JPH10163613A - Solder ball supply device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve work efficiency by providing, in a recessed part for solder ball mounting, a solder ball detecting means for detecting presence of a solder ball, and detecting whether a solder ball is correctly supplied or not to an alignment block. SOLUTION: On an alignment block 3 in which solder balls 1 used as an external electrode of a semiconductor device are aligned and then supplied to a pickup head 2, recessed parts 4 for solder ball mounting are arrayed with specified intervals. Then, a solder ball detecting means is provided to each recessed part 4, for detecting presence of solder ball. The solder ball detecting means comprises an optical fiber 5 provided on the bottom of each recessed part 4. The optical fiber 5 detects a light from a light source provided above the alignment block 3 only when the solder ball 1 is not present.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a solder ball supply device.

[0002]

2. Description of the Related Art Higher integration and higher density of semiconductor devices are strongly demanded along with higher performance of electric and electronic parts. Has been changed from a structure having bonding pads on two sides to a structure having bonding pads on all four sides.

Further, as a countermeasure for increasing the number of pins, in order to establish electrical connection with an external device such as a printed circuit board, an insulating layer having a wiring pattern formed on the surface (functional surface side) of the semiconductor chip via an elastomer layer. A semiconductor device called a BGA (ball grid array) in which a film is arranged and a plurality of solder balls are arranged in a grid on the surface of an insulating film has been proposed.

Normally, since this BGA type semiconductor device is formed based on one insulating film in which a plurality of wiring patterns are formed in a grid pattern, a plurality of chips are formed on the insulating film via an elastomer layer. Is mounted, and after the resin sealing step is completed, a dividing operation is performed for individual products.

When the solder balls are mounted on the insulating film, a solder ball supply device for automatically supplying the solder balls is used as shown in FIG. In the conventional solder ball supply device, the pickup head 2 of the solder ball 1 descends into the solder ball storage section 6 to suck the solder ball, and after picking up a predetermined number of solder balls, picks up the semiconductor device to a standby position. The head is moved to fix the sucked solder balls to the semiconductor device.

In such a solder ball supply device, in order to check whether or not the pickup head has attracted a predetermined number of solder balls, in addition to a visual inspection by an operator, a light source is provided inside the pickup head. An apparatus has been proposed in which light leaking from a portion where a solder ball is not attracted is detected by a light receiving element outside a pickup head.

[0007]

However, in such a structure, the pickup head does not move until the pickup head sucks the solder balls randomly stored in the solder ball storage section. The ball is not fixed.

[0008] As described above, it takes time to adsorb the solder balls stored casually, so that the workability is reduced.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a solder ball supply device capable of improving work efficiency and reliably supplying solder balls.

[0010]

SUMMARY OF THE INVENTION Accordingly, in the present invention, there is provided a solder ball storing portion for storing a solder ball used as an external electrode of a semiconductor device, and a plurality of solder balls having a size corresponding to the outer diameter of the solder ball. A plurality of recesses are arranged at predetermined intervals, and a required number of solder balls are aligned and taken out of the recesses from the solder ball storage section, and an alignment block is provided for each of the recesses. And a solder ball detecting means for detecting the presence or absence of the solder ball in step (a), and detecting whether or not the solder ball is normally supplied to the alignment block.

According to the above configuration, since the detecting means for judging whether or not the solder ball is present in the solder ball mounting recess provided in the alignment block is provided, it is determined whether the solder ball is mounted. Inspection can be performed reliably, and reliable mounting can be performed.

If an optical detecting means is used as the detecting means, it is possible to detect the light efficiently without contact.

Further, by using the optical fiber, it is possible to efficiently inspect whether or not the solder ball is mounted with a simple configuration.

Further, if the alignment block is moved up and down from below the solder ball storage section toward the pickup head, the time during which the pickup head fixes the solder ball to the semiconductor device can be used. A predetermined number of solder balls to be conveyed can be aligned and put on standby.

Further, when the pickup head moves onto the alignment block, a predetermined number of solder balls are already aligned, so that the solder balls can be surely sucked in a short time and workability is markedly improved. improves.

[0016]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described.
This will be described in detail with reference to the drawings. The solder ball supply device of the present invention aligns solder balls 1 used as external electrodes of a semiconductor device, as shown in FIG. 1, a main part explanatory view, FIG. 2 an overall conceptual view, and FIG. 3 an operation explanatory view. In the alignment block 3 to be supplied to the pickup head 2, recesses 4 for mounting solder balls having a size corresponding to the outer diameter of the solder balls are arranged at predetermined intervals, and solder ball detecting means is provided for each of the recesses 4. , Whereby the presence or absence of the solder ball is detected. The solder ball detecting means is composed of an optical fiber 5 provided at the bottom of each of the recesses 4 and a light source (not shown) provided above the alignment block 3 only when the optical fiber 5 does not have the solder ball 1. ) Is detected.

That is, the solder ball supply device is configured to store a solder ball 1 for storing the solder ball 1 and to be able to rise from the solder ball storage 6 to a desired height.
An alignment block 3 for aligning and extracting a required number of solder balls 1 is provided so that the solder balls 1 are supplied to the pickup head 2 in an aligned state.

The pickup head 2 picks up the solder balls 1, transports them to the semiconductor substrate 7 mounted on the support 8 or to the TAB tape, and mounts them collectively thereon.

Here, the pickup head 2 is configured to be movable in a horizontal direction and a vertical direction by a driving mechanism 9, holds the solder ball 1 by suctioning through a suction port O under vacuum, and transports the solder ball 1 onto the semiconductor substrate 7. Then, after being fixed on the semiconductor substrate, it is separated from the solder ball 1. On the other hand, the alignment block arranges the next solder ball to be conveyed and waits while the pickup head is performing the work of fixing the solder ball to the semiconductor substrate.

Next, the operation of the alignment block will be described.

The alignment block 3 is, as shown in FIG.
It is supported by the bottom of the solder ball storage section 6 and is shown in FIG.
As shown in the figure, the solder balls 1 are aligned in the concave portions 4 as they rise.

In this state, when a desired level above the solder ball storing section 6 is reached, a signal from the optical fiber is detected, and it is determined whether or not the solder ball exists in all the concave portions. . If there is a concave portion where no solder ball exists, the alignment block is lowered again to supply the solder ball in the solder ball storage section 6 and raise it again. When there is an unfilled concave portion, this is repeated.

When the unfilled concave portion is no longer present, as shown in FIG. 3C, the alignment block is raised so as to make surface contact with the pickup head 2 conveyed by the drive mechanism 9, and the solder ball is removed. Pickup head 2
Transfer to

Thereafter, the pickup head 2 is driven by the driving mechanism 9
, And is conveyed to the semiconductor substrate 5, descends, and fixes the solder balls on the semiconductor substrate 5 collectively.

On the other hand, during this time, the alignment block 3 descends again to the inside of the solder ball storage section 6, and the solder ball is supplied to the recess 4 and rises again. Then, it is determined whether or not an unfilled recess exists. By repeating the above operation, the alignment and supply of the solder balls are automatically executed.
In this way, the optical detection means can very easily determine whether light from the light source above the solder ball mounting recess 4 is captured by the optical fiber embedded in the bottom of the solder ball mounting recess. In addition, the presence or absence of a solder ball can be reliably detected, and an abnormality can be detected early.

Further, since the alignment block which moves up and down from the lower part of the solder ball storage part toward the pickup head is provided, the next transfer is performed by utilizing the time when the pickup head fixes the solder ball to the semiconductor device. A predetermined number of solder balls can be aligned and made to wait.

Furthermore, when the pickup head moves onto the alignment block, a predetermined number of solder balls have already been aligned, so that the solder balls can be reliably attracted in a short time, and workability is markedly improved. To improve.

In the above embodiment, the solder balls are formed on the semiconductor device on which bonding and coating have been completed. However, when the solder balls are formed on an insulating film (TAB substrate) before mounting the semiconductor chip. Is also applicable.

In the above embodiment, the light source for detecting the solder balls is provided, but the light source may not be provided.

FIG. 4 shows a semiconductor device formed by using this device. Here, the solder balls 12 are formed on the entire surface so as to form a lattice, and the connection between the semiconductor chip 11 and the solder balls 12 is achieved via bonding wires 13 and conductor patterns 14 connected to the bonding wires. Is done. This conductor pattern is formed by patterning a copper foil formed on the surface of the polyimide film 15, and the back surface other than the connection region with the solder ball is covered with the insulating film 16. The polyimide film 15 is adhered to a metal plate 17 having a concave portion via an insulating resin 18. Thus, a low-cost and highly reliable semiconductor device is formed.

In the above embodiment, the presence or absence of the solder ball is detected by the optical detection means. However, a pressure sensor or a contact sensor may be provided at the bottom of the recess.

[0032]

As described above, according to the present invention, the detecting means for detecting the presence or absence of the solder ball is provided in the concave portion for mounting the solder ball provided in the alignment block.
It is possible to reliably inspect whether the solder ball is mounted. When the pickup head moves onto the alignment block, a predetermined number of solder balls are already aligned, so that the solder balls can be reliably attracted in a short time, and workability is remarkably improved.

[Brief description of the drawings]

FIG. 1 is an explanatory view of a main part of an alignment block of a solder ball supply device according to an embodiment of the present invention.

FIG. 2 is an overall schematic view of a solder ball supply device according to an embodiment of the present invention.

FIG. 3 is a process explanatory view showing an alignment process using the solder ball supply device according to the embodiment of the present invention.

FIG. 4 is a diagram showing an example of a semiconductor device formed by the method of the present invention.

FIG. 5 is an overall schematic diagram of a conventional solder ball supply device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Solder ball 2 Pickup head 3 Alignment block 4 Concave part 5 Optical fiber 6 Solder ball storage part 7 Semiconductor substrate 8 Support stand 9 Drive mechanism 11 Semiconductor chip 12 Solder ball 13 Bonding wire 14 Conductive pattern 15 Polyimide film 16 Insulating film 17 Metal plate 18 Insulation Resin

Claims (3)

[Claims] A solder ball storing portion for storing a solder ball used as an external electrode of a semiconductor device, and a plurality of solder ball mounting recesses having a size corresponding to the outer diameter of the solder ball are provided at predetermined intervals. Along with the individual arrangement, an alignment block for taking out a required number of solder balls from the solder ball storage section in this recess is arranged and each of the recesses is arranged, and the presence or absence of the solder balls in the recess is determined. And a solder ball detecting means for detecting whether the solder balls are normally supplied to the alignment block. 2. The solder ball supply device according to claim 1, wherein said solder ball detecting means is an optical detecting means. 3. The optical detection means comprises an optical fiber buried in a bottom of a concave portion for mounting a solder ball, and detects the presence or absence of a solder ball by detecting whether or not the optical fiber detects a predetermined light amount. 3. The solder ball supply device according to claim 2, wherein: