JP2003033735A - Ultrasonic cleaning unit and tool for ultrasonic cleaning unit - Google Patents

Ultrasonic cleaning unit and tool for ultrasonic cleaning unit

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Publication number
JP2003033735A
JP2003033735A JP2001224516A JP2001224516A JP2003033735A JP 2003033735 A JP2003033735 A JP 2003033735A JP 2001224516 A JP2001224516 A JP 2001224516A JP 2001224516 A JP2001224516 A JP 2001224516A JP 2003033735 A JP2003033735 A JP 2003033735A
Authority
JP
Japan
Prior art keywords
cleaning
ultrasonic
jig
cleaning liquid
ultrasonic cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001224516A
Other languages
Japanese (ja)
Inventor
Goroku Shimoma
五六 下間
Tsutomu Suzuki
勉 鈴木
Shigeru Izawa
茂 伊沢
Terumichi Nishino
輝道 西野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2001224516A priority Critical patent/JP2003033735A/en
Publication of JP2003033735A publication Critical patent/JP2003033735A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide an ultrasonic cleaning device and a tool for the ultrasonic cleaning unit which always provides uniform cleaning results irrespective of the shape of an object to be cleaned. SOLUTION: This ultrasonic cleaning unit has a cleaning tank 1 filled with cleaning liquid 4, an oscillator 3 which is installed at the bottom of the cleaning tank 1, a high frequency signal generator 2 which supplies a high frequency signal for ultrasonic generation to the oscillator 3. The tools 8 and 9 which have function to induce the occurrence of a cavitation collapse phenomenon in accordance with the shape of the object to be cleaned are applied.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、超音波の印加によ
り洗浄液中に発生させた微小空洞の崩壊による衝撃波を
利用して物体の表面を洗浄する方式の超音波洗浄装置と
超音波洗浄装置用の治具に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic cleaning apparatus and a method for cleaning the surface of an object by utilizing a shock wave generated by the collapse of a minute cavity generated in a cleaning liquid by applying an ultrasonic wave. It is related to the jig.

【0002】[0002]

【従来の技術】物体の物理的洗浄には、従来から超音波
洗浄装置が広く使用されているが、この装置は、超音波
で生ずる洗浄液の粒子加速度を利用して洗浄する方式
と、超音波の印加による空洞崩壊現象を利用する方式の
2種の方式に大別される。
2. Description of the Related Art Ultrasonic cleaning devices have been widely used for the physical cleaning of objects, but this device uses a method of cleaning by utilizing the particle acceleration of a cleaning liquid generated by ultrasonic waves, and an ultrasonic cleaning device. The method is roughly classified into two methods, that is, a method of utilizing the cavity collapse phenomenon due to the application of.

【0003】ここで、後者の空洞崩壊現象を利用する方
式では、超音波を印加して洗浄液中に多数の微小空洞を
生成させ、これら微小空洞が崩壊し、液体分子が衝突す
る際の衝撃力を利用して物体の表面から異物を排除し洗
浄する方式であり、近年、精密機械部品や物理測定用機
器の洗浄に多用されるようになっている。
In the latter method utilizing the cavity collapse phenomenon, ultrasonic waves are applied to generate a large number of minute cavities in the cleaning liquid, and these minute cavities collapse and the impact force when liquid molecules collide with each other. This is a method of removing foreign matter from the surface of an object by using a cleaning method, and in recent years, it has been widely used for cleaning precision machine parts and physical measurement equipment.

【0004】そして、この空洞崩壊現象を利用する方式
の超音波洗浄装置でも、それにより洗浄すべき部品など
の洗浄対象物体を洗浄液の中に沈めた状態で、そのまま
超音波を印加して洗浄する方式と、振動子からの超音波
と洗浄液面などからの反射波が合成された定在波によ
り、洗浄液中での超音波の波長に特有の寸法間隔で微小
空洞の密な部分と疎な部分を形成させ、部品を洗浄槽の
中で上下移動や回転等揺動しながら部品全体を洗浄する
方式とが従来から知られている。
Even in the ultrasonic cleaning apparatus utilizing the cavity collapse phenomenon, the object to be cleaned such as parts to be cleaned is submerged in the cleaning liquid, and ultrasonic waves are directly applied for cleaning. The method and the standing wave that is the combination of the ultrasonic wave from the transducer and the reflected wave from the surface of the cleaning liquid, etc., makes the dense and sparse parts of the microcavity have a dimensional interval specific to the wavelength of the ultrasonic wave in the cleaning liquid. It has been known from the prior art to form a mold and wash the entire component while vertically moving or rotating the component in a cleaning tank.

【0005】なお、この種の装置に関連する従来技術に
ついては、例えば特開平5−154453号、特開平8
−10530号、特開平9−271729号、特開平1
0−244133号、それに特開平11−290803
号の各公報の記載を挙げることができる。
Prior arts relating to this type of device are disclosed in, for example, Japanese Patent Laid-Open No. 154453/1993.
-10530, JP-A-9-271729, JP-A-1
0-244133 and JP-A-11-290803.
The description of each publication of the issue can be mentioned.

【0006】[0006]

【発明が解決しようとする課題】上記従来技術は、洗浄
対象物体の形状について配慮がされておらず、物体表面
の均一な洗浄に問題があった。従来技術では、洗浄対象
物体の形状いかんにかかわらず、そのまま洗浄液中に沈
めた状態で洗浄しているが、ここで、空洞崩壊現象を利
用する方式の超音波洗浄装置の場合、洗浄液中では均一
に微小空洞が発生していても、その洗浄対象物体の形状
によっては、その表面で均一に空洞崩壊現象が起きると
は限らない。
In the above-mentioned prior art, the shape of the object to be cleaned is not taken into consideration, and there is a problem in cleaning the surface of the object uniformly. In the conventional technology, regardless of the shape of the object to be cleaned, the object is cleaned by submerging it in the cleaning liquid as it is.Here, in the case of an ultrasonic cleaning device that utilizes the cavity collapse phenomenon, it is uniform in the cleaning liquid. Even if minute cavities occur, the cavitation phenomenon may not occur uniformly on the surface depending on the shape of the object to be cleaned.

【0007】従って、従来技術では、洗浄対象物体のフ
ラットな面や凹部など、形状によって均一に空洞崩壊現
象が起り難い部分で洗浄結果にむらが生じてしまい、こ
の結果、物体表面の均一な洗浄に問題が生じてしまうの
である。
Therefore, in the prior art, the cleaning result is uneven in the flat surface or the concave portion of the object to be cleaned, which is unlikely to cause the cavity collapse phenomenon uniformly due to the shape. As a result, the object surface is uniformly cleaned. Will cause problems.

【0008】本発明は、上記課題に鑑みてなされたもの
で、空洞崩壊現象を必要とする部分で確実に発生させる
ことができ、洗浄対象物体の形状に左右されることな
く、常に均一な洗浄結果が得られるようにした超音波洗
浄装置と超音波洗浄装置用治具を提供することにある。
The present invention has been made in view of the above problems, and it is possible to reliably generate a cavity collapse phenomenon in a portion requiring it, and to always perform uniform cleaning regardless of the shape of the object to be cleaned. An object of the present invention is to provide an ultrasonic cleaning device and a jig for the ultrasonic cleaning device that can obtain the results.

【0009】[0009]

【課題を解決するための手段】上記目的は、洗浄槽内の
洗浄液に超音波を印加して前記洗浄液中に発生させた微
小空洞の崩壊による衝撃波を利用し、物体の表面を洗浄
する方式の超音波洗浄装置において、前記洗浄液内にあ
る前記物体の表面の少なくとも一部の近傍に、前記微小
空洞の崩壊を誘発する冶具が設けられた状態で洗浄が行
なわれるようにして達成される。
The object of the present invention is to clean the surface of an object by applying an ultrasonic wave to a cleaning liquid in a cleaning tank and utilizing a shock wave generated by the collapse of microcavities generated in the cleaning liquid. In the ultrasonic cleaning device, cleaning is performed in a state where a jig for inducing collapse of the micro-cavities is provided near at least a part of the surface of the object in the cleaning liquid.

【0010】このとき、前記超音波を印加するための手
段を前記洗浄槽の底部に設けた上で前記洗浄槽内にある
洗浄液の液面位置を制御する手段を設け、前記洗浄液中
に超音波の定在波が形成された状態で洗浄が行なわれる
ようにしても上記目的を達成することができる。
At this time, a means for applying the ultrasonic wave is provided at the bottom of the cleaning tank, and a means for controlling the liquid surface position of the cleaning liquid in the cleaning tank is provided so that the ultrasonic wave is contained in the cleaning liquid. The above object can be achieved even if the cleaning is performed in the state where the standing wave is formed.

【0011】同じく上記目的は、超音波の印加により洗
浄液中に発生させた微小空洞の崩壊による衝撃波を利用
し、物体の表面を洗浄する方式の超音波洗浄装置におい
て、前記物体の表面の少なくとも一部の近傍に配置さ
れ、前記微小空洞の崩壊を誘発するようにした超音波洗
浄装置用治具により達成される。
Similarly, in the ultrasonic cleaning apparatus of the type in which the surface of an object is cleaned by utilizing the shock wave generated by the collapse of the minute cavities generated in the cleaning liquid by the application of ultrasonic waves, at least one of the surfaces of the object is cleaned. This is achieved by a jig for an ultrasonic cleaning device which is arranged in the vicinity of the portion and is adapted to induce the collapse of the microcavities.

【0012】このとき、超音波洗浄装置が、前記超音波
を印加するための手段を前記洗浄槽の底部に設けた上
で、前記洗浄槽内にある洗浄液の液面位置を制御する手
段を備え、前記洗浄液中に超音波の定在波が形成された
状態で洗浄が行なわれるようにした超音波洗浄装置用治
具としてもよい。
At this time, the ultrasonic cleaning apparatus is provided with means for applying the ultrasonic waves at the bottom of the cleaning tank, and means for controlling the liquid surface position of the cleaning liquid in the cleaning tank. A jig for an ultrasonic cleaning device may be used in which cleaning is performed in a state where an ultrasonic standing wave is formed in the cleaning liquid.

【0013】[0013]

【発明の実施の形態】以下、本発明による超音波洗浄装
置と超音波洗浄装置用治具について、図示の実施の形態
により詳細に説明する。図1は、本発明の一実施の形態
で、この場合、洗浄液4が充満されている洗浄槽1と、
この洗浄槽1の底面に取付けてある振動子3、この振動
子3に超音波発生用の高周波信号を供給するための高周
波信号発生器2で構成されており、従って、空洞崩壊現
象を利用する方式の超音波洗浄装置としては一般的な構
成を備えたものである。
BEST MODE FOR CARRYING OUT THE INVENTION An ultrasonic cleaning apparatus and a jig for an ultrasonic cleaning apparatus according to the present invention will be described below in detail with reference to the illustrated embodiments. FIG. 1 shows an embodiment of the present invention, in this case, a cleaning tank 1 filled with a cleaning liquid 4,
It is composed of a vibrator 3 attached to the bottom surface of the cleaning tank 1 and a high-frequency signal generator 2 for supplying a high-frequency signal for ultrasonic wave generation to the vibrator 3, so that the cavity collapse phenomenon is utilized. The system type ultrasonic cleaning device has a general configuration.

【0014】ここで、まず、洗浄槽1は、所定量の洗浄
液4を満たすことができ、且つ、その中に洗浄対象とな
る物体5が挿入されたとき、それを洗浄液4に沈めた状
態にするためのものである。次に、高周波発生器2は、
例えば周波数が25kHz〜40kHzの高周波信号を
発生し、これを振動子3に供給する働きをする。
Here, first, the cleaning tank 1 can be filled with a predetermined amount of the cleaning liquid 4, and when an object 5 to be cleaned is inserted therein, it is submerged in the cleaning liquid 4. It is for doing. Next, the high frequency generator 2
For example, it has a function of generating a high frequency signal having a frequency of 25 kHz to 40 kHz and supplying this to the vibrator 3.

【0015】振動子3は、例えば圧電型セラミック振動
子からなり、上記した25kHz〜40kHzの周波数
で動作して超音波を発生する働きをする。なお、洗浄液
4には清浄水を用いるのが一般的であるが、このとき、
所定のPh値にしたり、洗剤を溶かして使用することも
あり、有機溶剤が使用されることもある。
The vibrator 3 is composed of, for example, a piezoelectric ceramic vibrator, and operates at the frequency of 25 kHz to 40 kHz described above to generate ultrasonic waves. Note that clean water is generally used as the cleaning liquid 4, but at this time,
There is a case where a predetermined Ph value is used, a detergent is dissolved and used, and an organic solvent is sometimes used.

【0016】次に、この実施形態の動作について説明す
る。高周波信号発生器2を動作させ、これから振動子3
に高周波信号が供給されると、この振動子3から洗浄槽
1内の洗浄液4に超音波が印加され、洗浄液4の中に超
音波が伝播されてゆくようになる。そうすると、このと
き伝播される超音波のエネルギーにより、洗浄液3の中
に無数の微小空洞6が発生する。
Next, the operation of this embodiment will be described. The high frequency signal generator 2 is operated, and the oscillator 3
When a high frequency signal is supplied to the cleaning liquid 4, ultrasonic waves are applied from the vibrator 3 to the cleaning liquid 4 in the cleaning tank 1, and the ultrasonic waves are propagated in the cleaning liquid 4. Then, the energy of the ultrasonic waves propagated at this time causes countless minute cavities 6 to be generated in the cleaning liquid 3.

【0017】そこで、このとき洗浄液4の中に洗浄対象
物体5が浸漬されていると、この物体5の表面で微小空
洞6が崩壊し、空洞崩壊現象が発生すると衝撃波による
物体5の洗浄が得られるようになる。
Therefore, when the object 5 to be cleaned is immersed in the cleaning liquid 4 at this time, the minute cavities 6 collapse on the surface of the object 5 and when the cavity collapse phenomenon occurs, the object 5 can be cleaned by a shock wave. Will be available.

【0018】しかしながら、このときの空洞崩壊現象の
発生は、例えば物体5の表面にある突起部や縁部などの
不連続部をきっかけとして起こるものであり、このた
め、物体5の表面状況に大きく左右され、例えば不連続
部のない平面部などでは空洞崩壊現象が起こり難くなっ
ている。
However, the occurrence of the cavity collapse phenomenon at this time is triggered by, for example, a discontinuous portion such as a protrusion or an edge portion on the surface of the object 5, and therefore the surface condition of the object 5 is greatly affected. Cavity collapse phenomenon is less likely to occur in a flat portion having no discontinuity, for example.

【0019】そして、この結果、このままでは、物体5
に均一な洗浄が得られなくなってしまう。なお、このこ
とが従来技術の問題点であることは、既に説明した通り
である。
As a result, the object 5 is left as it is.
Therefore, uniform cleaning cannot be obtained. It should be noted that this is a problem of the conventional technique as described above.

【0020】ここで、この図1の実施形態では、図示の
ように、洗浄対象物体5の平面部に金網で作られた治具
8が配置してある。そして、この治具8は、ここに図示
の洗浄対象物体5の場合、それが有する平面部の表面に
ほぼ接した状態で配置されている。
Here, in the embodiment of FIG. 1, as shown in the drawing, a jig 8 made of a wire net is arranged on the plane portion of the object 5 to be cleaned. In the case of the object to be cleaned 5 shown here, the jig 8 is arranged so as to be substantially in contact with the surface of the plane portion of the jig 8.

【0021】そうすると、この治具8は、上記したよう
に金網で作られているので、その全面にわたって無数の
突起部や縁部などの不連続部が存在し、従って、この治
具8の表面では空洞崩壊現象が極めて活発に発生する。
そして、この図1の場合、治具8が洗浄対象物体5の平
面部の表面にほぼ接した状態で配置されているのである
から、この平面部の表面でも極めて活発に空洞崩壊現象
を発生させることができ、充分な洗浄が得られることに
なる。
Then, since the jig 8 is made of the wire mesh as described above, there are innumerable projections, discontinuities such as edges, and the like on the entire surface thereof. The cavity collapse phenomenon occurs very actively in.
Further, in the case of FIG. 1, since the jig 8 is arranged in a state of being substantially in contact with the surface of the flat portion of the cleaning target object 5, the cavity collapse phenomenon is extremely actively generated also on the surface of the flat portion. Therefore, sufficient cleaning can be obtained.

【0022】従って、この実施形態によれは、洗浄対象
物体5の形状に応じて、必要な部分に治具8を配置させ
ることにより、その全表面で空洞崩壊現象を均一に発生
させることができ、常に高い洗浄力を容易に発揮させる
ことができる。
Therefore, according to this embodiment, by arranging the jig 8 in a necessary portion according to the shape of the object 5 to be cleaned, the cavity collapse phenomenon can be uniformly generated on the entire surface thereof. , It is possible to easily exert a high detergency.

【0023】このとき、例えば矢印で示したように、洗
浄対象物体5を動かしてやれば、落とされた汚れを洗浄
対象物体5から速やかに遠ざけることができる。なお、
このときの超音波の伝播は底面からに限らず、側面な
ど、何れの面からでも微小空洞が発生できる条件であれ
ば良い。
At this time, for example, as shown by the arrow, if the object 5 to be cleaned is moved, the removed dirt can be quickly separated from the object 5 to be cleaned. In addition,
The propagation of the ultrasonic waves at this time is not limited to the bottom surface, but may be any condition such that the microcavity can be generated from any surface such as the side surface.

【0024】ここで、以上に説明した実施形態は、洗浄
すべき部品などの洗浄対象物体を洗浄液の中に沈めた状
態で、そのまま超音波を印加して洗浄する方式の超音波
洗浄装置に本発明を適用した場合の一実施形態である
が、本発明は、以下に図2により説明する定在波を利用
する方式の超音波洗浄装置に適用してもよい。
Here, the above-described embodiment is mainly applied to an ultrasonic cleaning apparatus of a type in which an object to be cleaned such as parts to be cleaned is immersed in the cleaning liquid and ultrasonic waves are applied as it is for cleaning. This is one embodiment to which the present invention is applied, but the present invention may be applied to an ultrasonic cleaning apparatus of the type using a standing wave, which will be described below with reference to FIG.

【0025】この図2に示した超音波洗浄装置も、洗浄
槽1の底面に取り付けられた振動子3が高周波信号発生
器2から供給される信号により振動し、洗浄槽1内の洗
浄液4に超音波を放出させるようになっているが、この
とき、振動子3から洗浄液4の液面までの距離を、超音
波の1/2波長の整数倍+1/4波長と同じ寸法になる
ように調整しておくようになっている。
Also in the ultrasonic cleaning apparatus shown in FIG. 2, the vibrator 3 attached to the bottom surface of the cleaning tank 1 vibrates in response to a signal supplied from the high frequency signal generator 2 and the cleaning liquid 4 in the cleaning tank 1 is vibrated. Ultrasonic waves are emitted. At this time, the distance from the vibrator 3 to the liquid surface of the cleaning liquid 4 should be the same as the integral multiple of 1/2 wavelength of ultrasonic waves + 1/4 wavelength. It is supposed to be adjusted.

【0026】この結果、洗浄液4の液面で反射した超音
波により、洗浄液4中で超音波の波長に特有の寸法間隔
で微小空洞の密な部分と疎な部分が形成され、定在波7
が発生される。
As a result, the ultrasonic waves reflected by the surface of the cleaning liquid 4 form dense and sparse portions of the micro-cavities in the cleaning liquid 4 at dimensional intervals peculiar to the wavelength of the ultrasonic waves.
Is generated.

【0027】そこで、矢印Aで示すように、物体5を上
下させてやれば、定在波7により密になった微小空洞6
により更に強くなった衝撃力が利用でき、強い洗浄力を
得ることができる。
Therefore, as shown by the arrow A, if the object 5 is moved up and down, the minute cavities 6 denser by the standing waves 7 are formed.
As a result, a stronger impact force can be used, and a stronger cleaning power can be obtained.

【0028】従って、この図2に示した超音波浄装置に
おいて、物体5に、図1で説明した治具8を適用してや
れば、均一性に優れながら更に強い洗浄力を得ることが
できる。
Therefore, in the ultrasonic cleaning apparatus shown in FIG. 2, if the jig 8 described in FIG. 1 is applied to the object 5, it is possible to obtain a stronger cleaning power while being excellent in uniformity.

【0029】このときの物体5の移動方向は、図示の上
下移動に限らず、回転移動させたり揺動させたりしても
よい。また、この図2の場合でも、図4で後述する治具
9が適用できることはいうまでもない。
The moving direction of the object 5 at this time is not limited to the vertical movement shown in the figure, but may be rotational movement or rocking. Needless to say, the jig 9 described later with reference to FIG. 4 can also be applied to the case of FIG.

【0030】次に図3は、洗浄対象物体5の表面で、空
洞崩壊現象が発生し難い平面部に、金網からなる冶具8
を取り付けた状態を示す。上記したように、平面部で
は、微小空洞6を生成させても、空洞崩壊現象が発生す
るきっかけがないため、洗浄力は弱いが、金網の冶具8
を配置することにより平面部全体に空洞崩壊現象を活発
に発生させることができ、洗浄力を大きく強化すること
ができる。
Next, FIG. 3 shows a jig 8 made of a wire mesh on a flat surface on the surface of the object 5 to be cleaned where the cavity collapse phenomenon is unlikely to occur.
The state where is attached is shown. As described above, in the plane portion, even if the minute cavities 6 are generated, there is no trigger for the cavity collapse phenomenon, so the cleaning power is weak, but the wire mesh jig 8
By disposing, the cavity collapse phenomenon can be actively generated in the entire flat surface portion, and the cleaning power can be greatly enhanced.

【0031】図4は、洗浄部品5の空洞崩壊現象が発生
し難い凹みコーナー部に、リング状の冶具9を取り付け
た場合の一例で、このように凹んたコーナー部では微小
空洞6が内側に入り込んで空洞崩壊現象を起こす確率が
低くなり、洗浄力が弱くなってしまうが、リング状の冶
具9が配置されたことにより、この部分でも活発な空洞
崩壊現象が発生されるようになり、洗浄力が強化でき
る。
FIG. 4 shows an example in which the ring-shaped jig 9 is attached to the concave corner portion where the cavity collapse phenomenon of the cleaning component 5 is unlikely to occur. Although the probability that it will enter and cause a cavity collapse phenomenon will decrease, the cleaning power will weaken, but since the ring-shaped jig 9 is arranged, an active cavity collapse phenomenon will also occur in this part, and cleaning will be performed. Power can be strengthened.

【0032】図5は、このリング状冶具9の断面で、こ
こーこでは4本の線材で形成した場合を示してあるが、
このときの線材の本数は、洗浄力にはあまり関係がない
ことが確認されているので、取付対象となる部分の形状
と洗浄すべき面積に合わせて任意に構成すれば良い。
FIG. 5 is a cross section of the ring-shaped jig 9, and here shows a case where it is formed of four wire rods.
Since it has been confirmed that the number of wire rods at this time has little relation to the cleaning power, it may be arbitrarily configured according to the shape of the portion to be attached and the area to be cleaned.

【0033】次に、各治具8、9の材質について説明す
ると、この治具としては、上記したように、突起部や縁
部などの不連続部が存在すればよいので、その材質はあ
まり問題にはならない。上記した実施形態では金網で作
られているが、その線材には銅やステンレスなど各種の
金属線が使用でき、金属以外にもナイロン糸などが使用
できる。
Next, the material of the jigs 8 and 9 will be described. As described above, since the jigs need to have discontinuous portions such as protrusions and edges, the material is not so much. It doesn't matter. Although the wire mesh is made in the above embodiment, various metal wires such as copper and stainless steel can be used for the wire material, and nylon thread can be used in addition to the metal.

【0034】このときの線材の太さは概ね1mm以下が
望ましく、上記したように、必ずしも金属である必要は
無く、断面形状も円形とは限らず多角形でも良い。ま
た、円形断面又は多角形断面の線材を数本撚り合わせ
た、撚り線であっても良い。
The thickness of the wire at this time is preferably about 1 mm or less, and as described above, it is not necessarily required to be a metal, and the cross-sectional shape is not limited to a circular shape and may be a polygonal shape. Also, a stranded wire in which several wires having a circular cross section or a polygonal cross section are twisted together may be used.

【0035】以上、本発明の実施形態によれば、フラッ
トな表面でも凹みコーナー部でも、網状の冶具8やリン
グ状の冶具9を適用することにより、洗浄対象物体の形
状に関わりなく、全表面にわたって常に良好な状態で洗
浄することができる。
As described above, according to the embodiment of the present invention, by applying the reticulated jig 8 or the ring-shaped jig 9 to the entire surface regardless of the shape of the object to be cleaned, whether it is a flat surface or a concave corner portion. Can always be washed in good condition.

【0036】[0036]

【発明の効果】本発明によれば、洗浄すべき対象物体の
形状を問わず、常に均一で且つ強い洗浄力のもとで容易
に超音波洗浄をすることができ、従って、従来技術のよ
うに部品形状により洗浄不足部分が生じてしまう虞れが
ないので、手による洗浄作業や手拭き作業で補なう必要
がなくなる。
According to the present invention, regardless of the shape of the object to be cleaned, ultrasonic cleaning can always be performed uniformly and under a strong cleaning power, and therefore, it is possible to perform ultrasonic cleaning as in the prior art. In addition, since there is no risk of insufficient cleaning due to the shape of the parts, there is no need to supplement by manual cleaning or hand-wiping work.

【0037】この結果、本発明によれば、部品の形状に
関係なく常に均一に洗浄でき、手拭き作業の排除による
洗浄の質の向上や、洗浄能率向上に効果があり、部品単
品洗浄はもとよりユニット品の洗浄にも使用できるとい
う効果がある。
As a result, according to the present invention, the cleaning can be performed uniformly and irrespective of the shape of the parts, the cleaning quality can be improved by eliminating the hand-wiping work, and the cleaning efficiency can be improved. It has the effect that it can also be used for cleaning products.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明による超音波洗浄装置の一実施形態を示
す構成図である。
FIG. 1 is a configuration diagram showing an embodiment of an ultrasonic cleaning device according to the present invention.

【図2】定在波を利用した超音波洗浄装置の一例を説明
するための構成図である。
FIG. 2 is a configuration diagram for explaining an example of an ultrasonic cleaning device using a standing wave.

【図3】本発明による治具の一実施形態を示す説明図で
ある。
FIG. 3 is an explanatory view showing an embodiment of a jig according to the present invention.

【図4】本発明による治具の他の一実施形態を示す説明
図である。
FIG. 4 is an explanatory view showing another embodiment of the jig according to the present invention.

【図5】本発明による治具の他の一実施形態を示す断面
図である。
FIG. 5 is a cross-sectional view showing another embodiment of the jig according to the present invention.

【符号の説明】[Explanation of symbols]

1 洗浄槽6 2 高周波信号発生器 3 振動子 4 洗浄液 5 洗浄対象物体(洗浄部品) 6 微小空洞 7 定在波 8 金網状の冶具 9 リング状の冶具 1 cleaning tank 6 2 High frequency signal generator 3 oscillators 4 cleaning liquid 5 Objects to be cleaned (cleaning parts) 6 micro cavities 7 standing waves 8 Wire mesh jig 9 Ring-shaped jig

───────────────────────────────────────────────────── フロントページの続き (72)発明者 伊沢 茂 茨城県ひたちなか市大字市毛882番地 株 式会社日立製作所計測器グループ内 (72)発明者 西野 輝道 茨城県ひたちなか市大字市毛882番地 株 式会社日立製作所計測器グループ内 Fターム(参考) 3B201 AA46 AB32 AB47 BB02 BB83 BB92 CD41    ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Shigeru Izawa             882 Ichige, Ichima, Hitachinaka City, Ibaraki Prefecture             Ceremony company Hitachi measuring instruments group (72) Inventor Terumichi Nishino             882 Ichige, Ichima, Hitachinaka City, Ibaraki Prefecture             Ceremony company Hitachi measuring instruments group F term (reference) 3B201 AA46 AB32 AB47 BB02 BB83                       BB92 CD41

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 洗浄槽内の洗浄液に超音波を印加して前
記洗浄液中に発生させた微小空洞の崩壊による衝撃波を
利用し、物体の表面を洗浄する方式の超音波洗浄装置に
おいて、 前記洗浄液内にある前記物体の表面の少なくとも一部の
近傍に、前記微小空洞の崩壊を誘発する冶具が設けられ
た状態で洗浄が行なわれるように構成したことを特徴と
する超音波洗浄装置。
1. An ultrasonic cleaning apparatus of a type in which ultrasonic waves are applied to a cleaning liquid in a cleaning tank to utilize shock waves generated by the collapse of minute cavities generated in the cleaning liquid to clean the surface of an object. An ultrasonic cleaning apparatus, characterized in that cleaning is performed in a state in which a jig for inducing collapse of the microcavities is provided in the vicinity of at least a part of the surface of the object inside.
【請求項2】 請求項1に記載の発明において、 前記超音波を印加するための手段を前記洗浄槽の底部に
設けた上で、前記洗浄槽内にある洗浄液の液面位置を制
御する手段を設け、 前記洗浄液中に超音波の定在波が形成された状態で洗浄
が行なわれるように構成されていることを特徴とする超
音波洗浄装置。
2. The invention according to claim 1, wherein a means for applying the ultrasonic wave is provided at a bottom portion of the cleaning tank, and a means for controlling a liquid surface position of the cleaning liquid in the cleaning tank. And an ultrasonic cleaning apparatus configured to perform cleaning in a state where an ultrasonic standing wave is formed in the cleaning liquid.
【請求項3】 超音波の印加により洗浄液中に発生させ
た微小空洞の崩壊による衝撃波を利用し、物体の表面を
洗浄する方式の超音波洗浄装置において、 前記物体の表面の少なくとも一部の近傍に配置され、前
記微小空洞の崩壊を誘発するように構成されていること
を特徴とする超音波洗浄装置用治具。
3. An ultrasonic cleaning apparatus of the type which cleans the surface of an object by utilizing a shock wave generated by the collapse of micro-cavities generated in a cleaning liquid by the application of ultrasonic waves, in the vicinity of at least a part of the surface of the object. A jig for an ultrasonic cleaning device, wherein the jig is arranged in the above position and is configured to induce the collapse of the microcavities.
【請求項4】 請求項3に記載の発明において、 超音波洗浄装置が、前記超音波を印加するための手段を
前記洗浄槽の底部に設けた上で、前記洗浄槽内にある洗
浄液の液面位置を制御する手段を備え、 前記洗浄液中に超音波の定在波が形成された状態で洗浄
が行なわれるように構成されていることを特徴とする超
音波洗浄装置用治具。
4. The ultrasonic cleaning apparatus according to claim 3, wherein the ultrasonic cleaning device has means for applying the ultrasonic waves at the bottom of the cleaning tank, and the cleaning liquid in the cleaning tank. A jig for an ultrasonic cleaning device, comprising means for controlling a surface position, and configured to perform cleaning in a state where a standing wave of ultrasonic waves is formed in the cleaning liquid.
JP2001224516A 2001-07-25 2001-07-25 Ultrasonic cleaning unit and tool for ultrasonic cleaning unit Pending JP2003033735A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001224516A JP2003033735A (en) 2001-07-25 2001-07-25 Ultrasonic cleaning unit and tool for ultrasonic cleaning unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001224516A JP2003033735A (en) 2001-07-25 2001-07-25 Ultrasonic cleaning unit and tool for ultrasonic cleaning unit

Publications (1)

Publication Number Publication Date
JP2003033735A true JP2003033735A (en) 2003-02-04

Family

ID=19057662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001224516A Pending JP2003033735A (en) 2001-07-25 2001-07-25 Ultrasonic cleaning unit and tool for ultrasonic cleaning unit

Country Status (1)

Country Link
JP (1) JP2003033735A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2193879A1 (en) * 2008-12-05 2010-06-09 Mikron Agie Charmilles AG Tool cleaning
WO2018078926A1 (en) 2016-10-31 2018-05-03 長瀬フィルター株式会社 Cleaning device and cleaning method
WO2018158024A1 (en) * 2017-03-01 2018-09-07 Ika - Werke Gmbh & Co. Kg Cleaning device
US11219930B2 (en) 2018-05-28 2022-01-11 Nagase Filter Co, Ltd. Filter cleaning method and filter cleaning apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2193879A1 (en) * 2008-12-05 2010-06-09 Mikron Agie Charmilles AG Tool cleaning
WO2018078926A1 (en) 2016-10-31 2018-05-03 長瀬フィルター株式会社 Cleaning device and cleaning method
KR20190039571A (en) 2016-10-31 2019-04-12 나가세 필터 가부시키가이샤 Cleaning device and cleaning method
WO2018158024A1 (en) * 2017-03-01 2018-09-07 Ika - Werke Gmbh & Co. Kg Cleaning device
US11219930B2 (en) 2018-05-28 2022-01-11 Nagase Filter Co, Ltd. Filter cleaning method and filter cleaning apparatus

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