JPH10166256A - Wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the deviation and deflection of a cutting wire at the beginning of cutting work. SOLUTION: Three working rollers 13, 14 and 17 are arranged at the peaks of an inverse triangle and a wire 15 is wound at a preset pitch among three rollers. Slurry containing loose abrasive grains is supplied onto the wire while the wire is running, and a work 21 is put in contact with the wire 15 to perform cutting work. The lowest working roller 17 is moved down at the beginning of cutting work for the work 21 to tense the wire 15.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw for cutting a workpiece made of a hard and brittle material such as a semiconductor material, a magnetic material, and a ceramic using a wire.

[0002]

2. Description of the Related Art In a wire saw of this type, a plurality of processing rollers are disposed at predetermined intervals, and a plurality of annular grooves are formed at a predetermined pitch on the outer periphery of the rollers. In addition, one wire is sequentially wound around the annular groove between the processing rollers. Then, while the wire is running, an aqueous or oily slurry containing loose abrasive grains is supplied onto the wire, and in this state, the work is pressed against the wire and brought into contact with the wire so that the work is cut into a slice. It has become.

[0003]

A wire saw of this kind is usually used for cutting a hard brittle material to a thickness of 1 mm or less. It is important to keep the wire tension at a predetermined value. If these conditions are not ensured, high precision processing cannot be achieved. The problem here is the phenomenon of wire deflection / bending, which is most noticeable at the start of operation. In a general wire saw, a tension adjusting mechanism is provided on a wire path between a reel of the wire and a processing roller to absorb fluctuations in the tension of the wire.

However, not only is there a considerable distance between the processing roller and the tension adjusting mechanism, but also because the wire is wound around the processing roller a number of times, the deflection and deflection generated at the processing roller portion are reduced. There was a time lag in the response for adjusting the tension, and the function of correcting this with sufficient accuracy was not performed.

[0005] The present invention has been made by paying attention to such problems existing in the prior art. An object of the present invention is to provide a wire saw having a function with high accuracy, for example, in correction of deflection and deflection of a cutting wire generated at the start of operation.

[0006]

According to the first aspect of the present invention, a wire is wound at a predetermined pitch between a plurality of processing rollers, and the wire is run while the wire is running. In a wire saw, a slurry containing free abrasive grains is supplied thereon, and a workpiece is brought into contact with a wire to perform cutting.
The gist of the invention is that the processing roller of the book can be moved in the tension direction of the wire by the operation of the driving means.

According to the second aspect of the present invention, the processing roller is disposed at each vertex of the inverted triangle, and the lowermost processing roller is moved in the wire tension direction. The gist of the present invention is that the movement of the processing roller for tensioning the wire is performed at the start of the processing on the workpiece.

[0008] In the wire saw according to the first aspect, since the position where the tension is adjusted on the wire and the cutting portion are close to each other, the accuracy of the tension adjusting function can be easily increased.

Further, since the above-mentioned tension adjustment is performed by the processing roller which rotates in conjunction with the movement of the wire, no extra mechanism is required. According to the second aspect, the portion that imparts tension to the wire is disposed at a position equidistant from both sides of the cutting portion. For this reason, the tension is applied to the cutting portion in a well-balanced manner.

[0010] In the wire saw according to claim 3,
Since the wire is tensioned at the start of processing in which the wire is displaced or bent, the load on the wire is reduced.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS.

As shown in FIGS. 1 and 2, the cutting mechanism 1
1 is mounted on an apparatus table 12. This cutting mechanism 11
Is formed by three processing rollers 13, 14, 17 disposed at the positions of the vertices of the inverted triangle. The three processing rollers 13, 14, and 17 are simultaneously rotated in the same direction by driving a motor (not shown) in the box 10 and running the wire 15. Annular grooves 13a, 14a, 17a are formed on the outer circumference of each of the rollers 13, 14, 17 at a predetermined pitch. In the drawings, the number of annular grooves 13a, 14a, and 17a is smaller than the actual number to facilitate understanding. The wire 15 made of one wire is connected to each of the annular grooves 13a, 14 of the processing rollers 13, 14, 17.
a, 17a. The rotation of the processing rollers 13, 14, and 17 causes the wire 1
5 travels at a predetermined traveling speed. The traveling of the wire 15 is repeated such that the wire 15 repeatedly moves forward (for example, 10 m) and retreats a certain amount (for example, 9 m), and moves forward as a whole.

A work supporting mechanism 19 is supported by a column 20 arranged on the apparatus base 12 so as to be vertically movable so as to be located above the cutting mechanism 11, and a work 21 made of a hard and brittle material is provided below the work supporting mechanism 19. Is set detachably. The work elevating motor 22 is disposed on the column 20, and the work support mechanism is vertically moved by the motor 22 via a ball screw (not shown) or the like. The slurry supply mechanism 34 is disposed above the cutting mechanism 11 and has a plurality of slurry supply pipes 35 extending in parallel with the processing rollers 13 and 14 on both front and rear sides of the work 21.

During operation of the wire saw, the work supporting mechanism 19 is lowered toward the cutting mechanism 11 while the wire 15 is running between the processing rollers 13 and 14 of the cutting mechanism 11. At this time, an aqueous or oily slurry containing loose abrasive grains is supplied from the slurry supply pipe 35 of the slurry supply mechanism 34 onto the wire 15, and the work 21 is pressed against the wire 15 to come into contact therewith. 21 is cut into a slice.

A reel mechanism 23 is mounted on the apparatus base 12, and is used to feed out a wire 15 from the payout reel 2.
4 and a winding reel 25 for winding the wire 15. A pair of reel rotation motors 26 and 27 whose rotation direction and rotation speed can be changed are provided on the apparatus base 12, and reels 24 and 25 are connected to their motor shafts via a transmission mechanism (not shown). .

The traverse mechanism 28 includes the reel mechanism 23
And a take-up reel 25 for dispensing the wire 15 from the pay-out reel 24
The wire 15 is guided while being traversed up and down. The rotation of the two reels 24 and 25 of the reel mechanism 23 causes the wire 15 to be paid out from the pay-out reel 24 to the cutting mechanism 11, and the processed wire 15 is taken up by the take-up reel 25.

The tension applying mechanism 29 and the guide mechanism 30
It is arranged between the reel mechanism 23 and the cutting mechanism 11. Then, the processing rollers 13 and 14 of the cutting mechanism 11
Both ends of the wire 15 wound between them are hung on the tension applying mechanism 29 via the respective guide rollers 31 of the guide mechanism 30. In this state, a predetermined tension is applied to the wire 15 between the processing rollers 13 and 14 by the tension applying mechanism 29.

As shown in FIG. 3, the lowermost processing roller 17 is supported on a base 64 via a pair of stays 64a. The pedestal 64 has a screw cylinder 65 fixed to both ends thereof. A pair of servomotors 63 are fixed on the device base 12, and screws 66 are rotatably connected to their output shafts via bearings 66a.
6 is screwed into the screw cylinder 65. The pedestal 64 is moved up and down by the rotation of the servo motor 63.
Stoppers 67 are attached to both ends of the pedestal 64, and when these stoppers 67 come into contact with abutments 69 provided on the apparatus frame 68, the upper limit of the pedestal 64 is restricted. Therefore, the lowermost processing roller 17 is independent of the other processing rollers 13 and 14 and is independent of the apparatus base 1.
2 can be moved up and down within a certain range.

In this wire saw, the wire 15 is unwound from the unwinding reel 24 of the reel mechanism 23, travels stepwise between the processing rollers 13, 14, 17 of the cutting mechanism 11, and then takes up the winding reel. It is wound by 25. Then, while the slurry containing loose abrasive particles is supplied from the slurry supply pipe 35 of the slurry supply 34 onto the wire 15 between the processing rollers 13 and 14, the work 2
1 is pressed into contact. Thereby, the work 21 is cut to a predetermined thickness.

At the start of the operation of the above-mentioned cutting apparatus, the processing roller 17 is only used for a preset time.
Moves downward with respect to the apparatus main body by driving the servo motor 63 to increase the wire tension. Therefore, immediately after the start of the operation, the movement and the bending of the wire which are temporarily generated by the pressing of the work 21 against the wire 15 are suppressed. The preset time is preferably about several tens of seconds. Thereafter, the processing roller 17 is raised and returned to a predetermined position, so that no unnecessary load is applied to the wire 15 by the processing roller 17.

The effects that can be expected from the above embodiment will be described below. (A) In the wire saw of this embodiment, since the wire 15 is pushed by the processing roller 17 at the processing position at the start of processing, the tension of the wire 15 is instantaneously increased without delay, and blurring and bending are prevented. Can be
The wire can be applied to the required position of the work 21,
High precision processing becomes possible.

(B) The operation of the processing roller 17 for adjusting the wire is a linear up and down movement, and the configuration of the apparatus is easy. (C) The tension change of the wire 15 due to the vertical movement is
Since the rotation is performed by the driving force of the servo motor 63, if the rotation amount of the servo motor 63 is adjusted, fine adjustment of the strength can be freely performed in applying the tension.

(D) Processing roller 1 for adjusting tension
Since the point at which the wire 7 acts on the wire is close to the work cutting portion where correction of deflection / deflection is required, the effect of adjustment is direct and high accuracy can be maintained.

(E) In addition, since the position of the processing roller 17 is located at the same distance from both sides of the cutting portion, a balanced tension state can be obtained. (F) The roller for tensioning the wire 15 is the processing roller 17 originally provided for guiding the wire 15. Therefore, no extra configuration is required and the configuration is simplified.

The present invention can be embodied with the following modifications. That is, (1) The number of processing rollers in the cutting mechanism is, for example, two, four, or more, and one of them is used for wire tension at the start of cutting.

(2) A processing roller at a position different from that of the above embodiment is used for applying tension. For example, a pair of upper rollers are used for applying tension. In this case, the pair of rollers are moved in a direction away from each other.

[0027]

The present invention is configured as described above, and has the following effects. According to the first aspect of the present invention, since deflection and bending of the wire are prevented, high-precision machining can be achieved, and an extra mechanism is not required, so that the configuration is simplified. According to the second aspect of the present invention, since tension can be applied to the wire in a well-balanced manner, it is possible to contribute to high-precision processing as described above. According to the third aspect of the present invention, since the tension is applied at the start of the processing in which the deflection of the wire is most likely to occur, the processing can be accurately started from a required position on the work, and the wire and the processing roller are extraneous. No stress.

[Brief description of the drawings]

FIG. 1 is a front view of a wire saw showing a first embodiment of the present invention.

FIG. 2 is a plan view of the wire saw.

FIG. 3 is a side view of a mechanism for vertically moving a processing roller.

[Explanation of symbols]

11: Cutting mechanism, 12: Device base, 13: Processing roller (left), 14: Processing roller (right), 13a, 14a ...
Annular groove, 15 ... wire, 16 ... wire running motor, 1
7: processing roller (lower), 17a: annular groove, 19: work support mechanism.

Claims (3)

[Claims] A wire is wound at a predetermined pitch between a plurality of processing rollers, and while the wire is running, a slurry containing loose abrasive grains is supplied on the wire, and a workpiece is brought into contact with the wire, A wire saw for performing a cutting process, wherein at least one processing roller is movable in a tension direction of the wire by operation of a driving unit. 2. The wire saw according to claim 1, wherein the processing roller is disposed at each vertex of the inverted triangle, and the lowermost processing roller is moved in the wire tension direction. 3. The wire saw according to claim 1, wherein the movement of the processing roller for tensioning the wire is performed at the time of starting the processing on the workpiece.