JPH1022609A - Drying method and process equipment of printed wiring board - Google Patents

Drying method and process equipment of printed wiring board

Info

Publication number
JPH1022609A
JPH1022609A JP17334896A JP17334896A JPH1022609A JP H1022609 A JPH1022609 A JP H1022609A JP 17334896 A JP17334896 A JP 17334896A JP 17334896 A JP17334896 A JP 17334896A JP H1022609 A JPH1022609 A JP H1022609A
Authority
JP
Japan
Prior art keywords
printed wiring
wiring board
drying
water
wet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17334896A
Other languages
Japanese (ja)
Inventor
Shiro Kobayashi
史朗 小林
Hiroshi Yukiyanagi
博司 幸柳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP17334896A priority Critical patent/JPH1022609A/en
Publication of JPH1022609A publication Critical patent/JPH1022609A/en
Pending legal-status Critical Current

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  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

PROBLEM TO BE SOLVED: To attain wet treatment without generating through hole disconnection, by dipping a printed wiring board in heating water after wet treatment, pulling up the board from the heating water, and drying the board. SOLUTION: After a printed board 5 is clipped and treated in boiling water, it is introduced in a hot-air drying machine 15 by using an introducing carriage taking-out equipment. Hot air is blown against the printed wiring board 5 from a hot-air blower 16, and vapor drying is accelerated. Thereby liquid is not left in through holes, and tent break of a dry film, through hole disconnection and surface denaturation are scarcely generated, in an outer layer pattern forming process after copper plating. Since wet treatment is possible without generating through hole disconnection, a printed wiring board of high quality can be manufactured with high yield.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、多層プリント配線
板の乾燥方法及びそのような乾燥方法を用いることので
きるプリント配線板の処理装置に係り、特に高品質の多
層プリント配線板を製造するのに適した多層プリント配
線板の乾燥方法及びそのような乾燥方法を用いることの
できるプリント配線板の処理装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for drying a multilayer printed wiring board, and a processing apparatus for a printed wiring board which can use such a drying method. TECHNICAL FIELD The present invention relates to a method for drying a multilayer printed wiring board suitable for the method and a processing apparatus for a printed wiring board that can use such a drying method.

【0002】[0002]

【従来の技術】多層プリント配線板(以下、単にプリン
ト配線板という)は、導体パターンを形成した複数枚の
内層コアを積層接着した後、スルーホールの穴明け、ス
ルーホール内の銅めっき、外層導体パターン形成、半田
被着防止のためのソルダレジスト形成、最後に銅めっき
部の防錆処理(有機液体による防錆処理)工程を経て製
造されるのが一般的である。この製造工程では、エッチ
ング液や銅めっき液等の各種薬液を用いた湿式処理が適
用されている。各湿式処理工程の最終処理として製品は
乾燥処理された後、次工程に送られる。特に、穴明け工
程後の配線板は、スルーホール内に処理液や洗滌水が残
留しやすく、湿式処理後は充分に乾燥する必要がある。
2. Description of the Related Art A multilayer printed wiring board (hereinafter simply referred to as a printed wiring board) is formed by laminating and bonding a plurality of inner layer cores each having a conductor pattern, then drilling through holes, copper plating in the through holes, and outer layers. It is generally manufactured through a process of forming a conductor pattern, forming a solder resist for preventing solder adhesion, and finally performing a rust-proofing process (rust-proofing process with an organic liquid) on the copper plating portion. In this manufacturing process, wet processing using various chemical solutions such as an etching solution and a copper plating solution is applied. As a final treatment in each wet treatment step, the product is dried and then sent to the next step. In particular, the wiring board after the drilling process is liable to have a treatment liquid or washing water remaining in the through-holes, and needs to be sufficiently dried after the wet processing.

【0003】この問題について、外層パターン形成工程
後のプリント配線板のスルーホール部分の断面図を図1
に示して説明する。図のようにプリント配線板21のス
ルーホール24内には銅めっき部26が形成されてい
る。また、プリント配線板21の表面にはエッチングレ
ジストとしてドライフィルムレジスト22がラミネート
されている。このドライフィルムレジスト22は、スル
ーホール24内の残留液の作用により、スルーホール入
口部が部分的に溶解し、いわゆるテント破れを引き起こ
す。そしてその後工程でスルーホール内にエッチング液
が侵入し、スルーホール断線25を発生させる場合があ
る。そのためスルーホール内部の乾燥は重要な問題であ
る。
[0003] Regarding this problem, FIG. 1 is a cross-sectional view of a through hole portion of a printed wiring board after an outer layer pattern forming step.
And will be described. As shown, a copper plating portion 26 is formed in the through hole 24 of the printed wiring board 21. On the surface of the printed wiring board 21, a dry film resist 22 is laminated as an etching resist. In the dry film resist 22, the entrance of the through-hole is partially dissolved by the action of the residual liquid in the through-hole 24, causing so-called tent tear. Then, in a later step, the etchant may enter the through-hole and cause the through-hole disconnection 25 to occur. Therefore, drying inside the through hole is an important problem.

【0004】また、スルーホール内に化学銅めっき液の
ようなアルカリ性の液が残留するとテント破れが著しく
発生するので、銅めっき工程に化学銅めっきを使用する
場合には、特にめっき後の洗浄と乾燥を充分に行う必要
がある。
Further, if an alkaline solution such as a chemical copper plating solution remains in the through-hole, tent tearing is remarkably caused. Therefore, when chemical copper plating is used in the copper plating process, cleaning and cleaning after plating are particularly required. It is necessary to dry sufficiently.

【0005】乾燥方法としては、エッチングや剥離工程
のような水平搬送方式の湿式処理ではコンベア型熱風乾
燥機、銅めっき工程のような縦型処理槽を用いる湿式処
理ではスリット型熱風ブロアや密閉型熱風乾燥器を用い
るのが一般的である。
[0005] As a drying method, a conveyor-type hot air dryer is used in a horizontal transfer type wet process such as an etching or peeling process, and a slit type hot air blower or a closed type is used in a wet process using a vertical processing tank such as a copper plating process. It is common to use a hot air dryer.

【0006】なお、これに関する従来技術として、特開
平3−30330号公報が挙げられる。この技術は、基
板が収容されたチャンバー内に温水を注入して基板を温
水に浸した後、チャンバー内を温水の蒸気圧以下に減圧
して温水を沸騰させ、続いてチャンバー内に純水を注入
して基板をすすぎ、その後チャンバー内の水を排水する
と共にチャンバー内を真空引きするものである。
[0006] As a prior art relating to this, Japanese Patent Application Laid-Open No. Hei 3-30330 is cited. In this technology, hot water is injected into a chamber containing a substrate, the substrate is immersed in the hot water, and then the pressure in the chamber is reduced to the vapor pressure of the hot water or less, and the hot water is boiled, followed by pure water in the chamber. The substrate is injected to rinse the substrate, and then the water in the chamber is drained and the inside of the chamber is evacuated.

【0007】また、特開昭62−295485号公報に
記載の技術は、スルーホール内のめっきの前処理工程と
して、水等の処理液にプリント回路板を浸積した後処理
液を沸騰させ、その後処理液を冷却するものである。
The technique described in Japanese Patent Application Laid-Open No. Sho 62-295485 discloses a method of pre-treating plating in a through hole, in which a printed circuit board is immersed in a processing solution such as water and then the processing solution is boiled. Thereafter, the treatment liquid is cooled.

【0008】[0008]

【発明が解決しようとする課題】上記特開平3−303
30号公報記載の従来技術は、基板を純水ですすいでか
ら真空引きして乾燥するため、基板の温度が低下し、十
分に乾燥することが困難であるという問題があった。特
に板厚が厚いプリント配線板は熱容量が大きくなるため
に短時間の乾燥処理では乾燥が不充分となり、スルーホ
ール内に処理液が残留しやすいという問題があった。
SUMMARY OF THE INVENTION The above-mentioned JP-A-3-303
The prior art described in Japanese Patent No. 30 has a problem that since the substrate is rinsed with pure water and then evacuated and dried, the temperature of the substrate is lowered and it is difficult to sufficiently dry the substrate. In particular, a printed wiring board having a large thickness has a large heat capacity, so that short-time drying treatment results in insufficient drying, and there is a problem that the treatment liquid easily remains in the through holes.

【0009】また、特開昭62−295485号公報に
記載の従来技術は、スルーホール内の空気を除去し、空
気の存在によりめっき不良が発生するのを防止するため
のもので、乾燥については考慮されていないという問題
があった。
The prior art described in Japanese Patent Application Laid-Open No. 62-295485 is for removing air in a through-hole to prevent plating defects from occurring due to the presence of air. There was a problem that was not taken into account.

【0010】本発明の第1の目的は、高品質のプリント
配線板を製造可能なプリント配線板の乾燥方法を提供す
ることにある。本発明の第2の目的は、そのようなプリ
ント配線板の乾燥方法を用いた処理装置を提供すること
にある。
[0010] A first object of the present invention is to provide a method for drying a printed wiring board capable of producing a high quality printed wiring board. A second object of the present invention is to provide a processing apparatus using such a method for drying a printed wiring board.

【0011】[0011]

【課題を解決するための手段】上記第1の目的を達成す
るために、本発明のプリント配線板の乾燥方法は、プリ
ント配線板を湿式処理した後、加熱水に浸漬し、加熱水
から引上げて乾燥処理するようにしたものである。
In order to achieve the first object, a method for drying a printed wiring board according to the present invention comprises the steps of: wet-treating a printed wiring board; immersing the printed wiring board in heated water; And drying treatment.

【0012】上記湿式処理は、エッチング液や銅めっき
液等の各種薬液を用いた湿式処理のいずれでもよいが、
とくに銅めっき処理のときにこの乾燥方法を用いるのが
好ましい。上記加熱水は、沸騰水であることが好ましい
が、80℃程度以上の温度の加熱水であれば差し支えな
い。
The wet processing may be any of wet processing using various chemicals such as an etching solution and a copper plating solution.
It is particularly preferable to use this drying method at the time of copper plating. The heating water is preferably boiling water, but may be any heating water having a temperature of about 80 ° C. or higher.

【0013】乾燥処理は、プリント配線板全体の温度が
充分高くなった状態でプリント配線板を加熱水より引上
げれば、その際蒸気とともに水分を蒸発乾燥させること
ができる。この方法によるときは、加熱水は沸騰水とす
るのがよい。また、乾燥処理は、熱風により乾燥するこ
とも減圧下で乾燥することもできる。熱風により乾燥す
るときは、熱風の温度は水の沸騰温度以上とすることが
好ましい。
In the drying process, if the printed wiring board is pulled up from the heated water in a state where the temperature of the entire printed wiring board is sufficiently high, the moisture can be evaporated and dried together with the steam. When using this method, the heating water is preferably boiling water. The drying treatment can be performed by drying with hot air or under reduced pressure. When drying with hot air, the temperature of the hot air is preferably equal to or higher than the boiling temperature of water.

【0014】また、上記第2の目的を達成するために、
本発明のプリント配線板の処理装置は、プリント配線板
を湿式処理するための湿式処理手段と、湿式処理された
プリント配線板を加熱水に浸漬するための加熱水処理手
段と、加熱水に浸漬されたプリント配線板を乾燥するた
めの乾燥処理手段と、プリント配線板を上記各手段へ搬
送するための搬送手段から構成するようにしたものであ
る。湿式処理とは、例えば、銅めっき処理、エッチング
処理等である。
Further, in order to achieve the second object,
The printed wiring board processing apparatus of the present invention includes a wet processing unit for wet-processing the printed wiring board, a heated water processing unit for immersing the wet-processed printed wiring board in heated water, and an immersion in the heated water. The printed wiring board is configured to include drying processing means for drying the printed wiring board, and transport means for transporting the printed wiring board to each of the above means. The wet process is, for example, a copper plating process, an etching process, or the like.

【0015】[0015]

【発明の実施の形態】以下、本発明のプリント配線板の
乾燥方法及び処理装置の実施形態を図面を用いて詳細に
説明する。図2は、本発明の処理装置の一実施例の斜視
図である。湿式処理手段の一例である銅めっき装置13
に乾燥装置12と投入搬送取り出し装置2が具備されて
いる。銅めっき装置13は、脱脂槽、水洗槽、ソフトエ
ッチング槽、水洗槽、触媒処理槽、水洗槽、化学銅めっ
き槽、水洗槽からなる(図は一部の槽のみ示す)。プリ
ント配線板を、投入搬送取り出し装置2により、上記の
順に、界面活性剤を含むアルカリ水溶液で脱脂処理し、
水洗後、銅部分の表面をソフトエッチングし、再び水洗
後、スルーホール内を触媒処理し、さらに水洗後、銅め
っきする。銅めっき後の基板は、水洗槽14に投入され
洗浄された後に、乾燥装置12に投入され乾燥される。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the method and apparatus for drying a printed wiring board according to the present invention will be described below in detail with reference to the drawings. FIG. 2 is a perspective view of one embodiment of the processing apparatus of the present invention. Copper plating apparatus 13 which is an example of wet processing means
A drying device 12 and a loading / unloading device 2 are provided. The copper plating apparatus 13 comprises a degreasing tank, a washing tank, a soft etching tank, a washing tank, a catalyst treatment tank, a washing tank, a chemical copper plating tank, and a washing tank (only some tanks are shown in the figure). The printed wiring board is degreased with an alkaline aqueous solution containing a surfactant in the order described above by the loading / unloading device 2;
After washing with water, the surface of the copper portion is soft-etched, washed again with water, treated with a catalyst in the through hole, further washed with water, and then plated with copper. The copper-plated substrate is put into a washing tank 14 and washed, and then put into a drying device 12 and dried.

【0016】乾燥装置12についてさらに説明する。図
3は、乾燥装置の沸騰水処理槽1と投入搬送取り出し装
置2の構成図である。沸騰させる用水3には電気伝導度
1μS/cm以下の脱イオン水を使用し、過熱蒸気を通
した加熱ヒータ4により用水3を沸騰させる。プリント
配線板5は、投入搬送取り出し装置2のキャリヤ6にセ
ットされ、レール7に釣下げられて図の左方から移動
し、アーム8が上下して沸騰水処理槽1に投入され、所
定時間浸漬処理される。処理時間は、プリント配線板の
材質、層構成、厚さに応じて変わる。例えば、2層で厚
さ0.5mm程度のものでは5分位、50層で厚さ7m
m程度のものでは10分位とする。その後、沸騰水処理
槽2よりプリント配線板5を取り出し、スルーホール内
及び表面の水分を蒸発乾燥させる。
The drying device 12 will be further described. FIG. 3 is a configuration diagram of the boiling water treatment tank 1 and the loading / unloading / unloading device 2 of the drying device. Deionized water having an electric conductivity of 1 μS / cm or less is used as the water 3 for boiling, and the water 3 is boiled by the heater 4 through which superheated steam is passed. The printed wiring board 5 is set on the carrier 6 of the loading / unloading device 2, is suspended from the rail 7 and moves from the left side of the figure, and the arm 8 is moved up and down into the boiling water treatment tank 1 for a predetermined time. It is immersed. The processing time varies depending on the material, layer configuration, and thickness of the printed wiring board. For example, two layers having a thickness of about 0.5 mm have a thickness of about 5 minutes, and 50 layers have a thickness of 7 m.
For about m, it is about 10 minutes. Thereafter, the printed wiring board 5 is taken out from the boiling water treatment tank 2, and the moisture in the through hole and on the surface is evaporated and dried.

【0017】プリント配線板の処理は必ずしも沸騰水で
なくても、80℃程度以上の加熱水であればよい。しか
し、このような沸騰水のみの単独処理方式のときは、沸
騰水で行うことが好ましい。沸騰水処理槽1には、用水
3が不足したときに脱イオン水を追加するための供給口
を設けてもよい。追加する脱イオン水は予め加温又は加
熱してから供給してもよい。また、オーバーフローのた
めの排水口や沸騰水処理槽下部に通常の排水口を設けて
もよい。
The treatment of the printed wiring board is not necessarily boiling water, but may be heating water of about 80 ° C. or higher. However, in the case of such a single treatment system using only boiling water, it is preferable to perform the treatment with boiling water. The boiling water treatment tank 1 may be provided with a supply port for adding deionized water when the service water 3 runs short. The additional deionized water may be supplied after being heated or heated in advance. Further, a drain port for overflow or a normal drain port may be provided below the boiling water treatment tank.

【0018】図4は、乾燥装置の他の例の構成図であっ
て、沸騰水処理槽1、減圧室9からなる。図3に示した
実施形態と同様に、プリント配線板5を沸騰水に浸漬処
理した後、投入搬送取り出し装置2を用いて、減圧室9
に投入し、減圧乾燥させる。減圧室9は、密閉を保持す
るためのフランジ10及び真空ポンプ11を具備する。
本方式によれば図3に示した沸騰水のみの単独処理方式
に比べ、短時間で乾燥させることができる。また、沸騰
水から引き上げたプリント配線板は、可能な限り短時間
に減圧室に搬送投入することが乾燥効果を高める上で有
効である。
FIG. 4 is a block diagram of another example of the drying apparatus, which comprises a boiling water treatment tank 1 and a decompression chamber 9. As in the embodiment shown in FIG. 3, after the printed wiring board 5 is immersed in boiling water, the pressure-reducing chamber 9
And dried under reduced pressure. The decompression chamber 9 includes a flange 10 and a vacuum pump 11 for maintaining the hermetic seal.
According to this method, drying can be performed in a shorter time than in the single treatment method using only boiling water shown in FIG. In addition, it is effective to transport the printed wiring board pulled up from the boiling water into the decompression chamber in the shortest possible time to enhance the drying effect.

【0019】図5は、沸騰水処理槽1、熱風乾燥機15
からなる乾燥装置の実施の形態を示す構成図である。図
3又は図4に示した実施形態と同様に、プリント配線板
5を沸騰水に浸漬処理した後、投入搬送取り出し装置2
を用いて、熱風乾燥機15に投入し、熱風ブロアー16
により熱風をプリント配線板5に吹き付け、蒸発乾燥を
促進する機構となっている。この場合も沸騰水から引き
上げたプリント配線板は、可能な限り短時間に熱風乾燥
機に搬送投入する方がよい。
FIG. 5 shows a boiling water treatment tank 1, a hot air drier 15
FIG. 2 is a configuration diagram showing an embodiment of a drying device made of. As in the embodiment shown in FIG. 3 or FIG. 4, after the printed wiring board 5 is immersed in boiling water,
Into a hot-air dryer 15 and a hot-air blower 16
Thus, a hot air is blown onto the printed wiring board 5 to promote evaporation and drying. Also in this case, it is preferable that the printed wiring board pulled up from the boiling water is conveyed to the hot air dryer in as short a time as possible.

【0020】従来の熱風方式の乾燥方法では、小径のス
ルーホール内に熱風が入りにくく、また板厚が厚いと熱
容量が大きくなるために短時間の乾燥処理では、乾燥が
不充分となりスルーホール内に処理液が残留しやすかっ
た。一方、本実施例のような方法で乾燥したプリント配
線板は、スルーホール内に液の残留はなく、銅めっき後
の外層パターン形成工程におけるドライフィルムのテン
ト破れやスルーホール断線や表面変質の発生はほとんど
なかった。
In the conventional hot-air drying method, it is difficult for hot air to enter into the small-diameter through-hole, and when the plate thickness is large, the heat capacity is large. The processing solution was liable to remain. On the other hand, in the printed wiring board dried by the method as in the present embodiment, no liquid remains in the through-hole, and the tent tear of the dry film, the breakage of the through-hole, and the surface deterioration occur in the outer layer pattern forming step after the copper plating. Was almost never.

【0021】[0021]

【発明の効果】以上説明したように本発明によれば、ス
ルーホール断線を発生させずに湿式処理を施すことがで
きることから、高品質のプリント配線板を高歩留まりで
生産することができる。
As described above, according to the present invention, high-quality printed wiring boards can be produced at a high yield because wet processing can be performed without causing through-hole disconnection.

【図面の簡単な説明】[Brief description of the drawings]

【図1】従来の処理方式により処理したプリント配線板
のスルーホール部分の断面図。
FIG. 1 is a cross-sectional view of a through-hole portion of a printed wiring board processed by a conventional processing method.

【図2】本発明の処理装置の一実施例の斜視図。FIG. 2 is a perspective view of an embodiment of the processing apparatus of the present invention.

【図3】本発明の乾燥装置の一実施例の構成図。FIG. 3 is a configuration diagram of one embodiment of a drying device of the present invention.

【図4】本発明の乾燥装置の他の実施例の構成図。FIG. 4 is a configuration diagram of another embodiment of the drying device of the present invention.

【図5】本発明の乾燥装置のさらに他の実施例の構成
図。
FIG. 5 is a configuration diagram of still another embodiment of the drying apparatus of the present invention.

【符号の説明】 1…沸騰水処理槽 2…投入搬送取り出し装置 3…用水 4…加熱ヒータ 5…プリント配線板 6…キャリヤ 7…レール 8…アーム 9…減圧室 10…フランジ 11…真空ポンプ 12…乾燥装置 13…銅めっき装置 14…水洗槽 15…熱風乾燥機 16…熱風ブロアー 21…プリント配線板 22…ドライフィルムレジスト 24…スルーホール 25…スルーホール断線 26…銅めっき部[Description of Signs] 1 ... Boiling water treatment tank 2 ... Injection / conveyance removal device 3 ... Water supply 4 ... Heating heater 5 ... Printed wiring board 6 ... Carrier 7 ... Rail 8 ... Arm 9 ... Decompression chamber 10 ... Flange 11 ... Vacuum pump 12 ... Drying device 13 ... Copper plating device 14 ... Washing tank 15 ... Hot air dryer 16 ... Hot air blower 21 ... Printed wiring board 22 ... Dry film resist 24 ... Through hole 25 ... Through hole disconnection 26 ... Copper plating part

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】プリント配線板を湿式処理した後、加熱水
に浸漬し、該プリント配線板を加熱水から引上げて乾燥
処理することを特徴とするプリント配線板の乾燥方法。
1. A method for drying a printed wiring board, comprising the steps of wet-treating a printed wiring board, immersing the printed wiring board in heated water, pulling up the printed wiring board from the heated water, and drying the printed wiring board.
【請求項2】上記加熱水は、沸騰水であることを特徴と
する請求項1記載のプリント配線板の乾燥方法。
2. The method for drying a printed wiring board according to claim 1, wherein said heating water is boiling water.
【請求項3】上記乾燥処理は、熱風により乾燥すること
を特徴とする請求項1又は2記載のプリント配線板の乾
燥方法。
3. The method for drying a printed wiring board according to claim 1, wherein the drying is performed by hot air.
【請求項4】プリント配線板を湿式処理するための湿式
処理手段と、該湿式処理されたプリント配線板を加熱水
に浸漬するための加熱水処理手段と、該加熱水に浸漬さ
れたプリント配線板を乾燥するための乾燥処理手段と、
プリント配線板を上記各手段へ搬送するための搬送手段
からなることを特徴とするプリント配線板の処理装置。
4. A wet processing means for wet-processing a printed wiring board, a heated water treatment means for immersing the wet-processed printed wiring board in heated water, and a printed wiring immersed in the heated water. Drying treatment means for drying the plate,
An apparatus for processing a printed wiring board, comprising transport means for transporting the printed wiring board to each of the above means.
【請求項5】上記湿式処理手段は、銅めっき処理手段で
あることを特徴とする請求項4記載のプリント配線板の
処理装置。
5. The printed wiring board processing apparatus according to claim 4, wherein said wet processing means is a copper plating processing means.
JP17334896A 1996-07-03 1996-07-03 Drying method and process equipment of printed wiring board Pending JPH1022609A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17334896A JPH1022609A (en) 1996-07-03 1996-07-03 Drying method and process equipment of printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17334896A JPH1022609A (en) 1996-07-03 1996-07-03 Drying method and process equipment of printed wiring board

Publications (1)

Publication Number Publication Date
JPH1022609A true JPH1022609A (en) 1998-01-23

Family

ID=15958757

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17334896A Pending JPH1022609A (en) 1996-07-03 1996-07-03 Drying method and process equipment of printed wiring board

Country Status (1)

Country Link
JP (1) JPH1022609A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015015450A (en) * 2013-06-04 2015-01-22 三ツ星ベルト株式会社 Hole filling substrate having conductive film, manufacturing method thereof, and discoloration or ooze restraining method
CN112954909A (en) * 2021-03-24 2021-06-11 江西威尔高电子科技有限公司 Hot-blast device that weathers during production of power battery circuit board based on new energy automobile

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015015450A (en) * 2013-06-04 2015-01-22 三ツ星ベルト株式会社 Hole filling substrate having conductive film, manufacturing method thereof, and discoloration or ooze restraining method
CN112954909A (en) * 2021-03-24 2021-06-11 江西威尔高电子科技有限公司 Hot-blast device that weathers during production of power battery circuit board based on new energy automobile
CN112954909B (en) * 2021-03-24 2022-08-12 江西威尔高电子股份有限公司 Hot-blast device that weathers during production of power battery circuit board based on new energy automobile

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