JPH10221164A - Miscellaneous light eliminating method in laser light detection and laser sensor equipment - Google Patents

Miscellaneous light eliminating method in laser light detection and laser sensor equipment

Info

Publication number
JPH10221164A
JPH10221164A JP9038604A JP3860497A JPH10221164A JP H10221164 A JPH10221164 A JP H10221164A JP 9038604 A JP9038604 A JP 9038604A JP 3860497 A JP3860497 A JP 3860497A JP H10221164 A JPH10221164 A JP H10221164A
Authority
JP
Japan
Prior art keywords
light
light receiving
laser
receiving element
miscellaneous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9038604A
Other languages
Japanese (ja)
Inventor
Masahiro Ueda
上田正紘
Yoshikatsu Hifumi
一二三吉勝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hokkei Kogyo KK
Original Assignee
Hokkei Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hokkei Kogyo KK filed Critical Hokkei Kogyo KK
Priority to JP9038604A priority Critical patent/JPH10221164A/en
Publication of JPH10221164A publication Critical patent/JPH10221164A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To eliminate influence of miscellaneous lights under light environment having vibration, by installing a light receiving element adjacently to another light receiving element when intensity of a laser light is detected, receiving miscellaneous lights except the laser light with both of the elements, and eliminating the miscellaneous lights by operating intensity difference of the miscellaneous lights. SOLUTION: A second light receiving element D2 is arranged adjacently to a first light receiving element D1 for receiving a laser light. A differential circuit A obtains and outputs the intensity difference of the lights which the elements D1 and D2 receive. An amplifier A1 is connected with the element D1 . An amplifier A2 is connected with the element D2 . The outputs of both of the amplifiers A1 , A2 are inputted in a differential amplifier A3 and subjected to differential amplification.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、レーザ光を受光素
子で受光して強度を検出するレーザ光検出における雑光
除去方法及びレーザセンサ装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for removing noise in laser light detection in which laser light is received by a light receiving element and the intensity is detected.

【従来の技術】[Prior art]

【0002】一般に、レーザセンサ装置は、レーザ光を
受光素子で受光して強度を検出するものであり、各種の
工業計測用に使用され、近年、例えば、織紡工場におい
て織布の横糸数の計測に用いる装置が研究されている。
この場合、精度や信頼性が最も重要である。完全な暗室
と振動の無い定盤上での理想的な環境下での基礎研究段
階では初期の目的を違成し得るものであっても、それを
現場で使用する際には雑光や振動の影響のため必ず精度
や信頼性の低下を生じる。特に、織紡工場での横糸数の
計測の際には非常に明るいしかも振動の多い環境下での
測定が強いられる。そのため、従来においては、このよ
うな雑光の影響を除去するために、受光素子に出来るだ
け雑光が入射しないようにカメラのフードのようなもの
を用いたりレーザー光を変調したりさらには受光素子に
信号フィルターをかける方法等が考えられている。
2. Description of the Related Art Generally, a laser sensor device detects the intensity of a laser beam by receiving a laser beam with a light receiving element, and is used for various industrial measurements. Devices used for measurement have been studied.
In this case, accuracy and reliability are the most important. In the basic research stage in an ideal environment on a completely dark room and a vibration-free surface plate, even if it may deviate from the initial purpose, when using it in the field, , The accuracy and reliability always decrease. In particular, when measuring the number of weft yarns in a weaving factory, measurement is required in an environment that is very bright and has a lot of vibration. Therefore, in the past, in order to remove the influence of such noise, use something like a camera hood, modulate the laser light, and further reduce the light to prevent the light from entering the light receiving element as much as possible. A method of applying a signal filter to the element has been considered.

【0003】[0003]

【発明が解決しようとする課題】ところで、このような
雑光除去方法にあっては、これらは何れも雑光の振動の
影響を完全に除去できないこともあって、雑光の影響を
積極的に除去し得るものではなく、雑光除去が不十分に
なっているという問題があった。本発明は、このような
問題点に鑑みてなされたもので、明るいしかも振動のあ
る環境下においても積極的に雑光の影響をほぼ完全に除
去し得るレーザ光検出における雑光除去方法及びレーザ
センサ装置を提供することを目的とする。
However, in such a method of removing light, none of these methods can completely remove the influence of the vibration of the light. However, there is a problem that the light removal is insufficient. The present invention has been made in view of such a problem, and a method and a method for laser light detection in laser light detection capable of positively completely removing the influence of light interference even in a bright and vibrating environment. It is an object to provide a sensor device.

【0004】[0004]

【課題を解決するための手段】このような目的を達成す
るため、本発明のレーザ光検出における雑光除去方法
は、レーザ光を受光素子で受光して該レーザ光の強度を
検出する際、上記受光素子の他に別の受光素子を近接し
て設け、レーザ光以外の雑光を両受光素子により受光さ
せ、該受光した雑光の強度差の演算によって除去するも
のである。また、本発明のレーザセンサ装置は、レーザ
光を受光する第一の受光素子と、該第一の受光素子に近
接して設けられ該第一の受光素子とともにレーザ光以外
の雑光を受光する第二の受光素子と、上記第一及び第二
の受光素子に受光された光の強度差をとって出力する差
動回路とを備えた構成としている。
In order to achieve the above object, the present invention provides a method for removing miscellaneous light in laser light detection, comprising the steps of: receiving a laser beam by a light receiving element and detecting the intensity of the laser beam; In addition to the light receiving element, another light receiving element is provided close to the light receiving element, and light other than laser light is received by both light receiving elements, and is removed by calculating a difference in intensity of the received light. In addition, the laser sensor device of the present invention includes a first light receiving element that receives laser light, and a light receiving element that is provided close to the first light receiving element and receives light other than laser light together with the first light receiving element. It is configured to include a second light receiving element and a differential circuit that outputs the difference in intensity between the light received by the first and second light receiving elements.

【0005】本発明の基本原理は、図1に示すように、
近接した位置に所要規格の受光素子を2個用い、その一
方の素子のみに信号としてのレーザー光を入射させ両素
子の差出力を取り出すものである。図2に全体の測定系
を示す。受光素子D1 ,D2 に入射する雑光強度をそれ
ぞれN1 ,N2 、受光素子D1 のみに入射するレーザー
光強度をL1 とすると受光素子D1 に生じる電流I1
1 =k1 (L1 +N1 ),受光素子D2 に生じる電流
2 はI2 =k2 ・N2 となる。ここで、k1 ,k2
両受光素子D1 ,D2 の給合的な受光感度を表す係数で
1 =k2 ≡kが理想である。両受光素子D1 ,D2
近接配置されているのでほぼN1 =N2 ≡Nと考えられ
る。
The basic principle of the present invention is as shown in FIG.
Two light receiving elements of a required standard are used at close positions, and a laser beam as a signal is applied to only one of the light receiving elements to take out a difference output between the two elements. FIG. 2 shows the entire measurement system. Light-receiving element D 1, D 2 noisy light intensity incident to the respective N 1, N 2, the current I 1 of the laser beam intensity incident only on the light receiving elements D 1 and the L 1 occurs in the light receiving element D 1 is I 1 = k 1 (L 1 + N 1 ), the current I 2 generated in the light-receiving element D 2 is the I 2 = k 2 · N 2 . Here, k 1 and k 2 are coefficients representing the combined light receiving sensitivity of both light receiving elements D 1 and D 2 , and ideally k 1 = k 2 ≡k. Since both light receiving elements D 1 and D 2 are arranged close to each other, it can be considered that N 1 = N 2 ≡N.

【0006】[0006]

【発明の実施の形態】以下、添付図面に基づいて、本発
明の実施の形態に係るレーザ光検出における雑光除去方
法及びレーザセンサ装置について説明する。雑光除去方
法はレーザセンサ装置において実現されるので、レーザ
センサ装置の作用において説明する。図2に示すよう
に、実施の形態に係るレーザセンサ装置は、レーザ光を
受光する第一の受光素子D1 と、第一の受光素子D1
近接して設けられ第一の受光素子D1 とともにレーザ光
以外の雑光を受光する第二の受光素子D2 と、第一及び
第二の受光素子D1 ,D2 に受光された光の強度差をと
って出力する差動回路Aとを備えている。差動回路Aに
おいて、A1 は第一の受光素子D1 に接続された増幅
器、A2 は第二の受光素子D2 に接続された増幅器、A
3 は両増幅器A1 ,A2 の出力が入力されて差動増幅す
る増幅器、R1 ,R2 は増幅器A3 に結線された抵抗で
ある。
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a laser light detecting method according to an embodiment of the present invention; Since the method for removing noise is realized in the laser sensor device, the operation of the laser sensor device will be described. As shown in FIG. 2, the laser sensor device according to the embodiment includes a first light receiving element D 1 for receiving laser light, and a first light receiving element D provided near the first light receiving element D 1. 1 with a second light-receiving element D 2 that receives the noisy light other than the laser beam, the first and second light receiving elements D 1, D 2 to take the intensity differences of the received light and outputs the differential circuit a And In the differential circuit A, A 1 is an amplifier connected to the first light receiving element D 1 , A 2 is an amplifier connected to the second light receiving element D 2 , A
Reference numeral 3 denotes an amplifier to which the outputs of both amplifiers A 1 and A 2 are input and differentially amplifies, and R 1 and R 2 are resistors connected to the amplifier A 3 .

【0007】このレーザセンサ装置によれば、両受光素
子D1 ,D2 からの出力は図示のごとく差動結線として
いるので差動回路Aへの信号IはI=I1 −I2 =kL
1 となって雑光の影響の無いレーザー光の信号のみとな
る。ある環境下で雑光N1 とN2 が無視できない程度に
異なっている場合には,受光素子D1 ,D2 の取り付け
法を工夫するか増幅器A1 ,A2 どちらかの増幅度を調
整して近似的にN1 =N2 となるようにする。
According to this laser sensor device, since the outputs from the light receiving elements D 1 and D 2 are differentially connected as shown in the figure, the signal I to the differential circuit A is I = I 1 −I 2 = kL
It becomes 1 and it becomes only the signal of the laser beam which is not affected by the interference light. In case of noisy light N 1 and N 2 in an environment is different to a degree that can not be ignored, adjusting either the amplification degree light receiving elements D 1, D or amplifiers A 1 to devise mounting method 2, A 2 To approximately N 1 = N 2 .

【0008】[0008]

【実施例】次に、実施例について説明する。本実施例に
係る受光素子D1 ,D2 はともにS2281 シリーズフォト
ダイオード(HAMAMATSU )、増幅器A1 ,A2 はともに
C2719 フォトセンサアンプ(HAMAMATSU )、最終段増幅
器A3 は研究室で製作したものを用いた。次に、この実
施例に係るレーザセンサ装置により下記の試験を行な
い、本方法の有用性を検討した。雑光源としては現場で
の利用を考えて蛍光灯を用いた。また、試験では両受光
素子D1 ,D2 の特性を調べる目的で、図1に示すよう
に、それらをカバー出来るシールドカバーCを用いた。
尚、これら両受光素子D1 ,D2 を同じ支持系に取り付
ければ、両受光素子D1 ,D2 が受ける振動は全く同じ
になるから振動による誤差も除去し得る。
Next, an embodiment will be described. The light receiving elements D 1 and D 2 according to this embodiment are both S2281 series photodiodes (HAMAMATSU), and the amplifiers A 1 and A 2 are both
C2719 photosensor amplifier (HAMAMATSU), final-stage amplifier A 3 used was fabricated in the laboratory. Next, the following test was performed using the laser sensor device according to this example to examine the usefulness of the present method. Fluorescent lamps were used as the light source for the purpose of use in the field. In the test, a shield cover C capable of covering both light receiving elements D 1 and D 2 was used as shown in FIG.
If the light receiving elements D 1 and D 2 are mounted on the same support system, the vibrations received by the light receiving elements D 1 and D 2 become completely the same, so that errors due to the vibration can be eliminated.

【0009】まず、一方の受光素子を遮光したときの通
常の明るさの蛍光灯のみの出力を得た。図3にその出力
結果を示す。また、一方の受光素子を遮光したときのレ
ーザー光のみの出力を得た。図4にその出力結果を示
す。更に、一方の受光素子を遮光したとき、同時に両者
を入射したときの出力電圧E0 (直流成分と交流成分の
重畳した全出力)を得た。図5にその出力結果を示す。
それぞれの出力電圧は2.92V,6.58Vおよび
9.50Vとなっており、図3及び図4に示すの出力値
の和は完全に図5に示す出力値となっている。
First, an output of only a fluorescent lamp having a normal brightness when one light receiving element is shielded from light was obtained. FIG. 3 shows the output result. Further, an output of only the laser beam when one of the light receiving elements was shielded was obtained. FIG. 4 shows the output result. Further, when one of the light receiving elements was shielded from light, an output voltage E 0 (a total output in which a DC component and an AC component were superimposed) was obtained when both were incident simultaneously. FIG. 5 shows the output result.
The respective output voltages are 2.92 V, 6.58 V and 9.50 V, and the sum of the output values shown in FIGS. 3 and 4 is completely the output value shown in FIG.

【0010】次に、本方法の有用性を確認する目的で、
上記と同じ実験を差動動作させた。結果を図6乃至図8
に示す。すなわち、図6に示す結果は蛍光灯のみ、図7
に示す結果はレーザー光のみ、図8に示す結果はそれら
の両者を同時に入射したときの出力電圧である。それぞ
れの出力電圧は、18.85mV,0.94mVm およ
び20.25mVとなっており、これも図6及び図7に
示すの出力値の和は略図8に示す出力値となっている。
図に示す結果からレーザ光の強度変化は完全に無視し得
るものであり、僅かな雑光成分である約20mVは両受
光素子に入射する蛍光灯の光量変化と考えられる。しか
し、雑光成分である通常明るさの蛍光灯出力2.92V
(図3参照)と比較すれば約0.6%に減少している。
本実験ではレーザ光を減光して直接受光素子に入射させ
たが通常は反射散乱または透過光を利用することになる
ので図4に示したような大きな電圧が生じるとは限らな
い。しかし、簡単な実験から比較的少ない散乱光でも2
V程度のレーザ光出力がえられたのでこれを信号強度と
すれば信号対雑音比は100となり現場でも充分実用可
能であることがわかった。
Next, in order to confirm the usefulness of the present method,
The same experiment as above was operated differentially. 6 to 8 show the results.
Shown in That is, the results shown in FIG.
The results shown in FIG. 8 are the output voltages when only the laser beam was applied, and the results shown in FIG. The output voltages are 18.85 mV, 0.94 mVm, and 20.25 mV, respectively, and the sum of the output values shown in FIGS. 6 and 7 is almost the output value shown in FIG.
From the results shown in the figure, the change in the intensity of the laser light is completely negligible, and the slight noise component of about 20 mV is considered to be a change in the amount of light of the fluorescent lamp incident on both light receiving elements. However, a fluorescent light output of 2.92 V of normal brightness, which is a miscellaneous light component,
(See FIG. 3), which is reduced to about 0.6%.
In this experiment, the laser light was attenuated and was directly incident on the light receiving element. However, since a reflected or scattered or transmitted light is usually used, a large voltage as shown in FIG. 4 is not always generated. However, simple experiments show that even relatively small amounts of scattered light
Since a laser light output of about V was obtained, the signal-to-noise ratio was 100 when the signal intensity was used as the signal intensity.

【0011】尚、受光素子や増幅器そのものの雑音電圧
を図9に示す。約3mVであるが、この維音電圧も本目
的に対しては全く無視しうるものである。また、上記の
例では、両受光素子に直結した増幅器に同一規格のもの
を用いたが、必ずしもこれに限定されるものではなく、
これらに増幅度を可変出来るものを用いて、たとえ両受
光素子に異なった雑光量が入射してもそれらをほぼ素子
そのものの誤差にまで微調することによって、雑光の影
響をさらに減少するようにしても良く、適宜変更して差
支えない。
FIG. 9 shows the noise voltage of the light receiving element and the amplifier itself. It is about 3 mV, but this stray voltage is also negligible for this purpose. In the above example, the amplifier directly connected to both light receiving elements is of the same standard, but is not necessarily limited to this.
By using a variable amplification factor, even if different amounts of light are incident on both light-receiving elements, the influence of the light can be further reduced by finely adjusting them to almost the error of the element itself. It may be changed appropriately.

【0012】[0012]

【発明の効果】以上説明したように、本発明のレーザ光
検出における雑光除去方法及びレーザセンサ装置によれ
ば、2個の同一受光素子を差動接続し、一方の受光素子
のみにレーザー光を入射させその差出力信号とする謂わ
ばアクティブ雑光除去を行なうので、通常の明るさの現
場での雑光成分を減少させることができ、信号対雑音比
を少なくとも100倍以上改善でき、明るいしかも振動
のある環境下においても積極的に雑光の影響をほぼ完全
に除去し、精度の良い検出を行なうことができるように
なる。
As described above, according to the laser light detection method and the laser sensor device of the present invention, two identical light-receiving elements are differentially connected, and only one of the light-receiving elements is connected to the laser light. So that the so-called active light removal is performed as a difference output signal, so that the light component in the field of normal brightness can be reduced, the signal-to-noise ratio can be improved at least 100 times or more, and bright light can be obtained. In addition, even under a vibrating environment, the influence of noise can be positively almost completely removed, and accurate detection can be performed.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の基本原理を説明するための図である。FIG. 1 is a diagram for explaining a basic principle of the present invention.

【図2】本発明の実施の形態に係るレーザセンサ装置を
示す図である。
FIG. 2 is a diagram showing a laser sensor device according to an embodiment of the present invention.

【図3】本発明の実施例に係るレーザセンサ装置の実験
結果を示すグラフ図である。
FIG. 3 is a graph showing experimental results of the laser sensor device according to the example of the present invention.

【図4】本発明の実施例に係るレーザセンサ装置の実験
結果を示すグラフ図である。
FIG. 4 is a graph showing experimental results of the laser sensor device according to the example of the present invention.

【図5】本発明の実施例に係るレーザセンサ装置の実験
結果を示すグラフ図である。
FIG. 5 is a graph showing experimental results of the laser sensor device according to the example of the present invention.

【図6】本発明の実施例に係るレーザセンサ装置の実験
結果を示すグラフ図である。
FIG. 6 is a graph showing experimental results of the laser sensor device according to the example of the present invention.

【図7】本発明の実施例に係るレーザセンサ装置の実験
結果を示すグラフ図である。
FIG. 7 is a graph showing experimental results of the laser sensor device according to the example of the present invention.

【図8】本発明の実施例に係るレーザセンサ装置の実験
結果を示すグラフ図である。
FIG. 8 is a graph showing experimental results of the laser sensor device according to the example of the present invention.

【図9】本発明の実施例に係るレーザセンサ装置の受光
素子や増幅器そのものの雑音電圧を示すグラフ図であ
る。
FIG. 9 is a graph showing a noise voltage of the light receiving element and the amplifier itself of the laser sensor device according to the embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 レーザー光強度 N1 ,N2 雑光強度 D1 第一の受光素子 D2 第二の受光素子 A 差動回路 A1 ,A2 ,A3 増幅器 R1 ,R2 抵抗 C シールドカバーL 1 Laser light intensity N 1 , N 2 Miscellaneous light intensity D 1 First light receiving element D 2 Second light receiving element A Differential circuit A 1 , A 2 , A 3 Amplifier R 1 , R 2 resistance C Shield cover

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 レーザ光を受光素子で受光して該レーザ
光の強度を検出する際、上記受光素子の他に別の受光素
子を近接して設け、レーザ光以外の雑光を両受光素子に
より受光させ、該受光した雑光の強度差の演算によって
除去することを特徴とするレーザ光検知における雑光除
去方法。
When detecting the intensity of a laser beam by receiving a laser beam with a photodetector, another photodetector is provided in close proximity to the photodetector in addition to the aforementioned photodetector, so that light other than the laser beam is received by both photodetectors. And removing the received light by calculation of the intensity difference of the received light.
【請求項2】 レーザ光を受光する第一の受光素子と、
該第一の受光素子に近接して設けられ該第一の受光素子
とともにレーザ光以外の雑光を受光する第二の受光素子
と、上記第一及び第二の受光素子に受光された光の強度
差をとって出力する差動回路とを備えたことを特徴とす
るレーザセンサ装置。
2. A first light receiving element for receiving a laser beam,
A second light receiving element that is provided near the first light receiving element and receives miscellaneous light other than laser light together with the first light receiving element; and a light receiving element that receives the light received by the first and second light receiving elements. A laser sensor device comprising: a differential circuit that outputs an intensity difference.
JP9038604A 1997-02-07 1997-02-07 Miscellaneous light eliminating method in laser light detection and laser sensor equipment Pending JPH10221164A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9038604A JPH10221164A (en) 1997-02-07 1997-02-07 Miscellaneous light eliminating method in laser light detection and laser sensor equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9038604A JPH10221164A (en) 1997-02-07 1997-02-07 Miscellaneous light eliminating method in laser light detection and laser sensor equipment

Publications (1)

Publication Number Publication Date
JPH10221164A true JPH10221164A (en) 1998-08-21

Family

ID=12529888

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9038604A Pending JPH10221164A (en) 1997-02-07 1997-02-07 Miscellaneous light eliminating method in laser light detection and laser sensor equipment

Country Status (1)

Country Link
JP (1) JPH10221164A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010223776A (en) * 2009-03-24 2010-10-07 Anywire:Kk Photoelectric sensor and photoelectric sensor system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4969180A (en) * 1972-11-01 1974-07-04
JPS60179827U (en) * 1984-05-07 1985-11-29 清原 耕来 power meter
JPH10142148A (en) * 1996-11-08 1998-05-29 Mitsubishi Heavy Ind Ltd Concentration measuring device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4969180A (en) * 1972-11-01 1974-07-04
JPS60179827U (en) * 1984-05-07 1985-11-29 清原 耕来 power meter
JPH10142148A (en) * 1996-11-08 1998-05-29 Mitsubishi Heavy Ind Ltd Concentration measuring device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010223776A (en) * 2009-03-24 2010-10-07 Anywire:Kk Photoelectric sensor and photoelectric sensor system

Similar Documents

Publication Publication Date Title
US20080135735A1 (en) Signal-enhancement system for photodetector outputs
US4537510A (en) Output control device for light detectors for photometers
CA1223938A (en) Light detecting circuit
JPH10221164A (en) Miscellaneous light eliminating method in laser light detection and laser sensor equipment
TWI666436B (en) Multi-channel detecting system
JPS5983165A (en) Light source device for illumination
US6580066B2 (en) Measurement signal generating circuit for linear scale
JP2006292488A (en) Apparatus for measuring temperature distribution
JP2007163383A (en) Instrument and method for measuring microingredient
JPH07209336A (en) Current sensor
US20030202171A1 (en) Method, apparatus and system for testing one or more waveguides of an optical device
US7518094B2 (en) Compensation of nonuniformity among multiple sensing diodes in a multiple sensor device
JPS6388871A (en) Optical hybrid integrated circuit device
US20080278717A1 (en) Contamination-inspecting apparatus and detection circuit
JP2868097B2 (en) Mobile sensor
KR0155203B1 (en) Optical detecting using multi-receiving
JPH058498Y2 (en)
KR20230107789A (en) Electronic Integrating Circuits with Offset and Collect Charge Reduction Circuits and Related Methods
JP2023029036A (en) Signal processing device
JPH08261940A (en) Gas analyzer
JPH0216441B2 (en)
JPH0341484Y2 (en)
JPS63207175A (en) Optical hybrid integrated circuit device
JPH0290039A (en) Circuit for correcting fluctuation in illuminance of detected lighting
JPS5835407A (en) Signal processor for checking pattern defect

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20040209

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20050713

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20051108

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20060905