parts of the metallic body are constituted of a heat pipe structure. SOLUTION: A semi-conductor element 2 is positioned at the central part of a heat spreader 1 substantially and a heat conductive metallic body 101 is provided at the central part while a heat pipe cavity unit 100, constituting a heat pipe structure, is provided at the circumferential part of the metallic body 101. Fins 4 are attached to the opposite side of the heat spreader 1 and, further, heat conductive grease 3 is provided to reduce contact heat resistance between the fin unit 4 and the heat spreader 1. Accordingly, the heat of the semi-conductor element 2 is transferred to working liquid in the heat pipe cavity part 100 through the heat transfer metallic body 101 while the heat is dispersed by the heat conductive metallic body 101 and the heat absorbing part (evaporating unit) of the heat pipe cavity unit 100 is spread to a wide area. Accordingly, the generation of local boiling boundary is restrained and efficient heat transfer can be effected.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、冷却が必要な電気
部品等の冷却に適したヒートスプレッダとそれを用いた
冷却器に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat spreader suitable for cooling electric parts and the like that require cooling, and a cooler using the same.

【0002】[0002]

【従来の技術】パソコン等の各種電気機器やその他の機
器に搭載されている半導体素子等の冷却方法として、そ
の機器にファンを取り付け、機器筐体内の空気を冷却す
る方式や、その冷却すべき半導体素子に冷却体を取り付
けたりする方法等が知られている。
2. Description of the Related Art As a method for cooling semiconductor devices mounted on various electric devices such as personal computers and other devices, a method of cooling air in a device housing by attaching a fan to the device, and a method for cooling the device. A method of attaching a cooling body to a semiconductor element and the like are known.

【0003】半導体素子に冷却体を取り付けることで冷
却する場合、概ね半導体素子はサイズ的に小さいので、
半導体素子に直接、放熱フィンを取り付けず、一旦、伝
熱体に熱を拡散させてから、その伝熱体に取り付けたフ
ィンから放熱させる形態が有力である。
When cooling by attaching a cooling element to a semiconductor element, the semiconductor element is generally small in size.
It is effective to disperse the heat to the heat transfer member once and dissipate the heat from the fins attached to the heat transfer member without directly attaching the radiation fin to the semiconductor element.

【0004】具体的には、半導体素子に伝熱体を接触さ
せ、更にその伝熱体にフィンを取り付ける。冷却すべき
半導体素子の発する熱は、概ね伝熱体に移動し、そこか
らフィンを経て放熱するであろう。ここで伝熱体として
は、通常、アルミニウム材や銅材等の熱伝導性に優れる
材質が通常使われることが多い。
[0004] Specifically, a heat conductor is brought into contact with a semiconductor element, and fins are attached to the heat conductor. The heat generated by the semiconductor element to be cooled will generally travel to the heat conductor and dissipate therefrom via the fins. Here, as the heat transfer body, a material having excellent thermal conductivity such as an aluminum material or a copper material is usually used in many cases.

【0005】半導体素子に取り付ける伝熱体は、熱を広
げる意味で、ヒートスプレッダと呼ばれることもある。
熱がより効率的に広がるようにするため、ヒートスプレ
ッダをヒートパイプ構造とする場合もある。この場合、
別途用意したヒートパイプを伝熱体に埋め込む形態でも
良い。
[0005] The heat transfer member attached to the semiconductor element is sometimes called a heat spreader in order to spread heat.
In order to spread the heat more efficiently, the heat spreader may have a heat pipe structure. in this case,
A heat pipe prepared separately may be embedded in the heat transfer body.

【0006】半導体素子が搭載される位置によっては、
フィンとヒートスプレッダが離れている場合も少なくな
い。フィンは半導体素子が搭載される機器筐体の外部付
近に設けることが望ましい訳であるから、冷却すべき半
導体素子の位置によっては、ヒートスプレッダとフィン
が離れることになるのである。このような場合、ヒート
スプレッダとフィンとをヒートパイプでつなぐ方法が有
力であり、実用化もしている。
[0006] Depending on the position where the semiconductor element is mounted,
In many cases, the fins and the heat spreader are separated. Since it is desirable that the fin is provided near the outside of the device housing on which the semiconductor element is mounted, the heat spreader and the fin may be separated depending on the position of the semiconductor element to be cooled. In such a case, a method of connecting the heat spreader and the fins with a heat pipe is effective and has been put to practical use.

【0007】ヒートスプレッダとフィンとをつなぐヒー
トパイプや、ヒートスプレッダを構成するヒートパイプ
による熱の移動は通常、下述のような作動によってなさ
れる。即ち、ヒートパイプの吸熱側において、ヒートパ
イプを構成する容器(コンテナと呼ばれることも多い)
の材質中を熱伝導して伝わってきた熱を受けて作動液が
蒸発し、その蒸気がヒートパイプの放熱側に移動する。
放熱側では、作動液の蒸気は冷却され再び液相状態に戻
る。そして液相に戻った作動液は再び吸熱側に移動す
る。このような作動液の相変態や移動により、熱の移動
がなされる。尚、作動液は液相状態の他に蒸気になるこ
ともあるが、ここでは慣用的に作動液との呼称を使って
いる。
The transfer of heat by the heat pipe connecting the heat spreader and the fins or by the heat pipe forming the heat spreader is usually performed by the following operation. That is, on the heat absorption side of the heat pipe, a container (often called a container) that forms the heat pipe.
The working fluid evaporates due to the heat transmitted by conducting heat through the material, and the vapor moves to the heat radiation side of the heat pipe.
On the heat radiation side, the working fluid vapor is cooled and returns to the liquid state again. Then, the working fluid that has returned to the liquid phase moves to the heat absorbing side again. Heat is transferred by such phase transformation and movement of the working fluid. The working fluid may be in a vapor state in addition to the liquid state, but the term “working fluid” is conventionally used here.

【0008】相変態により液相状態になった作動液は、
重力または毛細管作用等により、吸熱側に戻るようにな
っている。重力式の場合は、吸熱側を放熱側より下方に
配置すればよい。パソコン等の電気機器の場合、その内
部のスペースの関係で、ヒートパイプの放熱側と吸熱側
の高低差を設けにくい場合も多い。そのような場合は、
内部に溝やウィックを設けたヒートパイプが適用され
る。もちろん性能上、このような毛細管作用を利用する
ヒートパイプであっても、放熱側は吸熱側より上方に配
置することが望ましいことは言うまでもない。
[0008] The working fluid that has been brought into the liquid phase state by the phase transformation is:
It returns to the heat absorbing side by gravity or capillary action. In the case of the gravity type, the heat absorption side may be disposed below the heat radiation side. In the case of an electric device such as a personal computer, it is often difficult to provide a height difference between the heat radiating side and the heat absorbing side of the heat pipe due to the internal space. In such a case,
A heat pipe with a groove or wick provided inside is applied. Of course, in terms of performance, it is needless to say that even in a heat pipe utilizing such a capillary action, it is desirable to arrange the heat radiation side above the heat absorption side.

【0009】ヒートパイプの外形形状としては、円形パ
イプ状のものが代表的であるが、その他、平板形状のプ
レート型のものが使われることも多い。これらヒートパ
イプの形状の選定は、そのヒートパイプの適用される状
態や要求される特性等を考慮して適宜決めればよい。ま
たヒートパイプを構成するコンテナの材質も、用途等に
よって種種選定すれば良く、例えば銅材、ステンレス
材、アルミニウム材等が適用できる。
A typical external shape of the heat pipe is a circular pipe shape, but a flat plate-shaped plate is also often used. The selection of the shape of the heat pipe may be appropriately determined in consideration of the state to which the heat pipe is applied, required characteristics, and the like. Also, the material of the container constituting the heat pipe may be selected in accordance with the use or the like, and for example, a copper material, a stainless steel material, an aluminum material or the like can be applied.

【0010】図3は従来の冷却器の形態例を示す説明図
である。冷却すべき半導体素子2はプリント基板5上に
実装されている。半導体素子2の上面側には、ヒートパ
イプ構造を有するヒートスプレッダ10が配置されてい
る。ヒートスプレッダ10に伝わった半導体素子2の熱
はフィン部4から放熱される。
FIG. 3 is an explanatory view showing an embodiment of a conventional cooler. The semiconductor element 2 to be cooled is mounted on a printed circuit board 5. A heat spreader 10 having a heat pipe structure is arranged on the upper surface side of the semiconductor element 2. The heat of the semiconductor element 2 transmitted to the heat spreader 10 is radiated from the fin portion 4.

【0011】半導体素子2のような被冷却部品をヒート
スプレッダ10に熱的に接続させるには、被冷却部品に
接触させるか、あるいは伝熱物質を介在させて接触させ
たりすればよい。ここではヒートスプレッダ10とフィ
ン部4との間には、これらの接触熱抵抗を下げる意味で
伝熱グリス3を介在させている。
In order to thermally connect a component to be cooled such as the semiconductor element 2 to the heat spreader 10, the component to be cooled may be brought into contact with the component to be cooled or may be brought into contact with a heat transfer material. Here, the heat transfer grease 3 is interposed between the heat spreader 10 and the fin portion 4 in order to reduce the contact thermal resistance.

【0012】図3の従来例は、ヒートスプレッダ10と
して板状のヒートパイプを用いたものである。従来、こ
のようなヒートスプレッダ10は、例えば、ヒートパイ
プを構成するコンテナとなる上下2枚の金属板を接合し
て内部空間を形成し、その内部空間に作動液(通常、水
や代替フロン等が使用される)を封入して作製される。
作動液が封入されているヒートパイプの内部は、作動液
の蒸発、凝縮の相変態が起きやすくなるように、真空脱
気しておく。
The conventional example shown in FIG. 3 uses a plate-like heat pipe as the heat spreader 10. Conventionally, such a heat spreader 10 has, for example, an inner space formed by joining two upper and lower metal plates serving as a container constituting a heat pipe, and a working fluid (usually water or alternative Freon) is formed in the inner space. Used).
The inside of the heat pipe in which the working fluid is sealed is vacuum degassed so that the working fluid is likely to undergo a phase transformation of evaporation and condensation.

【0013】[0013]

【発明が解決しようとする課題】上述した、ヒートパイ
プ構造のヒートスプレッダ10或いはヒートパイプが埋
め込まれたヒートスプレッダは、従来、冷却すべき半導
体素子等の位置に、そのヒートパイプの吸熱部が位置す
る構成となっていた。
The above-described heat spreader 10 having the heat pipe structure or the heat spreader in which the heat pipe is embedded has a structure in which the heat absorbing portion of the heat pipe is located at a position of a semiconductor element to be cooled. Had become.

【0014】しかし、冷却すべき半導体素子等は、概ね
サイズ的に小さく、また近年はその発熱密度も高い場合
も多い。このような被冷却部品の場合、それを熱的に接
続されるヒートパイプの吸熱部では、熱流速が高すぎて
沸騰限界に達しやすい。こうなると熱輸送の効率が損な
われてしまう。
However, semiconductor elements to be cooled are generally small in size, and in recent years, their heat density is often high. In the case of such a component to be cooled, the heat absorption portion of the heat pipe to which the component is thermally connected tends to reach the boiling limit because the heat flow velocity is too high. In this case, the efficiency of heat transport is impaired.

【0015】またヒートスプレッダの配置や、それが搭
載されている電気機器等の使用状況によっては、被冷却
部品の位置する吸熱部が、放熱部より上方に位置する場
合もある。このような場合、ヒートスプレッダを構成す
るヒートパイプの熱移動の機能が低下しやすい。つま
り、ヒートパイプとしてトップヒートモードになるから
である。
Further, depending on the arrangement of the heat spreader and the condition of use of the electric equipment or the like on which the heat spreader is mounted, the heat absorbing portion where the component to be cooled is located may be located above the heat radiating portion. In such a case, the heat transfer function of the heat pipe constituting the heat spreader is likely to be reduced. That is, the heat pipe is set to the top heat mode.

【0016】このような状況から、冷却すべき半導体素
子等の発熱密度も高い場合や、さまざまな配置方法にも
対応しやすいヒートスプレッダが求められていた。
Under such circumstances, there has been a demand for a heat spreader which can easily cope with a case where the heat generation density of a semiconductor element or the like to be cooled is high or various arrangement methods.

【0017】[0017]

【課題を解決するための手段】本発明において提案され
るヒートスプレッダは、被冷却部品が熱的に接続される
部分には伝熱金属体が備わり、その周囲部分はヒートパ
イプ構造となったヒートスプレッダである。またこのよ
うなヒートスプレッダを用いた冷却器をも提案する。
The heat spreader proposed in the present invention is a heat spreader having a heat transfer metal body at a portion to which a component to be cooled is thermally connected, and a heat pipe structure around the heat transfer metal body. is there. A cooler using such a heat spreader is also proposed.

【0018】[0018]

【発明の実施の形態】図1は本発明のヒートスプレッダ
とそれを用いた冷却器の構成を示す説明図である。プリ
ント基板5に実装された半導体素子2が冷却すべき対象
(被冷却部品)である。半導体素子2はヒートスプレッ
ダ1の概ね中央部分に位置している。その中央部分には
伝熱金属体101が備わり、その周囲部分はヒートパイ
プ構造を構成するヒートパイプ空洞部100が備わって
いる。この図では作動液は省略してある。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is an explanatory view showing the structure of a heat spreader according to the present invention and a cooler using the same. The semiconductor element 2 mounted on the printed circuit board 5 is an object to be cooled (a component to be cooled). The semiconductor element 2 is located substantially at the center of the heat spreader 1. A heat transfer metal body 101 is provided at the center portion, and a heat pipe cavity portion 100 forming a heat pipe structure is provided at a peripheral portion thereof. In this figure, the hydraulic fluid is omitted.

【0019】フィン部4は、ヒートスプレッダ1の、半
導体素子2が備わる面の反対側に取り付けられている。
伝熱グリス3は、フィン部4とヒートスプレッダ1との
接触熱抵抗を低減する意味で設けている。
The fin portion 4 is attached to the heat spreader 1 on the side opposite to the surface on which the semiconductor element 2 is provided.
The heat transfer grease 3 is provided to reduce the contact heat resistance between the fin portion 4 and the heat spreader 1.

【0020】図2は図1のヒートスプレッダ1の製造方
法を簡単に示す説明図である。ヒートスプレッダは上板
12と下箱13とを接合することで組み立てる。接合方
法は特に限定されないが、MIG溶接やTIG溶接、抵
抗溶接等の溶接法や、ろう付け法等が好適に適用でき
る。ろう付けする場合は、上板12や下箱13の材質が
Al材の場合はブレージングシートを用いると簡便であ
る。上板12や下箱13の材質がCu材の場合は、Ag
ろう材等を用いれば良い。
FIG. 2 is an explanatory diagram simply showing a method of manufacturing the heat spreader 1 of FIG. The heat spreader is assembled by joining the upper plate 12 and the lower box 13. The joining method is not particularly limited, but a welding method such as MIG welding, TIG welding, resistance welding, or a brazing method can be suitably applied. When brazing, if the material of the upper plate 12 and the lower box 13 is an Al material, it is convenient to use a brazing sheet. When the material of the upper plate 12 and the lower box 13 is Cu, Ag
A brazing material or the like may be used.

【0021】これらを接合後、凹み部14と上板12の
一部とで図1のヒートパイプ空洞部100が形成され
る。尚、上板12、下箱13との呼称は、説明の便宜上
の呼び名に過ぎない。上或いは下であることに意味はな
い。11は図1の伝熱金属体101に相当するブロック
である。
After these are joined, the heat pipe cavity 100 shown in FIG. 1 is formed by the recess 14 and a part of the upper plate 12. Note that the names of the upper plate 12 and the lower box 13 are merely names for convenience of explanation. There is no point in being above or below. Reference numeral 11 denotes a block corresponding to the heat transfer metal body 101 in FIG.

【0022】ヒートパイプ空洞部100の内面には、熱
効率を高める意図で溝を形成すると望ましい。そこで下
箱13の内壁部に溝を形成すると良い。溝の形成は例え
ば溝加工やねじ切り加工によって形成したり、或いは焼
結体を別途用意し、これを接合したりして形成すること
ができる。
It is desirable to form a groove on the inner surface of the heat pipe cavity 100 for the purpose of increasing thermal efficiency. Therefore, it is preferable to form a groove in the inner wall of the lower box 13. The grooves can be formed by, for example, grooving or threading, or by separately preparing a sintered body and joining them.

【0023】ヒートスプレッダ1を形成する上板12や
下箱13の材質は熱伝導性の高い銅材やアルミニウム材
が望ましい。要求される熱特性や強度特性等を考慮し
て、材料は選定すれば良い。熱伝導性の観点では、純銅
系(タフピッチ銅、無酸素銅等)や純Al系の材料等が
望ましい。
The material of the upper plate 12 and the lower box 13 forming the heat spreader 1 is desirably copper or aluminum having high thermal conductivity. The material may be selected in consideration of required heat characteristics, strength characteristics, and the like. From the viewpoint of thermal conductivity, pure copper (tough pitch copper, oxygen-free copper, etc.), pure Al-based material, and the like are desirable.

【0024】ヒートパイプ空洞部100には作動液を所
定量収容する。もちろん、ヒートパイプとして機能する
よう、脱気等も行う。作動液は水や代替フロン等、通常
の作動液を適用すればよい。
The heat pipe cavity 100 contains a predetermined amount of hydraulic fluid. Of course, degassing is also performed to function as a heat pipe. The working fluid may be a normal working fluid such as water or CFC substitute.

【0025】さて、本発明のヒートスプレッダ1を用い
れば、概ね、半導体素子2の熱は伝導金属体101を経
由して、ヒートパイプ空洞部100内の作動液に伝わる
ことになる。もちろん熱は伝導金属体101を経由して
フィン部4に伝わる分もある。伝導金属体101によっ
て熱が分散するので、ヒートパイプ空洞部100の吸熱
部(蒸発部)も、広い面積に広がる。このため、局所的
な沸騰限界の発生が抑制され、効率的な熱移動がなされ
るようになる。
When the heat spreader 1 of the present invention is used, generally, the heat of the semiconductor element 2 is transmitted to the working fluid in the heat pipe cavity 100 via the conductive metal body 101. Of course, some heat is transmitted to the fin portion 4 via the conductive metal body 101. Since the heat is dispersed by the conductive metal body 101, the heat absorbing portion (evaporating portion) of the heat pipe cavity 100 also spreads over a wide area. For this reason, generation | occurrence | production of a local boiling limit is suppressed, and efficient heat transfer will be performed.

【0026】図4は図2のブロック11に替え図4に示
すようなブロック15を配置した場合を示す。このブロ
ック15のように、その表面積を大きくすると、半導体
素子2からブロック15に伝わった熱がより効率的に作
動液に伝わるようになる。従って冷却性能が向上する。
FIG. 4 shows a case where a block 15 as shown in FIG. 4 is arranged in place of the block 11 in FIG. When the surface area is increased as in the block 15, the heat transferred from the semiconductor element 2 to the block 15 is more efficiently transferred to the working fluid. Therefore, the cooling performance is improved.

【0027】上述の実施例では、1個の半導体素子2が
ヒートスプレッダ1の概ね中央部分に位置した例を示し
たが、被冷却部品が複数ある場合は、その位置に対応さ
せて複数の伝熱金属体を設け、そしてその周囲部分には
ヒートパイプ空洞部を設けることになる。
In the above-described embodiment, an example was shown in which one semiconductor element 2 was located substantially at the center of the heat spreader 1. However, when there are a plurality of parts to be cooled, a plurality of heat transfer elements are provided corresponding to the positions. A metal body will be provided and a heat pipe cavity will be provided around it.

【0028】[0028]

【発明の効果】本発明のヒートスプレッダは、冷却すべ
き被冷却部品の発熱密度も高い場合や、それを冷却する
ための冷却器としてのさまざまな配置方法にも対応しや
すいものである。このヒートスプレッダを用いた冷却器
は効率的な冷却が実現できるものである。
The heat spreader according to the present invention can easily cope with a case where a component to be cooled has a high heat generation density and various arrangement methods as a cooler for cooling the component. A cooler using this heat spreader can achieve efficient cooling.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明のヒートスプレッダの例とそれを用いた
冷却器を示す説明図である。
FIG. 1 is an explanatory diagram showing an example of a heat spreader of the present invention and a cooler using the same.

【図2】本発明のヒートスプレッダの組み立てを示す説
明図である。
FIG. 2 is an explanatory view showing the assembly of the heat spreader of the present invention.

【図3】従来のヒートスプレッダを用いた冷却器の例を
示す説明図である。
FIG. 3 is an explanatory diagram showing an example of a cooler using a conventional heat spreader.

【図4】本発明のヒートスプレッダの他の例の組み立て
を示す説明図である。
FIG. 4 is an explanatory view showing assembly of another example of the heat spreader of the present invention.

【符号の説明】[Explanation of symbols]

1 ヒートスプレッダ 2 半導体素子 3 伝熱グリス 4 フィン部 5 プリント基板 10 ヒートスプレッダ 11 ブロック 12 上板 13 下箱 14 凹み部 15 ブロック 100 ヒートパイプ空洞部 101 伝熱金属体 DESCRIPTION OF SYMBOLS 1 Heat spreader 2 Semiconductor element 3 Heat transfer grease 4 Fin part 5 Printed circuit board 10 Heat spreader 11 Block 12 Upper plate 13 Lower box 14 Depression 15 Block 100 Heat pipe cavity 101 Heat transfer metal body

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 被冷却部品が熱的に接続される部分には
伝熱金属体が備わり、その周囲部分はヒートパイプ構造
となっているヒートスプレッダ。
1. A heat spreader in which a part to be cooled is thermally connected to a heat transfer metal body and a peripheral part thereof has a heat pipe structure.
【請求項2】 請求項1記載のヒートスプレッダを用い
た冷却器。
2. A cooler using the heat spreader according to claim 1.
JP02900397A 1997-02-13 1997-02-13 Heat spreader and cooler using it Expired - Lifetime JP3403307B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP02900397A JP3403307B2 (en) 1997-02-13 1997-02-13 Heat spreader and cooler using it
DE19805930A DE19805930A1 (en) 1997-02-13 1998-02-13 Cooling arrangement for electrical component with heat convection line
US09/023,372 US6082443A (en) 1997-02-13 1998-02-13 Cooling device with heat pipe
US09/544,313 US6269866B1 (en) 1997-02-13 2000-04-06 Cooling device with heat pipe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP02900397A JP3403307B2 (en) 1997-02-13 1997-02-13 Heat spreader and cooler using it

Publications (2)

Publication Number Publication Date
JPH10227585A true JPH10227585A (en) 1998-08-25
JP3403307B2 JP3403307B2 (en) 2003-05-06

Family

ID=12264235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP02900397A Expired - Lifetime JP3403307B2 (en) 1997-02-13 1997-02-13 Heat spreader and cooler using it

Country Status (1)

Country Link
JP (1) JP3403307B2 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999053256A1 (en) * 1998-04-15 1999-10-21 Furukawa Electric Co., Ltd. Plate type heat pipe and its installation structure
WO1999053255A1 (en) * 1998-04-13 1999-10-21 Furukawa Electric Co., Ltd. Plate type heat pipe and cooling structure using it
WO2007002957A2 (en) * 2005-06-29 2007-01-04 Intel Corporation Systems for integrated cold plate and heat spreader
WO2009072698A1 (en) * 2007-12-06 2009-06-11 Electronics And Telecommunications Research Institute The flat plate type micro heat spreading device
JP2010221310A (en) * 2009-03-19 2010-10-07 Seiko Epson Corp Turning arm with heat radiation device and horizontal articulated robot
JP2013252611A (en) * 2013-09-24 2013-12-19 Seiko Epson Corp Arm and robot
WO2016127579A1 (en) * 2015-02-12 2016-08-18 中兴通讯股份有限公司 Heat radiation shielding device and terminal
WO2018030478A1 (en) * 2016-08-10 2018-02-15 古河電気工業株式会社 Vapor chamber

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999053255A1 (en) * 1998-04-13 1999-10-21 Furukawa Electric Co., Ltd. Plate type heat pipe and cooling structure using it
GB2341230A (en) * 1998-04-13 2000-03-08 Furukawa Electric Co Ltd Plate type heat pipe and cooling structure using it
GB2341230B (en) * 1998-04-13 2002-01-09 Furukawa Electric Co Ltd Plate type heat pipe and cooling device using same
WO1999053256A1 (en) * 1998-04-15 1999-10-21 Furukawa Electric Co., Ltd. Plate type heat pipe and its installation structure
GB2342152A (en) * 1998-04-15 2000-04-05 Furukawa Electric Co Ltd Plate type heat pipe and its installation structure
GB2342152B (en) * 1998-04-15 2002-01-09 Furukawa Electric Co Ltd Plate type heat pipe and cooling device using same
WO2007002957A2 (en) * 2005-06-29 2007-01-04 Intel Corporation Systems for integrated cold plate and heat spreader
WO2007002957A3 (en) * 2005-06-29 2007-07-19 Intel Corp Systems for integrated cold plate and heat spreader
US7273090B2 (en) 2005-06-29 2007-09-25 Intel Corporation Systems for integrated cold plate and heat spreader
WO2009072698A1 (en) * 2007-12-06 2009-06-11 Electronics And Telecommunications Research Institute The flat plate type micro heat spreading device
KR100917599B1 (en) 2007-12-06 2009-09-17 한국전자통신연구원 The flat plate type micro heat spreading device
JP2010221310A (en) * 2009-03-19 2010-10-07 Seiko Epson Corp Turning arm with heat radiation device and horizontal articulated robot
JP2013252611A (en) * 2013-09-24 2013-12-19 Seiko Epson Corp Arm and robot
WO2016127579A1 (en) * 2015-02-12 2016-08-18 中兴通讯股份有限公司 Heat radiation shielding device and terminal
WO2018030478A1 (en) * 2016-08-10 2018-02-15 古河電気工業株式会社 Vapor chamber

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