JPH10158422A - Porous film and its production - Google Patents

Porous film and its production

Info

Publication number
JPH10158422A
JPH10158422A JP31963896A JP31963896A JPH10158422A JP H10158422 A JPH10158422 A JP H10158422A JP 31963896 A JP31963896 A JP 31963896A JP 31963896 A JP31963896 A JP 31963896A JP H10158422 A JPH10158422 A JP H10158422A
Authority
JP
Japan
Prior art keywords
film
porous film
resist film
permanent resist
photosensitive permanent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP31963896A
Other languages
Japanese (ja)
Inventor
Masayoshi Tanaka
正善 田中
Masahiko Tatsuki
雅彦 辰木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Riko Co Ltd
Original Assignee
Sumitomo Riko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Riko Co Ltd filed Critical Sumitomo Riko Co Ltd
Priority to JP31963896A priority Critical patent/JPH10158422A/en
Publication of JPH10158422A publication Critical patent/JPH10158422A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide a porous film which exhibits homogeneous moisture- permeability and waferproofness because of its small variation in micropore size and which is low in cost. SOLUTION: A photosensitive permanent resist is applied in a thickness of about 10μm to a substrate (e.g. an aluminum foil) 10 with a bar coater and is baked under specified conditions to form a resist film 20. The resist film is closely covered with a photomask 30 having microporous pattern formed through it, is exposed to light, and is developed with a developing soln. exclusively used therefor. After the developed resist film is baked, it is peeled from the substrate or the substrate is dissolved and removed, giving a porous film 21 having many micropores 21a formed through it. Thus obtd. porous film has uniform-sized micropores, has homogeneous moisture permeability and waterproofness, and can be produced at a low cost since the production process is simple and the cost of production equipment is low.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の技術分野】本発明は、水滴を遮断し、水蒸気を
透過させる透湿性防水膜として機能する多孔質フィルム
及びその製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a porous film functioning as a moisture-permeable waterproof membrane that blocks water droplets and allows water vapor to permeate, and a method for producing the same.

【0002】[0002]

【従来の技術及び発明が解決しようとする課題】透湿性
防水膜は、衣料用として、外側からの雨滴等の水分を遮
断し、人体から発散される水蒸気を透過させるために使
用されており、膜に形成される微細孔の径は、耐水性が
得られる範囲として0.3〜10μmの範囲が用いられ
ている。従来、この種の透湿性防水膜として機能する多
孔質フィルムとしては、種々知られている。例えば、未
焼成のポリテトラフルオロエチレン(PTFE)のフィ
ルムを延伸させ、これを加熱して多数の微細孔を形成
し、この微細孔を設けた多孔質フィルムを積層すること
により得られる多孔質フィルムが知られている。また、
織物の表面にポリマーをコーティングし、その後、水中
でポリマーを凝固させて微細孔を形成した多孔質フィル
ムが知られている。さらに、通常のフィラメント糸に比
べて単糸デニールが1/5〜1/10という細い糸を使
用して高密度織物にし、これに撥水加工を施した多孔質
フィルムが知られている。しかし、これら多孔質フィル
ムは、いずれも微細孔の孔径のばらつきが大きくて、均
質な透湿防水機能が得られ難く、また製造工程も長く高
価であるという問題がある。
2. Description of the Related Art A moisture-permeable waterproof membrane is used for clothing to block moisture such as raindrops from the outside and to transmit water vapor emitted from the human body. The diameter of the micropores formed in the film is in a range of 0.3 to 10 μm as a range in which water resistance can be obtained. Conventionally, various types of porous films functioning as moisture-permeable waterproof membranes of this type are known. For example, a porous film obtained by stretching an unfired polytetrafluoroethylene (PTFE) film, heating the film to form a large number of micropores, and laminating a porous film provided with the micropores. It has been known. Also,
A porous film is known in which a polymer is coated on the surface of a woven fabric, and then the polymer is coagulated in water to form micropores. Further, there is known a porous film obtained by forming a high-density woven fabric using a thin yarn having a single yarn denier of 1/5 to 1/10 as compared with a normal filament yarn, and performing a water-repellent treatment on the woven fabric. However, all of these porous films have a problem that the pore diameter of the micropores greatly varies, and it is difficult to obtain a uniform moisture-permeable and waterproof function, and the manufacturing process is long and expensive.

【0003】また、その他の多孔質フィルムとして、薄
いフィルムに、レーザにより孔開けを行ったものが知ら
れている。しかし、この多孔質フィルムは、レーザ加工
によりフィルム表面に付着したスミア(加工屑)の除去
が困難であり、またレーザ加工自体の費用も高価になる
という問題がある。本発明は、上記した問題を解決しよ
うとするもので、微細孔の孔径のばらつきが小さくて均
質な透湿防水機能が得られると共に安価な多孔質フィル
ム及びその製造方法を提供することを目的とする。
[0003] As another porous film, a film obtained by perforating a thin film with a laser is also known. However, this porous film has a problem that it is difficult to remove smears (work chips) adhered to the film surface by laser processing, and the cost of laser processing itself is high. An object of the present invention is to solve the above-mentioned problems, and an object of the present invention is to provide an inexpensive porous film and a method for producing the same, which can provide a uniform moisture-permeable and waterproof function with a small variation in the diameter of the fine pores. I do.

【0004】[0004]

【課題を解決するための手段及び発明の効果】上記目的
を達成するために、上記請求項1に係る発明の構成上の
特徴は、感光性永久レジストの薄膜に、ホトリソグラフ
ィ技術により多数の微細孔を設けてなることにある。
Means for Solving the Problems and Effects of the Invention In order to achieve the above object, the structural feature of the invention according to claim 1 is that a thin film of a photosensitive permanent resist is formed on a thin film of a photosensitive permanent resist by photolithography. It is to provide a hole.

【0005】上記のように構成した請求項1に係る発明
においては、感光性永久レジスト薄膜にホトリソグラフ
ィ技術により微細孔が形成されているため、多孔質フィ
ルムは均一な孔径の微細孔を有しており、そのため均質
な透湿防水機能を有する。また、微細孔の孔径は、多孔
質フィルムに要求される特性に合わせて自由に変更する
ことができる。さらに、この多孔質フィルムは、感光性
永久レジスト膜にホトリソグラフィ技術により微細孔を
形成したものであり、安価に提供される。
[0005] In the invention according to claim 1 configured as described above, since the fine holes are formed in the photosensitive permanent resist thin film by the photolithography technique, the porous film has fine holes having a uniform diameter. Therefore, it has a uniform moisture-permeable and waterproof function. Further, the diameter of the micropores can be freely changed according to the characteristics required for the porous film. Further, this porous film is obtained by forming micropores in a photosensitive permanent resist film by a photolithography technique, and is provided at a low cost.

【0006】また、上記請求項2に係る発明の構成上の
特徴は、平坦な基板面に感光性永久レジスト膜を塗布形
成し、感光性永久レジスト膜表面に多数の微細孔パター
ンを有するマスクを密着させて露光し、感光性永久レジ
スト膜の微細孔パターン部分を現像処理により除去し、
現像処理された感光性永久レジスト膜を乾燥した後、基
板面から取り外すようにしたことにある。
Another feature of the invention according to claim 2 is that a photosensitive permanent resist film is applied and formed on a flat substrate surface, and a mask having a large number of fine hole patterns is formed on the photosensitive permanent resist film surface. Exposure in close contact, the fine hole pattern portion of the photosensitive permanent resist film is removed by development processing,
After the developed photosensitive permanent resist film is dried, it is removed from the substrate surface.

【0007】また、上記のように構成した請求項2に係
る発明においては、上記請求項1の発明の効果に加え
て、製造工程が簡易であり、製造設備も安価であるた
め、多孔質フィルムを安価に製造することができる。
In the invention according to claim 2 configured as described above, in addition to the effects of the invention of claim 1, the manufacturing process is simple and the manufacturing equipment is inexpensive. Can be manufactured at low cost.

【0008】[0008]

【発明の実施の形態】以下、本発明の一発明の実施の形
態を図面を用いて説明すると、図1は、同実施の形態で
ある多孔質フィルムの製造工程を模式図により示したも
のである。まず、基材10(例えば脱脂処理されたアル
ミ箔等の金属箔)に、感光性永久レジスト(例えば、シ
プレイ社製の商品名マルチポジットXP−9500C
C)をバーコータ、ロールコータ等のレジスト塗布装置
を用いて、10μm程度の厚さに塗布し、所定条件例え
ば90℃、30分でベーキングを行い、レジスト膜20
を形成する(図1(a))。つぎに、レジスト膜20
に、微細孔パターン(例えば、孔径5μmφ、ピッチ1
0μm)が形成されたフォトマスク30を密着させ、露
光を行う(図1(b))。露光は、例えば水銀ランプ光
源から紫外線UVを150〜250mJ/cm2 照射し
て行われる。露光されたレジスト膜20は、再び所定条
件例えば90℃、15分でベーキングが行われる。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic diagram showing a manufacturing process of a porous film according to the embodiment. is there. First, a photosensitive permanent resist (for example, trade name, Multiposit XP-9500C manufactured by Shipley Co., Ltd.) is applied to the base material 10 (for example, a metal foil such as an aluminum foil that has been degreased).
C) is applied to a thickness of about 10 μm using a resist coating apparatus such as a bar coater or a roll coater, and baked at a predetermined condition, for example, at 90 ° C. for 30 minutes to obtain a resist film 20.
Is formed (FIG. 1A). Next, the resist film 20
A fine hole pattern (for example, a hole diameter of 5 μmφ, a pitch of 1
A photomask 30 having a thickness of 0 μm) is brought into close contact with the photomask 30 to perform exposure (FIG. 1B). The exposure is performed by, for example, irradiating ultraviolet rays 150 to 250 mJ / cm 2 from a mercury lamp light source. The exposed resist film 20 is again baked under predetermined conditions, for example, at 90 ° C. for 15 minutes.

【0009】ベーキングされたレジスト膜20を、専用
現像液を用いて現像を行う。専用現像液としては、マル
チポジットXP−9500CCに対しては、シプレイ社
の現像液(商品番号XP−91254−4)が用いられ
る。現像は、均一性を高めるため、スプレー法により行
われることが望ましく、例えば35℃の現像液を用いて
2分間行われる。現像されたレジスト膜20は、再び所
定条件例えば全面に100mJ/cm2 の紫外線UVを
照射後、145℃、5分でベーキング処理される。これ
により、基材10表面上に、多数の微細孔21aを設け
た多孔質フィルム21が形成される(図1(c))。つ
ぎに、この多孔質膜21を基材10から剥離し、または
基材10自体を溶解除去することにより多数の微細孔2
1aを設けた多孔質フィルム21が得られる(図1
(d))。
The baked resist film 20 is developed using a dedicated developer. As the special developer, a developer (product number XP-91254-4) manufactured by Shipley Co., Ltd. is used for Multiposit XP-9500CC. The development is desirably performed by a spray method in order to enhance uniformity, and is performed, for example, for 2 minutes using a developing solution at 35 ° C. The developed resist film 20 is baked again at 145 ° C. for 5 minutes after irradiation with ultraviolet light UV of 100 mJ / cm 2 again under predetermined conditions, for example, over the entire surface. Thus, a porous film 21 having a large number of fine holes 21a is formed on the surface of the substrate 10 (FIG. 1C). Next, the porous film 21 is peeled from the base material 10 or the base material 10 itself is dissolved and removed to form a large number of fine holes 2.
1a is obtained, and the porous film 21 provided with
(D)).

【0010】以上に説明したように、上記実施形態によ
れば、感光性永久レジストの薄膜20に微細孔がホトリ
ソグラフィ技術により形成されているため、多孔質フィ
ルム21は、均一な孔径の微細孔21aを有しており、
そのため均質な透湿防水機能を有する。また、微細孔2
1aはホトリソグラフィ技術により製造されるため、多
孔質フィルム21に要求される特性に合わせて微細孔2
1aの径を自由に変更することができる。さらに、この
多孔質フィルム21の製造工程は簡易であり、製造設備
も安価であるため、多孔質フィルム21を安価に製造す
ることができる。
As described above, according to the above embodiment, since the fine holes are formed in the thin film 20 of the photosensitive permanent resist by the photolithography technique, the porous film 21 has the fine holes having a uniform diameter. 21a,
Therefore, it has a uniform moisture-permeable and waterproof function. In addition, micropore 2
1a is manufactured by the photolithography technique, so that the fine holes 2a are formed in accordance with the characteristics required for the porous film 21.
The diameter of 1a can be freely changed. Furthermore, since the manufacturing process of the porous film 21 is simple and the manufacturing equipment is inexpensive, the porous film 21 can be manufactured at low cost.

【0011】この多孔質フィルム21は、透湿性防水膜
として使用することができ、スポーツウエアやスポーツ
シューズ、レインコート等への応用が可能である。その
場合、多孔質フィルムの強度を保持するため、その片面
または両面に織物を接着することが望ましい。なお、上
記感光性永久レジストはネガタイプのレジストである
が、ポジタイプのレジストを用いることもできる。
The porous film 21 can be used as a moisture-permeable waterproof film, and can be applied to sportswear, sports shoes, raincoats and the like. In that case, in order to maintain the strength of the porous film, it is desirable to adhere a woven fabric to one or both surfaces thereof. The photosensitive permanent resist is a negative type resist, but a positive type resist can also be used.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施形態である多孔質フィルムの製
造工程を概略的に示す模式図である。
FIG. 1 is a schematic view schematically showing a process for producing a porous film according to an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

10…基材、20…レジスト膜、21…多孔質フィル
ム、21a…微細孔、30…フォトマスク。
DESCRIPTION OF SYMBOLS 10 ... Base material, 20 ... Resist film, 21 ... Porous film, 21a ... Micropore, 30 ... Photomask.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 感光性永久レジストの薄膜に、ホトリソ
グラフィ技術により多数の微細孔を設けてなることを特
徴とする多孔質フィルム。
1. A porous film comprising a photosensitive permanent resist thin film provided with a large number of fine holes by photolithography.
【請求項2】 平坦な基板面に感光性永久レジスト膜を
塗布形成し、同感光性永久レジスト膜表面に多数の微細
孔パターンを有するマスクを密着させて露光し、前記感
光性永久レジスト膜の微細孔パターン部分を現像処理に
より除去し、現像処理された前記感光性永久レジスト膜
を乾燥した後、前記基板面から取り外すようにしたこと
を特徴とする多孔質フィルムの製造方法。
2. A photosensitive permanent resist film is coated and formed on a flat substrate surface, and a mask having a large number of fine hole patterns is brought into close contact with the photosensitive permanent resist film surface and exposed to light. A method for producing a porous film, comprising: removing a fine hole pattern portion by a development treatment; drying the developed photosensitive permanent resist film; and removing the photosensitive permanent resist film from the substrate surface.
JP31963896A 1996-11-29 1996-11-29 Porous film and its production Pending JPH10158422A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31963896A JPH10158422A (en) 1996-11-29 1996-11-29 Porous film and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31963896A JPH10158422A (en) 1996-11-29 1996-11-29 Porous film and its production

Publications (1)

Publication Number Publication Date
JPH10158422A true JPH10158422A (en) 1998-06-16

Family

ID=18112537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31963896A Pending JPH10158422A (en) 1996-11-29 1996-11-29 Porous film and its production

Country Status (1)

Country Link
JP (1) JPH10158422A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2834477A1 (en) * 2002-01-07 2003-07-11 Centre Nat Rech Scient PROCESS FOR MANUFACTURING A SHEET HAVING THROUGH PORES AND APPLICATION TO THE MANUFACTURE OF MICRON AND SUBMICRON FILTERS
JP2004143427A (en) * 2002-10-03 2004-05-20 Toray Ind Inc Photopolymerizable composition for forming porous pattern, method for forming the porous pattern by using the same and the porous pattern
WO2010097280A1 (en) * 2009-02-27 2010-09-02 Unilever Plc A spray nozzle

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2834477A1 (en) * 2002-01-07 2003-07-11 Centre Nat Rech Scient PROCESS FOR MANUFACTURING A SHEET HAVING THROUGH PORES AND APPLICATION TO THE MANUFACTURE OF MICRON AND SUBMICRON FILTERS
WO2003057352A1 (en) * 2002-01-07 2003-07-17 Centre National De La Recherche Scientifique (Cnrs) Method of producing a sheet comprising through pores and the application thereof in the production of micronic and submicronic filters
JP2004143427A (en) * 2002-10-03 2004-05-20 Toray Ind Inc Photopolymerizable composition for forming porous pattern, method for forming the porous pattern by using the same and the porous pattern
WO2010097280A1 (en) * 2009-02-27 2010-09-02 Unilever Plc A spray nozzle

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