JPH10212874A - Airtight structure of cleanroom - Google Patents

Abstract

PROBLEM TO BE SOLVED: To dispense with a caulking work, and increase the sealing effect against the floor face, by using long floor rails with a U-shaped section and vertically erecting the side pieces of the bottom piece and providing recessed grooves at the inside of the front end of the side pieces or at the underface of the bottom piece and fitting airtight rubber pieces therein. SOLUTION: The lower end of a panel 10 is fitted to a floor rail and supported by both side pieces 2, 2 of the floor rail. Then, airtight rubber pieces attached to the front end of the side pieces are positioned to contact the panel 10 surface. The side pieces 2 are prevented from falling outward by fixing to the support pieces of the leg of the base frame for an adjuster 5, at the middle part and prevented from generating a gap against the panel surface 10. The airtight rubber piece is also arranged at the underface of the bottom piece to closely contact the floor face and retain airtightness. Accordingly, the airtight rubber piece of the side piece 2 is closely stuck on the panel 10 surface and the airtight rubber of the bottom piece and the upper piece are closely stuck on the floor face, the ceiling face or wall face. In this way, the structure prevents outside air from penetrating from the floor face, the ceiling, the wall face and keeps airtight.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an airtight structure for a clean room, and more particularly to an airtight structure for a floor, a ceiling, and a wall.

[0002]

2. Description of the Related Art In the fields of computer development and biotechnology, as well as in new fields such as the precision machine industry, electronics, medicine, and food, an ultra-clean space called a "clean room" is required. The clean room is a space where temperature and humidity are controlled by preventing intrusion of ultra-fine particles of micro size, thereby improving product quality and yield, preventing infection by pathogenic bacteria, and the like.

[0003] Incidentally, the clean room is made by partitioning a part of a building, and a partition panel is generally used. FIG. 4 (a),
(B) shows a vertical section and a transverse section of a wall structure constituting a conventional clean room. Floor rail on the floor
(B) is laid, a baseboard (b) is covered on the floor rail (b) and supported by an adjuster device (c), and a panel (d) is placed on the baseboard and vertically It is installed, and the ceiling is covered with trees
(E) is attached, and the upper end of the panel is fitted and fixed between both side pieces of the cap (e).

[0004] Adjacent panels (d) and (d) have reinforcing bars (f) and (f) attached to their side ends connected to each other. A corner post (g) is attached to the corner, and a wall rail (h) is provided at the border with the wall. By the way, the clean room has an airtight structure in which the boundary with the wall surface, between adjacent panels, and the boundary with the floor or ceiling are sealed so that air does not enter from the outside.

FIGS. 5 (a) and 5 (b) show a conventional airtight structure between a ceiling and a floor. Silicon (nu) is used between the ceiling and the kasagi and between the kasagi and the panel surface. Also, silicon (R) is used for caulking between the floor surface and the floor rail, as well as the coping and the lower edge of the panel. The work of caulking the boundary of each member using such silicon is troublesome, and outgas (low siloxane) is generated from the silicon seal, which adversely affects the semiconductor in a clean room used for manufacturing semiconductors. To increase the product defect rate.

[0006]

As described above, the conventional hermetic structure of a clean room has the above-mentioned problems.
The problem to be solved by the present invention is this problem,
An airtight structure that does not require caulking work and does not generate outgas is provided.

[0007]

The airtight structure of the present invention is directed to an airtight structure of a ceiling, a floor, and a wall, and a cap, a floor rail, and a wall rail attached to each of these parts have an airtight function. Structure. For floor rails,
As a long material having a substantially U-shaped cross section, airtight rubber is provided on the inside of the tip of both side pieces, and the bottom piece is similarly provided with airtight rubber. Therefore, the airtight rubber is tightly sealed to the panel surface sandwiched between the both side pieces of the floor rail, and the airtight rubber of the bottom piece achieves a sealing effect with the floor surface.

[0008] Similarly to the floor rail, the Kasagi is provided with airtight rubber on the inside of the tip of the side piece, and the upper piece is also provided with airtight rubber. Further, the inner ends of both ends of the wall rail are provided with airtight rubber, and the bottom piece is also provided with airtight rubber, so that the conventional caulking process is not required. Hereinafter, embodiments according to the present invention will be described in detail with reference to the drawings.

[0009]

FIG. 1 shows a specific example of a floor rail having an airtight structure according to the present invention. The floor rail is a long material having a U-shaped cross section. Side pieces 2 and 2 stand upright on both sides of a bottom piece 1, and a concave groove is formed along the inside of the tip of the side piece. An airtight rubber 3 is fitted into the concave groove. Also, a concave groove is formed on the lower surface of the bottom piece 1 and the airtight rubber 3 is fitted therein.

The height of the side piece of this floor rail is larger than that of a conventional floor rail having a U-shaped cross section, and a support piece 4 is formed at an intermediate position. The adjuster 5 is attached by using the support pieces 4 formed on the side pieces 2. The adjuster 5 includes a base 6 bent in a U-shape, a screw 7 and a support plate 8, and the screw 7 is screwed into a screw hole provided in the center of the base 6. The support plate 8 is attached to the head of the screw 7, and the height of the support plate 8 is adjusted by rotating the screw 7.

The legs 9, 9 bent on both sides of the base 6 are supported by the support pieces 4, 4 provided on the side pieces 2, 2. Therefore, the base 6 is locked to the support pieces 4 and 4 and is stable without rattling. On the contrary, the support pieces 4 and 4 are also positioned by locking the legs 9 and 9 to increase the height of the side pieces. Although it is 2, 2, the bending rigidity of both sides 2 and 2 of the floor rail becomes high because the intermediate portion of the side pieces 2 and 2 is restrained by the base 6.

FIG. 2 shows a case where the lower end of the panel 10 is fitted to and supported by the floor rail, and the panel 10 rests on a support plate 8 of an adjuster 5 attached to the floor rail. The lower end of the panel 10 is sandwiched between both side pieces 2 and 2 of the floor rail, and the airtight rubber 3 provided at the end of the side piece is in contact with the panel surface and is in close contact with no gap. The side piece 2 has a base 6 of an adjuster 5 at an intermediate portion thereof.
The legs 9 are locked to the support pieces 4 to prevent outward fall and prevent a gap from being formed between the panel and the panel surface.

[0013] The hermetic rubber 3 provided at the tip is in close contact with the panel surface, and can maintain the hermeticity with the panel 10. Similarly, an airtight rubber 3 is also provided on the lower surface of the bottom piece 1 to completely eliminate the gap between the bottom piece 1 and the floor surface, thereby maintaining airtightness. Of course, the airtight rubber 3 fitted into the concave groove formed at the tip of the side piece and the concave groove formed at the bottom piece has a thickness slightly protruding from the concave groove, and is slightly compressed on the panel surface and the floor surface. Will be in contact. By providing the airtight rubber 3 on the floor rail in this way, it is not necessary to caulk the silicon seal.

FIG. 3 is a specific example showing a shade provided at the upper end of the panel. This cap is composed of a main unit 11 and an auxiliary unit 1
2, a main body 11 having an approximately L-shaped cross section
The upper piece 13 is screwed to the ceiling, and the auxiliary portion 12 is attached to the attached main body 11 in a locked state.
Of course, the auxiliary part 12 is locked by a locking member formed on the upper piece 13 without using any screw for attachment, and is detachable.

By the way, this crosspiece also has a substantially U-shaped cross section when the auxiliary part 12 is attached to the main body part 11, and a concave groove similar to that of a floor rail is formed at the inner end of both side pieces 14 and 15. The airtight rubber 3 is fitted and attached to this concave groove. The hermetic rubber 3 is in contact with the panel surface without any gap, and maintains the hermeticity between the cap and the panel. Also, a concave groove is formed on the upper surface of the upper piece 13, and the airtight rubber 3 is fitted into the concave groove so as to be in contact with the ceiling surface without any gap. Therefore, outside air cannot enter the clean room from the ceiling.

The cap shown in FIG. 3 can be used as it is as a wall rail. In order for the floor rail to fit and support the lower end of the panel as shown in FIG. 2, the skirting and wall rail must be of a split type consisting of two pieces, a main body and an auxiliary part, with the auxiliary part removed. Can be used to install the panel and then the auxiliary parts. As described above, the airtight structure of the clean room according to the present invention is provided with airtight rubber at the tip of each side piece of the floor rail, the cap, and the wall rail, and the airtight rubber is also attached to the bottom piece or the upper piece. The following effects can be obtained.

[0017]

According to the airtight structure of the clean room of the present invention, the airtight rubber is provided on the inner end of the side pieces of the floor rail, the cap, and the wall rail, and the airtight rubber is also provided on the bottom piece and the upper piece. The airtight rubber of one piece adheres tightly to the panel surface, and the airtight rubber of the bottom piece and upper piece adheres to the floor, ceiling, and wall, so that no outside air can enter from the floor, ceiling, or wall. , Airtightness is maintained.

Further, by raising the side piece of the floor rail and providing a support piece at an intermediate portion of the side piece and locking and attaching an adjuster to this support piece, the bending rigidity of the side piece is increased, and The hermetic rubber can contact the surface of the lower end portion of the panel fitted between the two pieces without any gap.

[Brief description of the drawings]

FIG. 1 shows an embodiment of a floor rail having an airtight function.

FIG. 2 shows a case where the lower end of the panel is fitted and supported on a floor rail.

FIG. 3 shows a case where the upper end of a panel is fitted into a coping.

FIG. 4 is a longitudinal section and a transverse section of a conventional clean room.

FIG. 5 shows a case where the ceiling and the floor are caulked using silicon.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Bottom piece 2 Side piece 3 Airtight rubber 4 Support piece 5 Adjuster 6 Base 7 Screw 8 Support plate 9 Leg 10 Panel 11 Main body part 12 Auxiliary part 13 Top piece 14 Side piece 15 Side piece

Claims (6)

[Claims] 1. A floor rail made of a long material having a substantially U-shaped cross section in an airtight structure on a floor surface of a clean room, which is a space where temperature and humidity are controlled while preventing intrusion of micro ultrafine particles, Airtight rubber is provided on the inner end of both side pieces, and airtight rubber is also provided on the bottom face of the bottom piece.The airtight rubber is brought into close contact with the surface of the lower end of the panel fitted between both side pieces, and the airtight rubber is also applied to the floor without gaps. Airtight structure of a clean room characterized by contact. 2. A clean room according to claim 1, wherein a support piece is formed at an intermediate portion inside the side piece, and an adjuster is locked and attached to the support piece, and a lower end of the panel is placed on a support plate at an upper end of the screw. Airtight structure. 3. An airtight structure at the ceiling of a clean room, which is a space where temperature and humidity are controlled by preventing the infiltration of ultra-fine particles of micro size, is a coping made of a long material having a substantially U-shaped cross section. Airtight rubber is provided on the inner end of the piece, and airtight rubber is also provided on the upper surface of the upper piece. Airtight structure of a clean room characterized by contact. 4. The airtight structure of a clean room according to claim 3, wherein said cap is constituted by two pieces of a substantially L-shaped main body part and an auxiliary part detachably attached to a locking part formed on an upper piece of said main body part. . 5. A wall rail made of a long material having a substantially U-shaped cross section in an airtight structure at a wall portion of a clean room, which is a space where temperature and humidity are controlled while preventing intrusion of micro ultrafine particles, Airtight rubber is provided on the inner end of both side pieces, and airtight rubber is also provided on the bottom face of the bottom piece.The airtight rubber is brought into close contact with the surface of the panel side end fitted between both side pieces, and the airtight rubber is also applied to the wall without gap Airtight structure of a clean room characterized by contact. 6. The airtight structure of a clean room according to claim 5, wherein said wall rail is constituted by two pieces of a substantially L-shaped main body and an auxiliary part detachably attached to a locking part formed on a bottom piece of said main body. .