JPH10139572A - Jig for firing of electronic parts - Google Patents

Jig for firing of electronic parts

Info

Publication number
JPH10139572A
JPH10139572A JP8305588A JP30558896A JPH10139572A JP H10139572 A JPH10139572 A JP H10139572A JP 8305588 A JP8305588 A JP 8305588A JP 30558896 A JP30558896 A JP 30558896A JP H10139572 A JPH10139572 A JP H10139572A
Authority
JP
Japan
Prior art keywords
zirconia
coating layer
jig
firing
cao
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8305588A
Other languages
Japanese (ja)
Other versions
JP3395549B2 (en
Inventor
Hirokuni Takahashi
宏邦 高橋
Koji Kono
晃治 河野
Fumio Nakatani
二三男 中谷
Kenichi Nobuhara
健一 延原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyushu Refractories Co Ltd
Original Assignee
Kyushu Refractories Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by Kyushu Refractories Co Ltd filed Critical Kyushu Refractories Co Ltd
Priority to JP30558896A priority Critical patent/JP3395549B2/en
Publication of JPH10139572A publication Critical patent/JPH10139572A/en
Application granted granted Critical
Publication of JP3395549B2 publication Critical patent/JP3395549B2/en
Anticipated expiration legal-status Critical
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5025—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with ceramic materials
    • C04B41/5042—Zirconium oxides or zirconates; Hafnium oxides or hafnates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
    • C04B2111/00482—Coating or impregnation materials
    • C04B2111/00577—Coating or impregnation materials applied by spraying
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
    • C04B2111/00844—Uses not provided for elsewhere in C04B2111/00 for electronic applications

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain a jig causing no reaction at the time of firing Cab-contg. ceramic electronic parts and capable of maintaining characteristics by coating the surface of a corundum-mullite substrate with zirconia contg. enough CaO to stabilize the zirconia by thermal spraying. SOLUTION: The surface of a corundum-mullite substrate having >=72% Al2 O3 content is coated with zirconia contg. 10-33wt.% CaO to produce the objective jig for firing of electronic parts. When a zirconia coating layer is formed by the conventional ceramic thermal spraying method, superior durability is ensured. Plasma spraying is preferably adopted in consideration of the m.p. of zirconia as a material to be sprayed and water plasma spraying is especially preferably adopted from the viewpoint of work efficiency. The thickness of the coating layer is desirably >=0.05mm. Since the resultant jig reacts very hardly with parts to be fired, electronic parts having satisfactory electrical characteristics are obtd.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【発明の属する技術分野】本発明はセラミックコンデン
サ、圧電素子、サーミスタなどの電子部品、特に副原料
成分としてＣａＯを含有する電子部品を焼成する際に用
いる匣鉢、棚板、セッターなどの治具に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to jigs such as saggers, shelves, and setters used for firing electronic components such as ceramic capacitors, piezoelectric elements, and thermistors, particularly electronic components containing CaO as an auxiliary material component. It is about.

【０００２】[0002]

【従来の技術】電子部品焼成用の治具は使用条件に応じ
た耐熱性と機械的強度を備えていなければならないが、
そのほかに重要な課題として焼成するセラミック電子部
品と反応しないことが要求される。すなわち電子部品が
焼成用治具と接触部分において反応すると変色や融着を
起こしたり、組成変動によって特性が低下するなどの不
都合を生じるため、いかなる反応も好ましくない。2. Description of the Related Art Jigs for firing electronic components must have heat resistance and mechanical strength in accordance with use conditions.
Another important issue is that it does not react with ceramic electronic components to be fired. In other words, if the electronic component reacts with the firing jig at the contact portion, discoloration or fusion occurs, or the characteristics are degraded due to the composition fluctuation, so that any reaction is not preferable.

【０００３】通常はこれら治具の基材には耐熱衝撃性に
富むアルミナ・シリカ系の高アルミナ材料が使用され
る。そして被焼成部品と基材成分との反応を防止する目
的で、高温での化学的安定性に優れるジルコニア製のセ
ッターを載置したり、ジルコニア粉末の焼結層や溶射層
を形成させる方法が実施されている。この際に使用され
るジルコニアはＣａＯ、Ｙ2Ｏ3、ＭｇＯ、ＣｅＯ2など
の安定化剤を含む安定化ジルコニアである。Usually, a high-alumina-silica-based high-alumina material having a high thermal shock resistance is used as a base material of these jigs. For the purpose of preventing the reaction between the component to be fired and the base material components, a method of mounting a zirconia setter having excellent chemical stability at high temperature or forming a sintered layer or a sprayed layer of zirconia powder is used. It has been implemented. The zirconia used at this time is stabilized zirconia containing a stabilizer such as CaO, Y 2 O 3 , MgO, and CeO 2 .

【０００４】[0004]

【発明が解決しようとする課題】しかし、電子部品の中
には副原料成分としてＣａＯ成分を含有するものがあ
り、このような電子部品を前述のような治具で焼成した
場合、電子部品と治具表面のジルコニア層が反応し、電
子部品の電気特性が損なわれたり、治具のコーティング
層が早期に剥離するなどの問題があった。However, some electronic components contain a CaO component as an auxiliary raw material component. When such an electronic component is fired with the above-described jig, the electronic component becomes incompatible with the electronic component. The zirconia layer on the surface of the jig reacts to cause problems such as impairment of the electrical characteristics of the electronic component and early peeling of the coating layer of the jig.

【０００５】[0005]

【課題を解決するための手段】本発明者らは、副原料成
分としてＣａＯを含有する電子部品の焼成用治具につい
て鋭意検討した結果、基材の電子部品と接触する表面に
完全安定化量以上のＣａＯを含有するジルコニアのコー
ティング層を形成させることにより、該電子部品焼成時
に反応を著しく抑制することに成功し本発明を完成させ
たものである。即ち、本発明はコランダム−ムライト質
基材の表面にＣａＯを１０〜３３重量％含有するジルコ
ニアのコーティング層を形成させることを特徴とする電
子部品焼成用治具である。特に、このジルコニアのコー
ティング層が溶射によって形成されたものが優れた耐用
を発揮するものである。Means for Solving the Problems The present inventors have conducted intensive studies on a jig for firing electronic components containing CaO as an auxiliary material component, and found that the surface of the base material that comes into contact with the electronic components has a completely stabilized amount. By forming the coating layer of zirconia containing CaO described above, the present invention succeeded in remarkably suppressing the reaction during firing of the electronic component. That is, the present invention is an electronic component firing jig characterized in that a zirconia coating layer containing 10 to 33% by weight of CaO is formed on the surface of a corundum-mullite substrate. In particular, the zirconia coating layer formed by thermal spraying exhibits excellent durability.

【０００６】ＣａＯを１０〜３３重量％含有するジルコ
ニアのコーティング層の形成は、溶射による方法や焼結
層を形成する方法が一般的である。また、基材表面にＣ
ａＯを１０〜３３重量％含有するジルコニア粉末を敷く
方法も可能である。要するに被焼成物である電子部品と
接触する部位がＣａＯを１０〜３３重量％含有するジル
コニアのコーティング層で形成されていれば、本発明の
効果が得られるものである。A zirconia coating layer containing 10 to 33% by weight of CaO is generally formed by thermal spraying or by forming a sintered layer. In addition, C
A method of laying a zirconia powder containing 10 to 33% by weight of aO is also possible. In short, the effect of the present invention can be obtained if the portion that comes into contact with the electronic component, which is the object to be fired, is formed of a zirconia coating layer containing 10 to 33% by weight of CaO.

【０００７】電子部品の主成分としては一般にチタン酸
バリウムやチタン酸ストロンチウム等が使用されるが、
本発明による電子部品焼成用治具はこのような主成分と
反応しないことはもちろん、副成分として含まれるＣａ
Ｏに対しても反応を生じないものである。これは治具の
使用面となるジルコニアのコーティング層中にＣａＺｒ
Ｏ3としてＣａＯ成分がすでに安定に存在しているため
である。また、コーティング層中のＣａＯ成分は、電子
部品に含まれるその他の微量成分がコーティング層中に
浸入した場合には浸入成分と作用して、電子部品の共材
的に働き電子部品の特性に影響を与えない効果も有す
る。従って、本発明による電子部品焼成用治具は副成分
としてＣａＯを含有する電子部品焼成時に優れた反応防
止特性を有するが、該電子部品の焼成用として限定され
るものではなく、コーティング層中のＣａＯ成分が悪影
響を及ぼさない電子部品であればその焼成にも使用可能
である。Barium titanate, strontium titanate or the like is generally used as a main component of an electronic component.
The electronic component firing jig according to the present invention does not react with such a main component, but also contains Ca as a subcomponent.
It does not react with O. This is because CaZr is contained in the zirconia coating layer, which is the use surface of the jig.
This is because the CaO component already exists stably as O 3 . In addition, the CaO component in the coating layer acts as a co-material of the electronic component when the other trace components contained in the electronic component enter the coating layer, thereby affecting the characteristics of the electronic component. Also has the effect of not giving. Accordingly, the electronic component firing jig according to the present invention has excellent reaction prevention properties when firing electronic components containing CaO as a subcomponent, but is not limited to firing the electronic components, and is not limited to firing the electronic components. Any electronic component that does not adversely affect the CaO component can be used for firing.

【０００８】[0008]

【発明の実施の形態】治具の基材となるコランダム−ム
ライト質材料は熱衝撃に強く、通常の耐火れんがや匣鉢
等に使用されるものであり、Ａｌ2Ｏ3および３Ａｌ2Ｏ3
・２ＳｉＯ2を主成分とするもので、不可避的不純物は
通常の耐火物の範囲で許される。このコランダム−ムラ
イト質基材はＡｌ2Ｏ3含有量が７２重量％以上のものを
使用する。Ａｌ2Ｏ3含有量が７２重量％未満の場合は、
必然的にＳｉＯ2量が増え、基材中に遊離のＳｉＯ2成分
が存在するようになり、ジルコニアのコーティング層中
に移動拡散することにより、電子部品の特性に悪影響を
及ぼすため好ましくない。特に、ＳｉＯ2との反応性が
強い電子部品を焼成する場合には、ＳｉＯ2成分の少な
い高Ａｌ2Ｏ3成分の基材を用いるのが望ましい。BEST MODE FOR CARRYING OUT THE INVENTION Corundum-mullite material serving as a base material of a jig is resistant to thermal shock and is used for ordinary refractory bricks and saggers, and Al 2 O 3 and 3Al 2 O 3 are used.
The main component is 2SiO 2 , and inevitable impurities are allowed within the range of ordinary refractories. The corundum - mullite substrate Al 2 O 3 content to use more than 72 wt%. When the Al 2 O 3 content is less than 72% by weight,
Inevitably, the amount of SiO 2 is increased, and a free SiO 2 component is present in the base material, and migrates and diffuses into the zirconia coating layer, which adversely affects the characteristics of the electronic component, which is not preferable. In particular, when baking an electronic component having a high reactivity with SiO 2, it is desirable to use a base material of a high Al 2 O 3 component having a low SiO 2 component.

【０００９】基材表面のコーティング層の形成にはＣａ
Ｏを１０〜３３重量％含有するジルコニアを使用する。
ＣａＯ含有量が１０重量％未満の場合はコーティング層
中にＣａＺｒＯ3鉱物以外のＣａＯ安定化ＺｒＯ2の割合
が高くなるため副成分としてＣａＯを含有する電子部品
との反応が抑えられない。また、ＣａＯ量が３３重量％
を越えると、遊離のＣａＯが存在するようになり大気中
の水分と反応し、いわゆる消化現象を起こし、コーティ
ング層の組織が劣化するため好ましくない。For forming a coating layer on the substrate surface, Ca
Zirconia containing 10 to 33% by weight of O is used.
If the CaO content is less than 10% by weight, the proportion of CaO-stabilized ZrO 2 other than the CaZrO 3 mineral in the coating layer becomes high, so that the reaction with the electronic component containing CaO as an auxiliary component cannot be suppressed. In addition, the amount of CaO is 33% by weight.
If it exceeds, free CaO becomes present and reacts with moisture in the atmosphere, causing a so-called digestion phenomenon, which is not preferable because the structure of the coating layer is deteriorated.

【００１０】ジルコニアのコーティング層は溶射層や焼
結層を形成する方法が一般的である。溶射層を形成する
場合は通常のセラミック溶射法が使用できる。焼結層を
形成する場合は例えばジルコニア粉末を水等の適当な溶
媒と混合しペースト状としたものを基材表面に塗布、あ
るいはジルコニア粉末を水等の搬送材を用いて基材表面
に吹き付けし、乾燥後１２００〜１４００℃で焼成して
焼結コーティング層を得る。このほか、基材表面にジル
コニア粉末を敷き詰める方法も可能である。The zirconia coating layer is generally formed by forming a sprayed layer or a sintered layer. When forming a thermal sprayed layer, a usual ceramic thermal spraying method can be used. When a sintered layer is formed, for example, a paste obtained by mixing zirconia powder with an appropriate solvent such as water is applied to the substrate surface, or zirconia powder is sprayed onto the substrate surface using a carrier such as water. After drying, firing is performed at 1200 to 1400 ° C. to obtain a sintered coating layer. In addition, a method of spreading zirconia powder on the surface of the base material is also possible.

【００１１】本発明者らの検討ではジルコニアのコーテ
ィング層は基材との接着性、コーティング層の物性等か
ら溶射により形成されたものが最も優れた性能を示し
た。溶射によるコーティング層と比較すると、焼結によ
るコーティング層は焼結時の収縮率が大きいため基材と
の接着性に劣り、コーティング層の緻密さも低い。ま
た、基材表面にジルコニア粉末を敷く方法は作業工程上
の煩雑さを伴う。このような点で溶射による方法が最も
好ましい。溶射には通常のセラミック溶射が適用できる
が、溶射材となるジルコニアの融点から考えてプラズマ
溶射が、特に作業効率の点から水プラズマ溶射が好適で
ある。According to the study of the present inventors, the zirconia coating layer formed by thermal spraying showed the best performance from the viewpoint of the adhesion to the substrate and the physical properties of the coating layer. Compared with the thermal spray coating layer, the sintering coating layer has a large shrinkage during sintering, and therefore has poor adhesion to the base material, and the coating layer has low density. Also, the method of laying zirconia powder on the surface of the base material involves complicated operation steps. From such a point, the method by thermal spraying is most preferable. For the thermal spraying, ordinary ceramic thermal spraying can be applied, but plasma thermal spraying is preferable in view of the melting point of zirconia used as a thermal spraying material, and water plasma thermal spraying is particularly preferable in terms of working efficiency.

【００１２】ジルコニアのコーティング層の厚みは０．
０１ｍｍ以上、好ましくは０．０５ｍｍ以上が望まし
い。コーティング層の厚みが０．０１ｍｍ未満の場合
は、基材中のＳｉＯ2成分が拡散しやすくなるため、コ
ーティング層によるＳｉＯ2と電子部品との反応抑制効
果が不十分となる。ジルコニアのコーティング層は必要
に応じて二層以上の多層構造とすることもできる。例え
ば基材表面に安定化ジルコニアのコーティング層を形成
し、さらにその上にＣａＯを１０〜３３重量％含有する
ジルコニアのコーティング層を形成しても良い。The thickness of the zirconia coating layer is 0.1 mm.
It is desirably at least 01 mm, preferably at least 0.05 mm. When the thickness of the coating layer is less than 0.01 mm, the SiO 2 component in the base material is easily diffused, and the effect of the coating layer on suppressing the reaction between SiO 2 and the electronic component becomes insufficient. The zirconia coating layer may have a multilayer structure of two or more layers, if necessary. For example, a stabilized zirconia coating layer may be formed on the substrate surface, and a zirconia coating layer containing 10 to 33% by weight of CaO may be further formed thereon.

【００１３】本発明において、基材表面にジルコニアの
コーティング層を形成する場合に、基材とコーティング
層の接着性を強固にするために、ブラスト処理等によっ
て基材表面をあらかじめ粗面化しておくことが望まし
い。あるいは、ジルコニアのコーティング層を形成する
前に基材表面にアルミナを溶射し、その上にジルコニア
のコーティング層を形成すればコーティング層と基材と
の接着性が非常に強固なものとなり、使用中の剥離等が
起こりにくいため治具の耐用を大幅に向上させることが
できる。この場合は、基材表面にブラスト処理を行わ
ず、焼き上がったまま、または加工したままの基材を用
いてもコーティング層の剥離などは起こりにくいが、基
材との接着を特に強固にする必要がある場合には、アル
ミナの溶射に先立ちブラスト処理により基材表面を粗面
化しても良い。In the present invention, when a zirconia coating layer is formed on the surface of a substrate, the surface of the substrate is previously roughened by blasting or the like in order to strengthen the adhesion between the substrate and the coating layer. It is desirable. Alternatively, if the zirconia coating layer is sprayed with alumina before forming the zirconia coating layer, and the zirconia coating layer is formed thereon, the adhesion between the coating layer and the base material becomes very strong, and the Since the peeling of the jig hardly occurs, the durability of the jig can be greatly improved. In this case, the blast treatment is not performed on the base material surface, and the peeling of the coating layer hardly occurs even when the baked or processed base material is used, but the adhesion to the base material is particularly strengthened. If necessary, the surface of the substrate may be roughened by blasting prior to spraying alumina.

【００１４】本発明におけるコーティング層は治具の被
焼成部品が載置される接触面はもちろんのこと、この接
触面の裏側の面あるいは匣鉢形状での側壁内面部へも適
用できる。部品載置面以外へのコーティング層形成も接
触面と同様に部品の反応を抑制する上で得られる効果が
大きい。The coating layer in the present invention can be applied not only to the contact surface of the jig on which the component to be fired is mounted, but also to the surface on the back side of the contact surface or the inner surface of the side wall in the shape of a sagger. The formation of a coating layer on a surface other than the component mounting surface also has a large effect in suppressing the reaction of the component similarly to the contact surface.

【００１５】[0015]

【実施例】以下この発明を実施例によって詳細に説明す
る。表１に示すコランダム−ムライト質基材を１５０×
１５０×１０ｍｍに切り出し、その表面に同表に示す仕
様によりコーティング層を形成させた。比較のため表
２、表３に示す仕様の治具も同時に作成した。溶射には
水プラズマ装置を用いた。焼結によるコーティング層の
形成は、材料粉末をペースト状とし基材に塗布し、乾燥
後１４００℃で焼成し治具を得た。ジルコニアのコーテ
ィング層の厚さは溶射層、焼結層のいずれも２００μｍ
とした。また、アルミナの溶射層を形成する場合はすべ
て厚さ１００μｍとした。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to embodiments. The corundum-mullite base material shown in Table 1 was 150 ×
It was cut out to 150 × 10 mm, and a coating layer was formed on the surface according to the specifications shown in the same table. For comparison, jigs having the specifications shown in Tables 2 and 3 were prepared at the same time. A water plasma device was used for thermal spraying. In forming the coating layer by sintering, the material powder was made into a paste, applied to a substrate, dried, and fired at 1400 ° C. to obtain a jig. The thickness of the zirconia coating layer is 200 μm for both the sprayed layer and the sintered layer.
And When a sprayed layer of alumina was formed, the thickness was 100 μm.

【００１６】これらの治具をセラミックコンデンサの焼
成に繰り返し使用し、コンデンサとコーティング層の反
応、コーティング層の亀裂、剥離の発生状況を観察し
た。コンデンサの成分はチタン酸バリウム９２重量％、
ジルコン酸カルシウム５重量％、その他の低融成分３重
量％のものである。焼成温度は１３５０℃、焼成時間は
４時間とした。治具使用後の外観観察結果も表１、２、
３に合わせて示す。These jigs were repeatedly used for firing a ceramic capacitor, and the reaction between the capacitor and the coating layer, and the occurrence of cracks and peeling of the coating layer were observed. The component of the capacitor is 92% by weight of barium titanate,
5% by weight of calcium zirconate and 3% by weight of other low melting components. The firing temperature was 1350 ° C., and the firing time was 4 hours. Tables 1 and 2 show the appearance observation results after using the jig.
3 is shown.

【００１７】実施例に示した治具を用いて焼成した電子
部品は、治具との反応が少なく変色もない所望の電気特
性を有するものが得られた。また治具の使用回数も大幅
な向上が得られた。それに対し、比較例に示した治具を
用いて焼成した電子部品は、変色がみられ電気特性の低
下が認められた。また治具の使用可能回数も少ないもの
であった。The electronic parts fired using the jigs shown in the examples had desired electrical characteristics with little reaction with the jigs and no discoloration. Also, the number of times the jig was used was greatly improved. On the other hand, in the electronic component fired using the jig shown in the comparative example, discoloration was observed and a decrease in electric characteristics was observed. Also, the number of times the jig can be used was small.

【００１８】[0018]

【表１】[Table 1]

【００１９】[0019]

【表２】[Table 2]

【００２０】[0020]

【表３】[Table 3]

【００２１】[0021]

【発明の効果】実施例に示すとおり、本発明の電子部品
焼成用治具を用いると、被焼成部品との反応が極めて少
なく良好な電気特性を有する電子部品が得られる。ま
た、亀裂や剥離が起こりにくいため、長期間の安定使用
が可能である。特に反応性に富む成分を含むセラミック
コンデンサの焼成用治具として好適と言える。As shown in the examples, when the electronic component firing jig of the present invention is used, an electronic component having excellent electrical characteristics with very little reaction with the component to be fired can be obtained. In addition, since cracking and peeling hardly occur, long-term stable use is possible. In particular, it can be said to be suitable as a firing jig for a ceramic capacitor containing a highly reactive component.

【００２２】[0022]

【表１】 [Table 1]

【００２３】[0023]

【表２】 [Table 2]

【００２４】[0024]

【表３】 [Table 3]

Claims (2)

【特許請求の範囲】[Claims] 【請求項１】 コランダム−ムライト質基材の表面に、
ＣａＯを１０〜３３重量％含有するジルコニアのコーテ
ィング層を形成させたことを特徴とする電子部品焼成用
治具。1. The surface of a corundum-mullite substrate,
A jig for firing electronic components, wherein a zirconia coating layer containing 10 to 33% by weight of CaO is formed. 【請求項２】 ジルコニアのコーティング層が溶射によ
って形成された層である請求項１に記載の電子部品焼成
用治具。2. The electronic component firing jig according to claim 1, wherein the zirconia coating layer is a layer formed by thermal spraying.
JP30558896A 1996-10-30 1996-10-30 Jig for firing electronic components Expired - Lifetime JP3395549B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30558896A JP3395549B2 (en) 1996-10-30 1996-10-30 Jig for firing electronic components

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30558896A JP3395549B2 (en) 1996-10-30 1996-10-30 Jig for firing electronic components

Publications (2)

Publication Number Publication Date
JPH10139572A true JPH10139572A (en) 1998-05-26
JP3395549B2 JP3395549B2 (en) 2003-04-14

Family

ID=17946955

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30558896A Expired - Lifetime JP3395549B2 (en) 1996-10-30 1996-10-30 Jig for firing electronic components

Country Status (1)

Country Link
JP (1) JP3395549B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005041777A (en) * 2004-09-22 2005-02-17 Mitsui Mining & Smelting Co Ltd Electronic component firing tool
EP1734022A1 (en) * 2004-03-31 2006-12-20 Mitsui Mining & Smelting Co., Ltd. Jig for electronic part firing
CN109279878A (en) * 2017-07-20 2019-01-29 宜兴市锦泰耐火材料有限公司 A kind of electronic component sintering zirconia coating saggar and preparation method thereof
CN113913727A (en) * 2021-09-28 2022-01-11 德清创智科技股份有限公司 Preparation method of thermal spraying ceramic coating of sagger burning board

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1734022A1 (en) * 2004-03-31 2006-12-20 Mitsui Mining & Smelting Co., Ltd. Jig for electronic part firing
EP1734022A4 (en) * 2004-03-31 2011-02-16 Mitsui Mining & Smelting Co Jig for electronic part firing
JP2005041777A (en) * 2004-09-22 2005-02-17 Mitsui Mining & Smelting Co Ltd Electronic component firing tool
CN109279878A (en) * 2017-07-20 2019-01-29 宜兴市锦泰耐火材料有限公司 A kind of electronic component sintering zirconia coating saggar and preparation method thereof
CN113913727A (en) * 2021-09-28 2022-01-11 德清创智科技股份有限公司 Preparation method of thermal spraying ceramic coating of sagger burning board

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