JPH10136628A - Electromagnetic actuator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electromagnetic actuator which obtains a large driving force, in which the responsiveness of the generation of a driving force to an input control signal is good and in which a setting property to a prescribed driving position is good. SOLUTION: An actuator is composed of permanent magnetic field generating parts 1, 2 which generate permanent magnetic fields and of a current-passage formation part 3, which is movable relative to the permanent magnetic field generation parts 1, 2 and in which a current passage crossed with the permanent magnetic fields is formed by a current according to an input control signal. The permanent magnetic field generating parts 1, 2 at the actuator generate two permanent magnetic fields in mutually crossed directions by, e.g. two pairs of magnets 13A, 13B and 23A, 23B. A current-passage formation part 3 is provided with two coils L1 which are crossed respectively with the two magnetic fields, and the coils L1 are formed in such a way that their winding axes are nearly on the same line. An object to be driven is driven by relative movements, which are generated between respective magnets 13A, 13B, 23A, and 23B and the coils L1 by two electromagnetic forces which are generated between the magnets 13A, 13B and those 23A, 23B and the coils L1.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to an electromagnetic actuator.

[0002]

2. Description of the Related Art Actuators that generate a driving force based on electromagnetic induction are used as mechanisms for driving lenses, mirrors, prisms, and other small optical components or electronic components used in imaging devices and the like. I have. Since such a conventional electromagnetic actuator constitutes one drive system for one drive force by the entire actuator, the drive force is small, and the response of the drive force generation to an input control signal tends to be low. Along with this,
In many cases, stabilization to a predetermined drive position is disadvantageous.

[0003]

SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and has as its object to provide an electromagnetic actuator capable of obtaining a large driving force. Another object of the present invention is to provide an electromagnetic actuator having good responsiveness of generating a driving force to an input control signal.

[0004] It is still another object of the present invention to provide an electromagnetic actuator having good settling to a predetermined driving position.

[0005]

According to the present invention, there is provided an electromagnetic actuator comprising: a permanent magnetic field generating means for generating a permanent magnetic field; and a permanent magnetic field generating means for moving the permanent magnetic field relative to the permanent magnetic field generating means by a current corresponding to an input control signal. An electromagnetic actuator comprising: a current path formation generating means for forming a current path intersecting with a magnetic field, wherein the permanent magnetic field generation means generates at least two permanent magnetic fields in directions intersecting with each other; And at least two coils each intersecting the at least two permanent magnetic fields, the winding axes of the at least two coils being substantially collinear with each other, and having at least two coils formed between the magnet and the coil. The driven body is driven by relative movement generated between the permanent magnetic field generating means and the current path forming means by two electromagnetic forces. It is characterized in.

[0006]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 is a perspective view of each member showing the structure of an electromagnetic actuator according to one embodiment of the present invention. In FIG. 1, the basic configuration of the electromagnetic actuator is such that a movable member 3 is sandwiched between a first fixed member (first drive stage) 1 and a second fixed member (second drive stage) 2. In other words, the movable member 3 is surrounded by the first and second fixed members 1 and 2. A plan view of the first fixing member 1 is shown in FIG. 2, and a side view and an AA cross-sectional view thereof are shown in FIG. 3. A plan view of the second fixing member 2 is shown in FIG. 4, and a side view and a BB cross-sectional view thereof are shown in FIG. 6 is a plan view of the movable member (movable base assembly) 3, and FIG. 7 is a side view and a cross-sectional view taken along line CC of FIG.

The first fixing member 1 has a circular hollow portion 10 at the center of its main surface, and is formed by resin molding or pressing a metal flat plate, or by machining an aluminum material. Based on the flat plate member 11 provided. The contour of the flat plate-shaped member 11 has a substantially square shape on the outside on the main surface and a substantially perfect circle on the inside centered on the intersection of the diagonal lines of the regular square. A yoke (magnetic material) 12 is provided around the end face of the flat member 11 on which the cavity 10 is formed. Therefore, the yoke 12
It extends along the side end surface and forms an annular shape. York 12
Is wider than the thickness of the flat member 11, and protrudes from the flat member 11 on the side opposite to the movable member 3 side. Inside the yoke 12, a first magnet 13A and a second magnet 13B facing each other are provided.

The second fixing member 2 has substantially the same basic structure as that of the first fixing member 1, but is formed by resin molding or pressing a ferrous flat plate, or is formed by machining an aluminum material. On the basis of the provided concave cross-sectional member 21. The concave cross section member 21 has a cross section (for example, B
-B cross section), it has a concave shape depressed outward from the movable member 3 side, and the concave portion has a substantially circular shape in a plan view. A circular hollow portion is formed at the center of the bottom surface of the concave section member 21 at the center thereof. A yoke 2 is provided on the inner wall surface of the recess.
2 is provided around. Therefore, the yoke 22 extends along the inner wall surface and forms an annular shape. Inside the yoke 22, a first magnet 23A and a second magnet 2 facing each other are provided.
3B.

The first magnets 13A, 23A and the second magnets 13B, 23B provided on each fixed member as permanent magnetic field generating means have substantially the same shape as each other, and have a predetermined sectional area or a yoke, respectively. It extends on the main surfaces of the yokes 12, 22 with a width of 12,22. Therefore, these magnets are both formed in an arc shape. Further, the first magnet and the second magnet are composed of the flat member 11, the hollow portion 10 of the concave section member 21,
The main direction in which the first magnet 13A and the second magnet 13B of the first fixed member 1 face each other (symmetrically in the left-right direction in FIG. 2).
The main direction in which the first magnet 23A and the second magnet 23B of the second fixing member 2 face each other (vertical direction in FIG. 4) maintains a relatively orthogonal relationship.

The first magnets 13A and 23A are
The second magnets 13B and 23B have an N pole on the inside and an N pole on the outside.
Therefore, between the first magnet 13A and the second magnet 13B in the first fixing member 1, the substantially flat member 11
The magnetic flux is distributed in a first direction (A-A direction), which is one side direction facing each other on the main surface of the first fixing member 2, and the first magnet 23A and the second magnet 23B in the second fixing member 2 The magnetic flux is distributed in a second direction (perpendicular to the BB direction), which is a direction substantially perpendicular to the direction and substantially opposite to the other side of the main surface of the flat plate member 11.

The first fixing member 1 has insertion holes 14 at four corners of the plate-like member 11 for inserting the fastening male screw 4 and fixing the male screw 4 to the second fixing member 2. On the other hand, the second fixing member 2 has four female screw cylindrical bodies 24 internally threaded at positions corresponding to the insertion holes 14 of the concave cross-sectional member 21, and the female screw cylindrical bodies 24 are concave cross-sectional members. 21st first fixing member 1
It is erected on the side. With this structure, the male screw 4 is screwed into the female screw cylinder 24 through the insertion hole 14, and the first fixing member 1 and the second fixing member 2 are separated by a gap corresponding to the height of the female screw cylinder. Can be combined and tightened.

The first fixing member 1 is internally threaded so that a male screw 5 for adjusting the angle can be screwed through each of the substantially central positions between the insertion hole 14 and the yoke 12. It has a female screw hole 15. Strictly, the female screw hole 15 is on a line connecting the center point of the hollow portion 10 and the four vertices of the main surface of the flat plate member 11, and the angle adjusting screw 5 is in contact with the surface of the movable member 3. Can do,
Preferably, it is provided at a more outer position. With this structure, the angle adjusting screw 5 can project toward the movable member 3 while being screwed with the female screw hole 15 and abut against the movable member 3. A minute gap can be created. Such an angle adjusting operation will be described later.

The movable member 3 comprises, for example, a flat plate-shaped portion 31 and a bobbin-shaped portion 32, which are integrally formed of resin. The contour of the plate-shaped portion 31 is on the main surface,
And a positive 4 equivalent to the contour of the concave section member 21.
Includes a part of each of the four sides of the square except for the vicinity of the vertex. Some of these four sides are straight side end surfaces 3U, 3R, 3 along the four directions.
B, 3L, respectively, and are formed such that curved side end surfaces 3G1, 3G2, 3G3, 3G4 exhibiting a circular arc extending along the side surface of the female screw cylindrical body 24 between these linear side end surfaces. The flat plate-shaped portion 31 forms a space by the curved end face, and allows the female screw cylindrical body 24 to be passed to the first fixed member 1 in this space, and at the same time, the curved end face is formed by the movable member 3. A function (guide groove) for guiding the correct swing direction when the rocker swings, and the entire movable member 3 is not largely displaced from the fixed members 1 and 2 even when the electromagnetic actuator is not operated. (To prevent the bobbin 32 from rotating around the central axis). In other words, the movable member 3 is formed of a cylindrical member 32 having a flange 31 near the center of the side surface.

On the main surface of the plate-shaped portion 31 on the side of the second fixing member 2, projections 31A, 31 serving as fulcrums described later are provided.
B, 31C and 31D are provided. These projections are arranged corresponding to the center position of the linear side end face of the flat plate portion 31. With this structure, the protrusions 31A to 31D are
By contacting the main surface of the concave section member 21 of the fixed member 2, a gap corresponding to the height of the protrusion can be created between the movable member 3 and the second fixed member 2. The characteristic fulcrum function of the projection will be described later.

The bobbin-like portion 32 has a cylindrical shape protruding from both main surfaces of the flat plate-like portion 31 and has a first fixing member 1.
And a second bobbin 322 that engages with the second fixing member 2. The first bobbin part 321 is provided on the first fixing member 1 with the magnet 13A,
13B, the second bobbin portion 322 is attached to the magnet 2 by the second fixing member 2.
It is loosely inserted and stored in the space formed between 3A and 23B. A conductive wire is wound around each of these bobbin portions, thereby forming coils L1 and L2 as current path forming means. Since the bobbin portions 321 and 322 have a coaxial cylindrical shape, the coils L1 and L2 formed along the bobbin portions 321 and 322 also have winding axes substantially collinear with each other. Various other shapes of the coil are conceivable.

Accordingly, the coils L1 and L2 are circulated and supported around the side surface of the cylindrical member 32 so as to sandwich the brim-shaped portion 31, and the movable member 3 thus configured is composed of the first and second fixed members. In other words, it can be said that the space surrounded by the lines 1 and 2 is swingably combined. The axis of such a swing consists of the symmetry axis of the magnets 13A and 13B and the symmetry axis of the magnets 23A and 23B.

The first bobbin section 321 is hollow, and this hollow space extends to the middle of the second bobbin section 322. In the hollow portion of the second bobbin portion 322, a flat plate-shaped portion having a substantially square cavity 323 is formed in the middle of the second bobbin portion 322. A driven body (not shown) is attached to this portion, for example, so as to pass through the cavity 323, and swings integrally with the movable member 3. As the driven body, as described above, lenses, mirrors, prisms, and other optical components used in an imaging device or the like, or small components such as electronic components are suitable, but the present invention can also be applied to other components. is there.

The stator and the mover having the above-described structure are assembled with the fastening screw 4 and the angle adjusting screw 5, and have a cross section as shown in FIG. FIG. 8 corresponds to the AA, BB, and CC cross sections.
As can be seen from FIG. 8, the movable member 3 is
4 between the first and second fixing members 1 and 2. The gap is set such that the movable member 3 can be sufficiently tilted in a predetermined direction or rotated at a predetermined angle even if the protrusions 31A to 31D and the protrusions 15a to 15d at the tip of the male screw 5 are subtracted. Note that FIG. 8 illustrates the movable member 3 in a state where the movable member 3 is floated between fixed members in order to simply show the swingable gap of the movable member 3, and the actual mode is not limited to this.

Next, the operation of the electromagnetic actuator will be described. 9 and 10 show a plan view and a side view, respectively, of a model of a part of the present actuator, and the same reference numerals are given to the same parts as the parts cited in the above description. FIG. 9 shows an operation mode performed between the first fixed member 1 and the movable member 3, and a substantially left-handed portion between the first magnet 13 </ b> A and the second magnet 13 </ b> B as indicated by a dotted arrow. A magnetic flux distribution carrying magnetic lines of force from right to left is formed. With respect to this magnetic flux distribution, the coil L1 provided on the movable member 3 intersects each magnetic field line on both the N pole side and the S pole side.

Now, when a current is applied to the coil L1 in the direction of the arrow as shown in the figure, the coil L1 follows the Fleming's left-hand rule by applying a mechanical force (in the direction perpendicular to the plane of the drawing) on the N-pole side in the direction of being pushed down. (Electromagnetic force) and a mechanical force in the direction of being lifted in the direction perpendicular to the paper surface on the S pole side (see side view, solid line arrow). Conversely, when a current is applied to the coil L1 in a direction opposite to the direction of the arrow shown in the figure, a mechanical force is generated in a direction that is lifted in a direction perpendicular to the paper on the N pole side, and is perpendicular to the paper on the S pole side (See side view, dotted arrow).

Therefore, the entire movable member 3 is moved along the first direction (vertical direction in FIG. 9), which is one of the opposing sides of the main surface of the plate-shaped portion 31, by the mechanical force generated in the coil L1. A force (rotational force) tilting around a line passing through the center point of the movable member 3, that is, the reference line RL1 is received. On the other hand, FIG. 10 shows an operation mode performed between the second fixed member 2 and the movable member 3, and a dotted arrow indicates a position between the first magnet 23 </ b> A and the second magnet 23 </ b> B. A magnetic flux distribution carrying magnetic lines of force from top to bottom is formed. With respect to this magnetic flux distribution, the coil L2 provided on the movable member 3 intersects each magnetic field line on both the N pole side and the S pole side.

Now, when a current is applied to the coil L2 in the direction of the arrow as shown in the figure, the coil L2 follows the Fleming's left-hand rule to apply a mechanical force in the direction of being pushed down in the direction perpendicular to the paper on the N pole side. As it arises
On the south pole side, a mechanical force is generated in a direction lifted in a direction perpendicular to the paper surface (see a side view and a solid line arrow). Conversely, when a current is applied to the coil L2 in a direction opposite to the direction indicated by the arrow, a mechanical force is generated on the N-pole side in a direction that is lifted in a direction perpendicular to the plane of the paper, and S
On the pole side, a mechanical force is generated in a direction pressed down in a direction perpendicular to the paper surface (see a side view and a dotted arrow).

Therefore, the entire movable member 3 is moved in the second direction (direction perpendicular to the first direction and substantially opposite to the other side of the main surface of the plate-shaped portion 31) by the mechanical force generated in the coil L2. (Left and right directions in FIG. 10)
Along the line passing through the center point of the coil L2 or the movable member 3,
That is, a force (rotational force) that tilts around the reference line RL2 is received.

On the other hand, the coils L1 and L2
Connected like That is, the coil L1 and the coil L
2 is connected in series with each other, or a series of connected coils is divided and arranged, one end of the coil L1 is led out as a terminal TA, one end of the coil L2 is led out as a terminal TB, and the series connection point or The division point of the series coil is derived as the common terminal TC. A predetermined signal corresponding to each operation mode is supplied to the terminal TA and the terminal TB, and the common terminal TC is grounded.

Four operation modes are set as shown in FIG. In the first operation mode, a positive voltage is supplied to both terminals TA and TB. Here, assuming that the positive voltage generates a current flowing as indicated by the arrows attached to the coils L1 and L2 in FIGS. 9 and 10 (hereinafter, the same premise), the left end face 3L is pushed down in a direction perpendicular to the paper. (Lift the right end face 3R)
The driving force and the driving force for pushing down the upper end face 3U in a direction perpendicular to the paper surface (lifting the lower end face 3B) are simultaneously applied to the movable member 3. Thereby, the movable member 3
Will tilt with the driving force obtained by combining these two driving forces. In the first operation mode, the combined driving force pushes down the intersection P1 side on each extension of the upper end face 3U and the left end face 3L as shown in FIG. 13 similarly modeled (the lower end face 3B and the lower end face 3B). The intersection P3 side on each extension of the right end face 3R is lifted). In FIG. 12, the directions of the arrows described in the column of the rotation (pressing) direction indicate the side that is eventually pushed down in the movable member 3, and the directions of the arrows described in the respective columns of the TA / TB input voltage are as follows. The component force used for the driving force indicates the side on which the movable member 3 is pushed down.

In the second operation mode, a negative voltage is supplied to the terminal TA and a positive voltage is supplied to the terminal TB. As a result, the driving force that pushes down the right end face 3R in a direction perpendicular to the paper surface (lifts the left end face 3L) and the upper end face 3R
U in the direction perpendicular to the paper surface (lower end face 3
B) is simultaneously applied to the movable member 3. As a result, the movable member 3 tilts with a driving force obtained by combining these two driving forces, and as shown in FIG. 13, pushes down the intersection P2 side on each extension of the upper end face 3U and the right end face 3R (downward). The intersection P4 side on each extension of the side end face 3B and the left end face 3L is lifted).

In the third operation mode, a negative voltage is supplied to both the terminal TA and the terminal TB. As a result, the driving force that pushes down the right end face 3R in a direction perpendicular to the paper surface (lifts the left end face 3L) and the lower end face 3R
B in a direction perpendicular to the paper surface (upper end face 3
U) is applied to the movable member 3 at the same time. As a result, the movable member 3 tilts with the driving force obtained by combining these two driving forces, and as shown in FIG. 13, pushes down the intersection P3 side on each extension of the lower end surface 3B and the right end surface 3R ( The intersection point P1 side on each extension of the upper end face 3U and the left end face 3L is lifted).

In the fourth operation mode, a positive voltage is supplied to the terminal TA and a negative voltage is supplied to the terminal TB. Thereby, the driving force for pushing down the left end surface 3L in the direction perpendicular to the paper surface (lifting the right end surface 3R) and the driving force for pushing down the lower end surface 3B in the direction perpendicular to the paper surface (lifting the upper end surface 3U) are simultaneously formed. It is hung on the movable member 3. As a result, the movable member 3 tilts with the driving force obtained by combining these two driving forces.
As shown in (2), the intersection P4 side of each extension of the lower end face 3B and the left end face 3L is pushed down (the intersection P2 side of each extension of the upper end face 3U and the right end face 3R is lifted).

As described above, the present actuator drives the mover in a predetermined direction by the combined force of the respective driving forces of the two independent driving systems, so that a large driving force can be obtained. The responsiveness of driving force generation to an input control signal is also improved. With such a large driving force and high responsiveness, the settability to a predetermined driving position is also improved, so that the positioning with respect to the driving target under high-speed driving can be ensured.

There are other points to note about the present actuator. That is, a predetermined fulcrum (support portion) is provided for each direction in which the movable member 3 is inclined. Projecting portions 31A to 31D and projecting portions 15a to 1 at the tip of male screw 5
5d serves as such a fulcrum, and as shown in FIG.
Supported by the protruding portion 15b at the tip and the protruding portions 31D and 31A,
It holds that inclination.

In order to show this situation, in addition to FIG.
The upper main surface of the movable member 3 is in contact with the tip of the protrusion 15b, and at the same time, the lower main surface of the movable member 3 is moved by its own projections 31A and 31D. Abut. As a result, the movable member 3 receives two points of support on the side where the movable member 3 is pushed down in a direction against the pushing,
On the side to be lifted, one point of support is received in the direction against the lift. Therefore, the position of the movable member 3 is determined by three fulcrums in space, and the coils L1 and L2
Therefore, even if the driving force to be generated varies, the inclination direction is always determined correctly. Therefore, the settability to the predetermined drive position is further improved. FIG. 14
Shows a cross section of the entire actuator including a DD cross section as shown in FIGS. 6 and 13 and corresponding thereto.

Since the height of the protrusions 15a to 15d at the tips of the male screw 5 can be changed from the outside with a driver or the like, the inclination angle of the movable member 3 can be easily adjusted. In other modes, such a three-point support form is the same, and has the same operation and effect.

In the above embodiment, a moving coil type actuator having a movable member provided with a coil and a fixed member provided with a magnet has been described. Even if a moving magnet type in which a magnet is provided and a coil is provided in the fixing member is used, the above-described resultant force can be generated. That is, at least two pairs of magnets that form an independent magnetic field are provided on the mover side, and two coils that individually intersect the magnetic field are provided on the stator side, and the first electromagnetic force generated on one magnet pair is provided. The movable element can be driven by the resultant force of the second electromagnetic force generated in the other magnet pair. Further, the movable member 3 in the above embodiment can be used as a stator and the fixed members 1 and 2 can be used as a movable member.

In the above embodiment, the opposed magnets are arc-shaped and the coils arranged in the opposed space are annular, but these shapes can be variously changed in design. Further, in the above embodiment, the driving directions of the two driving systems with respect to the movable member are orthogonal to each other, but various design changes can be made in this respect as well.

Further, in the above description, the movable member 3 (collar-shaped portion 31) has a three-point support form of two lower points and one upper point. However, the present invention is not limited to this. The points may be exchanged. The movable member 3 and the first fixed member 1
In addition to the form supported by the projections or projections provided on the movable member 3, for example, a predetermined projection may be provided only on the movable member 3, and various other forms are conceivable.

Further, the example has been described in which the rotation axis of the movable member 3 by one driving force and the rotation axis of the movable member 3 by the other driving force are orthogonal to each other. It is not necessary. In the above description, the configuration in which the movable member 3 is inclined in four directions has been described. However, the movable member 3 may be driven in a different number of directions.

In addition, although the above embodiment has been described in a limited manner, it can be appropriately modified within a range that can be designed by those skilled in the art.

[0038]

As described above, the electromagnetic actuator according to the present invention can obtain a large driving force. In addition, the responsiveness of driving force generation to an input control signal is good. Therefore, it is possible to provide an electromagnetic actuator having good settability to a predetermined drive position.

[Brief description of the drawings]

FIG. 1 is a perspective view of each member showing a structure of an electromagnetic actuator according to an embodiment of the present invention.

FIG. 2 is a plan view of a first fixing member of the electromagnetic actuator of FIG. 1;

FIG. 3 is a side view and a cross-sectional view taken along line AA of the first fixing member of FIG. 2;

FIG. 4 is a plan view of a second fixing member of the electromagnetic actuator of FIG. 1;

FIG. 5 is a side view and a BB cross-sectional view of the second fixing member of FIG. 4;

FIG. 6 is a plan view of a movable member of the electromagnetic actuator of FIG. 1;

FIG. 7 is a side view and a cross-sectional view taken along line CC of the movable member of FIG. 6;

FIG. 8 is a sectional view of an assembly of the electromagnetic actuator of FIG. 1;

FIG. 9 is a plan view and a side view of a movable member showing an operation mode of a first drive system in the electromagnetic actuator of FIG. 1;

FIG. 10 is a plan view and a side view of a movable member for illustrating an operation mode of a second drive system in the electromagnetic actuator of FIG. 1;

FIG. 11 is a connection diagram of coils used in first and second drive systems in the electromagnetic actuator of FIG. 1;

FIG. 12 is a table showing operation modes of the electromagnetic actuator of FIG. 1 with respect to each operation mode.

FIG. 13 is a plan view and a side view of a movable member showing an operation mode of the electromagnetic actuator of FIG. 1;

FIG. 14 is a sectional view showing a state in which a movable member of the electromagnetic actuator of FIG. 1 is tilted.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 1st fixing member 10 hollow part 11 flat member 12 yoke 13A, 13B magnet 14 insertion hole 15 female screw hole 15a-15d male screw protrusion part 2 2nd fixing member 20 hollow part 21 concave cross section member 22 yoke 23A, 23B magnet 24 Internal thread cylindrical body 3 Movable member 31 Flat plate-shaped portion (collar-shaped portion) 31A, 31B, 31C, 31D Projection 3U, 3B, 3R, 3L Linear end surface 3G1, 3G2, 3G3, 3G4 Curved end surface 32 Bobbin shape Part 321 First bobbin part 322 Second bobbin part 4 Fastening screw 5 Angle adjusting screw

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Hiroyuki Watanabe 4-2610 Hanazono, Tokorozawa-shi, Saitama, Japan

Claims (7)

[Claims] 1. A permanent magnetic field generating means for generating a permanent magnetic field,
An electromagnetic actuator comprising: a current path formation generating unit that is relatively movable with respect to the permanent magnetic field generation unit and forms a current path that intersects the permanent magnetic field by a current according to an input control signal; Generating means for generating at least two permanent magnetic fields in directions crossing each other; the current path forming means having at least two coils each intersecting the at least two permanent magnetic fields; The rotation axes are substantially collinear with each other, and are driven by relative movement generated between the permanent magnetic field generating means and the current path forming means by at least two electromagnetic forces generated between the magnet and the coil. An electromagnetic actuator for driving a body. 2. A relative movement between the permanent magnetic field generating means and the current path forming means by a resultant of the at least two electromagnetic forces.
An electromagnetic actuator as described. 3. The current path forming means includes a mover supporting the coil and swinging around first and second rotation axes intersecting with each other, and one of the electromagnetic forces is the mover. And driving the movable element so as to rotate about the second rotation axis, wherein the other of the electromagnetic force drives the mover about the second rotation axis. 3. The electromagnetic actuator according to 1 or 2. 4. The permanent magnetic field generating means includes a stator comprising first and second fixing members surrounding the mover and each provided with a pair of magnets, wherein one pair of the magnets and the magnets are provided. 4. The electromagnetic actuator according to claim 3, wherein the other pair is arranged so as to form lines of magnetic force in directions intersecting each other. 5. The electromagnetic actuator according to claim 4, further comprising a support portion that defines a position where the mover contacts the first and second fixing members. 6. The supporter defines a place where the mover and one of the first and second fixed members are in contact with each other, and the support portion is provided on one of the first and second fixed members of the mover. A first protrusion provided on a surface facing one of them and / or one of the first and second fixing members facing the mover, the mover, the first and second members, A position where the other of the fixed members abuts is determined, and the movable element faces the other of the first and second fixed members and / or the other of the first and second fixed members. 6. The electromagnetic actuator according to claim 5, further comprising: a second protrusion provided on a surface facing the collar portion. 7. The position of a driven body driven by a relative movement generated between the mover and the first and second fixing members is set by the support portion. 7. The electromagnetic actuator according to 5 or 6.