JPH0985471A - Marking device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a marking device having the generality corresponding to the kind of electron article by providing a jig of freely changing or exchanging with matching to the electron device being as the marking object. SOLUTION: A work inside a magazine on a loader 35 is picked up with a vacuum sucking mechanism, and it is transferred onto a transfer jig 5 of a transfer robot 4. When working of the work being mounted on the transfer jig 5 from the loader part 35 is finished, the jig 5 is moved to an unloader part 36 direction with the transfer robot 4. At the same time with this, the transfer jig lying on the transfer robot 3 in the unloader 36 side is started to move to the loader part 35. The work on the transfer jig 5 is passed through the irradiation position of laser under the optical laser system during moving, and in this time, the required mark is formed with the laser beam.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a marking device for electronic devices, and more particularly to a technique effective when applied to a laser marking device for electronic devices such as semiconductor devices, which is used for low-volume, high-mix production. Is.

[0002]

2. Description of the Related Art Generally, an electronic device such as a semiconductor device is provided with a mark on a product in order to describe a product type name or a manufacturer name. As a method of applying a mark, there is a method of imprinting with a stamp, etc., but recently, due to its simplicity, a method of printing on the surface of an electronic device using a laser and engraving has become mainstream.

In the case of targeting mass-produced electronic devices, such a marking device is configured as a dedicated device adapted to the target electronic device. For example, there is one in which a semiconductor element is attached to a lead frame, sealed, and then marked in that state. These are for lead frames only. Generally, lead frames are such that the lead frame is carried on rails.
It is used exclusively for the target product. A single item separated from the lead frame is a transport system in which a dedicated pallet attached to the outer shape is attached.

[0004] Among such known techniques, Japanese Patent Publication No. 58-28739 and the like are one example in which the carrying mechanism is not described, but the mark is made on the lead frame as it is.

[0005]

However, the above-mentioned means are intended for mass production, and those corresponding to the lead frame are only applicable to the corresponding product, so various products are processed. It is generally not suitable for things. Further, even if it is made to cope with this, it is considered that there is a problem in workability because pre-work such as rail replacement occurs. Even a single product is a dedicated jig that generally performs the same mass production process, so it is not designed to be replaced in a complicated manner, and workability cannot be said to be good.

An object of the present invention is to solve the above-mentioned problems and to provide a marking device which can cope with the production of a large number of products in small quantities.

[0007]

The typical means of the invention disclosed in the present application will be described below.

That is, a loader for supplying the target product, an unloader for storing the processed product, a transfer mechanism having a jig for mounting the electronic device to be marked provided between the loader and the unloader, A marking device, which is formed around a carrying mechanism and is attached to the electronic device so as to be marked, wherein the carrying jig is formed so that the carrying jig can be replaced depending on the type of the electronic device to be marked. .

[0009]

According to the above-mentioned means, it is possible to cope with the marking of various electronic devices, and therefore it is possible to mark the electronic devices adapted to a large number of small quantities.

[0010]

1 is a top view showing an outline of a marking device according to an embodiment of the present invention, and FIG. 2 omits a loader robot and an unloader robot to show the positional relationship of the marking device shown in FIG. Perspective view of the marking device shown in FIG.
FIG. 3 is a perspective view showing an outline of a magazine holder which holds a vertical magazine used in this embodiment, and FIG. 4 is a top view showing an example of the magazine holder used in this embodiment. 5 is a top view showing an example of a jig used in the present embodiment and a side sectional view thereof, FIG. 6 is a continuous operation schematic diagram for explaining the operation of the transport mechanism used in the present embodiment, and FIG. 3A and 3B are a top view and a side view showing an example of a target three-terminal type semiconductor device in this embodiment.

An electronic device 30 which is a target in this embodiment
Is, for example, the three-terminal type semiconductor device shown in FIG. This type of semiconductor device (hereinafter referred to as a work) has a resin encapsulation body 31 in which a semiconductor element is encapsulated and a plurality of leads 3 extending in parallel from one surface of the encapsulation body 31 to the outside.
4 The sealing body portion 31 is formed in a rectangular parallelepiped shape and has a structure in which the metal plate 32 is exposed on one surface thereof.
Further, for example, in this embodiment, the opposite side of the metal plate surface 32 becomes the mark area 33.

The outline of the marking device of this embodiment will be described with reference to FIGS. 1 and 2.

As shown in FIG. 1, a main body 1 serving as a base,
2 having the same length as the transport system arranged on the upper surface
A transport mechanism including a single-axis transport robot 3 and 4 arranged in parallel with each other, and a forward / backward moving mechanism 6 that is provided below the transport robot and holds the robot at an upper portion so as to intersect with the two transport robots. 2, a laser optical system 14 for marking, which is mounted above the center of the transport mechanism 2, and a work 30 to be subjected to a manufacturing process, which is disposed near the end of the transport mechanism 2. It comprises a turntable 9 having four stations holding a plurality of vertical magazines 10 packed with each other, and a loader robot 7 for picking up a target work 30 from the vertical magazine 10 arranged on the turntable 9 and carrying the carrying mechanism 2. An unloader arranged at the end opposite to the loader unit 35 and the loader unit 35 including the turntable 12 and the unloader robot 8 similarly. Consisting of part 36..

Next, details of the marking device of this embodiment will be described. The magazines 10 and 11 used in this embodiment are as shown in FIG. 3 and are formed to vertically stack the works 30. The magazine 10
Has a convex portion 19 therein, and the convex portion 19 presses the sealing body portion 31 of the work 30.
Even when a plurality of works 30 are stacked and stacked in the magazine 10, the outer leads 34 are configured to be pressed from the outside, so that the rattling of the works 30 can be suppressed.

Since the magazine 10 as described above is used, the turntable 9 in this embodiment is the work 3
Holder 16 to accommodate various sizes of 0
And a plurality of insertion holes 18 which are fitted to the outer frame of the magazine 10 for inserting the magazine 10.
It is possible to hold the magazine 10 that holds the work 30 to be processed in the manufacturing process.

The holes of the holder 16 are as shown in FIG. The magazines to be placed on these magazine holders 16 have holes (not shown) at the bottom of the insertion holes 18 of the holders 16 to be arranged. Is provided so that the pins that move up and down are positioned. Turntable 9 with these magazines 10
The work 30 rotated and pushed up as the work 30 is discharged by the loader 35 is arranged at the pickup position. In this embodiment, two types of magazines are shown, and the intersections of the lines indicated by x and y respectively locate the mark area points of the work when the work 30 is mounted.

Next, the transfer from the loader 35 to the transfer mechanisms 3 and 4 will be described. The loader unit 35 is the parallel 2
It is composed of a loader robot 7 and a turntable 9 arranged in the intersecting direction of the ends of the book transport mechanism 2. Although not shown, the arm of the loader robot 7 is provided with a workpiece pick-up means consisting of a vacuum suction mechanism, and the workpiece 30 pushed up by a push-up pin from the vertical magazine 10 on the turntable is vacuumed by the pickup mechanism. It is adsorbed, picked up, and conveyed to a conveying jig 5 mounted on the single-axis conveying mechanism 3 or 4.

The carrying jig 5 is as shown in FIG. This drawing shows the carrying jig 5 and the carrying jig 24 applied to works of two different sizes. As shown in these drawings, the shape is formed in conformity with the outer shape of the work 30 that is a target in this embodiment. In the portion corresponding to the resin sealing body portion 31, a hole portion 21 is formed along the outer shape thereof, and the sealing body portion 3 is formed.
The groove 22 is formed along the outer lead 34 extending from the outer lead 34. Each hole portion 21 is provided in the portion where the resin sealing body portion 31 is arranged.
Is formed so as to have a taper, so that when the work 30 is arranged, the position of the area 33 where the mark is to be formed is located at a desired position during laser irradiation. In the present embodiment, the laser irradiation area is configured such that the intersection point indicated by lines x and y is the center. These jigs 5 and 24 can be positioned and arranged by using the knock pin mounting holes 23 and 26 and pinning them to the transfer robots 3 and 4 of the transfer mechanism 2 at two points. Even when different kinds of jigs are replaced, the jigs can be replaced freely by using the mounting holes for attaching the knock pins at the same positions. In this way, the work can be positioned simply by transporting and placing it on these holes.

The jig 5 on which the work 30 is placed is transported by the uniaxial transport robot 3 or 4. At the time of this conveyance, the laser beam is moved below the laser optical system 14 for mark formation, and a desired mark area 33 of the work 30 is engraved with a laser to give a desired mark.

The transfer mechanism 2 is composed of two transfer robots provided in parallel with each other, and a forward / backward moving mechanism 6 arranged below the transfer robot. The transfer robot 2 moves in the transfer direction according to the work 30 placed on the loader 35. Moved to intersect with
A mark is attached to a desired position on the mounted work 30.

Next, the operation of the transport mechanism 28 will be described in detail with reference to FIG. First, as described above, the work in the magazine is picked up by the vacuum suction mechanism by the loader 35, and loaded on the transfer jig 5 of the transfer robot 4.
At this time, the two transfer robots 3 and 4 are arranged at positions far from the turntables 9 and 12 by the forward / backward movement device 6. The transfer jig 5 of the transfer robot 4 is located on the loader section 35 side, the jig 27 on the transfer robot 3 is near the opposite unloader section 36 position, and the held work 30 is held in the magazine. Is discharged to. When the work of placing the work 30 on the transfer jig 5 from the loader unit 35 is completed, the jig 5 on which the work 30 is placed is started to move toward the unloader unit 36 by the transfer robot 4. At the same time, the carrying jig 27 on the carrying robot 3 located on the unloader 36 side starts moving toward the loader unit 35. The work 30 on the transfer jig 5 passes through the laser irradiation position 13 under the laser optical system during movement. At this time, a desired mark is formed by the laser.

After the mark formation by the laser is completed,
The jig 5 moves toward the unloader section 36. When the movement is completed, the moving device 6 on which the transfer robots 3 and 4 are mounted is activated to move to a position near the turntables 9 and 12. After that, the unloader 36 operates.

In the unloader section 36, the loader portion 3
5 is performed by an operation opposite to that of the transfer mechanism 2, and is picked up by the vacuum suction mechanism provided on the arm of the unloader robot 8 from above the transport mechanism 2 and is then picked up in the jig 11 provided on the turntable 12 on the unloader section 36 side. It will be stored. At this time, the transfer jig 27 attached on the transfer robot 3 is moving to the loader unit 35 side, and the loader robot 7 operates in the same manner as described above to start supplying the work 30 to the transfer jig 27. To do.

The loader section 35 side and the unloader section 3
After the respective operations on the 6 side are completed, the transfer jigs on the loader section 35 side and the unloader section 36 side move in opposite directions. At this time, the jig 27 moving from the loader section side is laser-marked in the mark area 33 of the work 30 placed on the upper surface of the jig 27 when it passes under the laser optical system as in the above-mentioned case.

After the respective transfer jigs have reached the loader section side and the unloader section side, the moving mechanism 6 is moved to a position far from the turntable and the same process is repeated again to continue the laser marking operation.

The invention of the present application has been described above based on the technology as the background of the application. However, it is needless to say that the present application is not limited to the above-described embodiments and can be variously modified without departing from the scope thereof. Absent.

That is, although the magazine and the carrying jig have been described as being of a three-terminal type, the QFP type and the DIP type can be made into various products by forming the magazine and the carrying jig in accordance with the outer shape. It is possible to apply.

[0028]

The effects of the invention obtained by the representative one of the inventions disclosed in this application will be described below.

That is, since it can be applied to the marking device by changing the jig and the magazine corresponding to the target electronic product, the versatility is improved.

Further, by using the transport mechanism for the two single-axis transport robots, the return time of the transport jig can be substantially eliminated.

[Brief description of drawings]

FIG. 1 is a top view showing an outline of a marking device that is an embodiment of the present invention.

FIG. 2 is a perspective view in which a loader robot and an unloader robot are omitted for illustrating a positional relationship of the marking device shown in FIG.

FIG. 3 is a perspective view schematically showing a magazine holder that holds a vertical magazine used in this embodiment and a magazine.

FIG. 4 is a top view showing an example of a holder used for mounting a magazine on the turntable of this embodiment.

5A and 5B are a top view and a side cross-sectional view showing a jig used in this embodiment.

FIG. 6 is a schematic diagram for explaining the operation of the transport mechanism used in this embodiment.

7A and 7B are a top view and a side view showing an example of a work as a target of the present embodiment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Main body 2 ... Transfer mechanism 3 ... Single-axis transfer robot 4 ... Single-axis transfer robot 5 ... Transfer jig 6 ... Forward / backward movement device 7 ... Loader robot 8 ...・ Unloader robot 9 ・ ・ ・ Turntable 10 ・ ・ ・ Vertical magazine 11 ・ ・ ・ Vertical magazine 12 ・ ・ ・ Turntable 13 ・ ・ ・ Laser irradiation position 14 ・ ・ ・ Laser optical system 15 ・ ・ ・ Laser device 16 ... Magazine holder 17 ... Magazine holder 18 ... Insertion hole 19 ... Convex portion 20 ... Insertion hole 21 ... Hole 22 ... Groove 23 ... Mounting hole 24 ... Transport jig 25 ... Hole 26 ... Mounting hole 27 ... Transport jig 30 ... Work 31 ... Resin sealing body 32 ... Metal plate 33 ... Mark area 34. ..External leads 35 ... loader section 36 ... Over the reader unit

Claims (5)

[Claims] 1. A transfer mechanism having a loader, an unloader, a jig provided between the loader and the unloader for mounting a work to be marked, and a mark around the work mechanism around the transfer mechanism. A marking device comprising a marking mechanism that is mounted as much as possible, and a transport jig that can be freely changed according to the type of work to be marked. 2. A marking device for making a desired mark on the surface of a work, and a loader for carrying out the work to a carrying mechanism from a jig containing the work to be marked, and a carrying mechanism for carrying the work. And a unloader for unloading the work on the transfer mechanism to a jig, and a marking mechanism attached around the transfer mechanism. The transfer mechanism includes two uniaxial transfer robots provided in parallel. The marking device is characterized by comprising a jig that can be changed or replaced according to the outer shape of the workpiece to be marked. 3. A marking device for making a desired mark on the surface of a work, wherein a loader for carrying the work into a carrying mechanism from a jig containing the work to be marked and a work for carrying the work in parallel. A transport mechanism including two single-axis transport robots and a forward-backward movement mechanism that is formed in a direction intersecting with the transport robot and holds the transport robot on the upper portion, and the work on the transport mechanism is transported to a jig. And a marking mechanism mounted on the carrying mechanism, and the carrying mechanism is provided with a jig that can be changed or replaced according to the outer shape of the workpiece to be marked. Marking device. 4. The marking means is carried out by a laser, and each jig attached to the carrying mechanism is targeted to a laser irradiation position from a marking mechanism provided around the carrying mechanism. 4. The marking device according to claim 1, wherein a desired marking position is positioned for each work. 5. The marking device according to claim 1, wherein the work is an electronic device such as a semiconductor device.