JPH10107123A - Transfer system for semiconductor production line and method for setting transfer route - Google Patents

Abstract

PROBLEM TO BE SOLVED: To transfer an object to be transferred in the shortest time to the destination by forming a plurality of transfer routes in the same layer and between the layers in a semiconductor production line and referring the quantity of load by respective transfer route. SOLUTION: A transfer system for semiconductor production line to transfer an object to be transferred to the specified point, is provided with at least one or more interlayer routes 11, 12, 13, and 14 by which at least one or more intra-layer routes P11, P12, P21, and P22 passing through a plurality of transfer points in the same layer and the specific transfer positions in the intra-layer routes of layers different from each other are connected with each other. Thus, the obejct can be transferred in the layer and between the layers through the routes P11, P12, P21, and P22 and the routes I1, I2, I3, and I4.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer system for a semiconductor manufacturing line and a method for setting a transfer route. More specifically, the present invention relates to a method for forming a plurality of transfer routes within the same layer and between layers of a semiconductor manufacturing line. The present invention also relates to a semiconductor manufacturing line transfer system and a transfer path setting method in which a transfer object is transferred within a shortest time to a destination with reference to a load amount for each path.

[0002]

2. Description of the Related Art Usually, equipment having various uses such as process, measurement and control is arranged in a predetermined layout on a manufacturing line for manufacturing semiconductor manufacturing equipment. Wafers, which are intermediate products, are transported between equipment and between processing equipment and measurement equipment in order to perform a process.

[0003] The transfer of wafers from one facility to another is usually performed manually by an operator, but in an automated process is performed by an automatic transport system.
With the recent increase in mass flow, more and more automatic transport systems have been introduced for overall logistics inside factories.

A conventional automatic transfer system of a semiconductor manufacturing line is configured to transfer a conveyed product on an open or closed path limited to a specific layer by an extrusion method.

[0005] Therefore, if the load increases or a failure occurs at one point in the middle of the route, the flow of the physical distribution is not smooth, and the entire transport is not smoothly performed.

In particular, if the transport of the transported product is delayed, the time during which the wafer in the intermediate manufacturing stage is exposed to the air is increased, and the contamination and quality of the product may be reduced.

Accordingly, there has been a problem that the transfer efficiency of the entire semiconductor manufacturing line is reduced and the productivity of the semiconductor device is reduced.

[0008]

SUMMARY OF THE INVENTION It is an object of the present invention to provide a semiconductor manufacturing line for forming a plurality of paths between layers and between layers to transport a conveyed product to a desired specific point within a minimum time. Is to provide a transport system.

Another object of the present invention is to check the load and state of the intra-layer path and the interlayer path before transporting the transported article through a plurality of paths in the layer and between the layers, and to determine the load. An object of the present invention is to provide a method of setting a transfer route of a semiconductor manufacturing line for transferring a semiconductor device smoothly.

[0010]

According to a first aspect of the present invention, there is provided a semiconductor manufacturing line transfer system for transferring a transferred object to a predetermined transfer point. In the line transport system,
It has at least one or more interlayer paths connecting at least one or more intra-layer paths and specific transport positions of intra-layer paths of different layers via a plurality of transport points located in the same layer. In this case, the object is to be configured so that the conveyed article is conveyed in the layer and between layers through the intra-layer path and the inter-layer path. Therefore, a plurality of paths are formed between the layers and between the layers, and the transported object can be transported to a desired specific point within the shortest time.

According to a second aspect of the present invention, there is provided a method for setting a transfer route of a semiconductor manufacturing line in which a plurality of transfer routes are formed within a layer and between layers. A first step of determining an interlayer route that has room to be transported to the transport route of the transported product with reference to the availability of the transport route and the overall interlayer route status; With reference to the availability of the set route and the entire intra-layer route status, an intra-layer route is set that has room to convey to the conveyance route of the conveyed product. And a second step of determining a route. Therefore, before the transported object is transported through the plurality of paths in the layer and between the layers, the load and the state of the intra-layer path and the interlayer path are already checked, and the transported article can be transported smoothly.

According to a third aspect of the present invention, in the first step, it is determined whether or not the transport route is set if the transported product is an interlayer transported product, and the status of the route is determined to be good. The third step of determining the interlayer transport route for the route that has been set, and if the transport route is not set, or if the status of the route is not good even if the transport route is set, the entire interlayer route is checked and determined to be good. The gist of the present invention includes a fourth step of selecting a route having a sufficient transport amount and determining the route as an interlayer transport route. Accordingly, a variety of optimal paths are selected for transport between the same layers and transported therethrough. In addition, the transfer between layers can be similarly performed with a uniform load through various routes. In addition, since the route to be transported is checked before and during transport between layers and between layers, the route can be selected so that efficient transport can be performed.

According to a fourth aspect of the present invention, in the second step, the intra-layer transport route is set, and the transport route is determined to be the route set to be in good condition. 5th step, a 6th step of determining the set path as the intra-layer transport path when the state of the path on which the intra-layer transport is set is not good and the transport path is a confirmed path, and setting the intra-layer transport path If the state of the set route is not good or the route for which intra-layer transport is set is not defined as a confirmed route and the status of the set route is not good, the entire intra-layer route is checked and the transport amount has a margin. A seventh step of selecting from a certain route and determining the intra-layer transport route. Therefore,
The intra-layer path has an equal load on each path, and the conveyed goods are transported along the determined path with the shortest distance and the shortest time. In addition, since the route to be transported is checked before and during transport between layers and between layers, the route can be selected so that efficient transport can be performed.

[0014]

Embodiments of the present invention will be described below in detail with reference to the drawings.

Referring to FIG. 1, in an embodiment of a semiconductor manufacturing line transfer system according to the present invention, a plurality of transfer paths are formed for each layer in a plurality of layers and between layers.

That is, the upper layer 10 and the lower layer 12 are respectively provided with intra-layer routes (P21, P22, P11, P12) for transporting a conveyed article between different points in the same layer,
The intra-layer path (P21, P22) of the upper layer 10 and the intra-layer path (P
11, P12), a plurality of interlayer routes (I1-I4) for transporting the transported product between other layers are connected.

The intra-layer paths (P11, P12) of the lower layer 12 are separate closed paths, respectively, and are transport points where stockers for transporting the articles are transported by equipment such as process equipment, measuring equipment, or storage units. It passes through A1, B1, C1, and D1. The route in the upper layer 10 (P21, P2
2) is also a separate closed route, each of the transport points A2, B where a stocker for transporting the transported goods was located.
2, C2 and D2.

Here, the intra-layer paths (P21, P22, P11, P12) can be formed from a conveyor system, and the inter-layer paths (I1-I4) can be formed from an elevator system.

An embodiment according to the present invention is shown in FIG.
Four paths are formed between the two layers, and two paths are formed for each layer. This may be applied to a multilayer and a multi-path including a closed path and an open path according to a manufacturer's intention. Can be.

As described above, by configuring the transfer system of the semiconductor manufacturing line, a transfer path for transferring a transfer object such as a wafer from a specific point to another point can be variously selected. The selection of the route is determined by the load applied to the transport route and the status of the route.

In the above-described transport system for a semiconductor manufacturing line according to the present invention, the route on which the article is transported is determined by the transport route setting method shown in FIG. The transport route of such a transported product is determined at the location where the stocker that is each transport point is located (A1-D1, A2-D2), and the transported product is transported along the determined transport route, The transport system is controlled. Then, the transport control of the transported object is performed by the selected route determined in FIG. 2 while the controller of the stocker and the main host computer are interfaced.

The setting of the route of the conveyed article at each point will be specifically described with reference to FIG.

When a conveyed object is generated at a specific point, the position where the conveyed object is conveyed is first checked in step S2. Conveyed goods can be classified as being conveyed between different layers or within the same layer. The intra-layer transport must select and determine one of the intra-layer routes formed in the specific layer, and the inter-layer transport must select and determine one of the interlayer routes connecting the specific layers. There must be.

Therefore, if the transported article is an interlayer transported article in step S4, step S6 is performed to check whether an interlayer setting path exists. Here, the interlayer setting route is a route in which the transported product must pass through as much as possible in consideration of the process sequence, and if there is no problem in the route, the transported product is transported through the interlayer setting route. Is controlled so as to be performed.

Therefore, if there is an interlayer setting route set for the conveyed article, step S10 is performed to check the status of the interlayer setting route. The checked result is step S12,
If it is determined that the path is good, step S14 is performed to determine whether to finally determine the selected interlayer path. If the selected route is not determined in step S14,
Returning to step S2, the process is performed again from step S2, and the transfer route of the conveyed object is determined.

If it is determined in step S8 that there is no interlayer setting path specified for the conveyed article,
If it is determined in step 2 that the state of the route set in the interlayer setting route is not good, step S18 is performed, and the entire interlayer route (I1-I4) is checked. And stage S
Among the interlayer routes checked in step 20, an interlayer route having a sufficient load amount and having no abnormality in the route state is selected, and it is determined and determined whether to determine the interlayer route as the route selected in step S14. I do.

Through the above-described steps S6 to S20, a specific interlayer path for transferring a wafer as a transfer object is determined.

Then, if the transported object is an intra-layer transported object, or if an interlayer route is determined by the above-described method, then an intra-layer route for a specific layer is determined.

That is, by performing step S22, it is checked whether or not the transported object has the specified intra-layer setting path. The intra-layer setting route, like the inter-layer setting route, specifies in advance the intra-layer route that the conveyed product must pass through as much as possible in consideration of the process order. The transport is controlled so that the transported article is transported through the internal setting path.

If there is an intra-layer setting path for the conveyed object, the status of the specified intra-layer setting path is checked in step S26 through step S24. If the status of the intra-layer set route is not good, it is determined in step S30 whether the intra-layer set route is a confirmed route. The confirmed route is set so that it must pass through the specified route regardless of the status of the specified route. If it is determined that the route specified in step S30 is the determined route S30, step S32 is performed to determine whether the route for transporting the article is determined to be the intra-layer set route designated as the determined route, and An article transfer route is determined. If it is determined in step S28 that the status of the route specified as the intra-layer setting route is good, the process proceeds to step 32 to determine whether to determine the route for transporting the conveyed product as the selected intra-layer route. Judgment is made, and the transfer route of the transported object is determined.

If the intra-layer set route does not exist in step S24 or the state of the route specified as the intra-layer set route in step S30 is not good, and if the route is not a confirmed route, step S36 is performed. The entire intra-layer path is checked. Then, among the checked intra-layer routes, a route having a sufficient transport amount is selected in step S38, and step S32 is performed to determine whether to transfer the article to the selected intra-layer route. You.

When the intra-layer route selected in step S32 is determined, the article is transferred to the route. If the selected intra-layer route is not selected, the process returns to step S2, and the route setting operation is performed again from step S2. Is done.

Therefore, an optimum transport path for transporting the transported article from the specific position to another location is selected from the paths formed within the layers and between the layers, and the transported article is transported to the selected path.

For example, in FIG.
The case where the sheet is conveyed from the point A1 to the point A2 in the upper layer will be described below.

If the in-layer set route and the fixed route of the upper layer 10 and the lower layer 12 are not set for the transported material, the load amount and the state of each route between the layers and in the layer are checked. , The optimal route is selected.

Then, the in-layer route P11
When the route to be transferred to A2 after passing through D1 is set as a fixed route, the transported product is always set to be transported through this route, so that the transported product is in a normal state. The transfer is performed, but when the load is large or when the transfer becomes difficult due to an abnormality, a standby process is performed.

In this process, the inter-layer route I4 for the conveyed object is selected, and the intra-layer routes are defined as P11 and D11 of the lower layer 12.
If 1 is selected, the goods will be transported through the designated route
The transported material is transferred to the upper layer 10. Then, the in-layer route of the upper layer 10 is further specified for the transported article, and the transported article is transported to the point A2.

Therefore, the transported object is transported through a variety of paths that are optimally selected for transport between the same layers. The intra-layer path has an equal load on each path, and the conveyed goods are transported along the determined path with the shortest distance and the shortest time. In addition, the transfer between layers can also be performed with a uniform load through various routes.

In addition, since the route to be transported is checked before being transported in the layer and between layers, the route can be selected so that efficient transport can be performed.

Although the present invention has been described in detail only with respect to the specific examples described above, it will be apparent to those skilled in the art that various changes and modifications can be made within the technical idea of the present invention. It is to be understood that such changes and modifications fall within the scope of the appended claims.

[0041]

As described above, the transfer system of the semiconductor manufacturing line according to the first invention has at least one or more intra-layer paths and different paths through a plurality of transfer points located in the same layer. By providing at least one or more interlayer paths connecting between specific transport positions of the intra-layer path of the layer, it is configured such that a transported object is transported in the layer and between layers through the intra-layer path and the interlayer path. So
Various routes for transferring the conveyed goods are secured, whereby the optimum route is selected and determined, so that the conveyance in the semiconductor manufacturing line can be efficiently performed in the shortest distance and the shortest time. is there.

According to a second aspect of the present invention, when the article is an inter-layer article, an inter-layer path having a margin to be conveyed to the article conveying path is determined by referring to the availability of an inter-layer set path and the entire inter-layer path state. A first step to determine whether or not the conveyed article is a conveyed article in a layer, referring to the availability of a set path in the layer and the entire intra-layer path state, and referring to a layer that has room to convey to the conveyed path of the conveyed article. Setting an inner route, and determining the intra-layer route in the confirmed route when the confirmed route of the conveyed product exists, so that the transported product is transported through a plurality of routes in the layer and between the layers. The load and the state of the intra-layer path and the inter-layer path have already been checked, and the transported object can be smoothly transported.

According to a third aspect of the present invention, in the first step, it is determined whether or not a transport route is set as the transported product is an interlayer transported product.
A third step of determining an interlayer transport route to a route that is set to be favorable in the route, and if the transport route is not set or the transport route is set and the route status is not good, , Checking the entire interlayer route, selecting a route that is good and has a sufficient transport amount, and determining the interlayer transport route, so that the transported material is transported between the same layers. An optimal variety of routes are selected and transported through. In addition, the transfer between layers can be similarly performed with a uniform load through various routes. In addition, since the route to be transported is checked before and during transport between layers and between layers, the route can be selected so that efficient transport can be performed.

According to a fourth aspect of the present invention, in the second step, the intra-layer transport route is set, and if the status of the route is good, the fifth stage of determining the transport route to the set route is included;
The sixth stage of determining the set route to be the intra-layer transport route when the status of the route in which intra-layer transport is set is not good and the transport route is a confirmed route, and the state in which the intra-layer transport route is not set. Otherwise, if the route for which intra-layer transport has been set is not defined as a confirmed route and the status of the set route is not good, the entire intra-layer route is checked and a route with a sufficient transport amount is checked. And the seventh step of determining the intra-layer transport path, the intra-layer path has an equal load for each path, and the conveyed object follows the determined path with the shortest distance and the shortest time. Be transported. In addition, since the route to be transported is checked before and during transport between layers and between layers, the route can be selected so that efficient transport can be performed.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing an embodiment of a semiconductor manufacturing line transfer system according to the present invention.

FIG. 2 is a flowchart showing an embodiment of a method for setting a transfer route of a semiconductor manufacturing line according to the present invention.

FIG. 3 is a flowchart showing an embodiment of a method for setting a transfer route of a semiconductor manufacturing line according to the present invention.

[Explanation of symbols]

 10 Upper layer 12 Lower layer A1 to D2 Transport point I1 to I4 Interlayer route P11, P12, P21, P22 Intralayer route

Claims (4)

[Claims] 1. A transport system for a semiconductor manufacturing line for transporting a transported article to a predetermined transport point, wherein at least one or more intra-layer routes and a plurality of routes through a plurality of transport points located in the same layer. Providing at least one or more interlayer paths for connecting between specific transport positions of the intra-layer paths of different layers, so that a transported object is transported in the layer and between the layers through the intra-layer path and the interlayer path. A transfer system for a semiconductor manufacturing line. 2. A method for setting a transfer route of a semiconductor manufacturing line in which a plurality of transfer routes are formed in a layer and between layers. A first step of determining an interlayer route having room to be transported to the transport route of the transported product, and determining whether or not a set route in the layer can be determined if the transported product is a transported product in the layer and the entire layer. A second step of setting an intra-layer route having a margin to be conveyed to the conveyance route of the conveyed object, and determining an intra-layer route as the definite route when there is a confirmed route for the conveyed product, with reference to the inner route status; A method for setting a transfer route of a semiconductor manufacturing line, comprising: 3. The first step is to check whether a transport route has been set when the transported product is an interlayer transported product, and to determine an interlayer transport route as a route that has been set to have a favorable condition for the route. In the third stage, if the transport route is not set, or if the status of the route is not good even if the transport route is set, the entire interlayer route is checked and a route that is good and has a sufficient transport amount is selected. The method according to claim 2, further comprising: a fourth step of determining an inter-layer transfer path. 4. The second step is a step in which an intra-layer transport route is set, and a fifth stage in which a transport route is determined to be a route set to be in good condition, and the intra-layer transport is set. A sixth step of determining that the set route is an intra-layer transport route if the status of the set route is not good and the transport route is a definite route; or the intra-layer transport route is not set, or If the route for which the transport is set is not defined as the fixed route and the status of the set route is not good, the entire intra-layer route is checked, and a route having a sufficient transport amount is selected, and the route is selected. 7. The method according to claim 2, further comprising: determining an internal transport path.