JPH1021862A5 - - Google Patents

Info

Publication number
JPH1021862A5
JPH1021862A5 JP1996176485A JP17648596A JPH1021862A5 JP H1021862 A5 JPH1021862 A5 JP H1021862A5 JP 1996176485 A JP1996176485 A JP 1996176485A JP 17648596 A JP17648596 A JP 17648596A JP H1021862 A5 JPH1021862 A5 JP H1021862A5
Authority
JP
Japan
Prior art keywords
flange
front surface
crossbeam
electron beam
vacuum vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996176485A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1021862A (ja
JP3652795B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP17648596A priority Critical patent/JP3652795B2/ja
Priority claimed from JP17648596A external-priority patent/JP3652795B2/ja
Publication of JPH1021862A publication Critical patent/JPH1021862A/ja
Publication of JPH1021862A5 publication Critical patent/JPH1021862A5/ja
Application granted granted Critical
Publication of JP3652795B2 publication Critical patent/JP3652795B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP17648596A 1996-07-05 1996-07-05 電子ビーム真空容器 Expired - Fee Related JP3652795B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17648596A JP3652795B2 (ja) 1996-07-05 1996-07-05 電子ビーム真空容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17648596A JP3652795B2 (ja) 1996-07-05 1996-07-05 電子ビーム真空容器

Publications (3)

Publication Number Publication Date
JPH1021862A JPH1021862A (ja) 1998-01-23
JPH1021862A5 true JPH1021862A5 (cg-RX-API-DMAC10.html) 2004-07-15
JP3652795B2 JP3652795B2 (ja) 2005-05-25

Family

ID=16014497

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17648596A Expired - Fee Related JP3652795B2 (ja) 1996-07-05 1996-07-05 電子ビーム真空容器

Country Status (1)

Country Link
JP (1) JP3652795B2 (cg-RX-API-DMAC10.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4855170B2 (ja) * 2006-07-28 2012-01-18 株式会社日立ハイテクノロジーズ 電子顕微鏡装置

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