JPH10185581A - Vibrator for vibration gyro - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a vibrator for vibrational gyro having high sensitivity and high reliability, by integrally laminating a plurality of thin plate-like electro- mechanical energy converting elements carrying electrode films on one surfaces on the vibrator in parallel with the longitudinal axis of the vibrator. SOLUTION: When a vibrator is deformed in the X-Y plane due to primary bending deformation, charges are generated between electrode films 5-1 and 5-2 due to a piezoelectric effect and detected on the outside via electrodes 7-1 and 7-2. When angular acceleration acts on the vibrator around the X-axis when primary bending vibrations are excited in the X-Z plane, bending deformation occurs in the X-Y plane due to a Coriolis force and charges are generated between a through electrode 7-1 and through electrodes 7-2 and 7-3, and the angular acceleration around the X-axis can be detected. The vibrator has a symmetrical shape in the Y-Z plane and the resonance frequency of the primary bending vibration in the X-Z plane nearly coincides with that of the primary bending vibration in the X-Y plane. Therefore, the bending deformation in the X-Y plane caused by the Coriolis force excites the primary bending vibration in the X-Y plane and amplifies detecting signals. Therefore, the angular acceleration can be detected stably and a high-accuracty vibrational gyro can be formed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrator for a vibrating gyroscope.

[0002]

2. Description of the Related Art FIG. 8 is a perspective view showing an example of a conventional vibrating gyroscope as a background of the present invention, and FIG. 9 is a cross-sectional view of the vibrating gyroscope 11 shown in FIG. .

The vibrating body 12 is formed in a columnar shape having a square cross section from an elastic metal material or the like. On each of a pair of opposing side surfaces of the vibrating body 12, a detecting piezoelectric element 13 is formed. This detecting piezoelectric element 13 is one in which electrodes are formed on both sides of a piezoelectric ceramic.

Further, a piezoelectric element 13 for detecting the vibrating body 12
The driving piezoelectric elements 14 are formed on the other pair of side surfaces on which the is not formed. This driving piezoelectric element 14
Similarly to the piezoelectric element for detection, electrodes are formed on both sides of the piezoelectric ceramic.

The vibrating gyroscope 11 is supported by a supporting member 15 at a node of the vibrating body 12. Therefore, when a driving signal is applied to the driving piezoelectric element 14, the vibrating body 12 performs bending vibration in the direction indicated by the arrow in FIG. 8A in a direction perpendicular to the main surface of the driving piezoelectric element 14.

In such a state, when the vibrating gyroscope rotates about its axis, for example, Coriolis force acts in a direction orthogonal to the vibration direction. The vibrating body 1 is driven by this Coriolis force.
2 generates vibration in the direction of the arrow in FIG. 8B, and an output voltage is generated on the piezoelectric element 13 for detection. Since this output voltage is proportional to the amount of bending in the direction orthogonal to the main surface of the detecting piezoelectric element, the rotational angular velocity of the vibrating gyroscope 11 can be known by measuring this output voltage. The same applies to the case where the vibrating gyroscope is rotated about an arbitrary axis along the axis.

[0007]

In such a conventional vibrating gyroscope, as described above, a detecting piezoelectric element and a driving piezoelectric element are formed on the side surface of a vibrating body made of an elastic metal material having a square cross section by bonding or the like. , Vibration detection and vibration generation. This causes the following problems.

[0008] Since the piezoelectric element for detecting or driving is arranged on the side surface of the vibrator, it is difficult to increase the volume ratio of the piezoelectric element in the vibrator. For this reason, a restriction is imposed on the vibration generation force and the vibration detection force for the vibration gyro, and the magnitude, sensitivity, and the like of the detection signal of the vibration gyro are restricted.

In addition, since the piezoelectric element plate is attached to the side surface of the vibrating body, the shape varies from one unit to another. For this reason, variations in performance of individual vibrating gyroscopes occur. For this reason, a step of correcting the shape of the vibrating gyroscope and a step of inspecting the performance are required.

An object of the invention according to the present application is to provide a vibrator of a piezoelectric vibrating gyroscope which can increase the generation and detection of vibration of the vibrating gyroscope, and has high sensitivity and excellent reliability. .

[0011]

A first configuration for realizing the object of the invention according to the present application is that a plurality of thin plate-shaped electro-mechanical energy conversion elements each having an electrode film formed on one surface are formed by a longitudinal axis of a vibrator. And are integrated in parallel.

A second configuration for realizing the object of the invention according to the present application is to stack a thin plate-shaped electro-mechanical energy conversion element having an electrode film formed on one side thereof in parallel with a longitudinal axis of a vibrator,
By being integrated, a rectangular parallelepiped vibrator whose cross section orthogonal to the longitudinal axis is substantially square is formed.

[0013] A third configuration for realizing the object of the invention according to the present application is that a continuity of the electrode film formed on the thin plate-shaped electro-mechanical energy conversion element of each layer is a thin plate-shaped electro-mechanical energy conversion element. The through electrodes formed in the thickness direction are used.

A fourth structure for realizing the object of the invention according to the present application is to use a through electrode formed in a thin plate-shaped electro-mechanical energy conversion element located on the outermost layer for electrical connection with the outside. It is.

A fifth configuration for realizing the object of the invention according to the present application includes a first region for generating a first vibration mode,
The second region for detecting the displacement in the second vibration mode is provided in a different thin plate-shaped electro-mechanical energy conversion element.

A sixth configuration for realizing the object of the invention according to the present application comprises a first region for generating a first vibration mode,
The second region for detecting the displacement of the second vibration mode is provided in the same thin plate-shaped electro-mechanical energy conversion element.

According to a seventh configuration for realizing the object of the invention according to the present invention, generation or detection of one vibration mode uses the in-plane piezoelectric effect of a thin plate-shaped electro-mechanical energy conversion element, and the other vibration mode is used. The generation or detection of the vibration mode uses the piezoelectric effect in the thickness direction of the thin plate-shaped electro-mechanical energy conversion element.

An eighth configuration for realizing the object of the invention according to the present application is to form a plurality of electrode films parallel to the longitudinal axis of a vibrator on a thin plate-shaped electro-mechanical energy conversion element, and to form these in-plane. It is used for the effect of the directional piezoelectric effect.

A ninth structure for realizing the object of the invention according to the present application is to form a plurality of electrode films orthogonal to a longitudinal axis of a vibrator on a thin plate-shaped electro-mechanical energy conversion element,
This is used for the action of the piezoelectric effect in the in-plane direction.

A tenth embodiment for realizing the object of the invention according to the present application is:
In the configuration, the first vibration mode is a primary bending vibration mode, and the second vibration mode is a primary bending vibration orthogonal to the first vibration mode.

[0021]

BEST MODE FOR CARRYING OUT THE INVENTION

[Embodiment 1] The operation of a vibrating gyroscope according to the present embodiment is the same as that shown as a conventional example, and a description thereof will be omitted.

FIG. 1 shows the structure of the vibrator according to the present embodiment. The shape of the vibrator is 20 mm in the longitudinal direction, and the width and the height are 4 mm. The vibrator is formed by laminating piezoelectric element plates 2 made of lead zirconate titanate and sintering them integrally. In the present embodiment, the thickness of each piezoelectric element 2 is 0.1 mm.
The height is 4 mm by stacking the piezoelectric element plates 2 in 20 layers.

This will be described below with reference to FIG.

The piezoelectric element plate 2-1 is located at the end of the vibrator. For convenience, the surface on which the piezoelectric element plate is located is referred to as an upper portion. In the piezoelectric element plate 2-1, five through holes are formed on the x-axis in FIG. 2, each is filled with a conductive material, and the through electrodes 6-1, 6-2, 7-1, 7- are formed. 2, 7-3 are formed. These through electrodes 6-1, 6-2, 7-1, 7-2,
Reference numeral 7-3 is used for electrical connection between the second and lower layers of the piezoelectric element plate and an external circuit. The piezoelectric element plate 2-2 located immediately below the piezoelectric element plate 2-1 has the through electrodes 6-1, 6-2, and 7- at the same projected position as the through electrodes of the piezoelectric element plate 2-1.
1, 7-2 and 7-3 are formed. These through electrodes having the same number are electrically connected. An electrode film 5 having a portion connected to the through electrode 7-1 and two rectangular regions 5-1a parallel to the x-axis is formed on the piezoelectric element plate 2-2.
1 is formed. Similarly, an electrode film 5-2 is formed.
The rectangular region 5-2a of the electrode film 5-2 is formed so as to be located outside 5-1a. Similarly, the electrode film 5-
3 is formed.

Land-shaped electrode films 4-1 and 4-2 are formed at the positions of the through electrodes 6-1 and 6-2, respectively.

The through electrode and the electrode film are obtained by mixing silver-palladium fine powder with an organic binder, and sintering is performed simultaneously with sintering of the piezoelectric element.

Hereinafter, the piezoelectric element plates 2-3 to 2-9 located up to the ninth layer counted from the upper portion have the same shape as the piezoelectric element plate 2-2. Through electrodes 6-1, 6-2, 7 formed in each layer
-1, 7-2, and 7-3 are electrically connected to the same numbers.

Although the through electrodes 7-1, 7-2 and 7-3 are not formed on the piezoelectric element plate located on the tenth layer, the other parts have the same shape as the piezoelectric element plate 2-2.

With such a structure, the electrode film 5-1 is formed.
Is electrically connected to the through electrode 7-1 formed in the first layer,
The electrode film 5-2 is electrically connected to the through electrode 7-2 formed in the first layer, and similarly, the electrode film 5-3 is electrically connected to the through electrode 7-3 formed in the first layer. Therefore, the through electrode 7-
By using 1, 7-2, and 7-3, a signal is input or output after the polarization processing of the portion of the piezoelectric element plate 2 sandwiched between the electrode films 5-1 and 5-2 and 5-3.

An electrode film 3-1 is formed on substantially the entire upper surface of the piezoelectric element plate 2-11, and is electrically connected to the through-electrode 6-1. A land-shaped electrode film 4-2 insulated from the electrode film 3-1 is formed at the position of the through electrode 6-2.

The piezoelectric element plate 2-12 is provided with a piezoelectric element plate 2-12.
1 through-electrodes 6-1 and 6
2 are formed. An electrode film 3-2 is formed on substantially the entire upper end surface of the piezoelectric element plate 2-12, and is electrically connected to the through electrode 6-2. A land-like electrode film 4- insulated from the electrode film 3-1 is located at the position of the through electrode 6-1.
1 is formed.

The piezoelectric element plate 2-13 and the piezoelectric element plate 2-1
The odd-numbered piezoelectric element plates up to 7 are formed in the same shape as the piezoelectric element plate 2-11. The even-numbered piezoelectric element plates up to the piezoelectric element plate 2-14 and the piezoelectric element plate 2-18 are formed in the same shape as the piezoelectric element plate 2-12.

The piezoelectric element plate 2-19 has the same shape as the piezoelectric element plate 2-11, except that the through electrode 4-1 is not formed.

On the lowermost piezoelectric element plate 2-20, an electrode film 3-2 having the same shape as the electrode film 3-2 formed on the piezoelectric element plate 2-12 is formed.

The first layer penetrating electrode 6-1 and the electrode film 3-1 have the same electric potential. Similarly, the penetrating electrode 6-2 of the first layer
And the electrode film 3-2 are electrically at the same potential. Therefore, by using the through electrodes 6-1 and 6-2, signal input or output is performed after the polarization processing sandwiched between the electrode films 3-1 and 3-2 of the piezoelectric element plate 2.

The green sheets composed of the piezoelectric ceramic powder and the organic binder before firing are laminated with the piezoelectric element plates 2-1 to 2-20 as described above, and are thermocompression-bonded.
The vibrator 1 is formed by performing sintering at ~ 1200 ° C and integrating them. FIG. 1 shows a perspective view of the vibrator thus produced.

Polarization is performed by applying a DC potential between the through electrodes 6-1 and 6-2. In the present embodiment, the polarization process is performed so that the potential of 6-1 becomes higher with respect to the through electrode 6-2. FIG. 3 shows the polarization state at this time. FIG. 3A shows a partial area when the vibrator 1 is viewed from the y-axis direction shown in FIG. Through electrode 6
By applying an electric field to -1 and 6-2, a polarization process is performed on a region of the piezoelectric element plate sandwiched between the electrode films 3-1 and 3-2 which are electrically connected to these. In FIG. 3, the direction of polarization is indicated by an arrow from a higher potential to a lower potential.

When a potential in the same direction as the polarization is applied between the through electrodes 6-1 and 6-2 after the polarization process is performed in this manner, the piezoelectric element plate is deformed to extend in the polarization direction in the drawing, and simultaneously the X-axis is deformed. Perform a deformation that shrinks in the direction. As a result, the vibrator shown in FIG.
A bending deformation in the XZ plane is performed as shown in FIG.

By selecting an alternating current as the applied voltage and further selecting an applied voltage having a frequency substantially equal to the resonance frequency of the primary bending vibration in the xy plane of the vibrator, the primary bending vibration in the xy plane is applied to the vibrator. Given.

Polarization is performed by applying a DC potential between the penetrating electrodes 7-1 and 7-2 and 7-3. In the present embodiment, the polarization processing is performed such that the potential of the through electrode 7-3 is lowered and the potential of the through electrode 7-3 is lowered so that the potential of the through electrode 7-1 is set to the GND potential and the potential of the through electrode 7-3 is increased. The polarization state at this time is shown in FIG. The electrode films 5-1 and 5-1 which are electrically connected to the through electrodes 7-1 and 7-2 and 7-3 by applying an electric field between them.
Polarization is applied to the region of the piezoelectric element plate sandwiched between 5-2 and 5-3. FIG. 3C shows the polarization direction.

When the primary bending deformation occurs in the XY plane with respect to the vibrator, electric charges are generated between the electrode films 5-1 and 5-2 by the piezoelectric effect. The electric charges generated here are through electrodes 7-1,
It is detected outside through 7-2.

When primary bending vibration in the XZ plane is excited on the vibrator, if an angular acceleration around the X axis acts, bending deformation in the XY plane occurs due to Coriolis force. This X
-Through electrodes 7-1 and 7-2, 7 due to bending deformation in the Y plane
-3, an electric charge is generated, and by monitoring this, the angular acceleration around the X axis can be detected.

In the present embodiment, the shape of the vibrator is symmetrical in the YZ section, and the primary bending vibration in the XZ plane and X
The resonance frequency of the primary bending vibration in the −Y plane is substantially the same.
For this reason, the bending deformation in the XY plane caused by the Coriolis force as described above excites the primary bending vibration in the XY plane, and acts to amplify the detection signal. Thus, stable angular acceleration can be detected, and a highly accurate vibration gyro can be formed.

Further, contrary to the above description, the through electrode 7 of the first layer
Angular acceleration around the X-axis can also be detected by applying a drive signal between -1 and 7-2, 7-3 and detecting signals of the through electrodes 6-1 and 6-2.

[Second Embodiment] FIG. 4 shows another configuration of the vibrator of the present embodiment. The outer shape of the vibrator is the same as that of the first embodiment. Also, the processing of the material, thickness, sintering and the like of the piezoelectric element plate 2 constituting the vibrator is the same.

As shown in FIG. 4, the piezoelectric element plate 2-1 has
Penetrating electrodes 6-1, 6-2, 6-3, 7-1, 7-2
Is formed.

On the piezoelectric element plate 2-2 located on the second layer, the through electrodes 6-1 and 6 are projected at the same position as the piezoelectric element plate 2-1.
-2, 6-3, 7-1, 7-2 are formed. An electrode film 3-2 is formed parallel to the X axis, and the electrode film 3-2 is electrically connected to the through electrode 6-2. Through electrodes 6-1 and 6-3
The land-like electrode films 4-1 and 4-3 are formed in the portions where are located. The electrode film 5-1 and the electrode film 5-
2 are formed in parallel with the X axis, and the through electrodes 7-1 and 7-
2, respectively.

Similarly, the through electrodes 6-1, 6-2, 6-3, 6-4, 6-5 are formed on the piezoelectric element plate 2-3 located in the third layer.
Is formed. The electrode film 3-1 is formed along the X axis. The electrode film 3-1 is electrically connected to the through electrode 6-1. Land-shaped electrode films 4-2 and 4-3 are formed at positions where the through electrodes 6-2 and 6-3 are located. The electrode films 5-1 and 5-2 are formed in the same manner as the piezoelectric element plate 2-2.

The piezoelectric element plates 2-4, 2-6 and 2-8 are formed in the same shape as the piezoelectric element plate 2-2. Piezoelectric element plate 2-
5, 2-7 and 2-9 are formed in the same shape as the piezoelectric element plate 2-3.

The through electrode 6-2 is not formed on the piezoelectric element plate 2-10, but otherwise has the same shape as the piezoelectric element plate 2-2.

The piezoelectric element plate 2-3 is not formed on the piezoelectric element plate 2-11 except that the through electrode 6-2 and the electrode film 4-2 are not formed.
It has the same shape as.

The piezoelectric element plate 2-12 has an electrode film 3-3 formed thereon and is electrically connected to the through electrode 6-3. Through electrode 6-
A land-shaped electrode film 4-1 is formed in the portion of FIG. Accordingly, the through electrodes 7-1 and 7-2 and the electrode films 5-1 and 5-2 have the same shape as the piezoelectric element plate located above.

The odd-numbered piezoelectric element plates up to the piezoelectric element plates 2-13 and 2-17 have the same shape as the piezoelectric element plate 2-11. The even-numbered piezoelectric element plates up to the piezoelectric element plates 2-14 and 2-18 have the same shape as the piezoelectric element plate 2-12.

The through electrode 6-1 is not formed on the piezoelectric element plate 2-19, but otherwise has the same shape as the piezoelectric element plate 2-11.

No through electrodes are formed on the piezoelectric element plate 2-20, and electrode films 3-5, 5-5 having the same shape as the piezoelectric element plate 2-12.
-1 and 5-2 are formed.

FIG. 5 shows that the vibrator 1 has electrode films 3-1, 3-2,
3A shows a polarization state of a portion 3-3 and a deformation state of the piezoelectric element plate 2 when a drive signal is input. FIG. 5 shows an arbitrary cross section including the Z-axis of the vibrator 1, and a path of an electric signal is schematically shown. FIG. 5 shows the piezoelectric element plates 2-7 to 2-7.
-14, but actually, the piezoelectric element plate 2-
Similar processing is performed for 2 to 2-19. FIG.
(A) shows a polarization state, and the electrode films 3-1 and 3-
By applying an electric potential to 2, 3-3, an electric potential is applied to the piezoelectric element plate 2 as shown by an up and down arrow in the figure, and polarization is performed.

FIG. 5B shows the deformed state of the piezoelectric element plate 2 when the connection is made as shown in FIG. The piezoelectric element plates 2-7 to 2-10 shown in the figure are given the same potential as that at the time of polarization, and expand in the Z direction and simultaneously contract in the X direction. Also, the piezoelectric element plate 2-11
Since 2-14 have potentials in the opposite direction to the polarization, they contract in the Z direction and simultaneously deform in the X direction.

As a result, the vibrator 1 moves 1 in the XZ plane.
The next bending deformation is performed. As in the first embodiment, stable driving deformation is performed by applying an AC electric field close to the frequency of the primary bending vibration of the vibrator 1 as a driving signal.

Although the method of using the regions of the electrode films 3-1, 3-2 and 3-3 for driving has been described above, it is also possible to use this region for detection.

The regions of the electrode films 5-1 and 5-2 have the same operation as that of the first embodiment, and the description is omitted.

[Third Embodiment] FIG. 6 shows the configuration of another vibrator according to the third embodiment. Vibrator 1 in the present embodiment
The outer shape, the composition of the piezoelectric element plate, the forming process, and the like are the same as those of the first embodiment, and the description is omitted.

The topmost piezoelectric element plate 2-1 has 5
Penetrating electrodes 6-1, 6-2, 7-1, 7-2, 7-3
Is formed. An electrode film 5-1 having a plurality of regions extending in the Y-axis direction, a region connecting them and extending in the center in the X-axis direction, and a region connecting to the through electrode 5-1 are formed on the piezoelectric element plate 2-2.
Is formed. The electrode film 5-2 extends in the Y-axis direction.
-1 and a region connected to them and a region connected to the through electrode 7-2. Electrode film 5-
3 is formed so as to be symmetric about the X axis with respect to the electrode film 5-2. Land-like electrode films 4-1 and 4-2 are formed at the positions of the through electrodes 6-1 and 6-2.

Hereinafter, the piezoelectric element plate 2-10 has the same shape as the piezoelectric element plate 2-2.

The piezoelectric element plates 2-11 to 2-20 are shown in FIG.
And the shape and operation are the same as those in the first embodiment shown in FIG.

FIG. 7A shows the electrode films 5-1 and 5 of the vibrator 1.
This shows the polarization state of the portions -2, 5-3. By applying a potential to the electrode films 5-1, 5-2, and 5-3 as shown here, a polarization process is performed as shown by the left and right arrows in the figure.

FIG. 7B shows a state in use. When the vibrator 1 performs the primary bending deformation in the XY plane, the deformation occurs, for example, as indicated by an arrow in the drawing. At the time of such a deformation, a charge is generated between the electrode films 5-1 and 5-2 so that the electrode film 5-2 has a high potential. Therefore, a charge is generated between the electrode films 5-1 and 5-3 so that the electrode film 5-3 has a high potential. For this reason,
The primary bending deformation in the XY plane of the vibrator 1 can be monitored by detecting the charges on the electrode film 5-1 and the electrode films 5-2 and 5-3.

[0067]

As described above, according to the present invention,
A vibrating gyroscope vibrator with excellent vibration generation force and vibration detection capability is realized.

More specifically, by laminating the vibrator by laminating thin piezoelectric element plates and integrating them, the conventional vibrator itself can have the function of generating and detecting vibration.

The vibrator has a rectangular parallelepiped shape and a square cross section, so that the frequencies of vibration generation and detection mode can be matched.

A complicated structure can be obtained by forming an electrode film on each piezoelectric element plate constituting the vibrator.

[Brief description of the drawings]

FIG. 1 is a perspective view of a vibrator of a vibrating gyroscope according to the present invention.

FIG. 2 is a diagram illustrating a stacked state of a vibrator according to the first embodiment.

FIG. 3 is a diagram illustrating a polarization state of the vibrator according to the first embodiment.

FIG. 4 is a diagram showing a stacked state of transducers according to the second embodiment.

FIG. 5 is a diagram showing a polarization state of the vibrator according to the second embodiment.

FIG. 6 is a diagram showing a stacked state of transducers according to a third embodiment.

FIG. 7 is a diagram showing a polarization state of the vibrator according to the third embodiment.

FIG. 8 is a perspective view showing an example of a vibrator of a conventional vibrating gyroscope.

9 is a cross-sectional view of the vibrator shown in FIG. 8, taken along IX-IX.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... vibrator 2 ... piezoelectric element plate 3, 4, 5 ... electrode film 6, 7 ... penetrating electrode 11 ... vibrator 12 ... vibrating body 13, 14 ... piezoelectric element 15 ... support member

Claims (10)

[Claims] 1. A vibrator for a vibrating gyroscope comprising a plurality of thin plate-shaped electro-mechanical energy conversion elements each having an electrode film formed on one side thereof, which are laminated and integrated in parallel with a longitudinal axis of the vibrator. 2. A thin plate-shaped electro-mechanical energy conversion element having an electrode film formed on one side is laminated in parallel with the longitudinal axis of the vibrator and integrated, so that a cross section orthogonal to the longitudinal axis is substantially square. A vibrator for a vibrating gyroscope, wherein a vibrator having a certain rectangular parallelepiped shape is formed. 3. The continuity of an electrode film formed on a thin plate-shaped electro-mechanical energy conversion element according to claim 1 or 2, wherein conduction of an electrode film formed on the thin sheet-shaped electro-mechanical energy conversion element is formed in a thickness direction of the thin plate-shaped electro-mechanical energy conversion element. A vibrator for a vibrating gyroscope using a through electrode. 4. A vibrator for a vibrating gyroscope according to claim 3, wherein a through electrode formed in a thin plate-shaped electro-mechanical energy conversion element located at the outermost layer is used for electrical connection with the outside. . 5. The thin plate-shaped electric motor according to claim 1, wherein the first region for generating the first vibration mode and the second region for detecting displacement of the second vibration mode are different from each other. A vibrating gyroscope provided on a mechanical energy conversion element. 6. The thin plate-shaped electric motor according to claim 1, wherein the first region for generating the first vibration mode and the second region for detecting the displacement of the second vibration mode are provided.
A vibrating gyroscope provided on a mechanical energy conversion element. 7. The method according to claim 1, wherein the generation or detection of one vibration mode uses a piezoelectric effect in a plane direction of a thin plate-shaped electro-mechanical energy conversion element, and the generation or detection of the other vibration mode. Is a vibrator of a vibrating gyroscope using a piezoelectric effect in the thickness direction of a thin plate-shaped electro-mechanical energy conversion element. 8. The device according to claim 1, wherein a plurality of electrode films parallel to the longitudinal axis of the vibrator are formed on the thin plate-shaped electro-mechanical energy conversion element, and the plurality of electrode films are formed by the action of the piezoelectric effect in the in-plane direction. A vibrator for a vibrating gyroscope. 9. The thin film electro-mechanical energy conversion element according to claim 1, wherein a plurality of electrode films orthogonal to the longitudinal axis of the vibrator are formed on the thin plate-shaped electro-mechanical energy conversion element, and the plurality of electrode films are formed by the action of the in-plane piezoelectric effect. A vibrator for a vibrating gyroscope. 10. The method according to claim 1, wherein the first vibration mode is a first-order bending vibration mode, and the second vibration mode is orthogonal to the first vibration mode.
A piezoelectric vibrating gyroscope vibrator characterized by the following bending vibration.