JPH10165965A - Treatment of ammonia-containing waste solution - Google Patents
Treatment of ammonia-containing waste solutionInfo
- Publication number
- JPH10165965A JPH10165965A JP35237896A JP35237896A JPH10165965A JP H10165965 A JPH10165965 A JP H10165965A JP 35237896 A JP35237896 A JP 35237896A JP 35237896 A JP35237896 A JP 35237896A JP H10165965 A JPH10165965 A JP H10165965A
- Authority
- JP
- Japan
- Prior art keywords
- ammonia
- liquid
- soln
- waste liquid
- waste
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Removal Of Specific Substances (AREA)
- Treatment Of Water By Oxidation Or Reduction (AREA)
- Catalysts (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明はアンモニア含有廃液
の処理に係り、特に、アンモニア及び／又はその塩を製
造又は使用する工業の廃液、又は化学洗浄に使用される
アンモニア又はその塩を含む洗浄廃液等のアンモニア分
を高濃度に含む廃液の処理方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the treatment of ammonia-containing waste liquid, and more particularly to industrial waste liquid for producing or using ammonia and / or its salt, or cleaning waste liquid containing ammonia or its salt used for chemical cleaning. The present invention relates to a method for treating a waste liquid containing ammonia at a high concentration.
【０００２】[0002]
【従来の技術】アンモニア及び／又はその塩は、金属表
面に付着した銅スケールや、各種の金属酸化物スケール
の除去を目的とする洗浄剤として、また、金属表面の錆
の発生を抑制することを目的とする防錆剤、保管剤とし
て広く一般に使用されている。これらの処理において、
洗浄後あるいは防錆後に排出される廃液にはアンモニア
が含まれており、この廃液を排出するに当たっては、海
水の富栄養化の一つの原因物質であるアンモニアを除去
することが必要である。従来アンモニアを含有する液の
処理には以下に示す手段が採られている。 （１）ストリッピング法により、アンモニアを放散さ
せ、少量の酸に吸収させる方法。 （２）硝化菌、脱窒素菌等の微生物によって分解する方
法。 （３）ＲＯ（逆浸透膜）を用いて濃縮分離する方法。 （４）塩素により分解する方法。 （５）活性炭を触媒として、塩素により分解する方法
（特開平７−２０４６６９号公報）。2. Description of the Related Art Ammonia and / or its salt are used as a cleaning agent for removing copper scale and various metal oxide scales adhered to a metal surface, and also to suppress generation of rust on a metal surface. It is widely and widely used as a rust preventive and storage agent for the purpose. In these processes,
The waste liquid discharged after washing or rust prevention contains ammonia. In discharging this waste liquid, it is necessary to remove ammonia, which is one of the substances causing eutrophication of seawater. Conventionally, the following means have been employed for treating a liquid containing ammonia. (1) A method in which ammonia is diffused by a stripping method and absorbed in a small amount of acid. (2) A method of decomposing by microorganisms such as nitrifying bacteria and denitrifying bacteria. (3) A method of performing concentration separation using RO (reverse osmosis membrane). (4) A method of decomposing with chlorine. (5) A method in which activated carbon is used as a catalyst to decompose with chlorine (JP-A-7-204669).
【０００３】このような処理方法においてはそれぞれ次
のような問題点があった。 （１）の場合、アンモニアは気相に放散させるため放散
されたアンモニアを回収する装置が必要となる。 （２）の場合、微生物の培養、装置設備費用の問題があ
り、一定条件下では低コストであるが、負荷変動のある
非定常廃液の処理としては実際的でない。 （３）の場合、簡単にアンモニアを濃縮分離処理できる
が、液の種類や液中の塩類濃度が高い（食塩で２％位）
場合、処理が困難となる。 （４）の場合、アンモニアの分解反応の完結が遅いた
め、反応系の処理装置、設備が大きくなり、また処理時
間が長いなど負荷が大きくなる。連続的な処理は難し
く、バッチ式処理法となる。 （５）は（４）の欠点を解決する為に、活性炭を触媒と
して用いることにより、反応の完結を短かくし、コンパ
クトな装置で連続処理を可能にする処理方法として提供
された方法である。この方法は、アンモニア含有濃度が
高い場合、反応当を２塔設け、２段処理を行う必要があ
る。[0003] Such processing methods have the following problems. In the case of (1), a device for recovering the released ammonia is required to diffuse the ammonia into the gas phase. In the case of (2), there is a problem of culturing microorganisms and equipment costs, and the cost is low under certain conditions. However, it is not practical as a treatment of an unsteady waste liquid having a load fluctuation. In the case of (3), ammonia can be easily concentrated and separated, but the type of liquid and the salt concentration in the liquid are high (about 2% in salt)
In this case, processing becomes difficult. In the case of (4), the completion of the decomposition reaction of ammonia is slow, so that the processing apparatus and equipment of the reaction system become large, and the load becomes large such as a long processing time. Continuous processing is difficult and requires a batch processing method. (5) is a method provided as a treatment method for shortening the completion of the reaction by using activated carbon as a catalyst in order to solve the disadvantage of (4) and enabling continuous treatment with a compact apparatus. In this method, when the ammonia concentration is high, it is necessary to provide two reactors and perform two-stage treatment.
【０００４】[0004]
【発明が解決しようとする課題】本発明は、上記従来技
術の問題点を解消し、触媒を用いる方法をさらに改良
し、よりコンパクトな装置で連続的に短時間で、廃液中
のアンモニア及び／又はその塩に起因する窒素分を分解
除去する処理方法を提供することを課題とする。SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems of the prior art, further improves the method using a catalyst, and continuously and in a short time with a more compact apparatus, to reduce ammonia and / or Alternatively, an object is to provide a treatment method for decomposing and removing nitrogen caused by a salt thereof.
【０００５】[0005]
【課題を解決するための手段】上記課題を解決するため
に、本発明では、アンモニア及び／又はその塩を含有す
る廃液中の窒素分を分解除去するアンモニア含有廃液の
処理方法において、該廃液に含有アンモニア分に対して
当量以上の塩素、塩素ガス又は酸化剤を添加して、該廃
液を、上部に液の滞留部を有し、下部に触媒の充填部を
有する反応塔に、上部から下向流で通し、アンモニアを
連続的に分解除去することとしたものである。本発明で
使用できる触媒は、活性炭、ゼオライト等、アンモニア
の分解速度を促進する物であればいずれでも良い。本発
明では、廃液中のアンモニア分が高濃度の場合でも、反
応塔は一段で処理できる。According to the present invention, there is provided a method for treating an ammonia-containing waste liquid which decomposes and removes nitrogen in a waste liquid containing ammonia and / or a salt thereof. An equivalent or more amount of chlorine, chlorine gas or an oxidizing agent is added to the contained ammonia component, and the waste liquid is transferred from the top to the bottom of a reaction tower having a liquid retention section at the top and a catalyst filling section at the bottom. It is to be passed countercurrently to continuously decompose and remove ammonia. The catalyst that can be used in the present invention may be any one that promotes the decomposition rate of ammonia, such as activated carbon and zeolite. In the present invention, even when the ammonia content in the waste liquid is high, the reaction tower can be treated in one stage.
【０００６】[0006]
【発明の実施の形態】このように、本発明は、アンモニ
ア及び／又はその塩を含有する廃液から窒素分を分解除
去するに際し、該廃液に含有アンモニア分に対して当量
以上の塩素、塩素ガス又は酸化剤、例えば、塩素酸、次
亜塩素酸ナトリウム、次亜塩素酸カリウム、次亜塩素酸
カルシウム、オゾン等を添加してから、反応塔でアンモ
ニアを分解処理するもので、反応塔には、上部に液の滞
留部を有し、下部に触媒の充填部を有し、液は上から下
へ流す下向流でおこない、触媒層上部に液の滞留部を設
けることによりアンモニア分が高濃度の場合でも、より
コンパクトな装置による連続処理が可能となったもので
ある。上記処理方法において、廃液中のアンモニア濃度
が高い（例えば、１，０００ｐｐｍ以上）場合は、触媒
層上部に設けた液の滞留部で大部分のアンモニアを分解
除去（塩素によるアンモニアの分解はアンモニア濃度が
高い場合、初期の分解は触媒が無くても十分に速い）し
た後、触媒層を通過させ残りのアンモニア分を分解除去
することができる。DETAILED DESCRIPTION OF THE INVENTION As described above, according to the present invention, when decomposing and removing nitrogen from a waste liquid containing ammonia and / or a salt thereof, chlorine or chlorine gas having an equivalent amount or more of the ammonia contained in the waste liquid is used. Or an oxidizing agent, for example, chloric acid, sodium hypochlorite, potassium hypochlorite, calcium hypochlorite, ozone, and the like, and then ammonia is decomposed in a reaction tower. The upper part has a liquid retention part, the lower part has a catalyst filling part, the liquid flows in a downward flow flowing from the top to the bottom, and the ammonia concentration is increased by providing a liquid retention part in the upper part of the catalyst layer. Even in the case of the concentration, continuous processing by a more compact device has become possible. In the above treatment method, when the concentration of ammonia in the waste liquid is high (for example, 1,000 ppm or more), most of the ammonia is decomposed and removed in the liquid retaining portion provided above the catalyst layer. When the ratio is high, the initial decomposition is sufficiently fast even without a catalyst), and then it is passed through a catalyst layer to decompose and remove the remaining ammonia.
【０００７】そして、上部の液の滞留部で大部分のアン
モニアが分解されるため、分解反応により発生するＮ2
ガスは、大部分は簡単に上部へ抜けて廃ガス系統へ送ら
れるため、触媒層にＮ2 ガスが滞留することが少なく、
触媒の効率の良い処理ができる。上記のように、本発明
ではアンモニア及び／又はその塩を含有する廃液を処理
するに際し、該廃液の処理後のｐＨを９以上に保つよう
予じめｐＨを調整した後、塩素を注入し、液の滞留部と
触媒の充填部を設けた反応塔へ下向流で流し、アンモニ
アを分解除去することにより、対象とするアンモニア濃
度が数千ｍｇ／リットルと高い場合でも反応塔１基によ
る連続処理が可能となり、窒素分濃度を１０ｍｇ／リッ
トル以下に処理できる。[0007] Since most of the ammonia is decomposed in the stagnation portion of the upper liquid, N 2 generated by the decomposition reaction is decomposed.
Most of the gas easily escapes to the upper part and is sent to the waste gas system, so that the N 2 gas does not stay in the catalyst layer,
The catalyst can be treated efficiently. As described above, in the present invention, when treating a waste liquid containing ammonia and / or a salt thereof, after adjusting the pH in advance to maintain the pH of the waste liquid after treatment at 9 or more, inject chlorine, It flows downflow to the reaction tower provided with the liquid storage part and the catalyst filling part to decompose and remove ammonia, so that even if the target ammonia concentration is as high as several thousand mg / liter, it can be continuously used by one reaction tower. Processing can be performed and the nitrogen concentration can be reduced to 10 mg / liter or less.
【０００８】次に、本発明を図面を用いて詳細に説明す
る。図１に、本発明の処理方法を行う装置の工程図を示
す。図１に示すように、予めアルカリでｐＨ調整した被
処理液１はポンプ６にて、塩素２はポンプ７にて同時
に、予め求めてある流量比にて反応塔３へ送り、まず液
滞留部４を通し、次に触媒層５で完全にアンモニアを分
解するよう構成したものである。１１は処理液である。
特に、被処理液のアンモニア濃度が高い場合には液滞留
部で大部分のアンモニアを分解すると共に、発生するＮ
2 ガスを上部へ逃がし、Ｎ2 ガスを触媒層へ持ち込まな
いよう構成したものである。また、液滞留部４には、ト
レイ１２、邪魔板、充填材等を設け、液の滞留時間を延
ばし、液の触媒への到達をできるだけ長くするのがよ
い。Next, the present invention will be described in detail with reference to the drawings. FIG. 1 shows a process diagram of an apparatus for performing the processing method of the present invention. As shown in FIG. 1, the liquid 1 to be treated, which has been adjusted in pH with an alkali, is simultaneously sent to the reaction tower 3 by a pump 6 and the chlorine 2 by a pump 7 at a previously determined flow ratio. 4 and then the catalyst layer 5 completely decomposes ammonia. Reference numeral 11 denotes a processing liquid.
In particular, when the ammonia concentration of the liquid to be treated is high, most of the ammonia is decomposed in the liquid stagnation section and the N
The structure is such that two gases are allowed to escape to the upper part and N 2 gas is not brought into the catalyst layer. Further, it is preferable that the liquid retaining section 4 is provided with a tray 12, a baffle plate, a filler, and the like, so that the liquid retaining time is extended and the liquid reaches the catalyst as long as possible.
【０００９】また、触媒層にガスが多量に溜まると、液
が均一に流れなくなり、アンモニアの分解が不完全とな
るが、上記のように、本発明では、液滞留部で発生する
ガスは、上部の排気口から排出されるため、触媒層へは
持ち込まれない。反応塔３の上部から排出されるガスの
廃ガス系には、排風機８を設け、強制的に排気し、廃ガ
ス吸着槽９、１０へ送り塩素ガス、アンモニアガスを吸
着させており、排ガス中の有害ガスを大気中に放出しな
いよう構成してある。廃ガス吸着槽の９は特に塩素ガ
ス、１０は特にアンモニアガスの吸着を対象としてい
る。Further, when a large amount of gas accumulates in the catalyst layer, the liquid does not flow uniformly, and the decomposition of ammonia becomes incomplete. However, as described above, in the present invention, the gas generated in the liquid retaining portion is Since it is discharged from the upper exhaust port, it is not carried into the catalyst layer. An exhaust fan 8 is provided in the waste gas system of the gas discharged from the upper part of the reaction tower 3 to forcibly exhaust and send the waste gas to the waste gas adsorption tanks 9 and 10 to adsorb chlorine gas and ammonia gas. It is configured not to release harmful gas in the atmosphere. The waste gas adsorption tank 9 specifically targets chlorine gas, and the target 10 specifically targets ammonia gas adsorption.
【００１０】[0010]
【実施例】以下、実施例により本発明を具体的に説明す
る。 実施例１ 被処理液として、アンモニア濃度２５０ｍｇ／リットル
の液を作成し、この液を表１に示す処理条件で、本発明
による処理を行い、アンモニア処理の効果を確認した。The present invention will be described below in detail with reference to examples. Example 1 A liquid having an ammonia concentration of 250 mg / liter was prepared as a liquid to be treated, and the liquid was treated according to the present invention under the treatment conditions shown in Table 1, and the effect of the ammonia treatment was confirmed.
【表１】 [Table 1]
【００１１】処理は図１に示すような装置により、まず
液のｐＨをＮａ2 ＣＯ3 でｐＨ１０．３に調整後、触媒
２００ｍｌを充填した直径４２ｍｍのカラムに通水し、
同時に次亜塩素酸ナトリウムをアンモニアに対して１．
０〜１．１当量連続添加しながら、４リットル／ｈおよ
び５リットル／ｈで通水して処理した。この時、触媒層
上部に２００ｍｌの液滞留部を設け、この液面を保持し
ながら通水した。アンモニアの処理効果は反応塔を通過
した液のアンモニア濃度及びＴ−Ｎの濃度を測定し確認
した。結果を表２に示す。In the treatment, the pH of the solution is first adjusted to pH 10.3 with Na 2 CO 3 using an apparatus as shown in FIG. 1, and then water is passed through a column having a diameter of 42 mm filled with 200 ml of the catalyst.
At the same time, sodium hypochlorite was added to ammonia for 1.
Water was passed at 4 l / h and 5 l / h for continuous addition of 0 to 1.1 equivalents for treatment. At this time, a 200 ml liquid retaining portion was provided above the catalyst layer, and water was passed while maintaining the liquid level. The effect of ammonia treatment was confirmed by measuring the ammonia concentration and the TN concentration of the liquid passed through the reaction tower. Table 2 shows the results.
【００１２】[0012]
【表２】 表２からわかるように、アンモニアは完全に分解され、
ＳＶ２５でもＴ−Ｎで５ｍｇ／リットル以下に処理で
き、顕著な効果が認められる。[Table 2] As can be seen from Table 2, the ammonia is completely decomposed,
Even SV25 can be treated with TN at 5 mg / liter or less, and a remarkable effect is recognized.
【００１３】実施例２ 被処理液として実施例１の１０倍の濃度のアンモニアを
作成し、表３に示すように、実施例１と同様の処理を行
った。また、比較例１として液滞留部を設けない場合
（図２）及び比較例２として液を下から上へ流す上向流
で行った場合（図３）の処理を同時に行った。処理の効
果は実施例１と同様に処理液のアンモニア濃度及びＴ−
Ｎの濃度を測定し確認した。処理条件を表３、処理結果
を表４に示す。Example 2 Ammonia having a concentration 10 times that of Example 1 was prepared as a liquid to be treated, and the same treatment as in Example 1 was performed as shown in Table 3. In addition, the processing in Comparative Example 1 in which the liquid retaining section was not provided (FIG. 2) and the processing in Comparative Example 2 in which the liquid was performed in the upward flow in which the liquid flowed from bottom to top (FIG. 3) were performed simultaneously. The effect of the treatment was the same as in Example 1, except that the ammonia concentration of the treatment liquid and T-
The N concentration was measured and confirmed. Table 3 shows the processing conditions, and Table 4 shows the processing results.
【００１４】[0014]
【表３】 [Table 3]
【００１５】[0015]
【表４】 [Table 4]
【００１６】表４からわかるように、本発明の方法によ
れば、被処理液のアンモニア濃度が２，５００ｍｇ／リ
ットルと高い場合でも、ＳＶ２５でＴ−Ｎを１０ｍｇ／
リットル以下に処理できる。液滞留部を設けない場合
（比較例１）や、上向流（比較例２）の処理ではアンモ
ニアが完全に分解されないまま通過し、処理液中に残留
する。アンモニアが完全に分解されない大きな原因とし
ては、分解により発生するガスが触媒層に溜まり、液の
ショートパスなどが起き、液と触媒の接触が均一に行わ
れないことに起因している。この様に、本発明によれば
数千ｍｇ／リットルという高濃度のアンモニアも短時間
で完全に分解し、連続して安定した結果が得られる顕著
な効果が認められる。前記実施例では、塩素源として次
亜塩素酸ナトリウムを用いているが、有効な塩素を発生
する次亜塩素酸塩であれば、これに限定されるものでは
ない。As can be seen from Table 4, according to the method of the present invention, even if the ammonia concentration of the liquid to be treated is as high as 2,500 mg / liter, the TN of SV 25 is 10 mg / liter.
Can be processed to less than 1 liter. In the case where the liquid retaining portion is not provided (Comparative Example 1) or in the upward flow (Comparative Example 2), ammonia passes through without being completely decomposed and remains in the processing liquid. A major reason why ammonia is not completely decomposed is that gas generated by the decomposition accumulates in the catalyst layer, a short path of the liquid occurs, and the contact between the liquid and the catalyst is not uniform. As described above, according to the present invention, a remarkable effect that ammonia having a high concentration of several thousands mg / liter is completely decomposed in a short time and a stable result is continuously obtained is recognized. In the above embodiment, sodium hypochlorite is used as a chlorine source. However, the present invention is not limited to sodium hypochlorite as long as it generates effective chlorine.
【００１７】[0017]
【発明の効果】上記のように、本発明によれば、アンモ
ニア濃度が数千ｍｇ／リットルと高濃度の場合でも、低
濃度の場合と同じ流量で、反応塔一基による一段処理
で、連続的にＴ−Ｎとして１０ｍｇ／リットル以下まで
処理でき、アンモニアを高濃度に含有する廃液の処理方
法として非常に有用な方法である。As described above, according to the present invention, even when the ammonia concentration is as high as several thousand mg / liter, the same flow rate as in the case of the low concentration and the single-stage treatment by one reaction tower can be performed continuously. In particular, it can be treated up to 10 mg / liter or less as TN, which is a very useful method as a method for treating a waste liquid containing a high concentration of ammonia.
【図１】本発明の処理方法に用いる装置の工程図。FIG. 1 is a process diagram of an apparatus used in a processing method of the present invention.
【図２】比較例１に用いた装置の工程図。FIG. 2 is a process chart of an apparatus used in Comparative Example 1.
【図３】比較例２に用いた装置の工程図。FIG. 3 is a process diagram of an apparatus used in Comparative Example 2.
１：被処理液、２：塩素、３：反応塔、４：液滞留部、
５：触媒層、６、７：定量ポンプ、８：排風機、９、１
０：廃ガス吸着槽、１１：処理液、１２：トレイ1: liquid to be treated, 2: chlorine, 3: reaction tower, 4: liquid retention section,
5: catalyst layer, 6, 7: metering pump, 8: exhaust fan, 9, 1
0: waste gas adsorption tank, 11: treatment liquid, 12: tray
Claims (2)
廃液中の窒素分を分解除去するアンモニア含有廃液の処
理方法において、該廃液に含有アンモニア分に対して当
量以上の塩素、塩素ガス又は酸化剤を添加して、該廃液
を、上部に液の滞留部を有し、下部に触媒の充填部を有
する反応塔に、上部から下向流で通し、アンモニアを連
続的に分解除去することを特徴とするアンモニア含有廃
液の処理方法。1. A method for treating an ammonia-containing waste liquid which decomposes and removes nitrogen in a waste liquid containing ammonia and / or a salt thereof, wherein chlorine, chlorine gas or an oxidizing agent is used in an amount equivalent to the amount of ammonia contained in the waste liquid. Is added, and the waste liquid is passed through a reaction tower having a liquid storage section at the top and a catalyst filling section at the bottom in a downward flow from the top to continuously decompose and remove ammonia. For treating ammonia-containing waste liquid.
ることを特徴とする請求項１記載のアンモニア含有廃液
の処理方法。2. The method for treating an ammonia-containing waste liquid according to claim 1, wherein the catalyst is activated carbon or zeolite.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35237896A JP3366204B2 (en) | 1996-12-13 | 1996-12-13 | Ammonia-containing waste liquid treatment method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35237896A JP3366204B2 (en) | 1996-12-13 | 1996-12-13 | Ammonia-containing waste liquid treatment method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10165965A true JPH10165965A (en) | 1998-06-23 |
| JP3366204B2 JP3366204B2 (en) | 2003-01-14 |
Family
ID=18423668
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP35237896A Expired - Lifetime JP3366204B2 (en) | 1996-12-13 | 1996-12-13 | Ammonia-containing waste liquid treatment method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3366204B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ES2178540A1 (en) * | 2000-03-14 | 2002-12-16 | Univ Sevilla | Process for rendering drinkable water for public consumption which at outset has high ammonium content involves oxidation using hydrogen peroxide |
| CN110709974A (en) * | 2017-05-19 | 2020-01-17 | 应用材料公司 | Apparatus for collecting and subsequently reacting liquid and solid effluents into a gaseous effluent |
-
1996
- 1996-12-13 JP JP35237896A patent/JP3366204B2/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ES2178540A1 (en) * | 2000-03-14 | 2002-12-16 | Univ Sevilla | Process for rendering drinkable water for public consumption which at outset has high ammonium content involves oxidation using hydrogen peroxide |
| CN110709974A (en) * | 2017-05-19 | 2020-01-17 | 应用材料公司 | Apparatus for collecting and subsequently reacting liquid and solid effluents into a gaseous effluent |
| JP2020521328A (en) * | 2017-05-19 | 2020-07-16 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | Device for collecting liquid and solid effluents for subsequent reaction into gaseous effluents |
| CN110709974B (en) * | 2017-05-19 | 2023-08-01 | 应用材料公司 | Apparatus for collecting and subsequently reacting liquid and solid effluents into gaseous effluents |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3366204B2 (en) | 2003-01-14 |
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