JPH10188277A - Apparatus for production of tape-like magnetic recording medium and its production - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a recording medium with which high reproduction output is made possible and a higher surface recording density is attained and which has high quality. SOLUTION: This apparatus has a supply section which delivers a nonmagnetic base into a hermetically closed vacuum chamber, a take-up section which takes up the tape-like magnetic recording medium, a cleaning can 7, an evaporation means (electron gun) which evaporates a magnetic metallic material 11 and a gaseous O2 supply section 12 which supplies reactive gases, such as gaseous O2 . The tape-like magnetic recording medium is supplied in the range of 60 deg.<=θ1<=120 deg. with respect to the angle θ1 formed by the extension line L of the blow-off direction of the gas from the gaseous O2 supply section 12 and the line M connecting the surface central part 8a of a crucible 8 packed with the magnetic metallic material 11 and the min. incident angle θ2 of vapor deposition at the time of depositing the magnetic metallic material 11 by evaporation on the surface of the nonmagnetic base described above, by which the tape-like magnetic recording medium is produced.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and a method for manufacturing a tape-shaped magnetic recording medium in which a metal magnetic layer is formed on a non-magnetic support by a vacuum evaporation method.

[0002]

2. Description of the Related Art In general, a tape-shaped magnetic recording medium (hereinafter referred to as a thin film type magnetic tape) is made of a ferromagnetic metal such as Co, Ni, Fe or the like which is heated and evaporated on a surface of a non-magnetic support in a vacuum. An oblique evaporation method in which a metal magnetic material such as an alloy of a ferromagnetic metal is formed by being incident from an oblique direction has been put to practical use.

In the oblique deposition method, in order to improve the electromagnetic conversion characteristics and corrosion resistance of the magnetic thin film, a reaction of O ₂ gas or the like on the surface of the non-magnetic support is performed in the step of forming the metal magnetic layer. Forming a metal magnetic layer while blowing gas,
A so-called reactive vapor deposition method has been proposed and put to practical use.

[0004] In recent years, with the shift of technology from analogization to digitalization, thin-film magnetic tapes have been required to have higher density as information recording means. Therefore, in order to realize a high areal recording density, it is indispensable to further increase the output of the thin-film magnetic tape by narrowing the track and increasing the linear recording density, and various studies have been made.

[0005]

In general, in a thin-film magnetic tape, the degree of oxidation of Co and the like forming the metal magnetic layer and the distribution of Co and the like in the thickness direction of the metal magnetic layer are determined by the magnetic properties of the entire metal magnetic layer. Determine the characteristics. In the thin-film magnetic tape, the reproduction output is mainly determined by the magnetic energy of the ferromagnetic material constituting the metal magnetic layer and the gap between the tape surface and the head. For this reason, in a thin-film magnetic tape, it is necessary to increase the magnetic energy of the magnetic material constituting the metal magnetic layer and to reduce the spacing by smoothing the surface of the magnetic tape, etc., in order to increase the output.

A thin film type magnetic tape is obtained by analyzing a depth profile by Auger electron spectroscopy of a metal magnetic layer formed on a surface of a non-magnetic support by reactive evaporation with O ₂ gas using Co as a metal magnetic material. , Generally in the state shown in FIG.

That is, in the above-mentioned thin-film type magnetic tape, as shown in FIG. 7, an O ₂ -rich layer called a surface oxide layer is formed near the surface thereof, and a non-magnetic layer is formed from the central portion in the thickness direction of the metal magnetic layer. The oxidation degree distribution changes greatly on the surface of the support, and the oxidation degree distribution is uneven in the thickness direction from the surface of the metal magnetic layer to the nonmagnetic support. This oxidation degree distribution is affected by the film formation conditions such as the blowing direction and the flow rate of the O ₂ gas.

[0008] In the thin film magnetic tape, when depositing a metal magnetic material in order to improve the electromagnetic conversion characteristics and corrosion resistance as described above, supplies a reaction gas such as O ₂ gas, the O ₂ Co in metal magnetic layer generated by gas supply
And the distribution of the degree of oxidation in the thickness direction of the metal magnetic layer determine the magnetic properties of the entire metal magnetic layer. For this reason, the thin-film type magnetic tape is formed as shown in FIG.
Since the degree of oxidation such as o and the distribution of the degree of oxidation in the thickness direction of the metal magnetic layer are not uniform, it has been difficult to completely uniform the magnetic properties of the entire metal magnetic layer. Further, the thin-film type magnetic tape has a problem that a surface oxide layer of non-magnetic CoO or the like formed near the surface of the thin-film magnetic tape causes spacing to deteriorate reproduction output.

Therefore, in the thin-film magnetic tape, it is necessary that the surface oxide layer is made thinner in order to obtain a higher reproduction output, and that the oxidation state in the metal magnetic layer is uniform in the thickness direction.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a tape-shaped magnetic recording medium manufacturing apparatus and a manufacturing method capable of obtaining a higher reproduction output than before. Aim.

[0011]

According to the present invention, there is provided an apparatus for manufacturing a tape-shaped magnetic recording medium according to the present invention, wherein a nonmagnetic support supplied from a supply section is cooled in a closed vacuum chamber. The metal magnetic layer is formed by vapor deposition on the outer peripheral surface of the substrate, and a reactive gas such as O ₂ gas is disposed near the outer peripheral portion of the cooling can when the metal magnetic material is deposited. Done O
_{2 The} reaction gas is supplied from the gas supply unit. The O ₂ gas supply unit provides an angle θ between an extension line in the blowing direction of the reaction gas and a line connecting the center of the surface of the crucible filled with the metal magnetic material and the minimum incidence angle of vapor deposition, to 60 ° ≦ θ ≦ 120. It is configured to supply the reaction gas in the range of °.

According to the apparatus for manufacturing a tape-type magnetic recording medium according to the present invention configured as described above, from the O ₂ gas supply unit O ₂ gas is the outlet angle θ, 60 ° ≦ θ ≦ 120
By supplying in the range of °, the surface oxide layer formed on the surface of the metal magnetic layer is made thinner, and the oxidation state in the metal magnetic layer is made uniform in the thickness direction, enabling higher reproduction output To manufacture a tape-shaped magnetic recording medium realizing a high areal recording density.

Further, in the method for producing a tape-shaped magnetic recording medium according to the present invention, which achieves the above-mentioned object, the non-magnetic support sent from the supply unit is caused to travel around the outer periphery of the cooling can and is vapor-deposited on the surface thereof. In a manufacturing process in which a metal magnetic layer is formed by a method and the nonmagnetic support on which the metal magnetic layer is formed is wound by a winding unit, the metal magnetic material is heated and evaporated on the surface of the nonmagnetic support. While being formed, O is disposed near the outer periphery of the cooling can.
_An angle θ formed by an extension line of the blowing direction of the O ₂ gas from the ₂ gas supply unit and a line connecting the center of the surface of the crucible filled with the metal material and the minimum incidence angle of deposition is 60 ° ≦ θ ≦ 120 °. The reaction gas is supplied within the range.

According to the method of manufacturing a tape-shaped magnetic recording medium according to the present invention employing the method configured as described above,
And extension reaction gas of the blowing direction from the O ₂ gas supply unit of the O ₂ gas or the like at the time of deposition of the metal magnetic material, and the line connecting the evaporation minimum incident angle and the surface center of the filled crucible metallic magnetic material With respect to the angle θ formed, by being supplied in the range of 60 ° ≦ θ ≦ 120 °, the surface oxide layer is made thinner, and the oxidation state in the metal magnetic layer is made uniform in the film thickness direction. A thin-film magnetic tape that enables high reproduction output and achieves high areal recording density is manufactured.

[0015]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a tape-shaped magnetic recording medium according to an embodiment of the present invention; However, the present invention is not limited to this embodiment.

The thin-film magnetic tape 23 is formed by depositing the metal magnetic material 11 on the surface of the supplied nonmagnetic support 20 and forming a metal magnetic layer 25 in a vacuum evaporation apparatus 1 described later. . The nonmagnetic support 20 is supplied to the vacuum evaporation apparatus 1 as a long and wide so-called raw material.
Examples of the material of the nonmagnetic support 20 include a polyester resin such as polyethylene terephthalate, polyethylene-2, and 6-naphthalate, an aromatic polyamide film, and a polyimide resin film. And
The thin film type magnetic tape 23 is formed through a cutting step of cutting out to an appropriate width along the length direction after being taken out from the vacuum evaporation apparatus 1.

The magnetic material 11 is made of, for example, Fe, Co,
A ferromagnetic metal material such as Ni, Fe-Co, Co-Ni,
An alloy material such as Fe-Co-Cr can be used. The metal magnetic material 11 is irradiated with an electron beam 9a in a vacuum vapor deposition apparatus 1 to be heated and vapor-deposited in the vacuum vapor deposition apparatus 1 as described later, and is vapor-deposited on the surface of the non-magnetic support 20 at a predetermined angle.
5 is formed. The thin film magnetic tape 23 is formed by a so-called oblique evaporation method in which the metal magnetic material 11 is evaporated at a predetermined angle. In the following embodiment, Co is used as the metal magnetic material 11.

As shown in FIG. 4, a carbon protective film 26 is further formed on the surface of the metal magnetic layer 25 formed on the surface of the nonmagnetic support 20 by a sputtering method. Have been. Also, the thin-film magnetic tape 23
The backcoating is performed on the back surface of the nonmagnetic support 20 to form the backcoat layer 27. Further, a perfluoropolyether-based lubricant is applied to the surface of the carbon protective film 26 on the thin-film type magnetic tape 23 to form a top coat layer 28.

As shown in FIG. 1, the vacuum evaporation apparatus 1 for producing the above-mentioned thin film magnetic tape 23 has a chamber (vacuum tank) 2 forming a sealed internal space 2a and a chamber 2 inside the chamber. And a vacuum deposition unit arranged. As shown in the figure, the chamber 2 performs a vapor deposition process on a non-magnetic support 20 described later.
The inner space 2a is substantially vacuum environment is performed exhaust of the internal space portion 2a by the vacuum pump 3 provided at the bottom of the chamber 2 to 10 ^{@ 4} Pa through a conductance valve 4.

The vacuum evaporation unit is provided in the chamber 2 and has a supply roll 5 for sending out the non-magnetic support 20;
A cooling can 7 for causing the nonmagnetic support 20 to run on the outer peripheral surface; a crucible 8 arranged near the outer peripheral portion of the cooling can 7 and filled with the metal magnetic material 11; and a magnetic material 11 in the crucible 8. Gun 9 to heat and evaporate
And a winding roll 6 for winding the formed thin-film magnetic tape 23.

The cooling can 7 includes a non-magnetic support 20.
And is rotatably supported in the chamber 2 by a large-diameter roller member having a width dimension slightly larger than the width dimension. The cooling can 7 is rotated counterclockwise by a drive source (not shown) as shown by an arrow in FIG. The cooling can 7 guides the non-magnetic support 20 to travel, and a part of the outer peripheral portion functions as a vapor deposition unit. The cooling can 7 also acts to prevent deformation of the nonmagnetic support 20 that is heated when the metal magnetic material 11 is deposited, by cooling it to a predetermined temperature, for example, −40 ° C.

The electron gun 9 is disposed on the upper wall surface of the chamber 2 shown in FIG. 1. The electron gun 9 emits an electron beam into the chamber 2 at an output of 30 KW, for example, to fill the crucible 8 with a magnetic material. 11 is heated and evaporated.

As shown in FIG. 1, the crucible 8 is disposed at the lower left of the cooling can 7 in the chamber 2 in the drawing. The crucible 8 has an opening substantially equal to the width dimension of the cooling can 7, and the evaporated magnetic material 11 is placed on the surface of the non-magnetic support 20 running on the outer peripheral surface of the cooling can 7. It is configured to be uniformly deposited.

As shown in FIGS. 1 and 3, the mask 10 is formed in a substantially arc shape having a curvature substantially equal to the outer peripheral surface of the cooling can 7. The mask 10 is disposed between the mask 10 and the crucible 8 so as to cover a predetermined area on the outer peripheral surface of the cooling can 7. As shown in FIG. 3, the mask 10 configured as described above has a minimum deposition angle of the incident angle at which the metal magnetic material 11 heated and evaporated in the chamber 2 is deposited on the surface of the nonmagnetic support 20. The angle θ1 is defined.

The supply roll 5 and the take-up roll 6 are rotated counterclockwise by a drive source (not shown) as shown in FIG. These supply roll 5 and take-up roll 6
Are rotationally driven in synchronization with the cooling can 7 described above. A non-magnetic support roll 21 formed by winding the non-magnetic support 20 is wrapped around the supply roll 5. Further, a magnetic tape roll body 22 configured by winding a thin film type magnetic tape raw material 24 on which a metal magnetic layer 25 is formed is wound around the winding roll 6.

The vacuum deposition unit is shown in FIGS.
The O ₂ gas supply pipe 12 connected to a supply unit (not shown) is drawn into the chamber 2 as shown in FIG. The O ₂ gas supply pipe 12 is provided at its tip with a nozzle portion 12 a located near the outer periphery of the cooling roll 7. As shown in FIG. 2, the nozzle portion 12 a is provided with a slit 14 having a width substantially equal to the width of the non-magnetic support member 20, which constitutes an outlet of the O ₂ gas 13. The slit 14 is provided in the vicinity of one end 10a of the mask 10 for determining the minimum deposition angle θ2 as described later. The O ₂ gas supply pipe 12 is configured to change the direction of the slit 14 by appropriately rotating the nozzle portion 12 a, thereby changing the blowing direction of the O ₂ gas 13.

The blowing direction of the O ₂ gas 13 is defined by its blowing angle θ1. That is, the mask 10 blowing angle θ1 of the O ₂ gas 13 is determined as shown in FIG. 3, the extended line L of the blowout direction of the O ₂ gas 13, and the surface central portion 8a of the crucible 8 deposition minimum incident angle θ2 Is defined as an angle formed by a line M connecting the end portion 10a of the first and second members. The O ₂ gas 13 reacts with the metal magnetic material 11 deposited on the surface of the nonmagnetic support 20 to form the metal magnetic layer 25 as described later, thereby forming the magnetic properties of the thin-film magnetic tape 23. Improve corrosion resistance.

In the vacuum vapor deposition apparatus 1 configured as described above, a non-magnetic support roll 21 having a non-magnetic support 20 wound around a supply roll 5 is mounted. The vacuum evaporation apparatus 1 pulls out the non-magnetic support 20 from the non-magnetic support roll 21 and makes the non-magnetic support 20 circulate around the cooling can 7. The vacuum deposition apparatus 1 further includes the non-magnetic support 2
0 is run on the outer peripheral surface of the cooling can 7, and the metal magnetic material 11 filled in the crucible 8 is heated and evaporated by an electron beam 9 a emitted from the electron gun 9, and The metal magnetic layer 25 is formed by vapor deposition. The vacuum deposition apparatus 1 deposits the metal magnetic material 11 on the surface of the non-magnetic support 20 by the mask 10 when depositing the metal magnetic layer 25.
Is obliquely vapor-deposited so that the metal magnetic layer 25 is formed by being incident obliquely.

Further, the vacuum evaporation apparatus 1 uses the slit 14 provided in the nozzle portion 12a of the O ₂ gas supply pipe 12 disposed at the lowest incident angle position near the outer periphery of the mask 10 during this evaporation. _{The two} gases 13 are blown out in a predetermined direction in the chamber 2 and supplied. The vacuum vapor deposition apparatus 1 supplies the O ₂ gas 13 during the oblique vapor deposition to form the metal magnetic layer 25 vapor-deposited on the surface of the non-magnetic support 20.
To form a surface oxide layer formed by the reaction between the metal magnetic material 11 and the O ₂ gas 13.

As described above, the vacuum evaporation apparatus 1 forms the thin film magnetic tape 23 by forming the metal magnetic layer 25 on the surface of the nonmagnetic support 20 and then cools the thin film magnetic tape 23 to the cooling can. Take out from 7 and take-up roll 6
Are sequentially wound around the outer peripheral portion of the magnetic tape roll body 22 attached to the tape.

The thin-film type magnetic tape 23 is mounted on the vacuum deposition device 1
After the metal magnetic layer 25 is formed as described above, a carbon protective film 26 is formed on the surface of the metal magnetic layer 25 by a sputtering method, and further, on the back surface thereof, a back coat layer 27, and on the surface of the carbon protective film 26, The top coat layer 28 is formed by applying a lubricant. The thin-film magnetic tape 23 on which each layer is formed through the above-described steps is cut into a predetermined width along the length direction in the cutting step.

The vacuum deposition apparatus 1 for manufacturing the thin-film magnetic tape 23 according to the embodiment of the present invention comprises an O ₂ gas supply pipe 1.
2 is disposed at the lowest incident angle position near the one end 10a of the mask 10 that determines the deposition minimum incident angle θ2. As shown in FIG. 3, the O ₂ gas 13 is supplied to the vacuum evaporation apparatus 1 from the slit 14 provided in the nozzle 12 a of the O ₂ gas supply pipe 12 when the metal magnetic layer 25 is deposited. Further, in the vacuum evaporation apparatus 1, the direction of the slit 14 is
The blowing direction of the O ₂ gas 13 is appropriately adjusted by a structure that can be freely changed.

[0033]

For each specific embodiment of a manufacturing method of EXAMPLE then tape-type magnetic recording medium according to the present invention, correlation between oxidation relative concentrations and reproduction output in O ₂ gas blowing angle θ1 and a thin-film magnetic tape 23 The result of the characteristic test in which the relationship was measured will be described.

(1) Metal magnetic layer 25: A metal magnetic layer 25 containing Co as a main component is formed to a thickness of 0.2 μm on the surface of the nonmagnetic support 20 made of a PET film. The deposition minimum incident angle θ2 is set to 50 °.

(2) Supply of O ₂ gas 13 at the time of vapor deposition: At the time of vapor deposition, the blowing angle θ 1 of the O ₂ gas is set to 50 °,
60 °, 70 °, 90 °, 110 °, 120 °, 130
°, 140 °, and 160 °, and vapor deposition is performed under each condition. The supply amount of the O ₂ gas 13 is 2500 SCCM.
To be constant.

(3) Other steps: A carbon protective film 26 having a thickness of 10 nm is formed on the surface of the metal magnetic layer 25 by sputtering.
Is formed. The back surface of the non-magnetic support 20 is subjected to a back coat treatment to form a back coat layer 27. Further, a top coat layer 28 is formed by applying a perfluoropolyether-based lubricant on the surface of the carbon protective film 26.

The thin film magnetic tape 23 formed by the above method was cut into a 6.35 mm width by a cutting machine, and this was used as a sample for the following test.

As described above, the blowing angle θ of the O ₂ gas 13
The characteristics of each sample manufactured by changing 1 from 50 ° to 160 ° were evaluated by measuring the depth profile and the reproduction output by Auger spectroscopy.

(4) Depth profile measurement by Auger spectroscopy: Measurement is performed under the conditions of an acceleration voltage of 2 kv and a sample current of 2 × 10 ⁻⁷ using JAMP30 manufactured by JEOL Ltd.

(5) Measurement of playback output: Using a commercially available digital video camera DVC-1000 (manufactured by Sony Corporation),
The output of the RF signal is converted to a commercially available spectrum analyzer 35.
Measure with 85B (Hewlett Packard).
The recording waveform used for the measurement is ＴT (wavelength: 1.0 μm).
m). Note that the recording wavelength 1 / 4T is the wavelength that has the greatest effect on the error rate value that largely affects the image quality in consumer digital video using scrambled NRZI as the modulation method.

As the reproduction output value, the lowest output value at which an error rate of 1.0 × 10 ^-4 required for securing good picture quality is displayed as 0 dB. That is, in order to obtain good image quality, a reproduction output of 0 dB or more is required.

<Results of Depth Profile Measurement by Auger Spectroscopy> The blowing angle θ1 of the O ₂ gas 13 was set to 5
FIG. 5 shows the measurement results of the O ₂ depth profiles of the samples at 0 °, 90 °, and 130 °.

[0043] The maximum relative density of the oxide layer near the surface (%): O ₂ gas blowing angle θ1 is 50 ° of the sample; in 44% O ₂ gas; 37% O ₂ blowing angle θ1 of the gas is 90 ° Sample blowing angle θ1 is 130 ° of the sample; difference between the maximum degree of oxidation of 50% oxide layer near the central portion and the non-magnetic support: O ₂ blowing angle θ1 gas 50 ° sample; of 5% O ₂ gas blowing angle θ1 Is 90 °; 14% O ₂ gas blowing angle θ1 is 130 ° sample; 22% From the measurement graph of FIG. 5 and the above comparison result, the thin film magnetic tape 23 has a blowing angle θ1 of O ₂ gas 13. It has been found that the oxide layer becomes thicker near the surface of the metal magnetic layer 25 and the difference in the degree of oxidation between the center in the thickness direction and the vicinity of the surface of the non-magnetic support 20 increases as the value increases. In the thin-film magnetic tape 23, the degree of oxidation at the central portion of the metal magnetic layer 25 in the thickness direction is determined by the blowing angle θ of the O ₂ gas 13.
It was found that as 1 increased, it tended to decrease.

In general, in the thin-film magnetic tape 23, it is necessary that the surface oxide layer is thin and the degree of oxidation of the metal magnetic layer 25 in the thickness direction is uniformly distributed in order to increase the output. On the other hand, the blowing angle θ1 of the O ₂ gas 13 is
If the degree of oxidation of the central portion of the metal magnetic layer 25 is too high, it is difficult to achieve high density recording. Therefore, it is determined that the blowing angle θ1 of the O ₂ gas 13 has an optimum range in the range of 50 ° to 160 °.

<Measurement Result of Reproduction Output> Next, O ₂ gas 1
FIG. 6 shows a correlation graph of the measurement result of the blowout angle θ1 and the reproduction output of No. 3.

The O ₂ gas blowing angle θ1 is 50 ° of the sample S1; reproduction output -0.3 dB O ₂ gas blowing angle θ1 is 60 ° of the sample S2; reproduction output 0 dB O ₂ gas blowing angle θ1 is 70 ° Sample S3 having a reproduction output of 0.5 dB O ₂ gas and sample S4 having a blowout angle θ1 of 90 °; reproduction output 0.8 dBO ₂ Sample S5 having a blowout angle θ1 of 110 °; reproduction output of 0.1 dB O ₂ gas the outlet angle θ1 is 120 ° sample S6; reproduction output 0 dB O ₂ blowing angle θ1 gas 140 ° sample S7; reproduction output over 0.5 dB O ₂ gas blowing angle θ1 is 160 ° sample S8; reproduction output -0.8 dB From the measurement graph of FIG. 6 and the above comparison result, it was found that the range of the blowing angle θ1 of the O ₂ gas 13 at which the reproduction output was 0 dB or more was 60 ° ≦ θ ≦ 120 °. In the region where the blowing angle θ1 of the O ₂ gas 13 is less than 60 °, the reproduction output is low, and the reason is that the degree of oxidation of the central portion of the metal magnetic layer 25 becomes too high, so that high-density recording becomes impossible. it is conceivable that. Further, even in the region where the blowing angle θ1 of the O ₂ gas 13 is 120 ° or more, the reproduction output is low, which causes the surface oxidation degree to increase, and further the oxidation degree distribution in the thickness direction of the metal magnetic layer 25 to deteriorate. It is thought to be.

According to the production method of the [0047] above constructed tape-type magnetic recording medium to the blowing angle θ1 of the O ₂ gas 13 during deposition, the blowing direction of the extension line of the O ₂ gas 13, crucible 8 A high reproduction output can be obtained by setting the angle θ1 formed by the line connecting the surface central portion 8a and the vapor deposition minimum incident angle θ2 to 60 ° ≦ θ ≦ 120 °.

[0048]

As described in detail above, according to the apparatus for manufacturing a tape-shaped magnetic recording medium according to the present invention, when depositing the metal magnetic layer, O ₂ gas is brought into the vicinity of the outer peripheral surface of the cooling can. The O ₂ gas is supplied from the O ₂ gas supply unit provided, and an angle θ formed by an extension line in the blowing direction of the O ₂ gas and a line connecting the center of the surface of the crucible and the minimum incidence angle of vapor deposition is 60 ° ≦ θ.
≤120 °, the surface oxide layer is made thinner, and the oxidation state in the metal magnetic layer is made uniform in the thickness direction, enabling higher reproduction output and higher surface area. A tape-shaped magnetic recording medium that achieves a recording density is manufactured.

[0049] As described above in detail, according to the tape-type magnetic recording medium manufacturing method according to the present invention, during the deposition of the metallic magnetic layer, and an O ₂ gas extension of the delivery direction, crucible The angle θ formed by the line connecting the center of the surface and the minimum incidence angle of deposition is set in the range of 60 ° ≦ θ ≦ 120 ° and the surface oxide layer is made thinner, and the metal magnetism is further reduced. The oxidation state in the layer was made uniform in the thickness direction, and it was possible to obtain a higher reproduction output.
Higher quality tape-shaped magnetic recording media can be manufactured.

[Brief description of the drawings]

FIG. 1 is a schematic diagram illustrating a structure of a vacuum evaporation apparatus shown as an embodiment of a tape-shaped magnetic recording medium manufacturing apparatus according to the present invention.

FIG. 2 is a schematic diagram showing a structure of an O ₂ gas supply unit provided in the vacuum evaporation apparatus.

FIG. 3 is a schematic diagram of a main part of a vacuum deposition apparatus for explaining an O ₂ gas supply unit and an O ₂ gas blowing angle.

FIG. 4 is a longitudinal sectional view of a main part of the thin-film magnetic tape.

FIG. 5 is a diagram showing a measurement result of a depth profile of an O ₂ gas concentration of a sample thin film type magnetic tape by Auger electron spectroscopy.

FIG. 6 is a diagram showing a measurement result of a reproduction output of a sample thin-film magnetic tape.

FIG. 7 is a diagram showing a measurement result of an Auger electron spectroscopy depth profile of a conventional thin-film magnetic tape.

[Explanation of symbols]

1. Vacuum evaporation equipment (production equipment), 2 chambers, 3
Vacuum pump, 5 supply roll, 6 take-up roll, 7 cooling can, 8 crucible, 8a crucible surface center, 9 electron gun, 10 mask, 11 metal magnetic material,
12 O ₂ gas supply unit, 12 a nozzle unit, 14 slits, 20 non-magnetic support, 23 thin-film magnetic tape (tape magnetic recording medium), 25 metal magnetic layer, θ1
O ₂ gas blowing angle, θ2 Deposition minimum incident angle

Claims (2)

[Claims] 1. A supply section for feeding a non-magnetic support into a closed vacuum chamber; a cooling can for running the non-magnetic support on an outer peripheral surface; and a non-magnetic support formed by heating and depositing a metal magnetic material. a magnetic material deposition means for depositing a metallic magnetic layer on the surface of, O ₂ supplies a reactive gas O ₂ gas or the like is disposed near an outer periphery of the cooling scan when depositing the metallic magnetic material comprising a gas supply unit, and a winding section in which the metal magnetic layer is wound around a non-magnetic support which is formed, the reaction gas such as the O ₂ gas, the extension of the delivery direction from the O ₂ gas supply unit The angle θ formed by the line and the line connecting the center of the surface of the crucible filled with the metallic magnetic material and the minimum incident angle of deposition is supplied in the range of 60 ° ≦ θ ≦ 120 °. Equipment for manufacturing tape-shaped magnetic recording media. 2. In a closed vacuum chamber,
The non-magnetic support supplied from the supply unit is caused to run on the outer peripheral surface of the cooling can to form a metal magnetic layer on the surface by a vapor deposition method, and the reaction gas such as the O ₂ gas is supplied to the outer periphery of the cooling can. The angle θ formed by the extension line in the blowing direction from the O ₂ gas supply unit disposed in the vicinity of the part and the line connecting the center of the surface of the crucible filled with the metallic magnetic material and the minimum incidence angle of deposition is 60 A method for producing a tape-shaped magnetic recording medium, wherein the tape-shaped magnetic recording medium is supplied in a range of ° ≦ θ ≦ 120 °.