JP3872573B2 - Clean room ceiling structure - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a clean room ceiling structure, and more particularly to a clean room ceiling structure in which a filter or a blind plate is placed through a seal member in a filter mounting opening where a fan filter unit is not disposed.
[0002]
[Prior art]
Recently, in a clean room installed in a semiconductor manufacturing factory or the like, for example, as disclosed in JP-A-4-103937, a large number of fan filter units (FFUs) in which a fan and a filter are integrated are arranged on the ceiling surface. However, it is possible to arbitrarily set the cleanliness area in the clean room as necessary by individually controlling the number of operating units or controlling the air volume.
[0003]
FIG. 4 shows a clean room ceiling structure for supporting such a fan filter unit on the ceiling of the clean room. In this ceiling structure, a plurality of elongated main structures arranged in parallel at predetermined intervals are shown. A plurality of sub-frame members 2 are arranged between the frame members 1, and a lattice-like filter attachment member 4 having a plurality of filter attachment openings 3 is configured.
[0004]
Then, as shown in FIG. 5, a fan filter unit (FFU) 7 in which the fan 5 and the filter 6 are unitized on the upper surface of the main frame member 1 and the sub-frame member 2 forming each filter mounting opening 3. It is placed via a seal member 8 such as a gasket.
The main frame member 1 and the sub-frame member 2 are formed with a suspending portion 9 protruding upward, and this suspending portion 9 is suspended by a building beam of a building (not shown) via a suspension bolt 10. .
[0005]
In addition, the main frame member 1 and the sub-frame members 2 arranged on both sides of the main frame member 1 are connected to each other on the upper surface of the hanging portion 9 via a bolt 12 by a cross-shaped upper joint 11 made of metal. The squareness between the main frame member 1 and the sub-frame member 2 and the same flatness of the upper surfaces of the main frame member 1 and the sub-frame member 2 on which the seal member 8 is arranged, that is, the position of the seal surface 13 are maintained. ing.
[0006]
Conventionally, in such a clean room ceiling structure, as shown in FIG. 4, the fan filter unit 7 is disposed only in a part of the filter mounting openings 3, and the filter 6 is disposed in the remaining filter mounting openings 3. Or only the blind board 14 is arrange | positioned and the partition area of the cleanliness in a clean room is arbitrarily set as needed.
[0007]
[Problems to be solved by the invention]
However, in such a conventional clean room ceiling structure, when only the filter 6 or the blind plate 14 is disposed in the filter mounting opening 3, the filter 6 or the blind plate 14 is detachably attached to the filter mounting opening 3. And there was a problem that it was difficult to fix easily and surely.
[0008]
That is, in such a ceiling structure for a clean room, for example, the position of the fan filter unit 7, the filter 6 or the blind plate 14 is changed by changing the layout in the clean room. The filter 6 or the blind plate 14 needs to be detachably and easily and surely fixed to the filter 3, but a fixing method that satisfies such requirements has not been established so far. There has been a demand for a clean room ceiling structure in which the filter 6 or the blind plate 14 can be detachably and easily and reliably fixed.
[0009]
The present invention has been made to solve such a conventional problem, and provides a ceiling structure for a clean room in which a filter or a blind plate can be detachably and easily fixed securely to a filter mounting opening. The purpose is to do.
[0010]
[Means for Solving the Problems]
The ceiling structure for a clean room according to the present invention comprises a filter member having a plurality of filter mounting openings, wherein the frame members are arranged in a grid, and a fan filter is formed on the upper surface of the frame member forming the filter mounting openings. In the ceiling structure for a clean room, in which the unit is placed through a seal member, and a filter or a blind plate is placed through the seal member in the filter mounting opening where the fan filter unit is not disposed. A hanging portion is formed to protrude upward on the upper surface of the, and a groove portion is formed along the upper surface of the suspending portion on both sides of the inlet opening, and in the vicinity of one end of the press fitting inside the groove portion. of the annular head portion resiliently locks the fitting engagement, the other end of the clamping shoe, the filter or blind plate will be pressed and fixed to the sealing member side The pressing fitting includes a supporting member and a pressing member formed by bending spring steel, and the supporting member is continuous with the annular head inserted into the groove and on both sides of the head. And a first extension portion formed to protrude upward from the inner neck portion toward the filter or blind plate side to be pressed and fixed, A second extending portion extending from the neck portion to the opposite side of the first extending portion, and an upper end of the pressing member is fixed to the first extending portion and an intermediate portion is suspended from the first extending portion. It is characterized in that the lower side is bent into an S shape that is in contact with the inner surface of the part and is in contact with the filter or the blind plate .
[0011]
The clean room ceiling structure according to claim 2 is the clean room ceiling structure according to claim 1, wherein, when the pressing fitting is attached or detached, the head portion is held while sandwiching the second extending portion and the upper portion of the pressing fitting. The groove portion is inserted and removed .
[0012]
(Function)
In the clean room ceiling structure of the present invention , after a filter or a blind plate is disposed in the filter mounting opening via a seal member, one end of the pressing metal fitting is elastically placed in a groove formed on the upper surface of the hanging portion of the frame member. When fitted and locked, the filter or the blind plate is pressed and fixed to the seal member side by the other end of the press fitting.
[0013]
And after arrange | positioning a filter or a blind board through a sealing member in a filter attachment opening part, when the head part of the support member of a press metal fitting is elastically deformed and inserted in the groove part formed in the upper surface of the suspension part of a frame member, The neck portion of the support member is fitted in an elastic state between the protrusions formed at the entrance of the groove portion, and the support member is detachably fixed to the groove portion of the frame member.
[0014]
At the same time, an intermediate portion of the pressing member fixed to the extending portion of the pressing metal is brought into contact with the inner surface of the hanging portion, and the filter or the blind plate is pressed and fixed to the seal member side by the lower side of the pressing member. The
[0015]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 shows details of the main part of FIG. 2, and FIG. 2 shows an embodiment of a ceiling structure for a clean room according to the present invention.
In FIG. 2, the code | symbol 21 has shown the several elongate main frame member arrange | positioned in parallel at predetermined intervals.
[0016]
A plurality of sub-frame members 23 are arranged between the main frame members 21, and a lattice-like filter attachment member 27 having a plurality of filter attachment openings 25 is configured.
A fan filter unit 29 is disposed in a predetermined filter mounting opening 25 among the plurality of filter mounting openings 25, and a filter 31 or a blind plate 33 is disposed in the filter mounting opening 27 where the fan filter unit 29 is not disposed. Only placed.
[0017]
FIG. 3 shows an arrangement structure of the fan filter unit 29 in the filter attachment opening 27. The seal surface 35 that is the upper surface of the main frame member 21 and the sub-frame member 23 forming the filter attachment opening 25 includes A fan filter unit 29 in which the fan 37 and the filter 31 are unitized is placed via a seal member 39 such as a gasket.
[0018]
The main frame member 21 and the sub-frame member 23 are formed with a suspending portion 41 protruding upward, and this suspending portion 41 is suspended by a building beam (not shown) via a suspending bolt 43. .
Further, the main frame member 21 and the sub-frame members 23 arranged on both sides of the main frame member 21 are connected by a cross-shaped upper joint 45.
[0019]
FIG. 1 shows an arrangement structure of the blind plate 33 shown in FIG. 2 to the filter mounting opening 25, and a sealing surface that is the upper surface of the main frame member 21 and the sub-frame member 23 that form the filter mounting opening 25. A blind plate 33 is placed on 35 via a seal member 39 such as a gasket.
[0020]
In this embodiment, the main frame member 21 and the sub-frame member 23 are formed by extrusion molding of aluminum and have the same cross-sectional shape.
The main frame member 21 and the sub-frame member 23 have a main body portion 47 having a rectangular cross section and a suspension portion 49 that protrudes upward from the main body portion 47.
On the upper surface of the suspension portion 49, a groove portion 53 is formed along the longitudinal direction. The groove portion 53 is formed on both sides of the inlet opening.
[0021]
One end of the press fitting 55 is elastically fitted and locked to the groove 53, and the blind plate 33 is pressed and fixed to the seal member 39 side by the other end of the press fitting 55.
In this embodiment, the pressing metal 55 is composed of a support member 57 and a pressing member 59.
The support member 57 and the pressing member 59 are formed by bending a belt-shaped spring steel.
[0022]
The support member 57 has a head portion 57a, a neck portion 57b, and extending portions 57c and 57d.
The head portion 57 a is formed in an annular shape and is inserted into a groove portion 53 formed at the upper end of the hanging portion 49.
Further, the tip of the head portion 57a is formed in a triangular shape in order to improve the insertability into the groove portion 53.
[0023]
The neck portion 57 b is formed continuously on both sides of the head portion 57 a and is elastically fitted between the protruding portions 51.
The extending portion 57c is formed so as to protrude upward from the inner neck portion 57b toward the blind plate 33 side to be pressed and fixed.
On the other hand, the pressing member 59 has an S-shape, and the upper end is fixed to the distal end of the extending portion 57c by, for example, spot welding W.
[0024]
Further, the intermediate portion 59 a is in contact with the inner surface of the hanging portion 49, and the lower side is in contact with the blind plate 33.
In the clean room ceiling structure described above, the blind plate 33 is disposed in the filter mounting opening 25 via the seal member 39, and then the groove 53 formed on the upper surface of the suspension portion 49 of the main frame member 21 or the subframe member 23. When the head portion 57a of the support member 57 of the press fitting 55 is elastically deformed and inserted, the neck portion 57b of the support member 57 is fitted in an elastic state between the protruding portions 51 formed at the entrance of the groove portion 53, and is supported. The member 57 is detachably fixed to the groove portion 53 of the main frame member 21 or the sub-frame member 23.
[0025]
At the same time, the intermediate portion 59a of the pressing member 59 fixed to the extending portion 57c of the pressing metal 55 is brought into contact with the inner surface of the suspension portion 49, and the blind plate 33 is sealed by the lower side of the pressing member 59. It is pressed and fixed to the 39 side.
In the clean room ceiling structure configured as described above, the blind plate 33 is disposed in the filter mounting opening 25 via the seal member 39 and then formed on the upper surface of the suspension portion 49 of the main frame member 21 or the sub-frame member 23. When one end of the press fitting 55 is elastically fitted and locked to the groove 53, the filter or blind plate 33 is pressed and fixed to the seal member 39 by the other end of the press fitting 55. The blind plate 33 can be fixed to the portion 25 detachably and easily and reliably.
[0026]
In the clean room ceiling structure described above, the support member 57 of the pressing metal 55 is formed between the annular head portion 57a inserted into the groove portion 53 and the protruding portion 51 formed continuously on both sides of the head portion 57a. Since the head portion 57a of the support member 57 is elastically deformed and inserted into the groove portion 53 formed on the upper surface of the suspension portion 49 of the main frame member 21 or the sub-frame member 23. Since the neck portion 57 b is fitted in an elastic state between the protruding portions 51 formed at the entrance of the groove portion 53, the support member 57 of the press fitting 55 is attached to the groove portion 53 of the main frame member 21 or the sub-frame member 23. It can be fixed detachably and easily and reliably.
[0027]
In addition, the support member 57 is formed with an extending portion 57c that protrudes upward from the inner neck portion 57b toward the side of the blind plate 33, and the upper end of the pressing member 59 is fixed to the extending portion 57c. The pressing member 59 can be reliably biased downward.
Furthermore, since the intermediate portion 59a of the pressing member 59 is in contact with the inner surface of the suspension portion 49, the suspension portion 49 can be sandwiched between the neck portion 57b of the support member 57 and the intermediate portion 59a of the pressing member 59, and the press fitting 55 can be securely fixed to the hanging portion 49.
[0028]
In addition, since the pressing member 59 is formed in an S shape and the blind plate 33 is pressed toward the seal member 39 by the lower side of the pressing member 59, the blind plate 33 is sealed by the elasticity of the pressing member 59. Can be reliably pressed.
Since the elastic deformation of the pressing member 59 can be easily set to be relatively large, the same pressing metal 55 can be used even when the thickness of the blind plate 33 is slightly changed.
[0029]
In the above-described embodiment, the example in which the blind plate 33 is fixed by the press fitting 55 has been described in detail. However, since the filter 31 is similarly fixed by the press fitting, detailed description thereof is omitted.
[0030]
【The invention's effect】
As described above, in the clean room ceiling structure of the present invention , after the filter or the blind plate is disposed in the filter mounting opening via the seal member, the pressing metal fitting is formed in the groove formed on the upper surface of the hanging portion of the frame member. When the one end of the filter is elastically fitted and locked, the filter or blind plate is pressed and fixed to the seal member side by the other end of the press fitting, so that the filter or blind plate can be attached to and detached from the filter mounting opening. And it can be fixed easily and reliably.
[0031]
And since the supporting member of the press fitting is formed from an annular head portion inserted into the groove portion and a neck portion which is continuously formed on both sides of the head portion and fitted between the protruding portions, the frame member When the head of the support member is elastically deformed and inserted into the groove formed on the upper surface of the suspension part, the neck part is elastically fitted between the protrusions formed at the inlet of the groove part. The support member of the metal fitting can be detachably and easily and reliably fixed to the groove portion of the frame member.
[0032]
In addition, the support member is formed with an extending portion that protrudes upward from the inner neck portion to the filter or the blind plate side, and the upper end of the pressing member is fixed to the extending portion. It is possible to reliably urge downward.
Furthermore, since the intermediate part of the pressing member is in contact with the inner surface of the hanging part, the hanging part can be held between the neck part of the supporting member and the intermediate part of the pressing member, and the pressing fitting is securely fixed to the hanging part. be able to.
[0033]
Further, since the pressing member is formed in an S shape and the filter or the blind plate is pressed toward the seal member by the lower side of the pressing member, the filter or the blind plate is securely attached to the seal member by the elasticity of the pressing member. Can be pressed.
And since it becomes possible to set elastic deformation of a press member comparatively large easily, even when the thickness of a filter or a blind board changes a little, the same press metal fitting can be used.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view showing details of the blind plate fixing structure of FIG. 2;
FIG. 2 is a top view showing an embodiment of a ceiling structure for a clean room according to the present invention.
3 is a cross-sectional view showing details of the arrangement structure of the fan filter unit of FIG. 2;
FIG. 4 is a top view showing a conventional ceiling structure for a clean room.
FIG. 5 is a cross-sectional view showing a main part of a conventional ceiling structure for a clean room.
[Explanation of symbols]
21 Main frame member 23 Sub frame member 25 Filter mounting opening 27 Filter mounting member 29 Fan filter unit 31 Filter 33 Blind plate 35 Sealing surface 39 Sealing member 49 Suspension part 51 Projection part 53 Groove part 55 Press fitting 57 Support member 57a Head part 57b Neck part 57c Extension part 59 Pressing member 59a Middle part

Claims (2)

A frame member is arranged in a lattice shape to form a filter attachment member having a plurality of filter attachment openings, and a fan filter unit is placed on the upper surface of the frame member forming the filter attachment openings via a seal member And in the ceiling structure for a clean room formed by placing a filter or a blind plate through a seal member in the filter mounting opening where the fan filter unit is not arranged,
The upper surface of the frame member, with projecting form the hanging portion upward, along the upper surface of the hanging portion forms a groove protruding portions on both sides of the inlet opening is formed, the groove inside the clamping shoe The annular head in the vicinity of one end is elastically fitted and locked, and the other end of the pressing fitting is pressed and fixed to the seal member side with the filter or blind plate .
The press fitting is composed of a support member and a press member formed by bending spring steel,
The support member includes the annular head inserted into the groove, a neck formed continuously on both sides of the head and fitted between the protrusions, and the pressing from the inner neck. A first extending portion that protrudes upward toward the filter or blind plate side to be fixed; and a second extending portion that extends from the neck portion to the opposite side of the first extending portion. And
The pressing member has an upper end fixed to the first extending portion, and an intermediate portion is bent in an S shape so that the intermediate portion is in contact with the inner surface of the hanging portion and the lower side is in contact with the filter or the blind plate. The ceiling structure for the clean room characterized by being made . The ceiling structure for a clean room according to claim 1,
A ceiling structure for a clean room, wherein the head is inserted into and removed from the groove while sandwiching the second extending part and the upper part of the pressing metal when the pressing metal is attached / detached .

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