JPH10151516A - Groove machining method for polishing disc - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily form a groove in a pat, fixed at a disc body, with high precision by a method wherein, with the cutter of a groove machining means pressed against the pat, a guide rod is moved along a guide groove formed in a recessed surface or a protrusion surface in a guide member, and a groove is formed in the protrusion surface or the recessed surface of the pat. SOLUTION: When a rotary shaft 47 is rotated to the right, a body part 35 is moved upward. Simultaneously with introduction of the upper end of a guide rod 39 in the guide groove of a guide member 27, a spindle part 37 is moved to below and the lower end of the cutter 41 is pressed by the pat 15 of a polishing disc 11. Further, regulation of the depth of a groove formed in the pat 15 is effected through vertical movement of a stage 19. From this state, the guide rod 39 is moved along the guide groove of the guide member 27, and through repetition of the above, a groove in a vertical direction is formed in the pat 15 of the polishing disc 11.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming grooves in a polishing plate for forming grooves of a predetermined shape on a pad fixed to the outer periphery of the bottom surface of the plate body of the polishing plate.

[0002]

2. Description of the Related Art Conventionally, for example, in a mold for molding a lens, a polishing dish has been used for polishing a spherical concave surface formed in the mold. FIGS. 6 and 7 show such a polishing dish. In this polishing dish, a resin pad 2 is fixed to the outer periphery of a bottom surface 1a of a metal dish main body 1. FIG.

The bottom surface 1a of the dish body 1 is a spherical convex surface, and a pad 2 having a spherical convex surface 2a is fixed along the convex surface. On the convex surface 2a of the pad 2, a linear groove 2b for allowing an abrasive used for polishing to escape is formed in a lattice shape. Conventionally, in such a polishing plate, the formation of the groove 2b in the convex surface 2a of the pad 2 is performed by, for example, as shown in FIG. 5, and is performed by manually performing groove processing.

[0004]

However, in such a conventional method of forming a groove in a polishing plate, the formation of the groove 2b in the pad 2 is performed manually using a cutter 5 such as a cutter. A large number of steps are required to form the groove 2b, and it is difficult to form the groove 2b with a uniform depth and width.

That is, in such a polishing dish, the grooves 2b
If the depth or width of the surface is not uniform, there arises a problem that the surface accuracy of the workpiece due to polishing is reduced and the life of the polishing plate is reduced. The present invention has been made in order to solve such a conventional problem, and provides a groove machining method for a polishing dish which can easily form a groove with high precision in a pad fixed to a dish main body. With the goal.

[0006]

According to a first aspect of the present invention, there is provided a method for forming a groove in a polishing plate, wherein the groove is formed on a convex or concave surface of a pad fixed to an outer periphery of a bottom surface of the plate body. In the groove processing method, facing the bottom surface of the dish body, a guide member having a concave surface or a convex surface having a shape corresponding to the convex surface or the concave surface of the pad is arranged,
Between the pat and the guide member, a guide rod is disposed on the guide member side, and a groove processing means in which a blade is disposed on the pat side is disposed, and the blade of the groove processing means is pressed against the pad. The guide rod is moved along a guide groove formed on a concave or convex surface of the guide member, and the groove is formed on the convex or concave surface of the pad.

(Function) In the method of forming a groove in the polishing plate of the first aspect, the formation of the groove in the convex or concave surface of the pad fixed to the outer periphery of the bottom surface of the plate body presses the blade of the groove processing means against the pad. In this state, the guide rod is moved along a guide groove formed on the concave or convex surface of the guide member.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings. FIG. 1 shows an apparatus for forming grooves in a polishing dish used in an embodiment of the method for forming grooves in a polishing dish of the present invention, and reference numeral 11 denotes a polishing dish. This polishing dish 1
As shown in FIG. 2 and FIG. 3, a pad 15 made of a resin such as an epoxy resin is fixed to an outer periphery of a bottom surface 13a of a dish body 13 made of a metal such as cast iron or stainless steel. It is configured.

The bottom surface 13a of the dish body 13 has a spherical convex surface, and a pad 15 having a spherical convex surface 15a is fixed along the convex surface. The convex surface 15a of the pad 15 is provided with a linear groove 1 for releasing an abrasive used in polishing by the groove processing method of this embodiment.
5b are formed in a lattice shape.

The polishing dish 11 is supported by support means 17. The support means 17 has a stage 19, and a turntable 21 is rotatably arranged on the stage 19. A collet 23 is fixed to the turntable 21.
1 is inserted with the bottom surface 13a facing up.

Then, the polishing plate 11 is brought into contact with the collet 2 by tightening the chuck 25 fitted on the collet 23.
It is fixed to 3. A guide member 27 is disposed above the support means 17 at a position facing the polishing plate 11. The guide member 27 is fixed to a tip of the horizontal support 29 by a screw member 31.

FIGS. 4 and 5 show details of the guide member 27. On the lower surface of the guide member 27, a spherical concave surface 2 having a shape corresponding to the convex surface 15a of the pad 15 of the polishing plate 11 is shown.
7a are formed. A linear guide groove 27b is formed in the concave surface 27a in parallel at a predetermined interval.

[0013] Between the support means 17 and the guide member 27,
As shown in FIG. 1, a groove processing means 33 is arranged.
The groove processing means 33 has a main body 35 and a spindle 37. On the guide member 27 side of the main body 35, a guide rod 39 guided by the guide groove 27b of the guide member 27 is arranged.

On the polishing plate 11 side of the spindle portion 37, a blade 41 for processing the groove 15b in the pad 15 of the polishing plate 11 is arranged. The spindle 37 is rotatable by a belt 43. Also, the main body 35
Are supported by a rotating shaft 47 via a support 45. When the rotating shaft 47 is rotated rightward from the state shown by the solid line in FIG. 1, the main body 35 moves upward, and the upper end of the guide rod 39 is moved to the guide member 27 as shown by a two-dot chain line in FIG. Guide groove 2
7b, at the same time, the spindle portion 37 moves downward, and the lower end of the blade 41 is pressed against the pad 15 of the polishing plate 11, as indicated by the two-dot chain line in FIG.

An embodiment of the method for forming grooves in a polishing dish of the present invention using the above-described apparatus for forming grooves in a polishing dish is performed as described below. In this embodiment, first, the polishing plate 11 is inserted into the concave portion 23a at the tip of the collet 23 with the bottom surface 13a facing upward, and the chuck 25 fitted on the collet 23 is tightened so that the polishing plate 11 is
Fixed to

Next, the belt 43 is driven to drive the groove processing means 3.
The third spindle 37 is rotated. Thereafter, the rotating shaft 47 is rotated rightward from the state shown by the solid line in FIG. By this rotation, the main body 35 moves upward, and the upper end of the guide rod 39 is inserted into the guide groove 27b of the guide member 27, as shown by the two-dot chain line in FIG. The lower end of the blade 41 is pressed against the pad 15 of the polishing dish 11 as shown by a two-dot chain line in FIG.

The depth of the groove 15b formed on the pad 15 is adjusted by moving the stage 19 up and down. Then, from this state, the guide rod 39 is moved along the guide groove 27b of the guide member 27, and by repeating this, the vertical groove 15b on the paper surface shown in FIGS. 15 are formed.

Next, by rotating the turntable 21 of the supporting means 17 by 90 degrees and repeating the above-mentioned operation, the left and right grooves 15b on the paper surface shown in FIGS.
Is formed on the pad 15. In the above-described method for forming grooves in the polishing plate, the guide rod 39 is pressed against the concave surface 27a of the guide member 27 while the blade 41 of the groove processing means 33 is pressed against the pad 15.
Move along the guide groove 27b formed in the
Since the groove 15b is formed on the convex surface 15a, the groove 15b can be easily formed with high precision on the pad 15 fixed to the dish body 13.

That is, in this method of forming a groove in the polishing plate, the formation of the groove 15b in the pad 15 is performed along the guide groove 27b formed in the concave surface 27a of the guide member 27.
9, the man-hour required for forming the groove 15b can be significantly reduced as compared with the related art.
The depth and width of the groove 15b can be formed uniformly. Since the depth or width of the groove 15b is uniform, the surface accuracy of the workpiece by polishing can be improved, and the life of the polishing plate 11 can be improved.

In the above-described method for forming grooves in the polishing plate, the grooves 15b are processed while rotating the blade 41 by the spindle portion 37, so that the V-shaped grooves 15b can be formed easily and reliably. Can be.

In the embodiment described above, the guide member 2
7, the concave surface 27a is formed, and the groove 15b is formed in the convex surface 15a of the pad 15. However, the present invention is not limited to such an embodiment, and the convex surface is formed in the guide member, and the concave surface of the pad is formed. A groove may be formed in the groove. In the embodiment described above, the convex surface 1 of the pad 15 is used.
Although the example in which the linear groove 15b is formed in 5a has been described, the present invention is not limited to such an embodiment, and a curved groove may be formed.

[0022]

As described above, in the method of forming grooves in the polishing dish according to the first aspect, the guide rod is formed on the concave or convex surface of the guide member with the blade of the groove processing means pressed against the pad. Since the groove is formed on the convex or concave surface of the pad by moving along the guide groove, the groove can be easily formed with high precision in the pad fixed to the dish body.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view showing an apparatus for processing a groove in a polishing dish used in an embodiment of the method of processing a groove in a polishing dish of the present invention.

FIG. 2 is a cross-sectional view showing a polishing dish to be grooved by the apparatus of FIG. 1;

FIG. 3 is a top view showing the polishing dish of FIG. 2;

FIG. 4 is a sectional view showing the guide member of FIG. 1;

FIG. 5 is a bottom view showing the guide member of FIG. 4;

FIG. 6 is a sectional view showing a polishing dish.

FIG. 7 is a top view showing the polishing dish of FIG. 6;

FIG. 8 is a perspective view showing a conventional method for processing grooves in a polishing dish.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Polishing dish 13 Dish main body 13a Bottom surface 15 Pad 15a Convex surface 15b Groove 27 Guide member 27a Concave surface 27b Guide groove 39 Guide rod 41 Cutting tool

Claims (1)

[Claims] 1. A method for forming a groove in a polishing plate for forming a groove of a predetermined shape on a convex or concave surface of a pad fixed to an outer periphery of a bottom surface of a plate body, A guide member on which a concave or convex surface having a shape corresponding to the convex or concave surface of the pat is formed, and between the pat and the guide member, a guide rod is disposed on the guide member side and a knife is provided on the pat side. The guide rod is moved along a guide groove formed on a concave surface or a convex surface of the guide member in a state where the groove processing means to be disposed is arranged, and the blade of the groove processing means is pressed against the pad, and the pad is moved. Forming a groove on a convex or concave surface of the polishing plate.