JP3740669B2 - Clean room airtight structure - Google Patents

Description

[0001]
[Industrial application fields]
The present invention relates to an airtight structure of a clean room, and more particularly to an airtight structure in a floor portion, a ceiling portion, and a wall surface portion.
[0002]
[Prior art]
In the fields of computer development and biotechnology, and in new fields such as the precision machinery industry, electronics, medicine, and food, ultra-clean spaces called “clean rooms” are required. This clean room is a space in which microscopic ultrafine particles are prevented from entering and the temperature and humidity are controlled, and the quality and yield of products can be improved, and infection with pathogenic bacteria can be prevented.
[0003]
By the way, the clean room is made by partitioning a part of the building, and generally a partition panel is used. 4 (a) and 4 (b) show a wall section structure constituting a conventional clean room, showing a longitudinal section and a transverse section. A floor rail (a) is laid on the floor, and a baseboard (b) is covered on the floor rail (a) and supported by an adjuster device (c). ) Is mounted vertically, and a ceiling (e) is attached to the ceiling, and the upper end of the panel is fitted and fixed between both side pieces of the edge (e).
[0004]
In the adjacent panels (d) and (d), reinforcing bars (f) and (f) attached to the side ends are connected to each other. A corner post (g) is attached to the corner, and a wall rail (h) is provided at the boundary with the wall. By the way, the clean room has an airtight structure in which the boundary with the wall surface, between adjacent panels, and the boundary with the floor surface and the ceiling are sealed so that air does not enter from the outside.
[0005]
5 (a) and 5 (b) show a conventional airtight structure in the ceiling and floor, but silicon (nu) is used for caulking between the ceiling and the headboard, and between the headboard and the panel surface. Silicone (re) is used for caulking between the floor and the floor rails, and the bottom of the headboard and panel. The operation of caulking to the boundary part of each member using such silicon is troublesome, and outgas (low siloxane) is generated from the silicon seal, and if it is a clean room used for semiconductor manufacturing, the semiconductor is adversely affected. There is a problem of increasing the defective rate of the product.
[0006]
[Problems to be solved by the present invention]
As described above, the conventional airtight structure of a clean room has the above-described problems. The problem to be solved by the present invention is this problem, and provides an airtight structure that does not require coking and does not generate outgas.
[0007]
[Means for Solving the Problems]
The airtight structure of the present invention is intended for the airtight structure in the ceiling portion, floor portion, and wall portion, and the headboard, floor rail, and wall rail attached to each of these portions are provided with an airtight function. In the case of a floor rail, an airtight rubber is provided on the inner side of the tip of each side piece as a long material having a substantially U-shaped cross section, and the airtight rubber is also provided on the bottom piece. Therefore, the airtight rubber adheres and seals to the panel surface sandwiched between the both side pieces of the floor rail, and the airtight rubber of the bottom piece achieves a sealing effect between the floor surface.
[0008]
Similarly, as for the floor rail, the airtight rubber is provided on the inner side of the end of the side piece, and the airtight rubber is also provided on the upper piece. Further, airtight rubber is provided on the inner side of both ends of the wall rail, and airtight rubber is also provided on the bottom piece, so that a conventional coking process is not required. Hereinafter, embodiments according to the present invention will be described in detail with reference to the drawings.
[0009]
【Example】
FIG. 1 is a specific example of a floor rail having an airtight structure according to the present invention. The floor rail is a long material having a U-shaped cross section. Side pieces 2 and 2 are vertically erected on both sides of the bottom piece 1, and a concave groove is provided inside the side piece tip, An airtight rubber 3 is fitted into the concave groove. Further, a concave groove is formed on the lower surface of the bottom piece 1 to fit the airtight rubber 3.
[0010]
This floor rail has a side piece whose height is larger than that of a conventional floor rail having a U-shaped cross section, and a support piece 4 is formed at an intermediate position thereof. An adjuster 5 is attached using support pieces 4 and 4 formed on the side pieces 2 and 2. The adjuster 5 includes a base 6 bent into a U-shape, screws 7 and a support plate 8, and the screws 7 are screwed into screw holes provided in the center of the base 6. The support plate 8 is attached to the head of the screw 7, and the height of the support plate 8 is adjusted by rotating the screw 7.
[0011]
The legs 9 and 9 formed by bending on both sides of the base 6 are supported by supporting pieces 4 and 4 provided on the side pieces 2 and 2. Accordingly, the base 6 is stable without being rattled by being locked to the support pieces 4, 4, and conversely, the support pieces 4, 4 are also positioned by the legs 9, 9 being locked, and the side pieces having high height Although it is 2 and 2, since the intermediate part of the side pieces 2 and 2 is restrained by the base 6, the bending rigidity of the both side pieces 2 and 2 of a floor rail becomes high.
[0012]
FIG. 2 shows a case where the lower end of the panel 10 is fitted and supported on the floor rail, and the panel 10 is placed on the support plate 8 of the adjuster 5 attached to the floor rail. And the lower end part of the panel 10 is pinched | interposed into the both-side pieces 2 and 2 of a floor rail, and the airtight rubber | gum 3 provided in the side piece front-end | tip contact | abuts on the panel surface, and is closely_contact | adhering in the state which does not leave a clearance gap. The side piece 2 is secured to the support piece 4 by the leg 9 of the base 6 of the adjuster 5 at an intermediate portion thereof, so that the side piece 2 is prevented from falling outward and no gap is formed between the side piece 2 and the panel surface. ing.
[0013]
And the airtight rubber | gum 3 provided in the front-end | tip adheres to the panel surface, and can maintain airtightness between the panels 10. FIG. Similarly, an airtight rubber 3 is also provided on the lower surface of the bottom piece 1 to completely eliminate the gap between the floor and the airtightness. Of course, the airtight rubber 3 fitted into the concave groove formed at the side piece tip and the concave groove formed at the bottom piece has a thickness slightly protruding from the concave groove, and is slightly compressed on the panel surface and the floor surface. Will be in touch. By providing the airtight rubber 3 on the floor rail in this way, it is not necessary to caulk the silicon seal.
[0014]
FIG. 3 is a specific example showing a headboard provided at the upper end of the panel. This headboard is composed of two pieces, a main body part 11 and an auxiliary part 12, and the upper piece 13 of the main body part 11 having a substantially L-shaped cross section is screwed to the ceiling, and the auxiliary part 12 is locked to the attached main body part 11 Installed in condition. Of course, no screw is used to attach the auxiliary portion 12, and the auxiliary portion 12 is locked by a locking member formed on the upper piece 13 and is detachable.
[0015]
By the way, in the state where the auxiliary part 12 is attached to the main body part 11, this cross section also has a substantially U-shaped cross section, and a concave groove similar to the case of the floor rail is formed at the inner ends of the side pieces 14 and 15, An airtight rubber 3 is fitted and attached to the concave groove. The airtight rubber 3 is in contact with the panel surface without any gaps, and maintains the airtightness between the headboard and the panel. Similarly, a concave groove is formed on the upper surface of the upper piece 13, and the airtight rubber 3 is fitted into this concave groove so as to be in contact with the ceiling surface without any gap. Therefore, outside air cannot enter the clean room from the ceiling.
[0016]
The headboard shown in FIG. 3 can be used as it is as a wall rail. In order for the floor rail to fit and support the lower end of the panel as shown in FIG. 2, the headboard and wall rail must be divided into two pieces, the main body and the auxiliary part, with the auxiliary part removed. The panel can be installed with and the auxiliary part can be installed afterwards. As described above, the airtight structure of the clean room according to the present invention is provided with airtight rubber at the front end of each side piece of the floor rail, headboard, and wall rail, and airtight rubber is attached to the bottom piece or the upper piece, The following effects can be obtained.
[0017]
【The invention's effect】
The airtight structure of the clean room of the present invention is provided with airtight rubber at the inner tip of the side pieces of the floor rail, headboard, and wall rail, and also provided with airtight rubber on the bottom piece and top piece. Adhering to the panel surface without any gaps, and the bottom and top airtight rubbers are in close contact with the floor, ceiling, and wall surface, so that outside air does not enter from the floor, ceiling, and wall surface, ensuring airtightness. Be drunk.
[0018]
Also, by raising the side piece of the floor rail and providing a support piece at the middle part of the side piece, and locking and attaching the adjuster to this support piece, the bending rigidity of the side piece is increased and the airtight rubber at the tip is It is possible to contact the surface of the lower end portion of the panel fitted between the both side pieces without any gap.
[Brief description of the drawings]
FIG. 1 shows an embodiment of a floor rail having an airtight function.
[Fig. 2] When the lower end of the panel is inserted and supported on the floor rail.
[Fig. 3] When the top edge of the panel is inserted into the headboard.
FIG. 4 is a longitudinal section and a transverse section of a conventional clean room.
FIG. 5 shows a case where the ceiling portion and the floor portion are caulked using silicon.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Bottom piece 2 Side piece 3 Airtight rubber 4 Support piece 5 Adjuster 6 Base 7 Screw 8 Support plate 9 Leg
10 panels
11 Body
12 Auxiliary part
13 Upper piece
14 side piece
15 side piece

Claims (1)

  In the airtight structure of a clean room where the temperature and humidity are controlled, preventing the entry of microscopic ultrafine particles, the floor surface is a floor rail made of a long material with a roughly cross-sectional cross-section, at the inner ends of both side pieces Airtight rubber is provided, and the bottom piece is also provided with an airtight rubber on the bottom surface, the airtight rubber is brought into close contact with the surface of the lower end of the panel fitted between the both side pieces, and the airtight rubber is in contact with the floor surface without any gaps. A support piece is formed on the inner middle part of the piece, and the legs formed by bending the adjuster on both sides of the base are locked and attached, and the lower end of the panel is placed on the support plate at the upper end of the screw. In the ceiling, it is a headboard made of a long material having a substantially U-shaped cross section, and an upper end portion of the panel that is provided with an airtight rubber on the inner tip of both side pieces and also has an airtight rubber on the upper surface of the upper piece and is fitted between the both side pieces. Adhere airtight rubber to the surface of Airtight rubber is also in contact with the ceiling surface without any gaps, and the headboard is composed of two pieces: an L-shaped main body part and an auxiliary part removably attached to a locking part formed on the upper piece of the main body part. Furthermore, the wall surface portion is a wall rail made of a long material having a substantially cross-sectional U shape, and is provided with an airtight rubber at the inner tip of both side pieces, and also provided with an airtight rubber on the bottom surface of the bottom piece and fitted between the both side pieces. An airtight rubber is brought into close contact with the surface of the panel side end portion, and the airtight rubber is brought into contact with the wall surface without a gap, and the wall rail is formed on a locking portion formed on an approximately L-shaped main body portion and a bottom piece of the main body portion. A clean room airtight structure characterized by comprising two pieces of auxiliary parts which are detachably attached.

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