JPH11277010A - Ultrasonic washing apparatus - Google Patents
Ultrasonic washing apparatusInfo
- Publication number
- JPH11277010A JPH11277010A JP8539298A JP8539298A JPH11277010A JP H11277010 A JPH11277010 A JP H11277010A JP 8539298 A JP8539298 A JP 8539298A JP 8539298 A JP8539298 A JP 8539298A JP H11277010 A JPH11277010 A JP H11277010A
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic
- phase
- vibrator
- cleaning
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、精密洗浄に使用さ
れる超音波洗浄装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic cleaning device used for precision cleaning.
【０００２】[0002]
【従来の技術】超音波洗浄技術は、超音波を利用して物
体に付着した微小な異物や汚れを取り除く方法として、
電子部品、半導体、各種光学部品をはじめとする精密洗
浄に広く利用されている。超音波洗浄は、洗浄液に加え
られた音響出力によって洗浄液が引き裂かれ、真空の空
洞が発生するキャビテーション現象を利用し、物体に付
着した付着物や汚れを除去するもので、キャビテーショ
ン現象は、超音波エネルギの大きくなる位置（定在波の
最大振幅の部分）で顕著になることが知られている。2. Description of the Related Art Ultrasonic cleaning technology is a method for removing minute foreign matter and dirt attached to an object using ultrasonic waves.
Widely used for precision cleaning including electronic components, semiconductors, and various optical components. Ultrasonic cleaning uses cavitation phenomena, in which the cleaning liquid is torn by the acoustic power applied to the cleaning liquid and creates vacuum cavities, and removes extraneous matter and dirt attached to the object. It is known that it becomes remarkable at the position where the energy becomes large (the portion of the maximum amplitude of the standing wave).
【０００３】したがって、超音波洗浄装置ではキャビテ
ーションの偏在による洗浄ムラを抑えることが重要にな
る。洗浄ムラ対策として、超音波振動の発振周波数を変
調させる方法、異なる周波数の超音波振動子を用いる方
法、被洗浄物の揺動・回転など被洗浄物を移動させる方
法、その他種々の方法が採用されている。Therefore, it is important for an ultrasonic cleaning apparatus to suppress uneven cleaning due to uneven distribution of cavitation. As a countermeasure for uneven cleaning, a method of modulating the oscillation frequency of the ultrasonic vibration, a method of using an ultrasonic vibrator having a different frequency, a method of moving the object to be cleaned such as swinging and rotating the object to be cleaned, and various other methods are employed. Have been.
【０００４】例えば、実開昭６２−１２３２８９号公報
及び実開昭６２−１２３２９０号公報では、共振周波数
が異なる複数の振動子を備えた交互多周波式超音波洗浄
装置が提案されている。For example, Japanese Utility Model Laid-Open Nos. 62-123289 and 62-123290 propose an alternating multi-frequency ultrasonic cleaning apparatus including a plurality of vibrators having different resonance frequencies.
【０００５】また、特開平７−１７１５２６号公報で
は、複数の超音波振動子を洗浄槽の中央部に向けて取付
け、それぞれの振動子の振幅、位相、周波数のいずれか
１つを変化させることによって、超音波エネルギが高く
なる位置を制御し、洗浄度の高い部分とワークの投入位
置とを一致させて、一定の洗浄度でムラなく洗浄する方
法が提案されている。In Japanese Patent Application Laid-Open No. Hei 7-171526, a plurality of ultrasonic transducers are mounted facing the center of a cleaning tank, and any one of amplitude, phase, and frequency of each transducer is changed. Thus, there has been proposed a method of controlling the position where the ultrasonic energy is increased, making the portion having a high degree of cleaning coincide with the input position of the work, and performing uniform cleaning with a constant degree of cleaning.
【０００６】さらに、超音波洗浄におけるその他の問題
点としては、超音波洗浄装置を長期にわたって使用する
と、洗浄槽内部が徐々に腐食される所謂エロージョン
（腐食）の発生が知られている。エロージョンは洗浄槽
内部でも特に振動板などの超音波振動子を取付けた部分
に顕著に発生し、微小量づつ除去された材料が洗浄槽内
に残留して、被洗浄物を汚染する。エロージョンの発生
は、振動子の配置方法、振動板など振動子を取付ける部
分の材質・表面状態、水位などにより状況が異なるた
め、エロージョンを抑制する方法としては、振動板材料
をチタン製とする方法、水位を１５０ｍｍ以上にする方
法などが知られている。また、特開平５−１４５９９５
号公報に記載のように、金属あるいは樹脂で形成した振
動板の接液面にポリエステルフィルムを貼着する方法、
特開平６−９１２４０号公報に記載のように、板厚２０
〜１０００μｍの金属板を超音波発振器の超音波発振面
に搭載する方法などが提案されている。As another problem in ultrasonic cleaning, it has been known that when an ultrasonic cleaning apparatus is used for a long period of time, so-called erosion (corrosion) occurs in which the inside of a cleaning tank is gradually corroded. Erosion occurs remarkably in the cleaning tank, particularly in a portion where the ultrasonic vibrator is attached, such as a vibration plate, and a small amount of the removed material remains in the cleaning tank to contaminate the object to be cleaned. The occurrence of erosion differs depending on the arrangement method of the vibrator, the material and surface condition of the portion where the vibrator such as the vibrator is mounted, the water level, and the like. And a method of raising the water level to 150 mm or more are known. Also, Japanese Patent Application Laid-Open No.
As described in the publication, a method of attaching a polyester film to the liquid contact surface of a diaphragm formed of metal or resin,
As disclosed in JP-A-6-91240,
There has been proposed a method of mounting a metal plate of about 1000 μm on the ultrasonic oscillation surface of an ultrasonic oscillator.
【０００７】[0007]
【発明が解決しようとする課題】しかしながら、上記前
者の公開公報に記載の方法では共振周波数の異なる振動
子を駆動するために、共振周波数毎に異なる発振器を用
いる必要があり、洗浄装置が必要以上に大型化するとい
った課題を有していた。However, in the method disclosed in the above-mentioned publication, it is necessary to use a different oscillator for each resonance frequency in order to drive a resonator having a different resonance frequency. There was a problem that the size became large.
【０００８】また、上記後者の公開公報に記載の超音波
洗浄装置は、振動子の振幅、位相、周波数のいずれか１
つを選択し、被洗浄物の投入位置によって、最適な洗浄
性が選られるように制御する方式であるため、あらかじ
め被洗浄物の位置を正確に把握しておく必要があった。
また、一般的な超音波洗浄装置は、振動子を洗浄槽の底
面に取付ける直接式、振動子を振動板に取付ける振動板
方式、超音波発振ユニットを洗浄槽内に設置する投込方
式に大別される。上記後者の公開公報に記載の超音波洗
浄装置は、上記の一般的な超音波洗浄装置と異なり、振
動子を洗浄槽側面に取付け、洗浄槽の中央部に向ける構
成とし、超音波は２次元的に進行すると仮定している。
しかし、振動子を洗浄槽側面に取付けた場合、実際の超
音波は振動子から水面に湾曲して３次元的に進行するた
め、意図した効果が得られないといった課題を有してい
る。Further, the ultrasonic cleaning apparatus described in the latter publication discloses one of the amplitude, phase and frequency of the vibrator.
This is a method in which one is selected and the optimum cleaning performance is selected depending on the position of the object to be cleaned, so that the position of the object to be cleaned must be accurately grasped in advance.
In addition, general ultrasonic cleaning devices are generally classified into a direct type in which a vibrator is mounted on the bottom of a cleaning tank, a diaphragm type in which a vibrator is mounted on a diaphragm, and a projection type in which an ultrasonic oscillation unit is installed in the cleaning tank. Separated. The ultrasonic cleaning device described in the latter publication is different from the above general ultrasonic cleaning device in that a vibrator is attached to the side of the cleaning tank and directed toward the center of the cleaning tank. It is assumed that it progresses.
However, when the vibrator is attached to the side surface of the cleaning tank, the actual ultrasonic wave curves from the vibrator to the water surface and travels three-dimensionally, so that there is a problem that the intended effect cannot be obtained.
【０００９】エロージョンについていえば、特開平５−
１４５９９５号公報に記載の方法では、ポリエステルフ
ィルムの剥離が生じるといった課題を有しており、また
特開平６−９１２４０号公報に記載の方法では、超音波
発振面に搭載した金属板にエロージョンが発生し、洗浄
槽内を汚染するといった課題を有していた。Regarding erosion, see Japanese Patent Laid-Open No.
The method described in Japanese Patent No. 145995 has a problem that a polyester film is peeled off, and the method described in Japanese Patent Application Laid-Open No. 6-91240 has a problem that erosion occurs on a metal plate mounted on an ultrasonic oscillation surface. However, there is a problem that the inside of the cleaning tank is contaminated.
【００１０】また、一般的な超音波洗浄装置では、振動
子を同位相で駆動するため、振動子を取付けた面内で局
所的にエネルギの強い部分が存在し、この部分にエロー
ジョンが発生しやすいという課題を有していた。In a general ultrasonic cleaning apparatus, since the vibrator is driven in phase, there is a locally high-energy portion in the plane on which the vibrator is mounted, and erosion occurs in this portion. Had the problem of being easy.
【００１１】本発明は、上記課題に鑑みて、振動板など
の超音波振動子を取付けた部分に顕著に発生するエロー
ジョンを低減できる超音波洗浄装置を提供することを目
的とする。SUMMARY OF THE INVENTION In view of the above problems, an object of the present invention is to provide an ultrasonic cleaning apparatus capable of reducing erosion that occurs remarkably at a portion where an ultrasonic vibrator such as a diaphragm is attached.
【００１２】[0012]
【課題を解決するための手段】上記目的を達成するため
に、本発明に係わる超音波洗浄装置は、洗浄槽の底面も
しくは洗浄槽の底面に取付けた振動板に、複数の超音波
振動子を配設し、前記複数の超音波振動子を各々異なる
位相で駆動することを特徴とし、複数の超音波振動子を
各々異なる位相で駆動するための手段として、前記複数
の超音波振動子と超音波発振器とを、複数の位相変調素
子を介して接続したを特徴としている。In order to achieve the above object, an ultrasonic cleaning apparatus according to the present invention comprises a plurality of ultrasonic vibrators mounted on a bottom surface of a cleaning tank or a diaphragm attached to a bottom surface of the cleaning tank. And disposing the plurality of ultrasonic transducers at different phases, and as a means for driving the plurality of ultrasonic transducers at different phases, The sound wave oscillator is connected via a plurality of phase modulation elements.
【００１３】さらに、好ましくは、互いに隣合う超音波
振動子の位相を各々９０°もしくは１８０°異ならせる
ことことを特徴としている。Further, preferably, the phases of the ultrasonic transducers adjacent to each other are different from each other by 90 ° or 180 °.
【００１４】[0014]
【発明の実施の形態】本発明を以下の実施例により詳細
に説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail with reference to the following examples.
【００１５】図１は本発明による超音波洗浄装置の一実
施例を示している。図１に示す超音波洗浄装置は、振動
板１４に複数個の超音波振動子１２を配設し、洗浄槽１
１の底面に前記振動板１４を取付ける構造になってい
る。さらに、複数の超音波振動子１２と一つの超音波発
振器１３を複数の位相変調素子１５を介して接続し、前
記複数の超音波振動子１２を各々異なる位相で駆動する
構成になっている。FIG. 1 shows an embodiment of an ultrasonic cleaning apparatus according to the present invention. The ultrasonic cleaning apparatus shown in FIG. 1 has a plurality of ultrasonic vibrators 12
The structure is such that the vibration plate 14 is attached to the bottom surface of the device 1. Further, a plurality of ultrasonic transducers 12 and one ultrasonic oscillator 13 are connected via a plurality of phase modulation elements 15 so that the plurality of ultrasonic transducers 12 are driven at different phases.
【００１６】図２及び図３は本発明による他の実施例を
示している。図２に示す超音波洗浄装置は、洗浄槽１１
の底面に複数の超音波振動子１２を直接取付ける構成に
なっている。また、図３に示す超音波洗浄装置は、超音
波発振ユニット１５の内部に複数の超音波振動子１２を
取付ける構成になっており、超音波発振ユニット１５を
洗浄槽１１の内部に入れて使用する形式の超音波洗浄装
置である。FIGS. 2 and 3 show another embodiment according to the present invention. The ultrasonic cleaning apparatus shown in FIG.
A plurality of ultrasonic transducers 12 are directly attached to the bottom surface of the device. The ultrasonic cleaning apparatus shown in FIG. 3 has a configuration in which a plurality of ultrasonic vibrators 12 are mounted inside the ultrasonic oscillation unit 15, and the ultrasonic oscillation unit 15 is used inside the cleaning tank 11. This is an ultrasonic cleaning device of the type shown in FIG.
【００１７】図２並びに図３いずれの実施例において
も、図１に示されるように、複数の超音波振動子１２に
位相変調素子１５を接続することによって、一つの超音
波発振器１３で位相制御を行う方法を採用している。In each of the embodiments of FIGS. 2 and 3, as shown in FIG. 1, by connecting the phase modulating element 15 to a plurality of ultrasonic transducers 12, a single ultrasonic oscillator 13 controls the phase. The method of doing is adopted.
【００１８】本発明者らは、以上説明したような超音波
洗浄装置を用いて、超音波振動子の位相制御を行うこと
により、超音波洗浄装置に発生するエロージョンを低減
できることを確認した。The present inventors have confirmed that erosion generated in the ultrasonic cleaning device can be reduced by controlling the phase of the ultrasonic vibrator using the ultrasonic cleaning device described above.
【００１９】図４は、本発明によるエロージョン低減を
説明する図面であって、図４（Ａ）は振動板１４におけ
る超音波振動子１２の取付け位置２２ａ〜２２ｄを示し
ている。本発明者らは、図４（Ｂ）に示すように、取付
け位置２２ａ〜２２ｄに取付けた超音波振動子１２各々
の位相を、互いに隣合う振動子と９０°もしくは１８０
°異ならせる場合に、エロージョンの発生を効率的に抑
制できることを確認した。FIG. 4 is a view for explaining the erosion reduction according to the present invention. FIG. 4A shows the mounting positions 22a to 22d of the ultrasonic vibrator 12 on the diaphragm 14. The present inventors, as shown in FIG. 4B, set the phase of each of the ultrasonic transducers 12 attached to the attachment positions 22a to 22d to 90 ° or 180 ° with the adjacent transducers.
° It was confirmed that the generation of erosion can be suppressed efficiently when different.
【００２０】実際の超音波洗浄装置、特に大型の洗浄槽
を備えた洗浄装置では、さらに多くの振動子が必要とさ
れる。例えば、小〜中型の洗浄装置であっても、図５
（Ａ）に示すように、振動板１４の７つの取付け位置３
２ａ〜３２ｇに超音波振動子１２を配置している。図５
（Ａ）に示す例で、各超音波振動子１２の最適な位相を
求めるためには、極めて多くの位相変化の例を調べてい
く必要があるが、図４に示す振動板１４と複数個の振動
子１２を用いた実施例に基づき、３２ａ〜３２ｇの位置
に取付けた超音波振動子の位相を、図５（Ｂ）に示すよ
うに、エロージョンの発生を低減することが可能であっ
た。In an actual ultrasonic cleaning apparatus, particularly in a cleaning apparatus having a large cleaning tank, more vibrators are required. For example, even in the case of a small to medium-sized washing apparatus, FIG.
As shown in (A), seven mounting positions 3 of the diaphragm 14
The ultrasonic transducers 12 are arranged at 2a to 32g. FIG.
In the example shown in FIG. 4A, in order to obtain the optimum phase of each ultrasonic vibrator 12, it is necessary to investigate an extremely large number of phase changes, but the diaphragm 14 shown in FIG. Based on the embodiment using the vibrator 12, the phase of the ultrasonic vibrator mounted at the position of 32a to 32g can be reduced in the occurrence of erosion as shown in FIG. 5B. .
【００２１】すなわち、本発明者らは図５（Ａ）に示す
振動板１４と超音波振動子１２の配置をモデル化し、有
限要素法により振動板の振動状態を解析した。解析は、
各振動子の位相を図６に示す６通り変化させて、振動板
内で生じる最大振幅を計算した。解析条件にあたって、
境界条件、加振条件、振動板物性を以下の通り定めた。That is, the present inventors modeled the arrangement of the diaphragm 14 and the ultrasonic vibrator 12 shown in FIG. 5A and analyzed the vibration state of the diaphragm by the finite element method. The analysis is
The maximum amplitude generated in the diaphragm was calculated by changing the phase of each vibrator as shown in FIG. In analyzing conditions,
Boundary conditions, excitation conditions, and diaphragm physical properties were determined as follows.
【００２２】・境界条件：振動板の外周部を固定端とし
た。Boundary conditions: The outer peripheral portion of the diaphragm was a fixed end.
【００２３】・加振条件：振動子の取付け位置中心に、
所定の周波数（本解析においては、４０ｋＨｚ）と振幅
（本解析においては、無次元数１）を有する正弦波が作
用するとした。Vibration conditions: At the center of the mounting position of the vibrator,
It is assumed that a sine wave having a predetermined frequency (40 kHz in this analysis) and an amplitude (in this analysis, dimensionless number 1) acts.
【００２４】・材料物性：振動板をステンレス鋼である
とし、ヤング率２．０６×１０8ｋｇｆ／ｍｍ2、ポアソ
ン比０．２９、密度７．８２ｇｆ／ｃｍ２ 以上の条件をもとに得られた解析結果を以下に示す。Material properties: Assuming that the diaphragm is stainless steel, the diaphragm has a Young's modulus of 2.06 × 10 8 kgf / mm 2 , a Poisson's ratio of 0.29, and a density of 7.82 gf / cm 2 or more. The analysis results obtained are shown below.
【００２５】図６（Ａ）は解析に用いた振動板１４の大
きさ、及び取付け位置の例を示すものであり、単位はｍ
ｍである。図６（Ｂ）は解析例を示すものであり、図中
の各丸印内の数字は該位置に取り付けられる超音波振動
子の位相のズレを示している。FIG. 6A shows an example of the size and the mounting position of the diaphragm 14 used in the analysis, and the unit is m.
m. FIG. 6B shows an analysis example, and the numbers in the circles in the figure show the phase shift of the ultrasonic transducer attached to the position.
【００２６】[0026]
【表１】 [Table 1]
【００２７】※最大振幅の値は解析１を１００として算
出 上記の解析結果からも明らかなように、図４の例と同様
に、隣合う振動子の位相を９０°もしくは１８０°づつ
変化させた場合（解析３）に最大振幅の値が小さくなる
ことがわかる。* The value of the maximum amplitude is calculated with analysis 1 as 100. As is clear from the above analysis results, the phase of the adjacent vibrator was changed by 90 ° or 180 ° in the same manner as in the example of FIG. In the case (Analysis 3), it can be seen that the value of the maximum amplitude decreases.
【００２８】以上説明したように、超音波振動子の位相
のずれを制御し、振動板の振幅、応力の分布を変化させ
ることによって、超音波のエネルギを振動板全体に均一
に作用させることが可能となり、エロージョンの発生も
抑制できる。逆に、位相制御が適切でない場合は、振動
板の振幅、応力は局所的に大きくなる部分が現われ、超
音波のエネルギは振動板上で偏在するため、超音波のエ
ネルギが局所的に高い部分にエロージョンが発生するこ
とになる。As described above, by controlling the phase shift of the ultrasonic vibrator and changing the amplitude and stress distribution of the diaphragm, the energy of the ultrasonic wave can be uniformly applied to the entire diaphragm. And erosion can be suppressed. Conversely, if the phase control is not appropriate, a portion where the amplitude and stress of the diaphragm are locally large appears, and the energy of the ultrasonic wave is unevenly distributed on the diaphragm. Erosion occurs.
【００２９】さらに本発明によれば、特開平７−１７１
５２６号公報に記載の装置のように、被洗浄物の投入位
置によって、振動子のパラメータを制御する必要がな
く、一旦最適な条件を決定すれば、被洗浄物の位置、大
きさなどに係わらずエロージョンの発生を抑制すること
が可能になる。Further, according to the present invention, JP-A-7-171
There is no need to control the parameters of the vibrator according to the input position of the object to be cleaned as in the apparatus described in Japanese Patent No. 526, and once the optimal conditions are determined, the position and size of the object to be cleaned are not affected. Erosion can be suppressed.
【００３０】また、実開昭６２−１２３２８９号公報及
び実開昭６２−１２３２９０号公報に記載の装置のよう
に、複数の超音波発振器を用いる必要がなく、洗浄装置
全体を小型化することが可能になる。Further, unlike the apparatuses described in Japanese Utility Model Laid-Open Nos. 62-123289 and 62-123290, it is not necessary to use a plurality of ultrasonic oscillators, and the entire cleaning apparatus can be reduced in size. Will be possible.
【００３１】[0031]
【発明の効果】本発明による超音波洗浄装置は、第１
に、洗浄槽の底面もしくは洗浄槽の底面に取付けた振動
板に、複数の超音波振動子を配設し、前記複数の超音波
振動子を各々異なる位相で駆動し、かつ、前記複数の超
音波振動子を複数の位相変調素子を介して超音波発振器
に接続したことを特徴としている。したがって、位相変
調素子によって、簡単な構成で容易に振動子の位相を任
意に設定することが可能になる。また、互いに隣合う超
音波振動子の位相を各々９０°もしくは１８０°変化さ
せることを特徴としている。これによって、振動板など
に作用する超音波のエネルギを振動板全体にわたって均
一な分布とすることができるので、洗浄槽内部に発生す
るエロージョンを低減することができる。The ultrasonic cleaning apparatus according to the present invention has a first
A plurality of ultrasonic vibrators arranged on a bottom surface of the cleaning tank or a diaphragm attached to the bottom surface of the cleaning tank, driving the plurality of ultrasonic vibrators at different phases, and The ultrasonic transducer is connected to an ultrasonic oscillator via a plurality of phase modulation elements. Therefore, the phase modulator can easily set the phase of the vibrator arbitrarily with a simple configuration. Also, the phase of the ultrasonic transducers adjacent to each other is changed by 90 ° or 180 °, respectively. Thereby, the energy of the ultrasonic waves acting on the diaphragm or the like can be made uniform over the entire diaphragm, so that erosion generated inside the cleaning tank can be reduced.
【図１】本発明による超音波洗浄装置の第１の実施例を
説明する図面である。FIG. 1 is a view illustrating a first embodiment of an ultrasonic cleaning apparatus according to the present invention.
【図２】本発明による超音波洗浄装置の第２の実施例を
説明する図面である。FIG. 2 is a diagram illustrating a second embodiment of the ultrasonic cleaning apparatus according to the present invention.
【図３】本発明による超音波洗浄装置の第３の実施例を
説明する図面である。FIG. 3 is a view illustrating a third embodiment of the ultrasonic cleaning apparatus according to the present invention.
【図４】本発明による超音波振動子の位相制御方法の第
１の実施例を説明する図面である。FIG. 4 is a diagram illustrating a first embodiment of a phase control method for an ultrasonic transducer according to the present invention.
【図５】本発明による超音波振動子の位相制御方法の第
２の実施例を説明する図面である。FIG. 5 is a view for explaining a second embodiment of the phase control method of the ultrasonic transducer according to the present invention.
【図６】有限要素解析における各振動子の配列と位相の
ズレを説明する図面である。FIG. 6 is a view for explaining a displacement between the arrangement and the phase of each transducer in the finite element analysis.
１１ 洗浄槽 １２ 超音波振動子 １３ 超音波発振器 １４ 振動板 １５ 位相変調素子 １６ 超音波発振ユニット ２２ａ〜２２ｄ 超音波振動子取付け位置 ３２ａ〜３２ｇ 超音波振動子取付け位置 DESCRIPTION OF SYMBOLS 11 Cleaning tank 12 Ultrasonic vibrator 13 Ultrasonic oscillator 14 Vibration plate 15 Phase modulation element 16 Ultrasonic oscillation unit 22a-22d Ultrasonic vibrator mounting position 32a-32g Ultrasonic vibrator mounting position
Claims (2)
付けた振動板に、複数の超音波振動子を配設し、前記複
数の超音波振動子と超音波発振器とを複数の位相変調素
子を介して接続し、前記複数の超音波振動子を異なる位
相で駆動することを特徴とする超音波洗浄装置。1. A plurality of ultrasonic vibrators are disposed on a bottom surface of a cleaning tank or a diaphragm attached to a bottom surface of a cleaning tank, and the plurality of ultrasonic vibrators and the ultrasonic oscillator are connected to a plurality of phase modulation elements. Wherein the plurality of ultrasonic transducers are driven with different phases.
９０°もしくは１８０°異ならせて駆動することを特徴
とする請求項１に記載の超音波洗浄装置。2. The ultrasonic cleaning apparatus according to claim 1, wherein the ultrasonic transducers adjacent to each other are driven with a phase difference of 90 ° or 180 °, respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP08539298A JP3854406B2 (en) | 1998-03-31 | 1998-03-31 | Ultrasonic cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP08539298A JP3854406B2 (en) | 1998-03-31 | 1998-03-31 | Ultrasonic cleaning equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11277010A true JPH11277010A (en) | 1999-10-12 |
| JP3854406B2 JP3854406B2 (en) | 2006-12-06 |
Family
ID=13857502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP08539298A Expired - Lifetime JP3854406B2 (en) | 1998-03-31 | 1998-03-31 | Ultrasonic cleaning equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3854406B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100390169B1 (en) * | 2000-07-06 | 2003-07-04 | 주식회사 발해 | Washbasin using ultrasonic waves |
| KR100430855B1 (en) * | 2001-08-21 | 2004-05-10 | 주식회사 뷰닉스 | Washing apparatus of beauty culture tool with ultrasonic generator |
| JP2007215119A (en) * | 2006-02-13 | 2007-08-23 | Mitsubishi Electric Engineering Co Ltd | Electroacoustic transducer |
| JP2017029963A (en) * | 2015-08-06 | 2017-02-09 | トヨタ自動車株式会社 | Ultrasonic cleaning apparatus |
-
1998
- 1998-03-31 JP JP08539298A patent/JP3854406B2/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100390169B1 (en) * | 2000-07-06 | 2003-07-04 | 주식회사 발해 | Washbasin using ultrasonic waves |
| KR100430855B1 (en) * | 2001-08-21 | 2004-05-10 | 주식회사 뷰닉스 | Washing apparatus of beauty culture tool with ultrasonic generator |
| JP2007215119A (en) * | 2006-02-13 | 2007-08-23 | Mitsubishi Electric Engineering Co Ltd | Electroacoustic transducer |
| JP2017029963A (en) * | 2015-08-06 | 2017-02-09 | トヨタ自動車株式会社 | Ultrasonic cleaning apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3854406B2 (en) | 2006-12-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7247977B2 (en) | Ultrasonic processing method and apparatus with multiple frequency transducers | |
| CA2645933C (en) | Megasonic processing apparatus with frequency sweeping of thickness mode transducers | |
| US9610617B2 (en) | Megasonic multifrequency apparatus with matched transducer | |
| JP4036287B2 (en) | Ultrasonic cleaning equipment | |
| JPH11277010A (en) | Ultrasonic washing apparatus | |
| JP6935408B2 (en) | How to Excite Piezoelectric Transmitters and Sound Generators | |
| JP2007311379A (en) | Ultrasonic cleaning apparatus | |
| KR102065067B1 (en) | An ultrasonic cleaning device based on multi-ultrasonic vibrator that drive multiple frequencies simultaneously | |
| JP2789178B2 (en) | Ultrasonic cleaning equipment | |
| JP2008227300A (en) | Ultrasonic cleaner | |
| JP2002126668A (en) | Ultrasonic cleaning apparatus | |
| JPH043667Y2 (en) | ||
| JP3309749B2 (en) | Ultrasonic cleaning equipment | |
| JPH0642778Y2 (en) | Throw-in ultrasonic cleaner | |
| JPH08281225A (en) | Method for reducing noise in ultrasonic washer | |
| JPH11151469A (en) | Ultrasonic washer | |
| JPH081458U (en) | Washing machine with ultrasonic cleaning device | |
| JPH0446638B2 (en) | ||
| MXPA06005108A (en) | Ultrasonic processing method and apparatus with multiple frequency transducers | |
| JPH0739835A (en) | Ultrasonic cleaning vessel |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20040413 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20060227 |
|
| A131 | Notification of reasons for refusal |
Effective date: 20060425 Free format text: JAPANESE INTERMEDIATE CODE: A131 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060626 |
|
| RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20060626 |
|
| A521 | Written amendment |
Effective date: 20060626 Free format text: JAPANESE INTERMEDIATE CODE: A821 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Effective date: 20060905 Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20060908 |
|
| R150 | Certificate of patent (=grant) or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 3 Free format text: PAYMENT UNTIL: 20090915 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100915 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 5 Free format text: PAYMENT UNTIL: 20110915 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 6 Free format text: PAYMENT UNTIL: 20120915 |