JPH1010430A5 - - Google Patents

Info

Publication number
JPH1010430A5
JPH1010430A5 JP1996179882A JP17988296A JPH1010430A5 JP H1010430 A5 JPH1010430 A5 JP H1010430A5 JP 1996179882 A JP1996179882 A JP 1996179882A JP 17988296 A JP17988296 A JP 17988296A JP H1010430 A5 JPH1010430 A5 JP H1010430A5
Authority
JP
Japan
Prior art keywords
optical system
imaging optical
catadioptric
catadioptric imaging
circuit pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1996179882A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1010430A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP8179882A priority Critical patent/JPH1010430A/ja
Priority claimed from JP8179882A external-priority patent/JPH1010430A/ja
Priority to US08/877,920 priority patent/US6157498A/en
Publication of JPH1010430A publication Critical patent/JPH1010430A/ja
Priority to US09/679,267 priority patent/US6392822B1/en
Priority to US10/086,472 priority patent/US6867931B2/en
Publication of JPH1010430A5 publication Critical patent/JPH1010430A5/ja
Pending legal-status Critical Current

Links

JP8179882A 1996-06-19 1996-06-19 ２回結像光学系 Pending JPH1010430A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP8179882A JPH1010430A (ja) 1996-06-19 1996-06-19 ２回結像光学系
US08/877,920 US6157498A (en) 1996-06-19 1997-06-18 Dual-imaging optical system
US09/679,267 US6392822B1 (en) 1996-06-19 2000-10-04 Dual-imaging optical system
US10/086,472 US6867931B2 (en) 1996-06-19 2002-02-28 Dual-imaging optical system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8179882A JPH1010430A (ja) 1996-06-19 1996-06-19 ２回結像光学系

Publications (2)

Publication Number Publication Date
JPH1010430A JPH1010430A (ja) 1998-01-16
JPH1010430A5 true JPH1010430A5 (enExample) 2004-10-21

Family

ID=16073556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8179882A Pending JPH1010430A (ja) 1996-06-19 1996-06-19 ２回結像光学系

Country Status (1)

Country Link
JP (1) JPH1010430A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6512631B2 (en) * 1996-07-22 2003-01-28 Kla-Tencor Corporation Broad-band deep ultraviolet/vacuum ultraviolet catadioptric imaging system
EP1079253A4 (en) 1998-04-07 2004-09-01 Nikon Corp DEVICE AND PROCESS FOR PROJECTION EXPOSURE, AND OPTICAL SYSTEM WITH REFLECTION AND REFRACTION
EP1293832A1 (en) 1998-06-08 2003-03-19 Nikon Corporation Projection exposure apparatus and method
JP2002023055A (ja) * 2000-07-10 2002-01-23 Nikon Corp 結像光学系および該結像光学系を備えた露光装置
JP4245286B2 (ja) * 2000-10-23 2009-03-25 株式会社ニコン 反射屈折光学系および該光学系を備えた露光装置
US7929114B2 (en) * 2007-01-17 2011-04-19 Carl Zeiss Smt Gmbh Projection optics for microlithography

Similar Documents

Publication Publication Date Title
EP0736789B1 (en) Catadioptric optical system and exposure apparatus having the same
US6665126B2 (en) Projection exposure lens with aspheric elements
JP4070257B2 (ja) 高開口数リングフィールド光学縮小系
US7006304B2 (en) Catadioptric reduction lens
EP1069448B1 (en) Catadioptric optical system and projection exposure apparatus equipped with the same
EP0465882A2 (en) High resolution reduction catadioptric relay lens
JP2003177319A (ja) Ｅｕｖフォトリソグラフィ用の反射投影レンズ
US9046787B2 (en) Microlithographic projection exposure apparatus
US6707532B2 (en) Projection exposure apparatus
JP2005233979A (ja) 反射屈折光学系
US20060132931A1 (en) Catadioptric projection objective
JPH0533368B2 (enExample)
US7403262B2 (en) Projection optical system and exposure apparatus having the same
EP0902329A1 (en) Catadioptric reduction optical system
US20040075894A1 (en) Catadioptric reduction objective
JP5047544B2 (ja) リソグラフィ投影対物系の補正方法およびリソグラフィ投影対物系
US6597511B2 (en) Microlithographic illuminating system and microlithographic projection exposure arrangement incorporating said system
JP2007013179A5 (enExample)
US7203010B2 (en) Catadioptric projection objective
JPH1010430A5 (enExample)
US6208473B1 (en) Catadioptric projection lens
JP4159936B2 (ja) リソグラフィシステムの照明システムで使用されるリレーレンズ
JPH1010429A5 (enExample)
WO2003052462A2 (en) Catadioptric reduction lens
US7046459B1 (en) Catadioptric reductions lens