JPH10180691A - Reference hole punch for soft sheet including ceramic green sheet and flexible substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To efficiently and accurately punch reference holes in place in a soft sheet fed from a supply mechanism to a take-up mechanism freely corresponding to pitch intervals of the holes for allowing the subsequent process of obtaining plural printed boards based on the holes, by correcting a slack of the sheet being fed. SOLUTION: A soft sheet X is fed from a supply mechanism 3 to a take-up mechanism 4 by fixed lengths so as to be situated at its positions to be punched corresponding to plural reference hole punch units 1. At every feeding, a tension mechanism 5 is moved only a slight length in the X-axis direction to fix the sheet X and correct a slack thereof. The slight movement is continued until a sensor means arranged on the tension mechanism 5 detects predetermined tension to correct a slack of the sheet X including a ceramic green sheet and a flexible substrate. The plural reference hole punch units 1 are then moved in the X-axis and the Y-axis directions to punch reference holes in the sheet X in cooperation with each other at predetermined diagonal corners, based on which plural printed boards are obtained in the subsequent process.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a punching machine for a soft sheet such as a ceramic green sheet or a flexible substrate, and more specifically, a plurality of soft sheets wound in a roll are taken out in a subsequent step while being fed out. The present invention relates to a reference hole drilling machine for drilling reference holes at diagonal corners or the like of each printed circuit board.

[0002]

2. Description of the Related Art Conventionally, as a punching device for punching while feeding a soft sheet such as a ceramic green sheet or a flexible substrate wound in a roll shape, for example, Japanese Patent Publication No. 7-4
No. 7279 (the former) and Japanese Patent Publication No. 7-47280 (the latter) are known. Both the former and the latter are basically a winding mechanism (winding roll) provided on the other side while feeding a roll-shaped soft sheet provided on one side of the machine base in the X-axis direction by a feeding mechanism (feeding roll). This is a structure in which a boring unit is used to pierce the soft sheet in a portion to be pierced between the feeding mechanism and the winding mechanism while winding. The advantage of these perforating devices is that since the perforation is performed while feeding out the soft sheet wound in a roll shape, the work before cutting the soft sheet into a plate shape is unnecessary, and the productivity can be greatly improved.

[0003]

By the way, although the feeding mechanism (feeding roll) and the winding mechanism (winding roll) are driven in synchronization with each other, there is a slight loosening and the feeding mechanism (feeding roll). ), The soft sheet between the take-up mechanism (take-up roll) and the soft sheet between the pay-out mechanism (take-up roll) and the take-up mechanism (take-up roll) are loosened. For this reason, in the prior art, the suction method in which the soft sheet portions on both sides are slightly lifted directly above the perforator unit is used, and as a result, it is impossible to accurately cope with the difference in the amount of slack based on the difference in material, and the perforation accuracy is reduced. . In order to correct this, it is necessary to measure the amount of slack for each material of the soft sheet at the separation distance between the feeding mechanism and the winding mechanism, and to dispose the vacuum body at a height position corresponding to the measured amount. It is troublesome to respond.

[0004] The present invention has been made in view of such circumstances, and an object thereof is to correct a slack of a soft sheet between a feeding mechanism and a winding mechanism to take a large number of pieces. To provide a reference hole drilling machine for a soft sheet such as a ceramic green sheet or a flexible substrate, which efficiently and accurately drills a reference hole according to a pitch interval of a reference hole at a regular position of each printed circuit board. It is in.

[0005]

The technical means taken to achieve the above object is as follows. A first feature is a feeding mechanism for feeding a soft sheet such as a ceramic green sheet or a flexible substrate in the X-axis direction, and a roll-out mechanism. A winding mechanism for winding in a shape, a plurality of reference hole piercing units which are arranged in parallel between the unwinding mechanism and the winding mechanism and are controllably movable in the Y-axis direction and the X-axis direction, A tension mechanism for fixing the soft sheet between the feeding mechanism and the winding mechanism and removably fixing the sheet in the X-axis direction, and the tension mechanism is configured to move in the X-axis direction when a predetermined soft sheet tension is detected. The gist of the invention is to provide a sensor means for stopping the fine movement. Claim 2 is claim 1
The tension mechanism described above comprises a pair of approachable / separable clamp arms for vertically sandwiching a soft sheet with respect to the X-axis direction and an approachable / separable clamp arm, and a tension moving mechanism for finely moving a support portion of the clamp arm in the X-axis direction. And the support portion and the tension moving mechanism are provided between the support portion and the support portion.
A moving mechanism for correcting movement which is controlled and moved in the axial direction, and a variable clamping force mechanism which is provided on the clamp arm and forms a fixed state in which the flexible sheet is clamped and a semi-fixed state in which the flexible sheet is partially clamped with a clamping force weaker than the clamping force. The machine has edge detection means for detecting the edge of the soft sheet,
The unwinding mechanism and the winding mechanism are configured to be controllably movable in the Y-axis direction, and the clamping force variable mechanism is configured to protrude a projection, which is accommodated in the clamp arm so as to be freely rotatable in a circumferential direction, in a soft sheet direction. The feeding mechanism and the winding mechanism are controlled and moved in the Y-axis direction in the semi-fixed state based on the output signal of the edge detecting means. According to a third aspect of the present invention, the feeding mechanism and the winding mechanism are controlled and moved in the Y-axis direction in the semi-fixed state based on the output signal of the edge detecting means. In the fixed state, the moving mechanism for correction movement, the feeding mechanism, and the winding mechanism are Y
The gist is to be controlled and moved in the axial direction.

According to the above technical means, the following effects are obtained. (Claim 1) A fixed amount is fed so that a portion to be pierced of a soft sheet is opposed to a plurality of piercing tool units for reference holes while being fed by a feeding mechanism and wound by a winding mechanism. Each time, the soft sheet is finely moved in the X-axis direction by a tension mechanism so as to correct the slack by fixing the soft sheet. The fine movement is performed until the sensor means provided in the tension mechanism detects a predetermined tension, and corrects looseness of a soft sheet such as a ceramic green sheet or a flexible substrate. And
A plurality of reference hole punching tool units are controlled to move in the X-axis direction and the Y-axis direction, and pierce the reference hole by sharing the diagonal corners of the printed circuit boards that are to be formed in a large number in a later step. (Claim 2) The fixing (clamping) of the soft sheet with the clamp arm between the feeding mechanism and the winding mechanism can produce a fixed state of completely clamping and a semi-fixed state of clamping with a smaller force. it can. In the semi-fixed state, the soft sheet retreats the protruding member that is freely rotatable in the circumferential direction against the urging force of the spring, and the repulsive force of the spring gives the semi-fixed force of the soft sheet. This semi-fixing force gently presses the soft sheet, and controls the feeding mechanism and the winding mechanism in the Y-axis direction based on the output signal of the edge detecting means (specifically, for example, the feeding mechanism,
Θ when one of the winding mechanisms is controlled to move in the plus Y axis direction and the other is controlled to move in the minus Y axis direction).
It becomes a fulcrum of rotation of the soft sheet in the direction. Therefore, when the soft sheet is displaced in the θ direction in plan view due to friction with the reference hole drilling tool at the time of drilling the reference hole, the correction can be performed without causing wrinkles in the soft sheet. (Claim 3) In addition, even when the soft sheet may move in parallel in the Y-axis direction due to friction with the reference hole drilling tool at the time of drilling the reference hole, the edge is detected in a fixed state in which the soft sheet is sandwiched. Based on the output signal of the means, the moving mechanism for correction movement, the feeding mechanism, and the winding mechanism are respectively shifted in the plus or minus direction by Y.
The same amount of control movement is performed in the axial direction at the same time, and even if there is a displacement in the Y-axis direction in plan view, it is corrected.

[0007]

Next, an embodiment of the present invention will be described with reference to the drawings. 1 to 8 illustrate an embodiment of a reference hole drilling machine for a soft sheet such as a ceramic green sheet or a flexible substrate with reference to the drawings. Reference numeral A denotes a reference hole opening machine, 1 denotes a reference hole piercing unit, 2 denotes an edge detecting means, 3 denotes a feeding mechanism, 4 denotes a winding mechanism, and 5 denotes a tension mechanism.

In the present embodiment, the reference hole drilling unit 1 is shown as having two axes arranged side by side in the X-axis direction.
As shown in the figure, the reference surface (mounting surface) of the machine base 31 having a stepped portion with the horizontal reference surface (mounting surface) 21 as the upper surface formed at an intermediate height has X
It is provided so as to be controllably movable in the X-axis direction and the Y-axis direction via the axis moving mechanism 41 and the Y-axis moving mechanism 51.

Although not shown in the drawing, the reference hole piercing unit 1 has a U-shape in a side view, and a central space is a transfer space 11 for a work X (soft sheet), and the transfer space 11 is sandwiched therebetween. A punch 1 'is buried in the upper arm portion facing the above, and a die (not shown) is buried in an upper portion of the lower arm portion facing the punch 1' so as to be flush with the upper surface.
Of course, punches and dice are interchangeable. Each of the reference hole piercing tool units 1 is provided with a CCD camera for centering. It should be noted that the reference hole punching unit 1 is not limited to a punch, but may be a drill or a punching type.

The Y-axis moving mechanism 51 moves the above-described reference hole piercing tool unit 1 in the Y-axis direction. As shown in FIG. 3, the Y-axis moving mechanism 51 is spaced from the reference surface (mounting surface) 21 in the X-axis direction. The Y-axis guide members 51b, 51b guided by the Y-axis guide shafts 51a, 51a provided in parallel are rotated forward and reverse by a drive source (servo motor, etc.) 51c provided on the reference surface (mounting surface) 21. The reference hole drilling unit 1 is controlled in the Y-axis direction via an X-axis moving mechanism 41 provided over the guide members 51b and 51b. I have.

The X-axis moving mechanism 41 moves the above-described reference hole piercing tool unit 1 in the X-axis direction. The Y-axis moving mechanism 51 has a parallel Y-axis guide body 51b. The first X-axis guide shafts 41a, 41a, the support 41b for the reference hole drilling unit 1 through which the first X-axis guide shafts 41a, 41a penetrate, and the support between the first X-axis guide shafts 41a, 41a Y through body 41b
Screw rod 41c spanning the axis guide bodies 51b, 51b
And a drive source 41d provided for each of the supports 41b. The X-axis moving mechanism 41 has a support 41
The reference hole punching units 1 and 1 are individually supported so as to be movable in the Y-axis direction. The drive source 41
d has a mechanism in which the driving force of an actuator such as a servomotor is transmitted to a pulley and a sprocket screwed to the screw rod 41c. Using the 1X axis guide shafts 41a as guides, each of the reference hole drilling units 1 and 1 can be individually controlled and moved in the X axis direction.
Reference numeral 61 denotes a reference hole piercing tool unit 1, each of which is a support 41.
This is a Y-axis motor for correction that makes fine movement in the Y-axis direction with respect to b and 41b.

The unwinding mechanism 3 rotatably provides a winding shaft 13 of a soft sheet X such as a ceramic green sheet or a flexible substrate wound in a roll shape, and has a feed roller 23 downstream of the winding shaft 13. .

The winding mechanism 4 functions symmetrically with the unwinding mechanism 3, and has a feed roller 14 on the upstream side.
Further, a winding shaft 24 of the soft sheet X is provided on the downstream side.

The feeding mechanism 3 and the winding mechanism 4 are each driven by a motor, and as shown in the figure, are mounted on bases 33 and 34 which can be individually controlled and moved in the Y-axis direction with respect to the reference surface (mounting surface) 21. Supported.

The mechanism for controlling and moving each of the stands 33 and 34 in the Y-axis direction has a well-known structure in which the thread bar is moved in the Y-axis direction by rotating the thread bar forward and backward with a servo-type motor.

Reference numeral 6 denotes a pinch roller, which is supported by a drive source (for example, a cylinder) so as to be able to move up and down and has a function of measuring a winding amount (feed amount) of the soft sheet X. The edge detecting means 2 is a linear sensor or the like installed at a position above the reference hole piercing tool units 1 and 1, and detects the edge (long side) of the soft sheet X.

As shown in FIGS. 1, 2, 4 and 5, the tension mechanism 5 is arranged on the upstream side of the unit 1, 1 so as to sandwich the drill unit 1 for the reference hole with the pinch roller 6. A pair of upper and lower clamp arms 15, 15 disposed on the
And a tension moving mechanism 45 for finely moving the support portion 35 of the pair of upper and lower clamp arms 15 and 15 in the X-axis direction, and a correction moving mechanism provided between the tension moving mechanism 45 and the support portion 35. 55, a fixed state in which the soft sheet X is held, a holding force variable mechanism 65 for half-holding the soft sheet X with a holding force weaker than the holding force, and an X-axis direction when a predetermined tension of the soft sheet X is detected. And a sensor means 75 for stopping the fine movement.

The clamp arms 15, 15 are formed by a pair of upper and lower horizontal strips which are perpendicular to the X-axis direction and can be approached and separated from each other, and are supported by a support portion 35 having a substantially upward U-shape in side view as shown in FIG. Have been. The supporting part 35 is a parallel piece 35
a and 35a are provided with Z-axis actuators (linear motors, servomotors, etc.) 25 at the upper end thereof, and a guide space 35c is provided below the Z-axis actuator to contact the upper clamp arm 15 with the lower clamp arm 15; The drive shaft 25a of the actuator 25 is connected to the upper clamp arm 15.

The Z-axis actuator 25 is controlled so as to make a fixed state where the opposing faces of the clamp arms 15 and 15 are indirectly contacted with the soft sheet X therebetween and a semi-fixed state which will be described later.

As shown in FIG. 4, the correction movement moving mechanism 55 includes a fixing base 55a, and a nut portion vertically suspended from the bottom piece 35d of the support portion 35.
55b, a screw bar 55c provided along the Y-axis direction on the fixed base 55a and screwed into the nut portion 55b, and a drive source (for example, a servomotor) 55d for rotating the screw bar 55c.

The fixed base 55a is a vertical body 55e having a hollow inside.
Are suspended along the Y-axis direction, and a support portion 35 is provided on the upper surface.
The guide rail 55f projects in the Y-axis direction, and the guide rail 55f supports the support portion 35 so as to be movable in the Y-axis direction.

A drive source for the Y-axis direction control movement of the moving mechanism 55 for correcting movement, the feeding mechanism 3 and the feeding mechanism 4 is linked to the edge detecting means 2 described above.

As shown in FIGS. 1, 2, and 4, the tension moving mechanism 45 is supported in parallel with the reference surface (mounting surface) 21 in the X-axis direction and is a front portion and a rear portion of the hanging member 55e. , A second X-axis guide shaft 45a penetrating therethrough, a screw rod 45b screwing and penetrating an intermediate portion of the hanging member 55e, and a driving source 45c housed in the hanging member 55e.

The driving source 45c has a mechanism in which the driving force of an actuator such as a servomotor is transmitted to a pulley or a sprocket screwed to the screw rod 45b, similarly to the X-axis moving mechanism 41. Thus, the support portion 35 having the pair of upper and lower clamp arms 15, 15 is slightly moved in the X-axis direction using the second X-axis guide shaft 45a as a guide to apply tension to the soft sheet X.

The sensor means 75 is provided in the guide space described above.
A strain gauge 75b is fixed to a flexure element 75a which is erected from the bottom of 35c and whose upper end is fixed to the lower clamp arm 15,
The strain gauge 75b is linked to the control unit Y.

The variable clamping force mechanism 65 is provided at the center of the upper and lower clamp arms 15, 15, as shown in FIGS. This clamping force variable mechanism 65 is provided for each clamp arm 1
A protruding member 65a projecting from the opposing surface of 5, 5 is rotatably supported (can rotate freely in the circumferential direction) by guide means 65b such as a linear guide, and a spring (compression spring) 65 provided with the protruding member 65a interposed therebetween.
When the urging force is applied in the protruding direction at c and the urging force is pressed against the reaction force of the spring 65c, the protruding elements 65a
b, a structure in which it is immersed in a housing case 65d that houses a spring (compression spring) 65c. ).

The control unit Y includes a ROM for storing a predetermined control program for perforating the soft sheet X, a RAM for storing data required for a perforation pattern and the like required for arithmetic processing, and a control program based on the data. CPU to be executed and drive sources of the feeding mechanism 3 and the winding mechanism 4,
Drive source in the axial direction, edge detection means 2, clamp arm
15, 15 tension movement mechanism 45, correction movement movement mechanism 5
5, variable clamping force mechanism 65, pinch roller 6, sensor means 7
5, the X-axis moving mechanism 41 of the drilling unit 1 for each reference hole,
Each interface such as a Y-axis moving mechanism 51 is provided.

In the above-described soft green sheet punching machine for a ceramic green sheet, a flexible substrate or the like, first, the soft sheet X wound in a roll shape is fed onto the feed roller 23 of the feeding mechanism 3 by the clamp arm.
The free end is passed through the feed roller 14 of the winding mechanism 4 between the reference holes 15 and 15, the reference hole punch unit 1 and the individual transfer spaces 11 and 11, between the pinch roller 6 and the receiving roller 16, and twenty four
Wrap around.

Next, when the apparatus itself is operated, the edge detecting means 2 detects both side portions (long edge portions) of the soft sheet X, raises the pinch roller 6 to separate it from the soft sheet X, and feeds out the mechanism 3 and the winding mechanism. By actuating the drive source for control movement in the Y-axis direction of the take-up mechanism 4, the feed-out mechanism 3 and the take-up mechanism 4 are individually controlled to move in the plus or minus direction in the Y-axis direction to reduce the positional deviation in the θ direction in plan view. Correct (FIG. 7B). Next, a pair of upper and lower clamp arms 1
The soft sheet X is pinched (fixed state) by 5 and 15, and the tension moving mechanism 45 is operated to apply tension to the soft sheet X. The fine movement of the soft sheet X is performed until the value obtained by electrically converting the amount of strain by the strain gauge 75b reaches a predetermined tension value stored in the control unit Y. The predetermined tension stored in the control unit Y differs depending on the material of the soft sheet X to be perforated, and is an optimal value that does not cause plastic deformation due to cutting by tension but also of course. Then, the reference hole 100 is drilled at the diagonal corner of each printed circuit board Z, which is shared by each of the reference hole punching tool units 1 and 1 in a later process. The feeding of the soft sheet X and the movement of the perforator units for reference holes 1 and 1 are relatively performed based on a control program. At the time of drilling, since the reference hole drilling tool units 1 and 1 each have a camera unit, the centering correction of the reference point is performed, and then the drilling is performed. This perforation is carried out every time the payout mechanism 3 and the take-up mechanism 4 carry out the constant-rate feeding and the constant-volume take-up. There is a case where it is slightly rotated in the direction (FIG. 7A) or is slightly moved in parallel in a plan view (FIG. 8A). At that time, since the edge detecting means 2 always detects both side portions (long edge portions) of the soft sheet X, the control section Y determines that the control section Y is slightly rotated in the θ direction in plan view based on the output signal. Clamp arm if judged
15 and 15, the pinch roller 6 is lifted up and separated from the soft sheet X, and the unwinding mechanism 3 and the winding mechanism 4 are operated by driving the drive source for the control movement in the Y-axis direction. Take mechanism 4 individually Y
The displacement in the θ direction in plan view is corrected by controlling the movement in the plus direction or the minus direction in the axial direction. At the time of this correction, wrinkles and the like are not generated on the soft sheet X since the protrusion 65a is freely rotatable in the circumferential direction (FIG. 7B). On the other hand, if the control unit X determines that it is finely moved in parallel in plan view based on the output signal, the pinch roller 6 is lifted while being pinched (fixed state), separated from the soft sheet X, and used for correction operation. The drive source for the control movement in the Y-axis direction in the moving mechanism 55, the feeding mechanism 3, and the winding mechanism 4 is simultaneously moved to the plus side or the minus side in the Y-axis direction by the same amount to correct the parallel positional deviation in plan view. (Figure 8
(B)).

The fine rotation in the θ direction in the plan view and the fine movement in the parallel direction in the plan view are performed after the perforation of the reference hole 100 by the soft sheet X.
Is fixedly fed, the soft sheet Y is again clamped by the clamp arms 15 and 15 and a predetermined tension is applied, and is sequentially performed before the next perforation.

In this way, the soft sheet X is fed out,
A plurality of reference holes 100 are punched in the diagonal corners of each printed circuit board Z, which is to be taken in a post-process, into a rolled soft sheet X while being wound up by a multi-axis reference hole punching unit 1. Make a hole.

The X-axis moving mechanism 41 is operated only when the reference hole piercing unit 1 is set at a pitch in the X-axis direction at which the reference hole piercing unit 1 is to be pierced. The reference hole 100 may be pierced by the operation of the axis moving mechanism 51 alone. Alternatively, the X-axis moving mechanism 41 and the Y-axis moving mechanism 51 may be combined with the reference hole piercing tool unit 1. .. May be provided for each reference hole, and the reference hole drilling unit 1 may independently control and move the reference hole 100 at the time of drilling. This can be dealt with by changing the control program.

[0033]

As described above, the present invention has the following advantages. (Claim 1) When a reference hole is formed in a diagonal corner or the like of each printed circuit board which is to be taken out in a later step while feeding out a soft sheet such as a ceramic green sheet or a flexible board wound in a roll shape, Since an optimal predetermined tension is applied to a soft sheet that loosens due to its own weight or its own weight to correct the looseness, the reference hole can be accurately drilled at a desired position. In addition, the plurality of drilling unit for the reference hole can be individually controlled and moved in the Y-axis direction and the X-axis direction, and the pitch of the reference hole can be freely adjusted, and the opening of the reference hole can be shared. Therefore, the reference hole can be efficiently drilled at a diagonal corner or the like of each printed circuit board, which is to be formed in a large number in a later step, while feeding out the soft sheet wound in a roll shape. (Claim 2) In addition, a tension mechanism for applying tension to the soft sheet includes a pair of upper and lower clamp arms, and a clamp accommodating a spring biased from the clamp arm toward the soft sheet so as to be freely rotatable in the circumferential direction. In the case of having a variable force mechanism, the protrusion serves as a fulcrum of rotation of the soft sheet in the θ direction in plan view, so that the soft sheet is semi-fixed by the clamping force variable mechanism based on the output signal of the edge detecting means, and By controlling and moving the feeding mechanism and the winding mechanism in the Y-axis direction, the displacement of the soft sheet in the θ direction in plan view can be corrected. Therefore, even if the soft sheet portion between the feeding mechanism and the winding mechanism may rotate in the θ direction in a plan view due to the friction of the punching tool for the reference hole and the like, the wrinkle is generated on the soft sheet. The positional deviation can be corrected without causing a perforation error factor. (Claim 3) Further, since the tension mechanism for applying tension to the soft sheet is controlled to move in the Y-axis direction, the soft sheet is held by the pinching force variable mechanism based on the output signal of the edge detecting means. In the fixed state, the movement mechanism for correction movement, the unwinding mechanism, and the winding mechanism are controlled and moved in the Y-axis direction, so that the friction between the unwinding mechanism and the winding mechanism is caused by the friction of the punching tool for the reference hole. When the soft sheet portion is displaced in parallel when viewed from above, it can be corrected, and the reference hole can be correctly formed in the soft sheet at a regular perforated position as in the second aspect.

[Brief description of the drawings]

FIG. 1 is a front view of a reference hole opening machine.

FIG. 2 is a plan view of a reference hole drilling machine.

FIG. 3 is an enlarged perspective view of a piercing tool unit for a reference hole.

FIG. 4 is an enlarged side view of a tension mechanism portion, which is partially cut away.

FIG. 5 is an enlarged view of a main part of the tension mechanism, wherein (a) shows a state in which the tension mechanism is not clamped, (b) shows a semi-fixed state, and (c)
Indicates a fixed state.

FIGS. 6A and 6B schematically show front views when tension is applied. FIG. 6A shows a state before tension is applied, and FIG. 6B shows a state where tension is applied.

FIGS. 7A and 7B are schematic front views when correcting a deviation of the soft sheet in the θ direction in a plan view, wherein FIG.
Indicates a corrected state.

FIG. 8 is a schematic front view showing a state in which the soft sheet is displaced in the Y-axis direction. FIG.
Indicates a corrected state.

[Explanation of symbols]

A: Reference hole opening machine X: Soft sheet 3: Feeding mechanism 4: Winding mechanism 1: Punching unit for reference hole 5: Tension mechanism 2: Sensor means 15, 15: Clamp arm 35: Supporting part 45: Tension moving mechanism 55: Moving mechanism for correcting movement 65: Variable clamping force mechanism 2: Edge detecting means 65a: Protrusion 65c: Spring 31: Machine base 6: Pinch roller

Claims (3)

[Claims] An unwinding mechanism for unwinding a soft sheet such as a ceramic green sheet or a flexible substrate in the X-axis direction, a winding mechanism for winding the same in a roll shape, and a parallel between the unwinding mechanism and the winding mechanism. A plurality of piercing tool units for reference holes arranged and controllably movable in the Y-axis direction and the X-axis direction, and a soft sheet between the feeding mechanism and the winding mechanism are fixed and can be unlocked for fine movement in the X-axis direction. Such as a ceramic green sheet, a flexible substrate, and the like, wherein the tension mechanism has a sensor means for stopping fine movement in the X-axis direction when the tension of the predetermined soft sheet is detected. Standard hole drilling machine for soft sheets. 2. A tension mechanism, comprising: a pair of approachable / separable clamp arms for vertically sandwiching a soft sheet with respect to an X-axis direction and capable of approaching / separating from each other; and finely moving a support portion of the clamp arm in the X-axis direction. A moving mechanism for tension, a moving mechanism for correcting movement provided between the support section and the moving mechanism for tension and controlling and moving the supporting section in the Y-axis direction, and a fixed state provided on the clamp arm for clamping a soft sheet; A gripping force variable mechanism for creating a semi-fixed state in which the soft sheet is half-clamped with a clamping force weaker than the clamping force, the machine base has edge detecting means for detecting an edge of the flexible sheet, and a feeding mechanism, winding mechanism The take-off mechanism is configured to be controllably movable in the Y-axis direction, and the clamping force variable mechanism is configured to move the protrusion accommodated in the clamp arm so as to freely rotate in the circumferential direction in the soft sheet direction. 2. The feeding mechanism and the winding mechanism are controlled in the Y-axis direction in the semi-fixed state based on an output signal of the edge detecting means, wherein the feeding mechanism and the winding mechanism are configured to be biased by a spring so as to protrude. Reference hole puncher for soft sheets such as ceramic green sheets and flexible substrates described in the above. 3. The apparatus according to claim 2, wherein the feeding mechanism and the winding mechanism are controlled and moved in the Y-axis direction in the semi-fixed state based on an output signal of the edge detecting means. Moving mechanism for correction movement in fixed state,
3. The machine according to claim 2, wherein the feeding mechanism and the winding mechanism are controlled and moved in the Y-axis direction.