JPH10135551A - Laser beam irradiating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make possible easy and precise confirmation of the point of intersection and a focal point. SOLUTION: A laser beam generating means 72, which outputs a processing laser beam L1 proceeding the same optical axis, a guiding laser beam L11 and a laser beam generating means 12, which outputs a guiding laser beam L12, are provided on a laser beam irradiating device 10. Laser beam generating means 12 and 72 are provided in such a manner that the processing laser beam L1 and L2, which are outputted from the laser beam generating means 12 and 72, intersect at a point. The processing laser beams L1 and L2 are infrared rays. The guiding laser beam L11 and L12 are visible lights having different wavelengths, and the guiding-laser beam L11 is red color and the guiding laser beam L12 is green color.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser beam irradiating apparatus provided with visible light for guiding in order to irradiate a laser beam for processing in the fields of laser processing technology and laser surgery.

[0002]

_2. Description of the Related Art For example, a YAG laser or a CO ₂ laser is
It can be used for machining or surgery because of its high output, but has the disadvantage of being invisible infrared.
Therefore, in a conventional laser light irradiation apparatus, a visible laser light traveling along the same optical axis as the invisible laser light is superimposed on the invisible laser light and output (Japanese Patent Application Laid-Open No. 52-61387, JP-A-63-301580, JP-A-1-204661, etc.).

FIG. 5 is a configuration diagram showing a first example of such a conventional laser beam irradiation apparatus. FIG. 6 is a chart showing the spot shape of the guide laser light in the laser light irradiation device of FIG. Hereinafter, description will be made based on these drawings.

The laser beam irradiation device 70 includes a laser beam generating means 72 for outputting a processing laser beam L1 and a guiding laser beam L11 traveling on the same optical axis, a processing laser beam L2 and a guiding laser beam traveling on the same optical axis. Laser light generating means 74 for outputting light L21 is provided;
The laser light generating means 72 and 74 are provided so that the processing laser lights L1 and L2 output from 4 intersect at one point. The processing laser beams L1 and L2 are infrared rays,
The guiding laser beams L11 and L21 are red visible light having the same wavelength.

The laser light generating means 72 includes a processing laser oscillator 721 for outputting the processing laser light L1, a guiding laser oscillator 722 for outputting the guiding laser light L21,
Reflecting mirror 723, half mirror 724, and condenser lens 7
25. The reflecting mirror 723, the half mirror 724, and the condenser lens 725 are used for processing laser light L1.
And an optical system for propagating the guiding laser beam L11 to the same optical axis. Similarly, the laser light generating means 74 also includes a processing laser oscillator 741, a guiding laser oscillator 742, a reflecting mirror 743, a half mirror 744, a condenser lens 745, and the like.

In FIG. 6, the guiding laser beams L11, L
If the optical axes 21 intersect as shown in [a], a scattered spot shape as shown in [b] is obtained on the workpiece. On the other hand, if the optical axes of the guiding laser beams L11 and L21 are separated as shown in [c], a scattered spot shape as shown in [d] is obtained on the workpiece.
The spot shape shown in [b] is smaller than the spot shape shown in [d]. Therefore, the guiding laser light L1
The intersection of the invisible processing laser beams L1 and L2 is confirmed by visually judging the size of the spot diameter of L1 and L21.

FIG. 7 is a configuration diagram showing a second example of a conventional laser beam irradiation device. Hereinafter, description will be made based on this drawing.

The laser beam irradiating device 80 comprises a laser beam generating means 82 for outputting a processing laser beam L1 and a guiding laser beam L11 traveling along the same optical axis, and a processing laser beam L1 outputted from the laser beam generating section 82. And guiding laser light L1
And a condenser lens 84 for converging 1 and focusing on one point. The processing laser light L1 is infrared light, and the guide laser light L11 is red visible light. The laser light generating means 82 includes a processing laser oscillator 821 that outputs the processing laser light L1, a guiding laser oscillator 822 that outputs the guiding laser light L11, a reflecting mirror 823, and a half mirror 824. I have. Reflecting mirror 823
The half mirror 824 is an optical system for causing the processing laser light L1 and the guide laser light L11 to travel along the same optical axis. Then, the focus of the invisible processing laser light L1 is confirmed by visually determining the size of the spot diameter of the guide laser light L11.

[0009]

However, in the conventional laser beam irradiation devices 70 and 80, the guide laser beam L1
It was extremely difficult to visually determine the size of the spot diameter due to the influence of scattering and the like, as well as the small spot diameters of 1 and 12 originally. Therefore, it is difficult to confirm the intersection and the focal point of the processing laser beams L1 and L2, and even if it can be confirmed, the accuracy is low.

[0010]

SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a laser beam irradiation apparatus capable of easily and accurately confirming an intersection and a focus of a processing laser beam.

[0011]

According to a first aspect of the present invention, there is provided a laser beam irradiating apparatus provided with a plurality of laser beam generating means for outputting a processing laser beam and a guide visible beam traveling along the same optical axis. The wavelength of the guide visible light is different for each of the laser light generating means. Further, the plurality of laser light generating means are installed so that the respective processing laser lights output from the plurality of laser light generating means intersect at one point.

The visible light for guidance outputted from each laser light generating means intersects at one point with the visible light for guidance outputted from other laser light generating means. At this point, that is, at the intersection, since the wavelength of the visible light for guidance is different for each laser light generating means, a color in which a plurality of visible light for guidance is mixed is obtained. Therefore, the intersection of the processing laser light can be confirmed by visually determining the difference in the color of the guide visible light.

According to a second aspect of the present invention, there is provided a laser beam irradiating device, comprising: a laser beam generating means for outputting a processing laser beam and a plurality of guide visible lights having different wavelengths; a processing laser beam output from the laser beam generating unit; A light condensing means for condensing a plurality of visible light beams for guidance to focus on one point. The plurality of guide visible lights from the laser light generating means to the light condensing means travel along different optical axes parallel to the processing laser light.

A plurality of guide visible lights output from the laser light generating means intersect at one point via the light condensing means. At this point, that is, at the focal point, the wavelengths of the plural guide visible lights are different from each other, so that the color becomes a color in which the plural guide visible lights are mixed. Therefore, the focus of the processing laser light can be confirmed by visually determining the difference in the color of the guide visible light.

According to a third aspect of the present invention, there is provided a laser beam irradiation device including a plurality of the second laser beam irradiation devices.
The colors of the focal points of the plurality of guide visible lights are different for each of the laser light irradiation apparatuses, and the plurality of processing laser lights output from these laser light irradiation apparatuses are focused such that the focal points thereof intersect at one point. A laser light irradiation device is installed.

The focus of the visible light for guidance outputted from each laser light irradiation device intersects at one point with the focus of the visible light for guidance outputted from other laser light irradiation devices. This point, that is, the intersection, is a color in which a plurality of focal colors are mixed because the color of the focal point of the guide visible light is different for each laser beam irradiation device. Therefore, the focus of the processing laser light and the intersection of the focus can be confirmed by visually determining the difference in the color of the guide visible light.

According to a fourth aspect of the present invention, there is provided a laser beam irradiating apparatus according to the first, second or third aspect, wherein the processing laser beam is an invisible laser beam. By visually determining the difference in the color of the guide visible light, the intersection and focus of the invisible processing laser light can be confirmed.

The processing laser light in the present invention is not limited to the invisible laser light, but may be a visible laser light. The invisible laser light includes infrared laser light, ultraviolet laser light, excimer laser light, and the like. The guide visible light is preferably a laser light from the viewpoint of intensity and straightness, but may be a slit light or the like.

[0019]

FIG. 1 is a block diagram showing a first embodiment of a laser beam irradiation apparatus according to the present invention. FIG. 2 is a chart showing a spot shape of the guiding laser light in the laser light irradiation device of FIG. Hereinafter, description will be made based on these drawings.

The laser beam irradiation device 10 includes a laser beam generating means 72 for outputting a processing laser beam L1 and a guiding laser beam L11 traveling on the same optical axis, a processing laser beam L2 and a guiding laser beam traveling on the same optical axis. A laser light generating means 12 for outputting light L12;
2 processing laser light L1, L2 output from
Are provided so that the laser light generating means 12 and 72 intersect at one point. The processing laser beams L1 and L2 are infrared rays. The guide laser beams L11 and L12 are visible lights having different wavelengths, and the guide laser beam L11 is red,
The guide laser beam L12 is green.

The laser beam generating means 12 comprises: a processing laser oscillator 741 for outputting a processing laser beam L2; a guiding laser oscillator 121 for outputting a guiding laser beam L12;
Reflecting mirror 743, half mirror 744, and condenser lens 7
45. The reflecting mirror 743, the half mirror 744, and the condenser lens 745 are used for processing laser light L2.
And an optical system for causing the guiding laser beam L12 to travel along the same optical axis. Similarly, the laser light generating means 72 also includes a processing laser oscillator 721, a guiding laser oscillator 722, a reflecting mirror 723, a half mirror 724, a condenser lens 725, and the like.

In FIG. 2, the guiding laser beams L11, L
If the 12 optical axes intersect as shown in [a], a scattered spot S1 as shown in [b] is obtained on the workpiece. The color of the spot S1 is the guide laser light L11.
And the green of the guide laser beam L12 are yellow. On the other hand, if the optical axes of the guiding laser beams L11 and L21 are separated as shown in [c], a scattered spot S2 as shown in [d] is obtained on the workpiece.
The spot S2 is a red area S1 of the guiding laser beam L11.
1 and the green area S12 of the guiding laser beam L12 are half each. Then, the guiding laser beams L11, L
By judging the presence / absence of yellow in the spot by 21, the intersection of the invisible processing laser beams L <b> 1 and L <b> 2 can be confirmed.

Next, a method of using the laser beam irradiation device 10 will be described. First, guide laser oscillators 121 and 7
Only the optical system 22 is operated, and the optical system and the like are adjusted such that the intersection of the guide laser beams L11 and L12 is on the workpiece.
When the intersection of the guide laser beams L11 and L12 comes on the workpiece, the intersection of the processing laser beams L1 and L2 also comes to that position, and the processing laser oscillators 721 and 741 are operated to process the workpiece. I do.

FIG. 3 is a block diagram showing a second embodiment of the laser beam irradiation apparatus according to the present invention. Hereinafter, description will be made based on this drawing.

The laser beam irradiating device 20 includes a laser beam generating means 22 for outputting a processing laser beam L1 and guiding laser beams L11 and L12, a processing laser beam L1 outputted from the laser beam generating unit 22 and a guiding laser beam. Laser light L11, L
A condensing lens 24 is provided as condensing means for condensing the light 12 and focusing it on one point. The processing laser beam L1 is an infrared ray. Guide laser light L11, L1
Reference numeral 2 denotes visible light having different wavelengths, and the guide laser light L1
1 is red and the guiding laser beam L12 is green. The guide laser beams L11 and L12 travel along different optical axes parallel to the processing laser beam L1 from the laser beam generator 22 to the condenser lens 24.

The laser light generating means 22 includes a processing laser oscillator 821 that outputs the processing laser light L1, a guiding laser oscillator 822 that outputs the guiding laser light L11,
Guide laser oscillator 2 that outputs guide laser light L12
21, a reflecting mirror 823, half mirrors 222 and 824
It is composed of The reflecting mirror 823 and the half mirrors 222 and 824 are an optical system for making the processing laser light L1 and the guiding laser lights L11 and L12 travel parallel to different optical axes.

The guiding laser beams L11 and L12 output from the laser beam generating means 22 intersect at one point via the condenser lens 24. This point, that is, the focal point, becomes yellow in which red of the guiding laser light L11 and green of the guiding laser light L12 are mixed. Therefore, the guiding laser beams L11, L1
The focus of the processing laser light L1 can be confirmed by visually determining the difference between the two colors.

Next, a method of using the laser beam irradiation device 20 will be described. First, the guide laser oscillators 221, 8
The optical system and the like are adjusted so that only the laser beam 22 is operated and the focus of the guide laser beams L11 and L12 is on the workpiece.
When the focal points of the guide laser beams L11 and L12 are on the workpiece, the focal point of the processing laser beam L1 is also at that position, and the processing laser oscillator 821 is operated to process the workpiece.

FIG. 4 is a block diagram showing a third embodiment of the laser beam irradiation apparatus according to the present invention. Hereinafter, description will be made based on this drawing.

The laser beam irradiating device 30 of this embodiment comprises a laser beam generating means 22 for outputting a processing laser beam L1 and guiding laser beams L11 and L12,
Condensing means 26 for condensing the processing laser light L1 and the guiding laser lights L11 and L12 output from the light source 2 to focus on one point; and the processing laser light L2 and the guiding laser light L
A laser beam generating means 32 for outputting the laser beams 11 and L13, and a condensing means for condensing the processing laser light L2 and the guiding laser lights L11 and L13 output from the laser light generating means 32 to focus on one point. Is provided. Then, the laser light generating means 22, 32
The laser light generating means 22 and 32 are installed so that the processing laser lights L1 and L2 output from the laser light intersect at one point. The processing laser beams L1 and L2 are infrared rays. The guiding laser beams L11, L12, and L13 are visible lights having different wavelengths, respectively, and the guiding laser beam L11 is red, the guiding laser beam L12 is green, and the guiding laser beam L13 is blue. The guiding laser beams L11 and L12 are parallel to the processing laser beam L1 and travel along different optical axes. The guiding laser beams L11 and L13 are parallel to the processing laser beam L2 and travel along different optical axes.

The laser light generating means 22 includes a processing laser oscillator 821 that outputs the processing laser light L1, a guiding laser oscillator 822 that outputs the guiding laser light L11,
Guide laser oscillator 2 that outputs guide laser light L12
21 and half mirrors 222, 223, and 824. Half mirror 222, 223, 824
Are the processing laser beam L1 and the guiding laser beams L11, L
22 is an optical system for making the optical axes 22 travel in parallel to different optical axes. The light collecting means 26 includes a light collecting lens 261 and a reflecting mirror 262.

The laser light generating means 32 includes a processing laser oscillator 321 for outputting the processing laser light L2, a guiding laser oscillator 822 for outputting the guiding laser light L11,
Guide laser oscillator 3 that outputs guide laser light L13
22, half mirrors 223, 323, 324, and a reflecting mirror 325. The reflecting mirror 325 and the half mirrors 223, 323, and 324
2 and an optical system for causing the guiding laser beams L11 and L13 to travel in parallel to different optical axes.

The focal points (yellow) of the guiding laser beams L11 and L12 output from the laser beam generating means 22 and 32 and the focal points (purple) of the guiding laser beams L11 and L13 intersect at one point. This point, or intersection, is white where the colors of both focal points are mixed. Therefore, the guiding laser beams L11, L
By visually determining the difference in the color of the focal point due to L12 and L13, the focal point of the processing laser beams L1 and L2 and the intersection of the focal point can be confirmed.

Although the guide laser oscillator 822 and the half mirror 223 are shared by the laser light generating means 22 and 32, they may be provided separately for each of the laser light generating means 22 and 32.

[0035]

According to the first aspect of the present invention, when the intersection of a plurality of processing laser beams is determined, the wavelength of the guide visible light traveling along the same optical axis as each processing laser beam is determined. By making the guide laser light different for each guide light, the intersection of the guide visible light can be made a color in which each guide visible light is mixed. Therefore, by judging the difference in the color of the visible light for guidance by eye, the intersection of the processing laser light can be confirmed more easily and with higher precision than in the case of judging from the conventional spot diameter.

According to the second aspect of the present invention, when determining the focal point of the processing laser light, a plurality of guide visible lights having different wavelengths are made to travel along different optical axes in parallel with the processing laser light. As a result, the focus of the visible light for guidance can be set to a color in which the visible light for each guide is mixed. Therefore, by comparing the difference in the color of the visible light for guidance with the eyes, compared with the conventional case where the spot diameter is determined,
The focal point of the processing laser beam can be easily and accurately confirmed.

According to a third aspect of the present invention, there is provided a laser beam irradiating device comprising a plurality of the laser beam irradiating devices according to the second aspect, wherein a plurality of guide visible colors have different focal colors for each laser beam irradiating device. The intersection of each focal point can be a color in which each focal point is mixed. Therefore, by visually determining the difference in the color of the guide visible light, the focal point of the processing laser light and the intersection of the focal point can be easily and accurately confirmed.

According to the laser beam irradiation device of the fourth aspect, the processing laser beam in the laser beam irradiation device of the first, second, or third aspect is changed to an invisible laser beam, so that the difference in the color of the visible light for guidance is reduced. By making a visual determination, the intersection and focus of the invisible processing laser light can be easily and accurately confirmed, so that convenience and operability can be improved.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing a first embodiment of a laser beam irradiation device according to the present invention.

FIG. 2 is a table showing a spot shape of a guide laser beam in the laser beam irradiation device of FIG.

FIG. 3 is a configuration diagram showing a second embodiment of the laser beam irradiation device according to the present invention.

FIG. 4 is a configuration diagram showing a third embodiment of the laser beam irradiation device according to the present invention.

FIG. 5 is a configuration diagram showing a first example of a conventional laser light irradiation device.

FIG. 6 is a chart showing a spot shape of a guiding laser beam in the laser beam irradiation device of FIG. 5;

FIG. 7 is a configuration diagram showing a second example of a conventional laser light irradiation device.

[Explanation of symbols]

10, 20, 30 Laser light irradiation device L1, L2 Processing laser light (invisible laser light) L11, L12, L13 Guide laser light (guide visible light) 12, 22, 32, 72 Laser light generating means 24, 34 Condensing lens (condensing means)

Claims (4)

[Claims] 1. A plurality of laser light generating means for outputting a processing laser light and a guide visible light traveling along the same optical axis are provided,
The plurality of laser light generating means are installed such that the wavelength of the guide visible light is different for each of the laser light generating means, and the respective processing laser lights output from the plurality of laser light generating means intersect at one point. Laser irradiation equipment. 2. A laser beam generating means for outputting a processing laser beam and a plurality of guide visible lights having different wavelengths, and condensing the processing laser beam and a plurality of guide visible lights output from the laser beam generating unit. A focusing means for focusing on one point, and the plurality of guide visible lights from the laser light generating means to the focusing means travel in different optical axes parallel to the processing laser light. , Laser light irradiation device. 3. A plurality of laser light irradiation devices according to claim 2, wherein a color of a focal point of the plurality of guide visible lights is different for each of the laser light irradiation devices, and each of the laser light irradiation devices outputs a color. A plurality of laser light irradiation devices are installed such that the laser light for processing crosses at one point. 4. The laser beam irradiation apparatus according to claim 1, wherein the processing laser beam is an invisible laser beam.