JPH10217166A - Robot for handling - Google Patents

Abstract

PROBLEM TO BE SOLVED: To shorten a carry-in and out cycle by positioning first and second robot link mechanisms integrally free to rotate in an angular region where both of carrier bases are narrow. SOLUTION: A carrier base 8a of a first robot link mechanism B1 is devised to be in a stand-by state where both of first and second arms 46a, 46b sink in the ring boss side in a state where they are rectilinear in the diametrical direction. In the same way, a carrier base 8b of a second robot link mechanism B2 is devised to be in a stand-by state when third and fourth arms 46c, 46d come to be rectilinear in the diametrical direction. Thereby, both of the carrier bases 8a, 8b of these robot link mechanisms B1 , B2 in the stand-by state are slipped in position in the rotational direction of the ring boss, this state becomes a stand-by state of a robot for handling, each of the carrier bases 8a, 8b is actuated to project and sink in the radial direction of the ring boss by rotation of each of the ring bosses, and the robot for handling is devised to be rotated in this stand-by state.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor manufacturing apparatus, an LCD manufacturing apparatus, and the like, in which a plurality of process chambers are provided around a single transfer chamber, and processing is performed in each process chamber. Multi-chamber type manufacturing in which a thin plate-like work such as a wafer to be transferred is transferred from one process chamber to another process chamber by a handling robot provided in the transfer chamber via a transfer chamber. The present invention relates to the handling robot in the apparatus.

[0002]

2. Description of the Related Art A multi-chamber type semiconductor manufacturing apparatus is shown in FIG. 1 and a process chamber station 2a, 2b, 2c, 2d, 2e comprising a plurality of process chambers is provided around a transfer chamber 1.
And a work transfer station 3 for transferring works to the outside, and a vacuum state is always maintained in the transfer chamber 1 by a vacuum device.

The transfer chamber 1 is shown in FIG.
A handling robot A is rotatably provided at the center of the processing chamber, and is disposed on the peripheral wall and at each of the process chamber stations 2a, 2b, 2c, 2
On the partition wall 5 facing the d, 2e and the work transfer station 3, there is provided a gate 6 serving as an entrance of the work to each process chamber station. The gates 6 are opened and closed by an open / close door (not shown) provided inside the transfer chamber 2 so as to face each gate 6.

As a conventional handling robot used in this kind of semiconductor manufacturing apparatus, a handling robot A which is a so-called frog-leg type double arm type is used, and a same operation robot as shown in FIGS. Type handling robot A '(JP-A-7-227777)
Is known.

FIG. 3 to FIG. 6 show a frog-leg type double-armed handling robot A of the above-mentioned prior art.

Two arms 7 of the same length with respect to the center of rotation
a and 7b are provided rotatably. On the other hand, two transfer tables 8a and 8b having the same shape are located on both sides with respect to the center of rotation, and one end of two links 9a and 9b of the same length is provided at the base of each transfer table 8a and 8b. Are connected. One end of each of the two links 9a, 9b is connected to the carriage 8a,
The link 9a and 9b are connected to the transfer table 8a and 8b in a completely symmetrical direction with respect to each of the transfer tables 8a and 8b. One of the two links connected to the transport tables 8a and 8b is connected to one arm, and the other link is connected to the other arm.

FIG. 4 shows the above-mentioned frog-leg type carriage platform attitude regulating mechanism. The distal ends of two links 9a and 9b connected to the carriages 8a and 8b are as shown in FIG. 4 (a). The gears 9c, 9c mesh with each other and are connected by a gear structure.
The attitude angles θR and θL of the a and 9b are always the same. Thus, the transfer tables 8a and 8b are always directed in the radial direction of the transfer chamber 1 and are operated in the radial direction. The link between the links 9a and 9b may be replaced by a belt 9d crossed as shown in FIG. 4B instead of a gear.

FIG. 5 shows a mechanism for independently rotating the arms 7a and 7b. The bases of the arms 7a and 7b are ring-shaped, and the ring-shaped bosses 10a and 10b are rotatably supported on the transfer chamber 1 so as to be coaxial with the center of rotation.

On the other hand, disc-shaped bosses 11a and 11b are arranged inside the two ring-shaped bosses 10a and 10b so as to face each other and are concentric with each other. Is the magnetic coupling 12a,
Magnetically coupled at 12b.

The rotating shafts 13a, 13b of the disc-shaped bosses 11a, 11b are arranged concentrically.
The respective rotating shafts 13a, 13b are connected to output portions of motor units 14a, 14b which are concentrically supported by the frame 1a of the transfer chamber 1 and are displaced in the axial direction.

The motor units 14a and 14b are integrally connected to a motor 15 using, for example, an AC servomotor and a reducer 16 having a large reduction ratio using a harmonic drive (trade name). Each reduction gear 1
The output units 6 and 16 are connected to the base ends of the rotating shafts 13a and 13b. Since the inside of the transfer chamber 1 in which the arms 7a and 7b are located is maintained in a vacuum state, the ring-shaped bosses 10a and 10b of this arm rotating mechanism are provided.
Between the disk-shaped bosses 11a and 11b.
Is provided.

FIGS. 6A and 6B show the operation of the conventional handling robot A described above.
As shown in (a), when both arms 7a, 7b are diametrically symmetrical with respect to the center of rotation, both transport tables 8
The links 9a and 9b are rotated so that the links 9a and 9b are most widened relative to the links a and 8b, and accordingly, both the carriages 8a and 8b are moved toward the center of rotation.

In this state, by rotating both arms 7a and 7b in the same direction, both carriers 8a and 8b are rotated with respect to the center of rotation while maintaining their positions in the radial direction. Further, from the state shown in FIG. 6A, both arms 7a and 7b are
By rotating them in directions approaching each other (opposite directions), as shown in FIG.
The transfer table 8a, which is located on the side where the angle formed by b becomes smaller, is pushed by the links 9a and 9b and protrudes outward in the radial direction, so that the process chamber is provided adjacent to the transfer chamber 1 outward in the radial direction. Station 2a,
2b, 2c, 2d, 2e, and 3 enter the process chamber of one station.

At this time, the other carrier is moved toward the center of rotation, but the amount of movement is small due to the angle between the arms 7a, 7b and the links 9a, 9b.

On the other hand, the latter conventional handling robot A 'of the same direction operation type is shown in FIGS. 12 and 13.

The handling robot A 'provided in the transfer chamber has a cylindrical case 22. At the upper end of the case 22, a rotary table 23 is rotatable via a flange 24 and vertically movable. It is provided in. A driven shaft 25 projects from a lower end surface of the turntable 23. And this first driven shaft 2
5 is connected to a first drive source 26 provided in the case 22. When the first drive source 26 operates to rotate the first driven shaft 25, the turntable 23 is rotated. It is designed to be rotated. A drive source for vertically driving the rotary table 23 is not shown.

An intermediate portion of each of the pair of first links 28a and 28b is pivotally mounted on the upper surface of the rotary table 23. One end of a second driven shaft 29 extending into the case 22 is fixed to a pivot portion of one link 28a of the pair of first links 28a, 28b. Is connected to a second drive source 30 provided in the case 22 at the tip of the first link 28.
a of the second drive source 3
At 0, it is rotated via the second driven shaft 29.

One end of each of the pair of first links 28a and 28b is rotatably connected to a pair of second links 32a and 32b via second support shafts 31a and 31b. Then, the pair of second links 32a, 32
A fork-shaped first transfer table 8a 'is connected to the tip of 2b.

A pair of third links 35a and 35b are rotatably connected to the other ends of the first links 28a and 28b via third support shafts 34a and 34b. And this pair of third links 35a, 3
A fork-shaped second transfer table 8b 'is connected to the tip of 5b.

The second support shafts 31a and 31b are rotatable with respect to the first links 28a and 28b, but are integral with the second links 32a and 32b. The third support shafts 34a and 34b are also rotatable with respect to the first links 28a and 28b.
The third links 35a and 35b are integral with each other.

The two transfer tables 8a 'and 8b' are vertically displaced from each other, and the first transfer table 8a 'is moved in the retreating direction from the state shown in FIG. ′
Do not interfere with each other when moved in the forward direction. At this time, both transfer tables 8a ', 8b'
Intersect with each other in an up-down direction.

Each of the second support shafts 31a and 31b protrudes below the first links 28a and 28b.
A pair of second gears 36a and 36b having the same number of teeth meshing with each other are fixed to the respective projecting portions. Also, the third support shafts 34a and 34b are also connected to the first links 28a and 28, respectively.
13b, a pair of third gears 37 having the same number of teeth meshing with each other as shown in FIG.
a and 37b are fixed. This pair of gears 36a,
36b, 37a and 37b are synchronization mechanisms 38a and 3 respectively.
8b.

By the two synchronous mechanisms 38a and 38b, one of the pair of first links 28a and 28b is connected to the second drive source 3 via the second driven shaft 29.
0, the rotation is performed in the normal rotation direction or the reverse rotation direction, whereby the rotation is performed by the first and second synchronization mechanisms 38a and 38.
b other links 2 of the first links 28a, 28b
8b and the second and third links 32a, 32b, 35a,
As shown in FIGS. 13 (a) and 13 (b), the pair of transport tables 8a 'and 8b' move up and down in the same direction.

[0024]

In the above-mentioned conventional handling robots A and A ', since there are two transfer tables, these two transfer tables are alternately provided for each station, or Although it can be used continuously and expected to have the effect of a dual-arm robot, there are actually the following problems.

That is, when the order of processes is determined and wafers processed in each process chamber station are sequentially sent to each station, there are wafers being processed or processed in each station. At this time, when a processed wafer in a certain station is replaced with an unprocessed wafer, the former handling robot A of the related art first uses one of the transfer tables as shown in FIGS. supporting the wafer W ₁ unprocessed is opposed to the station 2e to be exchanged carrier table 8b your free turning the handling robot a from the 8a (FIG. 7).

[0026] Then, you receive the wafer W ₂ processed the transfer table 8b of the person who has the vacant top of this by rush into the station 2e (Fig. 8), is conveyed to the transfer chamber 1. Then, the handling robot A turning 180 degrees (FIG. 9), rush movement (figure transfer table 8a supporting the wafer W ₁ unprocessed from to face the said station 2e to which the station 2e in 10) and to carry the wafer W ₁ unprocessed to this station 2e within carrier table 8a the emptied is moved backwardly to the transfer chamber 1 (Fig. 11).

As described above, the conventional handling robot has to rotate 180 degrees every time a wafer is exchanged for one station, which causes a problem that the cycle time of the wafer exchange becomes long. Was.

On the other hand, in the latter handling robot A 'of the prior art, both the carriages 8a' and 8b 'move in and out in the same direction, so that the handling robot A'.
Can be carried out to one process chamber and another work can be carried in with the operation stopped, the cycle time for carrying in and out the work to and from the process chamber can be shortened, and the two transfer tables 8 a ', 8
b 'can be operated by one drive source and can be operated by a small number of drive sources, which has an advantage over the former of the above-mentioned prior art. Also have the following problems.

That is, in the handling robot A ', a state in which the two transfer tables are vertically overlapped at the same position appears every time the transfer operation is performed, and the handling robot A' is placed on the upper surface of the work held by the lower transfer table. Dust or the like adhering to the upper carrier may fall and contaminate the surface of the lower workpiece.

Also, since the two carriages are vertically displaced,
If these two carriages come and go alternately without raising and lowering without a vertical movement mechanism, the opening width in the vertical direction of the gate will be widened by the amount of vertical displacement between the two carriages, and the airtightness of this gate part will be maintained. Was not preferred. For this reason, the above-mentioned conventional one-way operation type handling robot A 'has a vertical movement mechanism, and there is a problem in that the structure is complicated accordingly. Further, when transferring a work to the work support table in the process chamber, at least one of the transfer tables must be moved up and down by an amount corresponding to the vertical displacement thereof, which requires a corresponding process. This has been one obstacle to shortening the cycle.

The present invention has been made in view of the above, and by simply rotating the handling robot through a small angle of about 45 ° with respect to one process chamber station, the processed wafer in the station can be obtained. The unprocessed wafer in the transfer chamber can be replaced, and the dust scattered on one carrier is not dropped on both carriers, and
No vertical movement mechanism is required, and the width of the gate in the vertical direction can be reduced to one carrier table without moving the entire robot up and down, which simplifies the mechanism and reduces the airtightness of the gate. It is an object of the present invention to provide a handling robot which can make the former technology similar to the above-mentioned conventional technology and can shorten a carry-in / out cycle.

[0032]

In order to achieve the above object, the handling robot according to the first aspect of the present invention has a transfer table at a tip end thereof, and performs the transfer by extending and retracting the transfer table. The first and second robot link mechanisms are provided so that the table can be moved up and down in the radial direction and can be integrally rotated. When one of the robot link mechanisms protrudes, the other robot link mechanism is immersed. By the above-mentioned projecting operation, the transfer table is rushed into the process chamber station from the transfer chamber, and the workpiece placed on the transfer table is transferred into the process chamber.
Alternatively, an object to be processed in the process chamber station is received. Further, by the immersion operation, the transfer table is immersed from the process chamber station to the transfer chamber side. Both robot link mechanisms are immersed and rotated in the transfer chamber. When loading and unloading wafers to and from a single station, both robot link mechanisms need to rotate both robot link mechanisms by the amount of shift in the rotation direction of both transfer tables. The number is small due to the narrow angle and range where the tables do not overlap.

According to a second aspect of the present invention, there is provided a handling robot according to the first aspect, wherein the plurality of bosses are provided such that the first and second robot link mechanisms are independently rotated. A drive source connected to each of the bosses, and one or two arms provided on each of the bosses.
The robot includes a pair of arms, a pair of links connected near the ends of the pair of arms, and a carriage connected near the ends of the pair of links, and forms one robot link mechanism. When the boss rotates in the facing direction, the one robot link mechanism performs a projecting operation or a retracting operation, and when one robot link mechanism performs a projecting operation, the other robot link mechanism performs a retracting operation. Then, both robot link mechanisms are immersed and rotate integrally, so that they are rotated in the transfer chamber.

According to a third aspect of the present invention, there is provided the handling robot according to the second aspect, wherein the first, second, and third bosses and the first boss provided on the first boss are provided. An arm, a second arm provided on the second boss, a third arm provided on the second boss, a fourth arm provided on the third boss, and a link near a tip of the first and second arms. And a second transfer table provided near the distal ends of the third and fourth arms via a link. The first carrier is protrudingly moved from the center of rotation by being driven to rotate the first and second arms in a direction approaching the side of the first carrier that is connected to each other via a link. Works as follows. On the other hand, at this time, the third and fourth arms are rotated in a direction away from the second transfer table connected thereto via a link, and the second robot link mechanism keeps the transfer table immersed. It is. In this state, the third and fourth arms are rotated in a direction approaching the second transfer table connected to each other via a link, thereby causing the second robot link mechanism to rotate the third arm. 2
Is operated so as to protrude, and conversely, the conveyance table of the first robot link mechanism is immersed. When both bosses rotate in the same state while both robot link mechanisms are immersed, both robot link mechanisms rotate in the transfer chamber.

According to a fourth aspect of the present invention, the first arm is provided on a side surface of the first boss, and the second and third arms are provided on a side surface of the second boss. ,
The fourth arm is provided on a side surface of the third boss.

According to a fifth aspect of the present invention, there is provided a handling robot according to the second aspect, wherein the first and second bosses and the first and second bosses provided on the first boss are provided. An arm, a third and a fourth arm provided on the second boss, and a first transfer table provided near a tip of the first and fourth arms via a link,
A second transfer table is provided near the distal ends of the second and third arms via a link. The first and second arms are provided on a side surface of the first boss, and the third and fourth arms are provided on the second boss, and one of the first and second arms is provided on the second boss. The other side is provided on the top surface of the boss, and the first and second arms are provided on the side surface of the first boss, and the second arm is provided on the side surface of the first boss. Third and fourth arms are provided on side surfaces of the second boss. In this configuration, the first robot link mechanism rotates the first and fourth arms in a direction approaching the side of the first carriage that is connected to each other via a link, so that the first carriage has It is operated to protrude. On the other hand, at this time, the second and third arms are connected to the second arm via a link.
Is rotated in a direction away from the transfer table, and the transfer table of the second robot link mechanism is kept in the immersion state. In this state, the second robot link mechanism rotates the second and third arms in a direction approaching the second transfer table connected thereto, so that the transfer table of the second robot link mechanism can be moved. And the conveyer of the first robot link mechanism is immersed.

And, as shown in claim 8, claim 1
The handling robot according to any one of claims 1 to 7,
The robot link mechanisms are arranged so that their positions are shifted in the rotation direction so that the two transfer tables do not overlap in the vertical direction. With this configuration, even if dust scatters from one of the transfer tables of both robot link mechanisms, the wafer on the other transfer table is not contaminated by the dust.

As described above, the positions of the transfer tables are shifted in the rotation direction so as not to overlap in the vertical direction. Both carriages are arranged at the same position in the vertical direction. As a result, the space in which the two carriers are arranged in the vertical direction is reduced.

The handling robot according to the tenth aspect is the handling robot according to the first aspect,
The first and second robot link mechanisms include a turntable, a first drive source connected to the turntable, and first and second drive link mechanisms rotatably supported by the turntable. A second drive source connected to one of the first and second drive link mechanisms, and a synchronous rotation near the tip of the first and second drive link mechanisms in accordance with the rotation of each drive link mechanism. The first and second driven link mechanisms are connected at one end as described above, and the first and second transfer tables are respectively connected to the first and second driven link mechanisms. The first and second robot link mechanisms rotate the respective drive link mechanisms with the drive shafts, so that the carriages alternately move in and out via the respective drive link mechanisms and driven link mechanisms. By rotating the turntable with another drive source, both robot link mechanisms are integrally rotated.

According to a eleventh aspect of the present invention, there is provided the handling robot according to the tenth aspect, wherein each of the drive link mechanism and the driven link mechanism of the first and second robot link mechanisms comprises a parallel link mechanism. In the movement of the first and second robot link mechanisms, the carriage is moved linearly in and out of the rotation axis of each drive link mechanism in the radial direction.

According to a twelfth aspect of the present invention, in the handling robot according to the tenth aspect, the drive link mechanism and the driven link mechanism of the first and second robot link mechanisms are replaced with a belt mechanism. The rotation of each drive link mechanism is transmitted to the driven link mechanism and the carriage via a belt.

The handling robot according to a thirteenth aspect of the present invention is the handling robot according to the tenth aspect, wherein each of the transfer tables of the first and second robot link mechanisms is rotated in such a manner that they do not overlap in the vertical direction. Are arranged so that the wafers on the lower transfer table will not be contaminated even if dust drops from the transfer table positioned on the upper side in the vertical direction.

According to a fourteenth aspect of the present invention, in the handling robot, the two transfer tables connected to the first and second robot link mechanisms are in the same vertical direction. As a result, the transport tables that are moved in and out by the first and second robot link mechanisms are performed at the same position in the height direction. For this reason, the size of the gate of the transfer chamber in the vertical direction can be reduced to one without using a vertical movement mechanism.
It is enough to have two carriages.

[0044]

According to the handling robot of the present invention, each of the transfer tables of the first and second robot link mechanisms alternately protrudes and retracts in a slightly rotated direction. To exchange a processed wafer in the process chamber station with an unprocessed wafer in the transfer chamber by simply rotating the handling robot for a single station through a small angle of rotation. Therefore, the cycle time for exchanging the work such as the two wafers can be greatly reduced. In addition, since the respective carriages of the two robot link mechanisms are displaced in the rotation direction of the rotation support member over a range that does not overlap in the rotation direction of the rotation support member, the two carriages overlap in the vertical direction. This eliminates the influence of dust scattered on one carrier side falling on the other carrier side, and protects a work such as a wafer carried on both carrier sides from the dust.

Further, since the two carriages are displaced in the rotation direction, the height positions of the two carriages can be made the same, thereby enabling the two carriages to have the same height without a vertical movement mechanism. The vertical width of the gate of the transfer chamber, in which both transfer tables appear, can be made equal to one transfer table, so that the airtightness of the gate portion can be improved and the configuration of the entire handling robot can be simplified. .

[0046]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention are shown in FIGS. 14 to 17 as a first embodiment, FIGS. 18 to 23 as a second embodiment, and FIGS. 24 to 27 as a third embodiment. The embodiment will be described in a fourth embodiment with reference to FIGS. 33 to 35, and further in the fifth and sixth embodiments with reference to FIGS. In this description, the same components as those of the conventional configuration shown in FIG.

(First Embodiment) In FIGS. 14 to 17, three first, second, and third ring-shaped bosses 40a, 40b, and 40c are concentrically formed at the center of the transfer chamber 1, respectively. They are superimposed one after another from the bottom and are rotatably supported individually via bearings (not shown).

The ring-shaped bosses 40a, 40
A disc-shaped boss 4 is provided on the inside where b and 40c face each other.
The transfer chambers 1a, 41b, and 41c are individually rotatably supported on the frame 1a side of the transfer chamber 1 via bearings (not shown).

Each of the ring-shaped bosses 40a opposed to each other
To 40c and the disc-shaped bosses 41a to 41c are magnetically coupled by magnet couplings 42a, 42b, 42c. In order to maintain a vacuum state in the transfer chamber 1, a sealing partition 17 is provided between the ring-shaped boss and the disc-shaped boss.

Each of the disk-shaped bosses 41a to 41c is provided with a rotating shaft 43 concentrically arranged on these shaft centers.
a, 43b, 43c. The first and second rotating shafts 43a and 43b are hollow among these rotating shafts, and the second rotating shaft 43b is fitted into the first rotating shaft 43a, and the second rotating shaft 43b The third rotating shaft 43
c is inserted.

Then, the first and third rotating shafts 43a, 43c
Is connected to the output shaft 45a of the first motor unit 44a via a connection mechanism such as a timing belt. The second rotating shaft 43b is connected to the output shaft 45b of the second motor unit 44b via a connecting mechanism such as a timing belt.

As the motor units 44a and 44b, a combination of a servomotor and a speed reducer such as a harmonic drive is used, and the respective output shafts 45a and 45b are used.
Is decelerated with an extremely large reduction ratio, and forward rotation and reverse rotation are accurately controlled. Each output shaft 45a, 45b and each rotation shaft 43a, 43b, 43
and the connection rotation ratio of the connection mechanism for connecting the connection mechanism c and the connection mechanism c is the same.

The first ring-shaped boss 40a has a first arm 46a, the second ring-shaped boss 40b has second and third arms 46b and 46c, and the third ring-shaped boss 40c. , Each of which has a fourth arm 46d protruding in the radial direction, and the upper surface of the tip of each arm serves as a rotation fulcrum.

The radius of the rotation fulcrum of each of the arms 46a to 46d (the length from the center of the boss to the rotation fulcrum,
(The same applies hereinafter.) R has the same dimensions. The rotation fulcrum of the first and second arms 46a and 46b is located at the same position in the axial direction of the center of rotation of the ring-shaped boss, and the rotation fulcrum of the third and fourth arms 46c and 46d is ring-shaped. At the same position in the axial direction of the center of rotation of the boss, and
It is lower than that of the second arms 46a, 46b.

The rotation supports of the arms 46a to 46d have the same length and are longer than the length R of the arms.
Second, third and fourth links 47a, 47b, 47c, 4
One end of 7d is rotatably connected. A first transfer table 8a is connected to the lower surfaces of the distal ends of the first and second links 47a and 47b via a transfer table attitude regulating mechanism, thereby forming a _first robot link mechanism B1. I have. Also, the third and fourth links 47c, 47d
The second transfer table 8b is connected to the upper surface of the front end of the second transfer table via a transfer table attitude regulating mechanism, thereby forming a _second robot link mechanism B2.

At this time, the first robot link mechanism B ₁
The transfer table 8a of, for example, the first and second arms 46
In a state in which a and 46b are linearly arranged in the diameter direction, they are immersed in the ring-shaped boss side, which is a so-called standby state. Similarly, the second robot link mechanism B
_{The second} transfer table 8b includes third and fourth arms 46c and 46d.
Are in a standby state when they are linearly aligned in the diameter direction. The two transfer tables 8a and 8b of the robot link mechanisms B ₁ and B _{2 in} the standby state are displaced in the rotation direction of the ring-shaped boss, and this state (FIG. 16) becomes the standby state of the handling robot. From the standby state of the handling robot, the rotation of each ring-shaped boss causes each carrier 8a, 8b to move in and out in the radial direction of the ring-shaped boss, and the handling robot is rotated in this standby state. . Then, at this time, when one of the carriages is made to protrude, the other carriage is immersed further inward from the standby state.

The amount of displacement of the transfer tables 8a, 8b in the rotation direction of the robot link mechanisms B ₁ , B ₂ should be such that at least the transfer tables 8a, 8b do not overlap in the axial direction of the boss rotation center. Preferably, when a wafer is placed on each of the transfer tables 8a and 8b, the amount of shift is set such that the two wafers can be shifted over a range where they do not interfere with each other.

At this time, both robot link mechanisms B ₁ , B
_{Since the second} carriages 8a and 8b do not overlap in the axial direction of the center of rotation of the boss, they are located at the same position in the direction of the center of rotation (vertical direction) of the ring-shaped boss as shown in FIG. The distal ends of the first and second arms 46a and 46b are curved outward so that the distal ends of the third and fourth arms 46c and 46d do not interfere with each other.

In the first embodiment, each of the ring-shaped bosses 40a to 40c is rotated to move the first and second transfer tables 8a and 8b from the standby state shown in FIG. 16 as described above. Is protruded and the other is immersed. At this time, the third and fourth arms 46c, 46
The leading end of d passes through the inside of the first and second arms 46a and 46b and does not interfere with each other.

In the standby state shown in FIG.
By rotating Oa to 40c in the same direction, the handling robot is rotated in the transfer chamber 1.

[0061] Figure 32 from Figure 28 shows the working steps in the first embodiment, in a state of mounting the wafer W ₁ unprocessed conveying platform of one of the robotic link mechanism B _1,
If you do not place the wafer, i.e., the vacant transport of robots linkage B ₂ has to rotate in a standby state so as to face the process chamber station 2e there is processed wafer W ₂ (Figure 28).

[0062] Then vacant towards the transport of robots linkage B ₂ the process chamber station 2e
By plunge within, it is placed on the unloading the wafer W ₂ of the treated (Figure 29). Then, the process chamber station 2 the transport of robots linkage B ₁ that mounts the wafer W ₁ unprocessed, to do this process
e (see FIG. 30). At this time, the rotation angle is only a deviation in the rotation direction between the two transfer tables, and is, for example, about 45 °.

[0063] projects into the conveying platform of the robot link mechanism B ₁ that mounts the wafer W ₁ unprocessed in this state into the process chamber station stations within 2e sets the wafer W ₁ into the process chamber station ( (Figure 31). Then, the empty carrier is immersed in the transfer chamber, and the processed wafer W on the other carrier is
₂ rotates toward the process chamber station 2a for performing the next process, and repeats the same operation as described above (FIG. 3).
2).

At the time of these operations, both transport tables 8a,
8b do not overlap each other in the vertical direction, so that even if dust drops from one of the transport tables, the upper surface of the other transport table is not contaminated by the dust. In addition, since both carrier tables 8a and 8b are located at the same position in the rotation center direction (vertical direction) of the ring-shaped boss, each carrier table can be moved to and from one gate without moving the handling robot up and down. Can move. The vertical size of the gate 6 of each process chamber station from which both of the transfer tables 8a and 8b protrude may be as small as one transfer table can pass, and can be minimized.
These are the same in the following embodiments.

(Second Embodiment) FIGS. 18 to 21 show a second embodiment.
The first and second arms 56a and 56b are provided on the side surface of the first ring-shaped boss 50a, and the third arm 56c is provided on the side surface of the second ring-shaped boss 50b. Fourth arms 56d project radially from the axis of the top surface of the second ring-shaped boss 50b via pillars 56e, and the upper surface of the tip of each arm serves as a rotation fulcrum. ing.

The radius R of the rotation fulcrum of each of the arms 56a to 56d is the same. The rotation fulcrums of the first and fourth arms 56a and 56d are located at the same position in the vertical direction.
The rotation fulcrums of 6b and 56c are located at the same position in the vertical direction, and are lower than those of the first and fourth arms 56a and 56b.

The first, second, third, and fourth links 57a, 57b, and 57 of the same length and longer than the length R of the arms are provided at the rotation fulcrum of each of the arms 56a to 56d.
One ends of c and 57d are rotatably connected. A first transfer table 8a is connected to the lower surfaces of the distal ends of the first and fourth links 57a and 57d via a transfer table posture regulating mechanism, thereby forming a _first robot link mechanism B ₁ ′. Have been. Also, the second and third links 57
The second transfer table 8b is connected to the upper surfaces of the distal ends of the b and 57c via a transfer table attitude regulating mechanism, thereby forming a _second robot link mechanism B ₂ ′.

At this time, the transfer table 8a of the first robot link mechanism B ₁ ′ moves toward the ring-shaped boss in a state where the first and fourth arms 56a and 56d are linear in the diameter direction, for example. It is immersed in what is called a standby state. Similarly, the transfer table 8b of the second robot link mechanism B ₂ ′ is connected to the second and third arms 56b, 56b.
When c becomes straight in the diameter direction, it is in a standby state. Then, the two transfer tables 8 in the standby state
The positions a and 8b are displaced in the direction of rotation of the ring-shaped bosses, and this state (FIG. 20) becomes a standby state of the handling robot. From this state, the rotation of each ring-shaped boss causes a difference from the first embodiment. Similarly, each of the transfer tables 8a and 8b is moved in and out in the radial direction of the ring-shaped boss, and the handling robot is rotated in this standby state. The amount of displacement of the two carriages 8a and 8b in the rotation direction is the same as in the first embodiment.

At this time, since the transport tables 8a and 8b do not overlap in the rotational direction, they are at the same position in the vertical direction as shown in FIG. Further, the tip of the first arm 56a is curved outward so that the tip of the third arm 56c does not interfere. The operation of the second embodiment is substantially the same as that of the first embodiment.

FIGS. 22 and 23 show a modification of the second embodiment, in which a pillar 56e 'connecting the base end of a fourth arm 56d' is a top surface of a second ring-shaped boss 50b. Is located at a position deviated to one side from the axis thereof, between the two transport tables 8a and 8b, and on a line M passing through the center of rotation of the ring-shaped boss 50b. Each link 57a ', 57b', 57c ', 57d' connected to each arm 56a ', 56b', 56c ', 56d'.
When the carriages 8a and 8b move in and out, the pedestal 56
It is non-linear so as not to interfere with e '. In this embodiment, the amount of movement of the carriages 8a and 8b can be made larger than that of the structure shown in FIGS.

(Third Embodiment) FIGS. 24 to 27 show a third embodiment.
The first and second arms 66a and 66b are provided on the side surface of the first ring-shaped boss 60a, and the third and fourth arms are provided on the side surface of the second ring-shaped boss 60b. 66
c and 66d project in the radial direction, respectively, and the lower surfaces of the distal ends of the first and third arms 66a and 66c, and the upper surfaces of the distal ends of the second and fourth arms 66b and 66d respectively serve as rotation fulcrums. Has become.

The radius R of the rotation fulcrum of each of the arms 66a to 66d is the same. The rotation fulcrum of the first and third arms 66a and 66c is provided on the lower surface of each arm, and the rotation fulcrum of the second and fourth arms 66b and 66d is provided on the upper surface of each arm. , The rotation fulcrum of the fourth arm 66a, 66d is substantially at the same position in the vertical direction.
The rotation fulcrums of 6b and 66c are located at substantially the same position in the vertical direction, and are lower than those of the first and fourth arms 66a and 66d.

The first, second, third, and fourth links 67a, 67b, 67 of the same length and longer than the length R of each arm are provided at the rotation fulcrum of each of the arms 66a-66d.
One ends of c and 67d are rotatably connected. The first transfer table 8a is connected to the lower surfaces of the distal ends of the first and fourth links 67a and 67d via a transfer table attitude regulating mechanism, whereby the first robot link mechanism B ₁ ″ is connected.
Is configured. Also, the second and third links 67b, 6
A second transfer table 8b is connected to the upper surface of the distal end of 7c via a transfer table attitude regulating mechanism, thereby forming a robot link mechanism B ₂ ″.

At this time, the transfer table 8a of the first robot link mechanism B ₁ ″ is connected to the first and fourth arms 66a,
66d is a so-called standby state in which it is most immersed in the ring-shaped boss side in a state where it is linear in the diameter direction. Similarly, the transfer table 8b of the second robot link mechanism B ₂ ″ is connected to the second and third arms 66b, 66b.
When c becomes straight in the diameter direction, it is in a standby state. Then, the two transfer tables 8 in the standby state
The positions a and 8b are displaced in the direction of rotation of the ring-shaped bosses, and this state (FIG. 26) becomes a standby state of the handling robot. Similarly, each of the transfer tables 8a and 8b is moved in and out in the radial direction of the ring-shaped boss, and the handling robot is rotated in this standby state. The amount of displacement in the rotation direction of the two transfer tables 8a and 8b is the same as in the first embodiment.

At this time, since the two transfer tables 8a and 8b do not overlap in the rotation direction, they are at the same position in the vertical direction as shown in FIG. The distal end of the first arm 67a is curved outward so that the distal end of the third arm 66c does not interfere. The operation of the third embodiment is substantially the same as that of the first embodiment.

(Fourth Embodiment) FIGS. 33 to 35 show a fourth embodiment.
FIG. In the fourth embodiment as well, as in the first to third embodiments, both transfer tables 8a ', 8
The position b 'is displaced in the rotation direction of the robot and the same position in the direction of the rotation axis.

FIGS. 33 and 34 schematically show the structure and operation of the fourth embodiment, and FIG. 35 shows a specific structure thereof. In the drawing, reference numeral 70 denotes a turntable rotatably supported by the frame 1a of the transfer chamber 1. A drive shaft 71 is mounted on the turntable 70 at the center of rotation of the turntable 70.
It is rotatably supported with respect to. The turntable 70 is driven in the forward and reverse directions by a first motor unit 72a fixed to the frame 1a side of the transfer chamber 1, and the drive shaft 71 is connected to the turntable 70 side. Motor unit 72b fixed to the second motor unit 72b
Are driven in forward and reverse directions.

Reference numerals 73 and 74 denote first and second robot link mechanisms C disposed on both sides with respect to the axis of the drive shaft 71.
₁ and C ₂ , each of which has a parallel link structure, and the first and second drive link mechanisms 73 and 7.
4 are drive links 73a, 74 respectively arranged in parallel.
a, driven links 73b and 74b, and both links 73
a, 73b, 74a, and 74b.

The base ends of the drive links 73a, 74a of the drive link mechanisms 73, 74 are fixedly connected to the drive shaft 71. The base ends of the driven links 73b and 74b are pivotally supported by the turntable 70 so as to be located at a position separated from the rotation center of the turntable 70 by a separation angle α. Each drive link mechanism 73, 7
4, the support shafts 75a at both ends of the connecting links 73c, 74c,
75b, 76a, 76b have gears 77a, 7 having the same number of teeth and meshing with each other on both links.
7b, 77c and 77d are provided integrally with the respective support shafts. Of these support shafts, the drive links 73a, 74a
The support shafts 75a, 76a located at the tips of the drive links 73a, 74a are integrally connected to the drive links 73a, 74a, and the other components are rotatable with respect to the links.

Reference numerals 78 and 79 denote the drive link mechanisms 73 and 73 of the first and second robot link mechanisms C ₁ and C ₂ , respectively.
74, and each drive link mechanism 73,
74 are first and second driven link mechanisms having the same size as the parallel link 74.
9 are drive links 78a, 79 arranged in parallel, respectively.
a, and the driven links 78b, 79b, of which the base ends of the drive links 78a, 79a are the driven links 73b, 73b of the first and second drive link mechanisms 73, 74, respectively. 74b-side support shafts 75b, 76b
The base ends of the driven links 78b, 79b are rotatably connected to the support shafts 75a, 76a. The links 80a, 80b on the leading end side of the links of the driven link mechanisms 78, 79 are integrated with the links 80a, 80b.
a 'and 8b' are connected. Double driven link mechanism 7
From the shapes of the links 8, 79 and the shapes of the two transfer tables 8a ', 8b', the two transfer tables 8a ', 8b' are at the same position in the vertical direction as shown in FIG. The transfer table 8a ',
The base ends of 8b 'do not interfere with each other.

At this time, the two transfer tables 8a ', 8b' are connected to the links 80a,
The transfer tables 8 a ′ and 8 b ′ are displaced in the rotational direction by the above-mentioned separation angle α with respect to the rotation center of the turntable 70. In FIG. 35, reference numeral 81 denotes a magnetic fluid seal.

The operation of the fourth embodiment will be described below. In the standby state shown in FIG.
When the drive shaft 71 is rotated clockwise or reversely, for example, clockwise, the first and second robot link mechanisms C ₁ and C _{2 are} rotated.
The respective drive links 73a, 74a of the respective drive link mechanisms 73, 74 are integrally rotated rightward.

As a result, as shown in FIG.
The second driven link mechanisms 78, 79 are gears 77a, 77
b, 77c, by the operation of the 77d, rotates in the left direction, the first carrier table 8a of the robotic link mechanism C ₁ 'is projected operation, the second carrier table 8b robotic link mechanism C _2' immersive operation I do. At this time, the transport tables 8a ', 8
b 'is the first and second drive link mechanisms 73 and 7 respectively.
4, the separation angle α between the driven links 73b and 74b.
Are moved in and out of the respective angles α ₁ and α ₂ .

[0084] The drive shaft 71 backward, that is, rotated to the left, the operation is reversed, the first carrier table 8a of the robotic link mechanism C ₁ 'is moved backwardly along the angle alpha _1, second conveying table 8b of the robotic link mechanism C ₂ 'are projecting moving along an angular alpha _2.

By driving the first motor unit 72a in the standby posture shown in FIG. 34, the turntable 70 is rotated, and the first and second robot link mechanisms C ₁ and C ₂ are integrated. Rotated.

(Fifth Embodiment) The fifth embodiment is different from the fourth embodiment in that the drive link mechanisms 73, 1 of the first and second robot link mechanisms C ₁ , C ₂ having the same structure as those of the fourth embodiment, respectively. 7
4, the driving links 73a and 74a are driven coaxially by driving shafts separately provided on the turntable 70, so that the link operation on the projecting side is large and the link operation on the immersion side is small. It was done.

The fifth embodiment is shown in FIGS. 36 to 44, and has a structure prior to the drive link mechanisms 73 and 74 of the first and second robot link mechanisms C ₁ and C _2. Has the same configuration as that of the fourth embodiment, and the turntable 70 is also driven to rotate by the first motor unit 72a similarly to the fourth embodiment.

At the rotation center of the turntable 70, first and second drive shafts 85 and 86 are supported concentrically and rotatably with respect to each other. The first on the tip of the drive shaft 85 and one end of the drive link 73a of the first robot link mechanism C ₁ of the drive link mechanism 73 is fixed, the second robotic link mechanism to the tip of the second drive shaft 86 C ₂ drive link mechanism 74
One end of the drive link 74a is fixed.

The base ends of the first and second drive shafts 85 and 86 are connected to one second motor unit 7 supported on the turntable 70.
2b via a _first bi-directional rotation link mechanism X1, and the second motor unit 72b is rotated in one direction, so that the drive link mechanism 73 of the _first robot link mechanism C1 and the second drive linkage 74 of the robot linkage C ₂ of is adapted to be rotated in the same direction, and at different rotation angles.

The bidirectional rotation link mechanism X ₁ is as shown in FIGS. 37 to 39, and includes a first driven link 87 a having one end connected to a first drive shaft 85 and a second drive shaft 8.
6, a second driven link 87b having one end connected thereto, a first drive link 88a and a second drive link 88b connected to respective ends of the links 87a, 87b, and the second drive links 88a, 88b. Have a linked link configuration. And both drive links 88a,
The distal end of the motor link 89 having one end fixed to the drive section of the second motor unit 72b supported by the turntable 70 is connected to the distal end of the link 88b. The motor link 89 is disposed inside the link mechanism.

FIGS. 38 and 39 schematically show the _first bidirectional rotation link mechanism X1. By driving the second motor unit 72b, the motor link 89 is moved rightward, for example, as viewed from above. When rotated in a direction by a predetermined angle theta, bidirectional rotary link mechanism X ₁ is 38, rotates in a state of distorted to the right as shown in Figure 39. If the rotation angle of the first driven link 87a located on the upstream side in the rotation direction at this time is θ ₁ , and the rotation angle of the second driven link 87b located on the downstream side is θ ₂ , then θ ₁ > θ ₂ . When the motor link 89 is rotated in the reverse direction (left direction), θ ₁ <θ ₂ .

When the above operations are performed from the stand-by state, as shown in FIG.
3, the rotation angle θ _{1 of} the first drive link mechanism 73 in the protruding direction becomes larger than the rotation angle θ _{2 of} the second drive link mechanism 74 in the immersion direction, so that the first transfer table 8a ′ is Second transfer table 8 when projecting to a predetermined position
The amount of movement of b 'in the immersion direction is relatively smaller than the protruding operation of the first transfer table 8b'.

[0093] FIG 37, in both rotary link mechanism X ₁ of the configuration shown in FIG. 38, the rotational angle it is on the downstream side of the rotation angle θ ₁ (θ ₂₎ of the upstream side in the rotational direction of the links of the motor link 89 The fact that it becomes larger than θ ₂ (θ ₁ ) will be described with reference to FIGS. Here, first, second driven links 87a, L ₁ the length of each of the 87b, the first and second drive links 88a, L ₂ the length of each of the 88b, the length of the motor link 89 L ₃ , the distance between the joint of the first and second drive links 88 a and 88 b and the axis O of the first and second drive shafts 85 and 86 is R;
, The rotation angle of the first driven link 87a is θ ₁ , the rotation angle of the second driven link 87b is θ ₂ ,
Assuming that the angle formed by the second driven links 87a and 87b is 2 °, θ ₁ and θ ₂ are expressed by the following equations (1) and (2), which are shown in a diagram as shown in FIG. Become.
In FIG. 40 and Table 1, the rightward rotation of the motor link 89 is defined as a minus direction.

[0094]

(Equation 1)

[0095]

[Table 1]

As is apparent from the above equations (1) and (2), the diagram of FIG. 40 and Table 1, the first and second driven links 87a and 87b are driven by the rotation of the motor link 89 to rotate. The respective operating angles of the first and second drive link mechanisms 73 and 74 rotate by θ _{1 in the} projecting operation,
In immersion operations rotated by theta _2, working angle of the immersion operation is small relative to the projecting operation. FIG. 40 shows L ₁ : L ₂ :
This is the case where L ₃ : L ₄ = 1: 1: 1.8: 0.8.

FIGS. 41 to 44 show a second embodiment of the present invention.
Of shows a bi-directional rotation Riku mechanism X _2, a motor link 89a which is pivoted to the second motor unit 72b, the same first and bidirectional rotary link mechanism X ₁ in the embodiment shown in FIG 37 It is configured to be connected to the outside of the link mechanism of the configuration.

In the case of the _second bidirectional rotating link mechanism X ₂ , when the motor link 89 rotates rightward by a predetermined angle θ in FIGS. 41 and 42, the bidirectional rotating link mechanism X ₂ Contrary to the case of 1, it turns to the state distorted to the left. Assuming that the rotation angle of the first driven link 87a located on the upstream side in the rotation direction of the motor link 89 at this time is θ ₁ , and the rotation angle of the second driven link 87b located on the downstream side is θ ₂ , θ ₁ > θ ₂ . Note that this second
The theta ₁ bidirectional rotary link mechanism X ₂ of the direction of rotation of the theta ₂ is the opposite direction to that of the first bi-directional rotation link mechanism X _1. Therefore, the connection between the drive shafts 85 and 86 of the _second bidirectional rotation link mechanism X2 and the first and second drive link mechanisms 73 and 74 shown in FIGS. 33 and 34 is performed in the first two directions. for rotary link mechanism X ₁ have become reverse, the motor link 89 drive shaft 85 fixed to the driven links 87a of the upstream side in the rotational direction to the right direction of the second second robotic link mechanism C ₂ the drive linkage 74, also driven link 87b on the downstream side is connected to the first of the first drive linkage 73 of the robot linkage C _1.

[0099] FIG 41, towards the rotation angle theta ₁ of the upstream side in the rotational direction of the links of the motor link 89 in both directions pivot link mechanism X ₂ a second configuration shown in FIG. 42 (theta ₂₎ of the downstream-side The fact that the rotation angle becomes larger than the rotation angle θ ₁ (θ ₂ ) of the link will be described with reference to FIGS. 43 and 44. Now specifications of the components is assumed to be the same as those of the first bi-directional rotation link mechanism X ₁ described above, theta _1, theta ₂ is the following equation (3), as shown in (4) FIG. 44 shows this diagrammatically. In FIG. 44 and Table 2, the rightward rotation of the motor link 89 is plus.

[0100]

(Equation 2)

[0101]

[Table 2]

As is apparent from the above equations (3) and (4), the diagram of FIG. 44 and Table 2, the rotation is caused by the first and second driven links 87a and 87b driven by the rotation of the motor link 89. First and second drive link mechanisms 73 and 74
Rotates in the projecting direction by θ _{1 and} rotates in the immersing direction by θ ₂ , and the operating angle of the immersing operation becomes smaller than that of the projecting operation. FIG. 45 shows L ₁ : L ₂ : L ₃ : L ₄ = 1: 1: 1.
1: 2.

[0103] The second bi-directional operation link mechanism X in ₂ the first fifth embodiments described above, the second robotic link mechanism C
_1, an example is shown in which the drive shaft 85 and 86 and coaxially of the respective drive link mechanisms 73 and 74 of C _2, which is 4
As shown in FIG. Figure 46 shows the first, second robotic link mechanism C ₁ ', C _2' third bidirectional rotary link mechanism X ₃ for driving when spaced the drive shaft 85 and 86, for both directions pivot link mechanism X ₁ of this arrangement is the first, except that the drive shaft is spaced have the same configuration, the description of this embodiment the first bidirectional rotary link mechanism It will be described analogous to those of X _1.

[0104] In FIG. 46, when the motor link 89 is rotated by a predetermined angle θ in the right direction in the figure, the bidirectional rotary link mechanism X ₃ is rotated in a state distorted to the right. If the rotation angle of the first driven link 87a located on the upstream side in the rotation direction at this time is θ ₁ , and the rotation angle of the second driven link 87b located on the downstream side is θ ₂ , then θ ₁ <θ ₂ . When the motor link 89 is rotated in the reverse direction (left direction), θ ₁ > θ ₂ .

The description that θ ₁ <θ _{2 at} this time will be described with reference to FIG. Motor link 89 is θ
First and second driven links 8 when rotated only to the right
The rotation angles θ ₁ and θ ₂ of 7a and 87b are as shown in the following formulas (5) and (6), and when L ₁ = L ₂ , as shown in formulas (7) and (8) Become. This is shown in a diagram in FIG. Note that FIG.
7 is L ₁ : L ₂ : L ₃ : L ₄ : S = 1: 1: 1.8:
0.8: 0.2. This is shown in Table 3 below.

[0106]

(Equation 3)

[0107]

[Table 3]

Also in the fifth embodiment, similarly to the above case, the drive link mechanism 73, the drive shaft of which is largely rotated by the rotation of the motor link 89 and the one of which the protruding operation is performed, is used.
74 is connected.

The fourth bidirectional rotary link mechanism X ₄ is obtained by separating the drive shaft of the _second bidirectional rotary link mechanism X _{2 from} the drive shaft. If only rotates, the bidirectional rotary link mechanism X _4, as shown in FIG. 48, rotates in a state distorted to the left. At this time, if the rotation angle of the first driven link 87b located on the upstream side in the rotation direction of the motor link 89 is θ ₁ , and the rotation angle of the second driven link 87b located on the downstream side is θ ₂ , θ ₁ > θ ₂ Becomes When the motor link 89 is rotated in the opposite direction (left direction), θ ₁ <θ ₂ holds.

The description that θ ₁ > θ _{2 at} this time will be described with reference to FIG. Motor link 89 is θ
And second driven links 87a, 8 when rotated only by
The rotation angles θ ₁ and θ ₂ of 7b are as shown in the following formulas (9) and (10), and when L ₁ = L ₂ , they are as shown in formulas (11) and (12). FIG. 49 shows this diagram. FIG. 49 shows L ₁ : L ₂ : L ₃ : L ₄ : D = 1: 1: 1: 2:
0.2. This is shown in Table 4 below. In the case of this embodiment, the first driven link 8
The first drive shaft connected to the first drive shaft 7a is connected to the drive portion of the _first robot link mechanism C1 'shown in FIG. 36, and the second drive shaft connected to the second driven link 87b is connected to the second robot. It is connected to the drive of the link mechanism C ₂ ′.

[0111]

(Equation 4)

[0112]

[Table 4]

The first, second, third, and fourth bidirectional rotation link mechanisms X ₁ , X ₂ , X ₃ , and X ₄ have been described as examples using parallel link mechanisms, but this is an ellipse. A gear mechanism may be used. A fifth bidirectional rotary link mechanism X ₅ of an embodiment thereof in Figure 50.

The output shaft 90 of the second motor unit 72b
A first elliptical gear 91 and a first regular circular gear 92 are fixed to each other, and mesh with the first elliptical gear 91 on one of the drive shafts 85 arranged coaxially of the first and second robot link mechanisms. A second elliptical gear 93 is fixed to the drive shaft 86, and a second circular gear 94 meshing with the first circular gear 92 is fixed to the other drive shaft 86. Each of the elliptical gears 91 and 93 is fixed to each of the shafts 85 and 90 at one focal position.

In this configuration, when the rotating shaft 90 of the second motor unit 72b rotates leftward by θ ₁ from the neutral state shown in FIG. 51, for example, as shown in FIG. 52, the second elliptical gear 93 becomes rotates by theta ₂ to the right. At this time, by the opposing arrangement posture of the two elliptical gears 91 and 93,
θ ₁ <θ ₂ . On the other hand, at this time, the rotation angle of the second perfect circular gear 94 is θ ₁ . Thereby, the first drive shaft 8
5 theta _2, the second drive shaft 86 is rotated in the respective right direction by theta _1, by a theta ₁ <theta _2, the rotation direction of the first drive shaft 85 is greater than the second drive shaft 86 I do.

On the other hand, when the rotating shaft 90 is rotated rightward by θ ₁ from the neutral state shown in FIG.
Oval gear 93 is rotated by theta ₂ 'to the left, the second circle gear 94 is rotated in the left direction by theta _1. At this time, θ ₁ > θ ₂ ′ due to the opposed arrangement posture of the two elliptical gears 91 and 93.
Becomes Therefore now the theta ₂ to the left of the rotation angle of the second drive shaft 86, theta rotation angle of the first drive shaft 85 to the left ₁
To make (θ ₂ > θ ₁ ), the rotating shaft 90 is rotated clockwise by θ ₂ which is larger than the above. This allows
The second ellipse gear 93 is rotated in the left direction by theta _1, while the second
Circle gear 94 is rotated in the left direction by theta _2. Therefore, by rotating the second motor unit 72b rightward by θ ₂ , the first drive shaft 85 rotates leftward by θ ₁ , and the second drive shaft 86 rotates leftward by θ _2, respectively. ₁ <
Due to θ ₂ , the second drive shaft 86 rotates more than the first drive shaft 85.

Accordingly, for example, when the first drive shaft 85 is connected to the first robot link mechanism C ₁ shown in FIG. 33 and the second drive shaft 86 is connected to the second robot link mechanism C ₂ , respectively. , the first robotic link mechanism C ₁ projecting operation, when the second robot link mechanism C ₂ retracts operate left rotates the second motor unit 72b only theta _1, only ₂ theta when operating in the reverse direction Rotate right.

In the case of the _fifth bidirectional rotating link mechanism X5, the configuration is such that the elliptical gear and the perfect circular gear are combined.
As shown in FIGS. 53 and 54, the two perfect circular gears 92, 9
4 may be replaced by elliptical gears 92 ', 94' meshing with each other. FIG. 55 shows the operation state. In this case, the rotation angle of the first drive shaft 85 when the motor unit 72b rotates a certain angle from the neutral state, and the motor unit 72
the second drive shaft 86 when b rotates the same angle in the opposite direction
Are equal, and the calculations for controlling the first and second robot link mechanisms C ₁ and C ₂ are the same except for the sign, which facilitates control.

(Sixth Embodiment) The first and second robot link mechanisms C ₁ , C ₂ , C in the fourth and fifth embodiments are described.
_Although the drive link mechanism and the driven link mechanism of ₁ ′ and C ₂ ′ have a parallel link structure, the two link mechanisms may have a belt link structure as shown in FIG. FIG. 56 shows one robot link mechanism D, in which a first arm 101 rotatably supported by a turntable (not shown), a second arm 102 rotatably connected to a distal end of the first arm 101, The transfer table 103 rotatably connected to the tip of the second arm 102 includes a first pulley 104 concentrically supported by the rotation base of the first arm 101 and a first pulley 104.
The connecting portion between the arm 101 and the second arm 102 is connected to the connecting portion of
The second pulley 106 supported by the arm 101, the third pulley 107 supported by the second arm 102, and the second pulley fixedly supported at the tip of the second arm 102 to the rotating shaft 108 of the transfer table 103. 4 pulley 109 and the first belt 11 wound around the first and second pulleys 104 and 106.
0, the second around the third and fourth pulleys 107 and 109
And a belt 111.

The rotation base of the first arm 101 is connected to a first motor unit 115 via a driven pulley 112, a drive 113, and a belt 114.
Shaft 116 is connected to the second motor unit 117. The diameter ratio between the first pulley 104 and the second pulley 106 is 2: 1, and the diameter ratio between the third pulley 107 and the fourth pulley 109 is 1: 2.

In the above configuration, when the first motor unit 115 is driven to rotate the first arm 101 to one side while the second motor unit 117 is stopped, the first pulley 104 The first pulley 104 is rotated by the first pulley 104 via the first belt 110 and the second pulley 106 is rotated by the same rotation angle.
The second arm 102 is rotated in a direction opposite to the rotation direction of the first arm 101 at twice the rotation angle of the first arm 101. At this time, the third pulley 107 located on the rotation base end side of the second arm 102 is connected to the first pulley 104
Similarly, the second arm 102 is relatively rotated in the opposite direction to the rotation direction of the second arm 102.
2 is rotated in a direction opposite to the rotation direction and at a rotation angle of １ ／.

The carrier 103 is moved by the first motor unit 115 in the forward and reverse directions.
The rotating operation of the rotating base 01 is performed radially.
Then, the first and second motor units 115, 117
Are rotated in the same direction at the same rotation angle, whereby the entire robot link mechanism D is rotated.

In this embodiment, only one robot link mechanism has been described. However, this robot link mechanism uses two sets as a pair as in the above-described embodiments, and cooperates with each other to project one of the transfer tables. Then, the other carrier is immersed.

In this embodiment, an example is shown in which two motor units 115 and 117 are used for the retracting operation and the rotation. However, the drive shaft of each first arm of a pair of robot link mechanisms in this embodiment is shown. to, may be used to connect the respective bidirectional rotary link mechanism X ₁ to X ₅ in the fourth embodiment. Thereby, the operation amount of the immersion operation can be reduced with respect to the protrusion operation amount of the transfer table.

[Brief description of the drawings]

FIG. 1 is a schematic plan view of a semiconductor manufacturing apparatus which is an example of a multi-chamber type manufacturing apparatus.

FIG. 2 is an exploded perspective view showing a relationship between a transfer chamber and a conventional handling robot.

FIG. 3 is a perspective view showing a conventional handling robot.

FIGS. 4A and 4B are explanatory views showing a transport table attitude regulating mechanism.

FIG. 5 is a sectional view showing a conventional arm rotation mechanism.

6 (a) and 6 (b) are explanatory views of the operation of a conventional handling robot.

FIG. 7 is an explanatory diagram of an operation for one station of a conventional handling robot.

FIG. 8 is a diagram illustrating the operation of a conventional handling robot with respect to one station.

FIG. 9 is an operation explanatory diagram of one station of the conventional handling robot.

FIG. 10 is an explanatory diagram of an operation for one station of a conventional handling robot.

FIG. 11 is a diagram illustrating the operation of a conventional handling robot with respect to one station.

FIG. 12 is a perspective view showing another conventional handling robot.

13 (a) and 13 (b) are explanatory views of the operation of another conventional handling robot.

FIG. 14 is a sectional view showing a boss according to the first embodiment of the present invention.

FIG. 15 is a front view showing the first embodiment of the present invention.

FIG. 16 is a plan view showing the first embodiment of the present invention.

FIG. 17 is a perspective view showing the first embodiment of the present invention.

FIG. 18 is a sectional view showing a boss according to a second embodiment of the present invention.

FIG. 19 is a front view showing a second embodiment of the present invention.

FIG. 20 is a plan view showing a second embodiment of the present invention.

FIG. 21 is a perspective view showing a second embodiment of the present invention.

FIG. 22 is a plan view showing a modification of the second embodiment of the present invention.

FIG. 23 is a perspective view showing a modification of the second embodiment of the present invention.

FIG. 24 is a sectional view showing a boss according to a third embodiment of the present invention.

FIG. 25 is a front view showing a third embodiment of the present invention.

FIG. 26 is a plan view showing a third embodiment of the present invention.

FIG. 27 is a perspective view showing a third embodiment of the present invention.

FIG. 28 is an operation explanatory diagram for one station in the first embodiment of the present invention.

FIG. 29 is an operation explanatory diagram for one station in the first embodiment of the present invention.

FIG. 30 is an explanatory diagram of an operation for one station in the first embodiment of the present invention.

FIG. 31 is an explanatory diagram of an operation for one station in the first embodiment of the present invention.

FIG. 32 is an explanatory diagram of an operation for one station in the first embodiment of the present invention.

FIG. 33 is a plan view showing an operation state of the fourth embodiment of the present invention.

FIG. 34 is a plan view showing a standby state according to the fourth embodiment of the present invention.

FIG. 35 is a sectional view showing a configuration of a fourth example of the present invention.

FIG. 36 is a sectional view showing a configuration of a fifth example of the present invention.

FIG. 37 is a perspective view showing a first bidirectional rotation link mechanism.

FIG. 38 is an operation explanatory view of the first bidirectional rotation link mechanism.

FIG. 39 is an explanatory diagram showing a relationship between a link length, a rotation angle, and the like of the first bidirectional rotation link mechanism.

FIG. 40 is a diagram showing a change in the rotation angles of the first and second drive shafts with respect to the rotation angle of the motor link of the first bidirectional rotation link mechanism.

FIG. 41 is a perspective view showing a second bidirectional rotation link mechanism.

FIG. 42 is an operation explanatory view of the second bidirectional rotating link mechanism.

FIG. 43 is an explanatory diagram showing a relationship between a link length, a rotation angle, and the like of a second bidirectional rotation link mechanism.

FIG. 44 is a diagram showing a change in the rotation angles of the first and second drive shafts with respect to the rotation angle of the motor link of the first bidirectional rotation link mechanism.

FIG. 45 is a plan view showing a standby state of a modification of the fifth embodiment of the present invention.

FIG. 46 is an explanatory diagram showing a relationship between a link length, a rotation angle, and the like of a third bidirectional rotation link mechanism.

FIG. 47 is a diagram showing a change in the rotation angles of the first and second drive shafts with respect to the rotation angle of the motor link of the third bidirectional rotation link mechanism.

FIG. 48 is an explanatory diagram showing a relationship between a link length, a rotation angle, and the like of a fourth bidirectional rotation link mechanism.

FIG. 49 is a diagram showing a change in the rotation angles of the first and second drive shafts with respect to the rotation angle of the motor link of the fourth bidirectional rotation link mechanism.

FIG. 50 is a perspective view showing a fifth bidirectional rotation link mechanism.

FIG. 51 is an explanatory diagram showing a standby state of the fifth bidirectional rotating link mechanism.

FIG. 52 is an explanatory diagram showing an operation state of a fifth bidirectional rotation link mechanism.

FIG. 53 is a sectional view showing another example of the fifth bidirectional rotation link mechanism.

FIG. 54 is an explanatory diagram showing a standby state of another example of the fifth bidirectional rotating link mechanism.

FIG. 55 is an explanatory diagram showing an operation state of a fifth bidirectional rotation link mechanism.

FIG. 56 is a sectional view showing a sixth embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Transfer chamber 2a, 2b, 2c, 2d, 2e ... Process chamber station 3 ... Work transfer station 5 ... Partition wall 6 ... Gate 7a, 7b, 46a, 46b, 46c, 46d, 56
a, 56b, 56c, 56d, 56a ', 56b', 5
6c ', 56d', 66a, 66b, 66c, 66d,
101, 102 ... Arms 8a, 8b, 8a ', 8b', 103 ... Carrier 9a, 9b, 28a, 28b, 32a, 32b, 35
a, 35b, 47a, 47b, 47c, 47d, 57
a, 57b, 57c, 57d, 57a ', 57b', 5
7c ', 57d', 67a, 67b, 67c, 67d ...
Link 23 Rotary table 25, 29 Driven shaft 26, 30 Drive source 40a, 40b, 40c, 40d, 50a, 50b, 5
0c, 50d, 60a, 60b, 60c, 60d, ring-shaped bosses 56e, 56e ', pillar 70, rotary table 71, 85, 86, drive shafts 72a, 72b, motor units 73, 74, drive link mechanism 78, 79: driven link mechanism 87a, 87b: driven link 88a, 88b: drive link 89: motor link 91, 93, 92 ', 94': elliptical gear 92, 94: round gear 104, 106, 107, 109, 112, 113 ... pulley 110,111,114 ... belt A, A '... handling robot _{B 1, B 2, B 1} ', B 2 ', B 1 ", B 2", C 1,
_{C 2, C 1 ', C} 2', D ... robot linkage W _1, W ₂ ... wafer _{X 1, X 2, X 3} , X 4, X 5 ... bidirectional rotary link mechanism

Claims (14)

[Claims] 1. A transport table is provided at a front end portion, and the transport table is moved in and out in a radial direction by expanding and contracting.
It is provided with first and second robot link mechanisms that can be integrally rotated, and the first and second robot link mechanisms are arranged so that the two transfer tables are located within a narrow angle range. Handling robot. A plurality of bosses provided so that the first and second robot link mechanisms rotate independently of each other; a drive source connected to each of the bosses; and a boss. Two pairs of arms, each provided with one or two arms, a pair of links connected near the ends of the pair of arms, and a carrier table connected near the ends of the pair of links. The handling robot according to claim 1, wherein the handling robot is configured. 3. The first boss, the second boss and the third boss, and the first boss.
A first arm provided on the first boss, a second arm provided on the second boss, a third arm provided on the third boss, a first arm provided on the third boss, A first transfer table provided near a tip of the second arm via a link; and a second transfer table provided near the tip of the third and fourth arms via a link. 3. The handling robot according to claim 2, wherein: 4. The first arm is provided on a side surface of the first boss, the second and third arms are provided on a side surface of the second boss, and the fourth arm is provided on a side surface of the second boss. 4. The handling robot according to claim 3, wherein the robot is provided on a side surface of the boss. 5. A first and second boss, first and second arms provided on the first boss, and third and fourth arms provided on the second boss. A first transfer table provided near a tip of the first and fourth arms via a link, and a second transfer table provided near a tip of the second and third arms via a link The handling robot according to claim 2, further comprising: 6. The first and second arms are provided on a side surface of the first boss, and the third and fourth arms are provided on the second boss, one of which is provided on a side surface of the boss and the other. 6. The handling robot according to claim 5, wherein the robot is provided on a top surface of the boss. 7. The device according to claim 1, wherein the first and second arms are provided on a side surface of the first boss, and the third and fourth arms are provided on a side surface of the second boss. The handling robot according to claim 5, wherein 8. The method according to claim 1, wherein the first and second robot link mechanisms are arranged so as to be shifted in a rotational direction so that the two transfer tables do not overlap in the vertical direction. Handling robot. 9. The handling robot according to claim 8, wherein both of the transfer tables of the first and second robot link mechanisms are located at the same position in the vertical direction. 10. The first and second robot link mechanisms include a turntable, a first drive source connected to the turntable, and first and second rotatably supported by the turntable. A drive link mechanism, a second drive source connected to one of the first and second drive link mechanisms, and a drive link mechanism of each of the drive link mechanisms near the distal ends of the first and second drive link mechanisms. The first and second driven link mechanisms are connected at one end so as to rotate synchronously with the rotation, and the first and second transfer tables are respectively connected to the first and second driven link mechanisms. The handling robot according to claim 1, wherein: 11. The handling robot according to claim 9, wherein each of the drive link mechanism and the driven link mechanism of the first and second robot link mechanisms is constituted by a parallel link mechanism. 12. The handling robot according to claim 9, wherein each of the driving link mechanism and the driven link mechanism of the first and second robot link mechanisms is constituted by a belt mechanism. 13. The apparatus according to claim 9, wherein the first and second robot link mechanisms are arranged so as to be shifted in a rotational direction so that the transfer tables do not overlap in the vertical direction. The handling robot according to 1. 14. The handling robot according to claim 12, wherein both of the carriages connected to the first and second robot link mechanisms are at the same position in the vertical direction. .