JP3488904B2 - Electromagnetic actuator - Google Patents

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to an electromagnetic actuator.

[0002]

2. Description of the Related Art As a mechanism for driving lenses, mirrors and prisms and other optical parts used in image pickup devices, or small parts such as electronic parts, actuators that generate driving force based on electromagnetic induction are used. There is. Since such a conventional electromagnetic actuator constitutes one driving system for one driving force of the entire actuator, the driving force is small and the response of the driving force generation to the input control signal tends to be slow. With this,
Settling to a predetermined drive position is often disadvantageous.

[0003]

SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and an object thereof is to provide an electromagnetic actuator capable of obtaining a large driving force. Another object of the present invention is to provide an electromagnetic actuator having a good responsiveness of driving force generation to an input control signal.

Yet another object of the present invention is to provide an electromagnetic actuator having good settling to a predetermined driving position.

[0005]

SUMMARY OF THE INVENTION An electromagnetic actuator according to the present invention comprises a permanent magnetic field generating means for generating a permanent magnetic field and a permanent magnetic field movable relative to the permanent magnetic field generating means and driven by a current according to an input control signal. An electromagnetic actuator comprising a current path forming means for forming a current path intersecting a magnetic field, wherein the permanent magnetic field generating means generates at least two permanent magnetic fields in directions intersecting with each other, and the current path forming means comprises: , At least two coils respectively intersecting the at least two permanent magnetic fields, the winding axes of the at least two coils are substantially collinear with each other, and at least two coils are formed between the magnet and the coil. The driven body is driven by relative movement generated between the permanent magnetic field generating means and the current path forming means by one electromagnetic force. It is characterized in.

[0006]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described in detail below with reference to the drawings. FIG. 1 is a perspective view of each member showing the structure of an electromagnetic actuator of one embodiment according to the present invention. In FIG. 1, the electromagnetic actuator has a basic configuration in which a movable member 3 is sandwiched between a first fixed member (first drive stage) 1 and a second fixed member (second drive stage) 2. In other words, the movable member 3 is surrounded by the first and second fixed members 1 and 2. A plan view of the first fixing member 1 is shown in FIG. 2, and a side view and an AA cross-sectional view thereof are shown in FIG. A plan view of the second fixing member 2 is shown in FIG. 4, and a side view and a BB sectional view thereof are shown in FIG. Further, a plan view of the movable member (movable base assembly) 3 is shown in FIG. 6, and a side view thereof and a sectional view taken along the line CC are shown in FIG.

The first fixing member 1 has a circular cavity 10 at the center of its main surface and is made by resin molding or pressing a metal flat plate, or by machining an aluminum material. The flat plate-shaped member 11 is used as a base. On the main surface, the outline of the flat plate-shaped member 11 has a substantially regular quadrangular shape on the outside and a substantially perfect circle centered on the intersection of the diagonal lines of the regular quadrangular shape on the inner side. A yoke (magnetic material) 12 is provided around the end face of the flat plate-shaped member 11 that forms the cavity 10. Therefore, the yoke 12 is
It extends along the side end face and forms an annular shape. York 12
Is wider than the thickness of the flat plate member 11 and is projected from the flat plate member 11 on the side opposite to the movable member 3 side. A first magnet 13A and a second magnet 13B facing each other are provided inside the yoke 12.

The second fixing member 2 has a basic structure similar to that of the first fixing member 1, but is made by resin molding or pressing an iron flat plate, or is made by machining an aluminum material. It is based on the concave cross-section member 21. The concave cross-section member 21 has a cross-section (for example, B
In the (-B cross section), it has a concave shape that is concave outward from the movable member 3 side, and the concave portion has a substantially circular shape in a plan view. A circular cavity is formed at the center of the bottom surface of the concave section 21. On the inner wall surface of such a recess, the yoke 2
2 are installed around. Therefore, the yoke 22 extends along the inner wall surface and has an annular shape. The first magnet 23A and the second magnet 2 that face each other are provided inside the yoke 22.
3B is provided.

The first magnets 13A, 23A and the second magnets 13B, 23B provided on each fixing member as the permanent magnetic field generating means have substantially the same shape, and each has a predetermined cross-sectional area or a yoke. It has a width of 12 and 22 and extends on the main surfaces of the yokes 12 and 22. Therefore, these magnets are both formed in an arc shape. The first magnet and the second magnet are composed of the flat plate-shaped member 11, the hollow portion 10 of the concave cross-section member 21,
The first magnet 13A and the second magnet 13B of the first fixing member 1 are arranged and arranged symmetrically at the central position of 20, while the main magnets are opposed to each other in the main direction (left-right direction in FIG. 2).
And the main direction in which the first magnet 23A and the second magnet 23B of the second fixing member 2 face each other (vertical direction in FIG. 4) are relatively orthogonal to each other.

The first magnets 13A and 23A are
The second magnets 13B and 23B have an S pole inside and an N pole outside, respectively.
Therefore, between the first magnet 13A and the second magnet 13B of the first fixing member 1, the substantially flat plate-shaped member 11
The magnetic flux is distributed in the first direction (A-A direction), which is one of the opposite side directions on the main surface of the first main surface of the second fixing member 2, and the first magnetic member 23A and the second magnet 23B of the second fixing member 2 have the first magnetic field. The magnetic flux is distributed in a second direction (a direction perpendicular to the BB direction) which is a direction substantially orthogonal to the direction and is substantially the other side direction of the main surface of the flat plate-shaped member 11 which faces each other.

The first fixing member 1 has through holes 14 at four corners of the flat plate-like member 11 for inserting the male screw 4 for fastening and fixing it to the second fixing member 2. On the other hand, the second fixing member 2 has four internally threaded cylindrical bodies 24 internally threaded at positions corresponding to the insertion holes 14 of the recessed sectional member 21, and the internally threaded cylindrical bodies 24 have the recessed sectional members. 21st fixing member 1
It stands on the side. With this structure, the male screw 4 is screwed into the female screw cylindrical body 24 through the insertion hole 14, and the first fixing member 1 and the second fixing member 2 are spaced apart by the height of the female screw cylindrical body. Can be combined and tightened.

The first fixing member 1 is also internally threaded at each of the substantially central positions between the insertion hole 14 and the yoke 12 so that a male screw 5 for adjusting the angle can be screwed into and penetrated. It has a female screw hole 15. Strictly speaking, the female screw hole 15 is on the line connecting the center point of the hollow portion 10 and the four vertices of the main surface of the flat plate-shaped member 11, and the angle adjusting screw 5 is in contact with the surface of the movable member 3. Be able to
Preferably, it is provided at the outer position. With this structure, the angle adjusting screw 5 can be projected and abutted to the movable member 3 side while being screwed into the female screw hole 15, and the protruding height between the first fixed member 1 and the movable member 3 can be increased. You can create a minute gap. The angle adjusting action will be described later.

The movable member 3 is composed of, for example, a flat plate-shaped portion 31 and a bobbin-shaped portion 32 which are integrally resin-molded. The contour of the flat plate-shaped portion 31 is such that the flat plate-shaped member 11 is formed on the main surface.
And a positive 4 equivalent to that of the contour of the concave cross-section member 21.
Includes parts of each of the four sides of the polygon, excluding the vicinity of the vertex. Some of these four sides are straight side end faces 3U, 3R, 3 along the four sides.
B and 3L respectively bear the curved side end faces 3G1, 3G2, 3G3 and 3G4 which form an arc extending along the side surface of the female threaded cylindrical body 24 between the linear side end faces. The flat plate-shaped portion 31 forms a space by the curved side end surface, and allows the female screw cylindrical body 24 to be passed to the first fixing member 1 in this space, and at the same time, the curved side end surface of the flat plate-shaped portion 31 is movable. The function of guiding to guide the correct swinging direction when swinging (guide groove), and the movable member 3 as a whole does not significantly deviate from the fixed members 1 and 2 even when the electromagnetic actuator is not operating. It has a function of preventing the rotation (preventing rotation with the central axis of the bobbin portion 32). The movable member 3 can be rephrased as a member formed of a cylindrical member 32 having a collar portion 31 near the center of the side surface.

Further, on the main surface of the flat plate-shaped portion 31 on the second fixing member 2 side, projections 31A, 31 serving as fulcrums to be described later are provided.
B, 31C and 31D are provided. These protrusions are arranged corresponding to the central positions of the linear side end faces of the flat plate-shaped portion 31. With this structure, the protrusions 31A to 31D are
By contacting the main surface of the concave cross-section member 21 of the fixed member 2, a gap corresponding to the height of the protrusion can be formed between the movable member 3 and the second fixed member 2. The characteristic fulcrum action of the protrusion will be described later.

The bobbin-shaped portion 32 has a cylindrical shape protruding from both main surfaces of the flat plate-shaped portion 31, and the first fixing member 1
Is divided into a first bobbin portion 321 that engages with and a second bobbin portion 322 that engages with the second fixing member 2. The first bobbin portion 321 includes the magnets 13A,
The second bobbin portion 322 is inserted into the space formed between 13B and is housed therein.
It is loosely inserted and stored in the space formed between 3A and 23B. Conductive wires are respectively wound around these bobbin portions, and thus coils L1 and L2 as current path forming means are formed. Further, since the bobbin portions 321 and 322 have a coaxial cylindrical shape, the coils L1 and L2 formed along the bobbin portions 321 and 322 also have winding axes on substantially the same line. Various other coil shapes are possible.

Therefore, the coils L1 and L2 are circulated and supported around the side surface of the cylindrical member 32 so as to sandwich the brim-shaped portion 31, and the movable member 3 configured in this way has the first and second fixed members. In other words, the space formed by being surrounded by 1 and 2 can be swingably combined. The axis of such swing is composed of the axis of symmetry of the magnets 13A and 13B and the axis of symmetry of the magnets 23A and 23B.

The first bobbin portion 321 is hollow, and this hollow space reaches the middle of the second bobbin portion 322. In the hollow portion of the second bobbin portion 322, a flat plate-shaped portion having a substantially regular quadrangular cavity 323 is formed in the middle thereof. A driven body (not shown) is attached to this portion, for example, in such a manner as to pass through the cavity 323, and swings integrally with the movable member 3. As the driven body, lenses, mirrors and prisms and other optical components used in the image pickup device, or small components such as electronic components, as described above, are suitable, but they can also be applied to other components. is there.

The stator and the mover having the above construction are assembled by the tightening screw 4 and the angle adjusting screw 5, and have a cross section as shown in FIG. FIG. 8 corresponds to the cross section taken along the lines AA, BB and CC.
As can be seen from FIG. 8, the movable member 3 includes the cylindrical body 2
It is sandwiched between the first and second fixing members 1 and 2 with a gap defined by 4. The gap is set so that the movable member 3 can be sufficiently tilted in a predetermined direction or rotated at a predetermined angle even if the protrusions 31A to 31D and the protrusions 15a to 15d at the tip of the male screw 5 are subtracted. It should be noted that FIG. 8 is drawn in a state in which the movable member 3 is floated between the fixed members in order to clearly show the swingable gap of the movable member 3, and the actual mode is not limited to this.

Next, the operation of this electromagnetic actuator will be described. 9 and 10 show a plan view and a side view in which a part of the present actuator is modeled, and the same reference numerals are given to the same parts as those cited in the above description. In FIG. 9, an operation mode performed between the first fixed member 1 and the movable member 3 is shown, and between the first magnet 13A and the second magnet 13B, there is substantially left as indicated by a dotted arrow. A magnetic flux distribution that forms the lines of magnetic force from the to the right is formed. With respect to this magnetic flux distribution, the coil L1 provided on the movable member 3 intersects each magnetic field line on both the N pole side and the S pole side.

When an electric current is applied to the coil L1 in the direction of the arrow as shown in the figure, the coil L1 is pushed down in the direction perpendicular to the plane of the drawing on the N-pole side in accordance with Fleming's left-hand rule. (Electromagnetic force) and a mechanical force in the direction of being lifted in the direction perpendicular to the paper surface on the S pole side (see side view, solid line arrow). On the contrary, when a current is applied to the coil L1 in the direction opposite to the direction of the arrow shown in the drawing, a mechanical force is generated in the direction perpendicular to the paper surface on the N pole side, and a mechanical force is generated in the direction perpendicular to the paper surface on the N pole side, and is perpendicular to the paper surface on the S pole side. It produces a mechanical force that is pushed down in any direction (see side view, dotted arrow).

Therefore, the movable member 3 as a whole is moved along the first direction (vertical direction in FIG. 9), which is one of the side directions facing each other on the main surface of the flat plate-like portion 31, by the mechanical force generated in the coil L1 or the coil L1 or A force (rotational force) that tilts around a line passing through the center point of the movable member 3, that is, the reference line RL1 is received. On the other hand, FIG. 10 shows an operation mode that is performed between the second fixed member 2 and the movable member 3, and a portion between the first magnet 23A and the second magnet 23B is indicated by a dotted arrow. A magnetic flux distribution that forms the magnetic field lines from top to bottom is formed. With respect to this magnetic flux distribution, the coil L2 provided on the movable member 3 intersects each magnetic field line on both the N pole side and the S pole side.

When a current is applied to the coil L2 in the direction of the arrow as shown in the figure, the coil L2 applies a mechanical force in the direction perpendicular to the plane of the drawing on the N pole side in accordance with Fleming's left-hand rule. As it happens
On the south pole side, a mechanical force is generated in the direction perpendicular to the plane of the paper (see side view, solid arrow). On the other hand, when a current is applied to the coil L2 in the direction opposite to the direction of the arrow shown in the figure, a mechanical force is generated in the direction perpendicular to the plane of the drawing on the N pole side, and S
On the pole side, a mechanical force is generated that is pushed down in the direction perpendicular to the plane of the paper (see side view, dotted arrow).

Therefore, the movable member 3 as a whole is moved by the mechanical force generated in the coil L2 in the second direction, which is a direction orthogonal to the first direction and opposite to each other on the main surface of the substantially flat plate-shaped portion 31. (Left and right direction in FIG. 10)
A line passing through the center point of the coil L2 or the movable member 3 along
That is, it receives a tilting force (rotational force) about the reference line RL2.

On the other hand, the coils L1 and L2 are, for example, as shown in FIG.
Is connected like. That is, the coil L1 and the coil L
2 is connected to each other in series, or a series of continuous coils is divided and arranged, one end of the coil L1 is led out as a terminal TA and one end of the coil L2 is led out as a terminal TB, and the series connection point or The division point of the series of coils is derived as the common terminal TC. Predetermined signals corresponding to each operation mode are supplied to the terminals TA and TB, and the common terminal TC is grounded.

Four operation modes are set as shown in FIG. In the first operation mode, a positive voltage is supplied to both terminals TA and TB. Here, if it is assumed that the positive voltage generates a current flowing as shown by the arrows attached to the coils L1 and L2 in FIGS. 9 and 10 (hereinafter, the same premise), the left end face 3L is pushed down in the direction perpendicular to the paper surface. (Lift the right end face 3R)
The driving force and the driving force that pushes down the upper end surface 3U in the direction perpendicular to the paper surface (lifts the lower end surface 3B) are simultaneously applied to the movable member 3. This allows the movable member 3
Is inclined with a driving force obtained by combining these two driving forces. The combined driving force in the first operation mode pushes down the intersection point P1 side on each extension of the upper end surface 3U and the left end surface 3L (the lower end surface 3B and the lower end surface 3B as shown in FIG. 13 similarly modeled). The intersection P3 side on each extension of the right end surface 3R is lifted). In FIG. 12, the direction of the arrow described in the rotation (pushing down) direction column indicates the side of the movable member 3 that is pressed down as a result, and the direction of the arrow described in each column of the TA / TB input voltage is as follows. The component force used for the driving force indicates the side of the movable member 3 that is pushed down.

In the second operation mode, a negative voltage is supplied to the terminal TA and a positive voltage is supplied to the terminal TB. As a result, the driving force that pushes down the right end surface 3R in the direction perpendicular to the paper surface (lifts the left end surface 3L) and the upper end surface 3
Push U down in the direction perpendicular to the paper (lower end face 3
The driving force (lifting B) is simultaneously applied to the movable member 3. As a result, the movable member 3 tilts with a driving force obtained by combining these two driving forces, and as shown in FIG. 13, pushes down the intersection P2 side on each extension of the upper end surface 3U and the right end surface 3R (downward). The intersection P4 side on each extension of the side end surface 3B and the left end surface 3L is lifted).

In the third operation mode, a negative voltage is supplied to both terminals TA and TB. As a result, the driving force that pushes down the right end surface 3R in the direction perpendicular to the paper surface (lifts the left end surface 3L) and the lower end surface 3
B is pushed down in the direction perpendicular to the paper surface (upper end face 3
The driving force (lifting U) is simultaneously applied to the movable member 3. As a result, the movable member 3 tilts with a driving force obtained by combining these two driving forces, and as shown in FIG. 13, pushes down the intersection P3 side on each extension of the lower end face 3B and the right end face 3R ( The intersection P1 side on each extension of the upper end surface 3U and the left end surface 3L is lifted).

Further, in the fourth operation mode, a positive voltage is supplied to the terminal TA and a negative voltage is supplied to the terminal TB. As a result, the driving force that pushes down the left end face 3L in the direction perpendicular to the paper surface (lifts the right end face 3R) and the driving force that pushes down the lower end face 3B in the direction perpendicular to the paper surface (lifts the upper end face 3U) are simultaneously performed. It is hung on the movable member 3. As a result, the movable member 3 tilts with a driving force obtained by combining these two driving forces.
As shown in FIG. 4, the intersection P4 side of each extension of the lower end surface 3B and the left end surface 3L is pushed down (the intersection P2 side of each extension of the upper end surface 3U and the right end surface 3R is lifted).

As described above, the present actuator drives the mover in a predetermined direction by the combined force of the respective driving forces from the two independent driving systems, and it becomes possible to obtain a large driving force. The responsiveness of driving force generation to the input control signal also becomes good. With such a large driving force and high responsiveness, the settling property to a predetermined driving position becomes good, so that the positioning with respect to the driven object can be ensured under high speed driving.

There are other points to note in this actuator. That is, a predetermined fulcrum (support portion) is provided in each direction in which the movable member 3 is inclined. The protrusions 31A to 31D and the protrusions 15a to 1 at the tip of the male screw 5
5d bears such a fulcrum, and as shown in FIG. 12, the movable member 3 is fixed to the male screw 5 in the first mode.
Supported by the protruding portion 15b at the tip and the protruding portions 31D, 31A,
It holds that inclination.

In order to show this state, FIG. 14 and FIG.
The upper main surface of the movable member 3 abuts on the tip of the protruding portion 15b, and at the same time, the lower main surface of the movable member 3 has its own projections 31A and 31D for the main surface of the second fixed member 2. Abut. As a result, the movable member 3 receives support at two points in the direction against the pushing on the pushed side,
The side to be lifted receives one point of support in the direction against the lift. Therefore, the position of the movable member 3 is determined by three fulcrums in space, and the coils L1 and L2 are positioned.
Even if there is variation in the driving force that should be generated, the tilt direction is always determined correctly. Therefore, the settling property to the predetermined driving position is further improved. Note that FIG.
FIG. 14 shows a cross section of the entire actuator including and corresponding to the DD cross section shown in FIGS. 6 and 13.

Since the height of the projecting portions 15a to 15d at the tip of the male screw 5 can be changed from the outside with a screwdriver or the like, the tilt angle of the movable member 3 can be easily adjusted. In other modes as well, such a three-point support form is the same, and the same effect is obtained.

In the above embodiment, the moving coil type actuator in which the movable member is provided with the coil and the fixed member is provided with the magnet is shown. However, as long as it constitutes two driving systems, the movable member is reversed. Even if a moving magnet type is provided in which a magnet is provided on the fixed member and a coil is provided on the fixed member, the above-mentioned resultant force can be generated. That is, at least two pairs of magnets that form independent magnetic fields are provided on the mover side, two coils that individually intersect the magnetic field are provided on the stator side, and the first electromagnetic force generated in one magnet pair is provided. The mover can be driven by the resultant force of the second electromagnetic force generated in the other magnet pair. Further, the movable member 3 in the above embodiment can be used as a stator and the fixed members 1 and 2 can also be used as a mover.

Further, in the above embodiment, the facing magnets are arcuate and the coils arranged in the facing space are annular, but these shapes can be variously modified in design. Further, in the above-described embodiment, the driving directions of the movable members by the two driving systems are orthogonal to each other, but various design changes can be made in this respect as well.

In the above description, the movable member 3 (collar-shaped portion 31) is supported by two points on the lower side and one point on the upper side. However, the present invention is not limited to this and supports the upper side and the lower side. You may change the points. In addition, the movable member 3 and the first fixed member 1
In addition to the form of supporting by the protrusions or the protrusions provided on the and, for example, instead of this form, a predetermined protrusion may be provided only on the movable member 3, and various other forms are possible.

Furthermore, an example has been given in which the rotation axis of the movable member 3 by one driving force and the rotation axis of the movable member 3 by the other driving force are orthogonal to each other, but both axes do not necessarily intersect at right angles. You don't have to. Further, in the above description, the configuration in which the movable member 3 is tilted in four directions has been described, but the movable member 3 may be driven in a different number of directions.

In addition to the above, although the above embodiment has been described in a limited manner, it can be appropriately modified within a range that can be designed by those skilled in the art.

[0038]

As described above, the electromagnetic actuator according to the present invention can obtain a large driving force. Further, the response of the generation of the driving force to the input control signal is good. Therefore, it is possible to provide an electromagnetic actuator having good settling to a predetermined driving position.

[Brief description of drawings]

FIG. 1 is a perspective view of each member showing the structure of an electromagnetic actuator of one embodiment according to the present invention.

FIG. 2 is a plan view of a first fixing member of the electromagnetic actuator of FIG.

3 is a side view and an AA cross-sectional view of the first fixing member of FIG.

FIG. 4 is a plan view of a second fixing member of the electromagnetic actuator of FIG.

5 is a side view and a BB sectional view of the second fixing member of FIG.

6 is a plan view of a movable member of the electromagnetic actuator of FIG.

7 is a side view and a sectional view taken along line CC of the movable member in FIG.

8 is a cross-sectional view of an assembly of the electromagnetic actuator of FIG.

9A and 9B are plan and side model views of a movable member for showing an operation mode of a first drive system in the electromagnetic actuator of FIG.

10 is a plan view and a side view of a movable member for showing an operation mode of a second drive system in the electromagnetic actuator of FIG.

11 is a connection diagram of coils used for the first and second drive systems in the electromagnetic actuator of FIG.

FIG. 12 is a chart showing an operation mode for each operation mode of the electromagnetic actuator of FIG. 1.

13A and 13B are plan and side model views of a movable member for showing an operation mode of the electromagnetic actuator of FIG.

14 is a cross-sectional view showing a state where a movable member of the electromagnetic actuator of FIG. 1 is tilted.

[Explanation of symbols]

1st fixing member 10 cavity 11 Flat member 12 York 13A, 13B magnet 14 insertion holes 15 Female screw hole 15a to 15d Male screw protrusion 2 Second fixing member 20 cavity 21 Concave section member 22 York 23A, 23B magnet 24 Female thread cylinder 3 movable members 31 Flat plate part (Brim part) 31A, 31B, 31C, 31D Protrusion 3U, 3B, 3R, 3L Straight end face 3G1, 3G2, 3G3, 3G4 Curved end face 32 Bobbin-shaped part 321 First bobbin section 322 Second bobbin section 4 Fastening screws 5 Angle adjustment screw

─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hiroyuki Watanabe 426-10 Hanazono, Tokorozawa, Saitama Pioneer Co., Ltd. Tokorozawa factory (56) Reference JP-A-2-306214 (JP, A) JP-A-63 -220430 (JP, A) JP-A-62-81963 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) H02K 33/18

Claims (7)

(57) [Claims] 1. A permanent magnetic field generating means for generating a permanent magnetic field,
An electromagnetic actuator comprising: a current path forming and generating means that is relatively movable with respect to the permanent magnetic field generating means and forms a current path that intersects the permanent magnetic field by a current according to an input control signal. The generating means generates at least two permanent magnetic fields in directions intersecting with each other, and the current path forming means has at least two coils respectively intersecting with the at least two permanent magnetic fields, and windings of the at least two coils. The rotating shafts are substantially on the same line and driven by relative movement between the permanent magnetic field generating means and the current path forming means due to at least two electromagnetic forces generated between the magnet and the coil. An electromagnetic actuator characterized by driving a body. 2. The relative movement between the permanent magnetic field generating means and the current path forming means is generated by a resultant force of the at least two electromagnetic forces.
The electromagnetic actuator described. 3. The current path forming means includes a mover that supports the coil and is swingable around first and second rotating shafts intersecting each other, and one of the electromagnetic force is the mover. Is driven to rotate about the first rotating shaft, and the other of the electromagnetic forces drives the mover to rotate about the second rotating shaft. The electromagnetic actuator according to 1 or 2. 4. The permanent magnetic field generating means includes a stator surrounding the mover and comprising a first and a second fixing member each provided with a pair of magnets. One pair of the magnets and the magnet. 4. The electromagnetic actuator according to claim 3, wherein the other pair is arranged so as to form magnetic force lines in a direction intersecting with each other. 5. The electromagnetic actuator according to claim 4, further comprising a support portion that defines a portion where the mover and the first and second fixing members are in contact with each other. 6. The support portion defines a position where the mover and one of the first and second fixing members come into contact with each other, and the supporting portion has one of the first and second fixing members of the mover. A first protrusion provided on a surface facing one of the first and second fixing members and / or a surface facing one of the first and second fixing members to the mover; and the mover and the first and second A surface of the mover facing the other of the first and second fixing members and / or the other of the first and second fixing members is defined by a portion where the other of the fixing members abuts. 6. The electromagnetic actuator according to claim 5, further comprising a second protrusion provided on a surface facing the brim. 7. The position of a driven body driven by relative movement generated between the mover and the first and second fixing members is set by the support portion. 5. The electromagnetic actuator according to 5 or 6.