JPH10137705A - Washing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enhance washing effect by providing a solvent storage tank 7 with specified pieces of ultrasonic vibrator transducers therein and making the output energy cross. SOLUTION: A bottom of the solvent storage tank 13 is formed at a V shaped vertical section having a relatively larger opening. Two pieces of cycle vibrators 16, 17 as the ultrasonic vibrator transducer are respectively arranged on one side 14 and the other side 15 of the V shaped bottom. They are arranged so that the ultrasonic energies e1, e2 outputted from both cycle vibrators 16, 17 are mutually crossed in a liquid of a solvent A. A crossed ultrasonic wave flux region B is formed in the region deeper by specified water depth L1 than the liquid surface (a) of the solvent storage tank 13. The water depth L1 is set e.g. at about 30-50mm. Both cycle vibrators 16, 17 are constituted to enable to simultaneously oscillate two-frequency outputs, e.g. 28kHz and 39kHz. Besides, a heater 18 is fitted to the device. Thus, the energy density is strengthened and the washing efficiency can be enhanced.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to, for example, HC, H
The present invention relates to a cleaning apparatus for cleaning electronic parts, precision parts, printed wiring boards, metal parts, and other various works using a solvent such as FE, HFC, and methylene chloride.

[0002]

2. Description of the Related Art Conventionally, as a cleaning apparatus of the above-described example, a solvent storage tank for storing a solvent such as HC, HFE, HFC, and methylene chloride is provided, and at least one ultrasonic vibrator is provided at the bottom of the tank. Is installed, and an ultrasonic oscillator is vibrated by an ultrasonic oscillator to ultrasonically clean a workpiece by a cavitation effect and an acceleration effect.

Here, the above-mentioned cavitation effect is a cavity phenomenon caused by a change in pressure generated in a liquid. The gas dissolved in the liquid is liberated to form bubbles, and the decompression period and the pressurization period are separated. Bubbles are generated during the depressurizing period of the sound pressure of the ultrasonic wave that is alternately repeated, and the size of the air bubble increases while repeating the size of the bubble corresponding to the sound pressure change of the ultrasonic wave. The bubbles rise while oscillating and reach the liquid surface and disappear. However, the above-described bubbles form a cavity of a negative pressure in the cleaning liquid, thereby effectively removing the deposits on the work surface.

[0004] The acceleration effect means that a compression wave of an ultrasonic wave in a liquid increases a frequency and an amplitude to give a very large kinetic energy (acceleration) to particles of a medium (particles of a solvent). Since the acceleration adds to the stain on the work through the cleaning liquid, the stain is an effect of being separated from the surface of the work. However, in the conventional cleaning apparatus, there is a problem that a sufficient cleaning effect cannot be obtained because ultrasonic energy is simply added to the work in the solvent liquid.

[0005]

According to the first aspect of the present invention, the ultrasonic energy is provided by arranging the ultrasonic vibrators so that energies output from a plurality of ultrasonic vibrators cross each other. It is an object of the present invention to provide a cleaning apparatus capable of forming a strong energy density by the intersection of and achieving a sufficiently high cleaning effect.

According to a second aspect of the present invention, in addition to the object of the first aspect, the ultrasonic focusing area where the ultrasonic energy intersects is at a predetermined water depth below the liquid level of the solvent storage tank. An object of the present invention is to provide a cleaning apparatus that can form an area so that a submerged area to be used for cleaning a workpiece and an ultrasonic focusing area substantially coincide with each other, thereby performing more effective cleaning.

According to a third aspect of the present invention, in addition to the object of the first or second aspect of the present invention, a vibrator capable of simultaneously oscillating a plurality of different frequency outputs as an ultrasonic vibrator (for example, a two-frequency vibrator) It is an object of the present invention to provide a cleaning apparatus that can achieve both uniform cleaning and cleaning corresponding to a workpiece by using a vibrator).

[0008]

According to a first aspect of the present invention, at least two ultrasonic vibrators are provided in a solvent storage tank, and the energy output from each ultrasonic vibrator intersects. A cleaning device provided with the ultrasonic transducer described above.

According to a second aspect of the present invention, in addition to the configuration of the first aspect of the present invention, the ultrasonic focusing area where the energy crosses is set to an area below a liquid level of the solvent storage tank at a predetermined water depth or less. The cleaning device is characterized in that it is formed.

According to a third aspect of the present invention, in addition to the configuration of the first or second aspect of the present invention, each of the ultrasonic vibrators is provided with a vibrator capable of simultaneously oscillating a plurality of different frequency outputs. The cleaning device used is characterized in that:

[0011]

According to the first aspect of the present invention, since these ultrasonic vibrators are arranged so that the energy output from at least two ultrasonic vibrators intersect, A strong energy density can be formed by the intersection of the ultrasonic energy, and as a result, a sufficiently high cleaning effect can be obtained.

According to the second aspect of the present invention,
In addition to the effect of the first aspect of the present invention, the ultrasonic focusing area where the ultrasonic energy intersects is formed in an area at a predetermined water depth or lower than the liquid level of the solvent storage tank. The ultrasonic focusing area can be made substantially coincident with the ultrasonic focusing area, and therefore, more effective cleaning can be performed.

According to the third aspect of the present invention,
In addition to the effect of the first or second aspect of the present invention, a vibrator capable of simultaneously oscillating a plurality of different vibration frequency outputs such as a two-frequency vibrator is used as the ultrasonic vibrator. This has the effect of achieving both achievement and cleaning corresponding to the workpiece.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below in detail with reference to the drawings. The drawing shows a cleaning device. In FIG. 1, the cleaning device 11 is provided with a solvent storage tank 13 in which an upper surface is opened and a work entrance 12 is formed.
The tank bottom of No. 3 is formed in a V-shaped vertical section with a relatively large open angle, and two-frequency vibrators 16 and 17 as ultrasonic vibrators are installed on one side 14 and the other side 15 of the V-shaped bottom. doing.

The solvent storage tank 13 has HC,
While storing the solvent liquid A such as HFE, HFC and methylene chloride, the ultrasonic energies e1 and e2 output from the surfaces of the two two-frequency vibrators 16 and 17 cross each other in the solvent liquid A. Two ultrasonic vibrators 1
6, 17 are provided.

Here, the above-mentioned ultrasonic energy e1, e2
The ultrasonic focusing area B at which is intersected is formed from the liquid level a of the solvent storage tank 13 to a predetermined water depth L1 or less, in other words, from the position lower than the liquid level a by the predetermined water depth L1 to a deeper area. The predetermined water depth L1 is, for example, 3
It is set to about 0 to 50 mm.

As the two-frequency vibrators 16 and 17, vibrators capable of simultaneously oscillating outputs of two different frequencies (specifically, 28 KHz and 39 KHz) are used. Further, the above-mentioned solvent storage tank 13 is provided with a heater 18 as heating means for heating the solvent liquid A as required. When a workpiece is cleaned by the cleaning apparatus 11 configured as described above, there are the following two cleaning methods.

That is, the two two-frequency vibrators 16 and 17
Are ultrasonically vibrated in two ways, 28 KHz and 39 KHz, to form an ultrasonic focusing area B, and to wash the work in this area B.
Then, the other two-frequency vibrator 17 is ultrasonically vibrated at 39 KHz to form an ultrasonic focusing area B.
And a method of cleaning the work. According to the former vibration method (two-frequency vibration method), uniform cleaning can be performed, and according to the latter vibration method (single-frequency vibration method), cleaning corresponding to a workpiece can be performed. In either method, the points of action of the stress due to the ultrasonic vibration become dense due to the simultaneous oscillation of the vibrators 16 and 17.

As described above, since the ultrasonic vibrators 16 and 17 are arranged so that the energies e1 and e2 output from the at least two ultrasonic vibrators 16 and 17 intersect, the ultrasonic energy e1 , E2, a strong energy density can be formed, and as a result, a sufficiently high cleaning effect can be obtained.

Further, since the ultrasonic focusing area B where the ultrasonic energies e1 and e2 intersect is formed in the area below the liquid level a of the solvent storage tank 13 and at a predetermined water depth L1 or less, the ultrasonic convergence area B and the liquid submerged area to be used for cleaning the workpiece are superposed. The sound wave focusing area B can be made substantially coincident with the sound wave focusing area B, so that more effective cleaning can be performed.

Further, since the vibrators capable of outputting a plurality of different vibration frequencies, such as two-frequency vibrators, are used as the ultrasonic vibrators 16 and 17, for example, uniform cleaning can be achieved and cleaning corresponding to the workpiece can be achieved. There is an effect that both can be achieved.

FIG. 2 shows another embodiment of the cleaning apparatus, and FIG.
In the embodiment, the bottom surface of the tank is formed in a V-shape.
In this embodiment shown in FIG. 2, the bottom surface of the tank is formed in a quadrangular pyramid shape, and a total of four surfaces 20, 21, 22 (however,
(Only three planes are shown in FIG. 2), and the same two-frequency vibrators 16, 17, and 19 as described above are provided to form an ultrasonic focusing area B in the liquid. When the bottom surface of the tank is formed in a pyramid shape in this manner, the ultrasonic focusing region B
Can further increase the ultrasonic energy density, so that the cleaning effect can be further increased.

In the case where the two-frequency vibrator 16 is vibrated at two frequencies of 28 KHz and 39 KHz for the purpose of preventing the ultrasonic focusing region B from being shifted, the two-frequency vibrator 17 on the facing side is also required. When the ultrasonic vibration is performed at two frequencies of 28 KHz and 39 KHz, and the two-frequency vibrator 16 is ultrasonically vibrated at 28 KHz, the two-frequency vibrator 16 on the opposite side is ultrasonically vibrated at 39 KHz, and another two frequencies are used. Vibrator 19 at 28KHz
It is desired that ultrasonic vibration be applied to the vibrator (not shown) facing the vibrator 19 at 39 KHz.

In other respects, the operation and effect are almost the same as those of the previous embodiment.
The same reference numerals are given to the same parts as those described above, and the detailed description thereof will be omitted. However, the shape of the above-described tank bottom is changed to a triangular pyramid shape, a pentagonal pyramid shape, a hexagonal pyramid shape, or a polyhedral shape instead of the quadrangular pyramid shape. The ultrasonic transducer may be provided on all surfaces when the polyhedral shape is formed, or the ultrasonic transducer may be provided only on any required surface.

FIG. 3 shows still another embodiment of the cleaning apparatus. In each of the embodiments shown in FIGS. 1 and 2, the tank bottom is formed to be non-planar. In this embodiment shown in FIG. While the bottom surface is formed as a flat plane, the slant portions 23a, 23 are formed such that the ultrasonic focusing area B is formed at a predetermined position in the liquid when the two-frequency oscillators 16, 17 are attached.
4a, and the slant portions 23 of the brackets 23, 24 fixed to the tank bottom.
The two-frequency vibrators 16 and 17 are provided on the a and 24a to form the above-mentioned ultrasonic focusing area B.

With such a configuration, the same operation and effect as those of the previous embodiment can be obtained. Therefore, in FIG. 3, the same parts as those in the previous figure are denoted by the same reference numerals, and detailed description thereof will be omitted.

In correspondence between the configuration of the present invention and the above-described embodiment, the ultrasonic vibrator of the present invention corresponds to the dual-frequency vibrators 16, 17, and 19 of the present embodiment. The configuration is not limited only to the configuration of the embodiment. For example, HC, HFE, HFC, and methylene chloride are exemplified as the solvent, but other solvents may be used, and the frequency of the ultrasonic vibrator may be a frequency other than 28 KHz and 39 KHz.

The structure of the solvent storage tank 13 described above is merely an example, and it goes without saying that the present invention can be applied to other ultrasonic tanks having a solvent vapor layer and a dry layer formed thereon.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a cleaning apparatus of the present invention.

FIG. 2 is a sectional view showing another embodiment of the cleaning device.

FIG. 3 is a sectional view showing still another embodiment of the cleaning apparatus.

[Explanation of symbols]

 13: solvent storage tank 16, 17, 19 ... two-frequency oscillator B: ultrasonic focusing area e1, e2 ... ultrasonic energy

Claims (3)

[Claims] 1. A cleaning apparatus comprising a solvent storage tank provided with at least two ultrasonic vibrators, and the ultrasonic vibrators arranged so that energies output from these ultrasonic vibrators cross each other. 2. The cleaning apparatus according to claim 1, wherein the ultrasonic focusing area where the energy crosses is formed in an area at a predetermined water depth or less from the liquid level of the solvent storage tank. 3. The cleaning apparatus according to claim 1, wherein each of said ultrasonic vibrators is a vibrator capable of simultaneously oscillating a plurality of different frequency outputs.