JPH0977509A - Formation of independent gel film by sol-gel method - Google Patents

Formation of independent gel film by sol-gel method

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Publication number
JPH0977509A
JPH0977509A JP25943295A JP25943295A JPH0977509A JP H0977509 A JPH0977509 A JP H0977509A JP 25943295 A JP25943295 A JP 25943295A JP 25943295 A JP25943295 A JP 25943295A JP H0977509 A JPH0977509 A JP H0977509A
Authority
JP
Japan
Prior art keywords
sol
aqueous solution
gel film
supporting
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP25943295A
Other languages
Japanese (ja)
Inventor
Soi Chiyou
祖依 張
Yoshinori Tanigami
嘉規 谷上
Ryohei Terai
良平 寺井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yamamura Glass KK
Original Assignee
Yamamura Glass KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yamamura Glass KK filed Critical Yamamura Glass KK
Priority to JP25943295A priority Critical patent/JPH0977509A/en
Publication of JPH0977509A publication Critical patent/JPH0977509A/en
Pending legal-status Critical Current

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  • Other Surface Treatments For Metallic Materials (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Colloid Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Silicon Polymers (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a method for forming an independent gel film having smoothness, denseness and uniform thickness without the need of high temp. treatment. SOLUTION: A sol obtained by hydrolyzing and condensation polymerizing a starting material containing an organoalkoxy silane is spread on a supporting aq. solution insoluble in the sol to make a gel. The independent gel film consisting essentially of an organopolysiloxane, in which the net-work unit of a three dimensional network structure is expressed by Rn SiO(4-n)/2 (where, R is an organic group selected from groups of methyl, ethyl, n-propyl, isopropyl, phenyl and a vinyl and (n) is 0<n<=1.7), is obtained by using organotrialkoxy silane alone or with a tetraalkoxysilane and/or diorganoalkoxy silane in combination as the starting material.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】産業上の利用分野 本発明はゾル−ゲル法を用いた独立膜の形成方法に関
し、特に基板に直接薄膜を形成することが困難な、また
は表面の平滑性が要求される独立膜の形成方法に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming an independent film using a sol-gel method, and in particular to an independent film for which it is difficult to form a thin film directly on a substrate or where surface smoothness is required. It relates to a forming method.

【0002】従来の技術及びその課題 ゾル−ゲル法を用いる膜の形成方法として、ディップコ
ート法とスピンコート法がよく使われる。ガラス、セラ
ミックのコート薄膜は膜厚の限界が1.5μm程度であ
る。それ以上の膜厚を実現しようとすると、クラック、
剥離等の問題が生じる事が知られている。そこで、膜厚
を上げるにはコーティングと焼成を繰り返す方法が使用
されている。その他、基板に膜を形成させ、薄膜を基板
から剥がして、膜を形成する方法が公開されている(特
開昭63−171670号公報、特開平1−22206
1号公報)。また、シリコンアルコキシド含有有機溶液
と塩基性の水溶媒との界面で、シリカのゲル厚膜を製造
する方法が公開されている(特開平4−362033号
公報)。更に、比重が大きい水銀上やトリステアリン、
ジブロモエタン等の有機物の液体上に金属アルコキシド
から得たゾルを展開し、ゲル厚膜を作製し、ガラス板と
する方法(特開昭61−236620号公報、特開昭6
2−70237号公報)、同様のゾルを水溶液上に展開
し、ゲル薄膜を得、ガラス薄膜とする方法(特開昭51
−34219号公報)も公開されている。しかし、この
ような膜は多孔質で、無孔化するためには1000℃以
上の高温で熱処理する必要があり、収縮による反りや割
れの問題があった。加えて、水銀やジブロモエタン支持
液は有害であるため、また、トリステアリン等は常温で
液体でないため、操作上の問題があり、水溶液上に展開
するにしても金属アルコキシドから得たゾルは支持水溶
液と接触すると速やかにゲル化するため、厚さ10μm
程度までの薄膜しか作製できないという問題があった。
そこで、本発明では、有機基含有ポリシロキサンのゾル
が不溶の支持水溶液の自由表面に加水分解・重縮合反応
により得たゾルを展開し、ゲル化させることにより、高
温熱処理を必要としない、平滑かつ均一でち密な厚膜の
形成方法を提供することを目的とする。
2. Description of the Related Art Dip coat method and spin coat method are often used as a method for forming a film using the sol-gel method. The glass and ceramic coating thin film has a film thickness limit of about 1.5 μm. When trying to achieve a film thickness greater than that, cracks,
It is known that problems such as peeling occur. Therefore, a method of repeating coating and firing is used to increase the film thickness. In addition, a method of forming a film by forming a film on a substrate and peeling the thin film from the substrate has been disclosed (Japanese Patent Laid-Open No. 63-171670, Japanese Patent Laid-Open No. 1-220620).
No. 1). Also, a method for producing a silica gel thick film at the interface between a silicon alkoxide-containing organic solution and a basic water solvent has been disclosed (Japanese Patent Laid-Open No. 4-362033). In addition, mercury, which has a large specific gravity, and tristearin,
A method in which a sol obtained from a metal alkoxide is spread on an organic liquid such as dibromoethane to form a gel thick film and used as a glass plate (JP-A-61-2336620, JP-A-6-236620).
No. 2-70237), a method in which a similar sol is spread on an aqueous solution to obtain a gel thin film, which is used as a glass thin film (JP-A-51).
(JP-A-34219) is also published. However, such a film is porous and needs to be heat-treated at a high temperature of 1000 ° C. or higher in order to make it non-porous, and there is a problem of warpage or cracking due to shrinkage. In addition, since mercury and dibromoethane supporting liquids are harmful and tristearin and the like are not liquid at room temperature, there is a problem in operation, and the sol obtained from metal alkoxides is supported even when developed in an aqueous solution. When contacted with an aqueous solution, it rapidly gels, so the thickness is 10 μm.
There was a problem that only a thin film up to a certain degree could be produced.
Therefore, in the present invention, a sol obtained by a hydrolysis / polycondensation reaction is spread on the free surface of a supporting aqueous solution in which the sol of an organic group-containing polysiloxane is insoluble and gelled, so that high temperature heat treatment is not required, and a smooth surface is obtained. It is an object of the present invention to provide a method for forming a uniform and dense thick film.

【0003】本発明の概要 本発明は、オルガノアルコキシシランを含有する出発原
料を加水分解・重縮合させて得られたゾルをそのゾルが
不溶の支持水溶液上に展開することを特徴とする独立ゲ
ル膜の形成方法に関する。特に、式:Rn SiO
(4-n)/2 (0<n≦1.7)(Rはメチル基、エチル
基、n−プロピル基、イソプロピル基、フェニル基、ビ
ニル基から選ばれる有機基)で示されるネットワーク構
成単位が三次元網目構造を形成するように反復結合して
いるポリシロキサンより主としてなる独立膜の形成方法
に関し、式:Rn Si(OR’)4-n (n=0,1,
2)(R’はメチル基、エチル基、プロピル基等の低級
アルキル基)のアルコキシシランまたはオルガノアルコ
キシシランが主な出発原料として使用される。
SUMMARY OF THE INVENTION The present invention is an independent gel characterized in that a sol obtained by hydrolyzing and polycondensing a starting material containing an organoalkoxysilane is spread on a supporting aqueous solution in which the sol is insoluble. The present invention relates to a method for forming a film. In particular, the formula: R n SiO
A network constituent unit represented by (4-n) / 2 (0 <n ≦ 1.7) (R is an organic group selected from a methyl group, an ethyl group, an n-propyl group, an isopropyl group, a phenyl group, and a vinyl group) Relates to a method for forming an independent film mainly composed of polysiloxanes which are repeatedly bonded to form a three-dimensional network structure, and has the formula: R n Si (OR ′) 4-n (n = 0, 1,
2) Alkoxysilanes or organoalkoxysilanes (R 'is a lower alkyl group such as a methyl group, an ethyl group, a propyl group) are used as a main starting material.

【0004】本発明によれば、前記アルコキシシランや
オルガノアルコキシシランの加水分解及び脱水、脱アル
コール縮合によってシロキサン結合を形成させ、ゾル溶
液を得るが、ゾルの支持水溶液に対する不溶性を上げる
ため、ゾルの反応状態と有機基(R)の含有量のコント
ロールが重要である。また、重合が進むと、ゾルと支持
水溶液との親和性が減少するので、アルコール、アミ
ン、界面活性剤などを添加した支持水溶液上にゾルを展
開させることが好ましい。また、支持水溶液上に均一な
膜を形成させるために支持水溶液の密度を調整する。上
記方法によって、ゾルを支持水溶液上に均一に展開さ
せ、更にゲル化させることにより、透明かつ平滑でち密
な独立厚膜が得られる。
According to the present invention, a siloxane bond is obtained by forming a siloxane bond by hydrolysis, dehydration and dealcoholization condensation of the above-mentioned alkoxysilane or organoalkoxysilane, but a sol solution is obtained in order to increase the insolubility of the sol in a supporting aqueous solution. It is important to control the reaction state and the content of the organic group (R). Further, as the polymerization proceeds, the affinity between the sol and the supporting aqueous solution decreases, so it is preferable to develop the sol on the supporting aqueous solution to which alcohol, amine, surfactant, etc. have been added. Further, the density of the supporting aqueous solution is adjusted in order to form a uniform film on the supporting aqueous solution. By the method described above, the sol is uniformly spread on the supporting aqueous solution and further gelled to obtain a transparent, smooth and dense independent thick film.

【0005】好ましい実施態様 前記の式:Rn SiO(4-n)/2 (0<n≦1.7)で示
されるポリシロキサンの独立ゲル膜の形成方法におい
て、原料として、テトラエトキシシラン(TEOS)、
テトラメトキシシラン(TMOS)などのテトラアルコ
キシシラン、メチルトリメトキシシラン(MTMS)、
メチルトリエトキシシラン(MTES)、エチルトリメ
トキシシラン(ETMS)、フェニルトリエトキシシラ
ン(PhTES)などのトリアルコキシシラン、ジメチ
ルジエトキシシラン(DMDE)、ジフェニルジメトキ
シシラン(DPhDM)等のジアルコキシシランの混合
物を用いることができる。また、トリアルコキシシラン
を単独で用いても良い。式:Rn SiO(4-n)/2 (0<
n≦1.7)において、n≦1.7としたのは、nが
1.7を越えると、三次元網目構造が形成し難くなり、
均一なゲル膜が得られ難いからである。また、0.2≦
n≦1.6であることが更に好ましい。n≧0.2とす
ると、ゾルが支持水溶液と一層混合し難くなり、かつよ
り透明度の高い膜が得られる。n≦1.6とすること
で、より高強度の膜が得られる。
Preferred Embodiment In the method for forming an independent gel film of polysiloxane represented by the above formula: R n SiO (4-n) / 2 (0 <n ≦ 1.7), tetraethoxysilane ( TEOS),
Tetraalkoxysilane such as tetramethoxysilane (TMOS), methyltrimethoxysilane (MTMS),
A mixture of trialkoxysilanes such as methyltriethoxysilane (MTES), ethyltrimethoxysilane (ETMS) and phenyltriethoxysilane (PhTES), dialkoxysilanes such as dimethyldiethoxysilane (DMDE) and diphenyldimethoxysilane (DPhDM). Can be used. Further, trialkoxysilane may be used alone. Formula: R n SiO (4-n) / 2 (0 <
In n ≦ 1.7), n ≦ 1.7 means that when n exceeds 1.7, it becomes difficult to form a three-dimensional network structure.
This is because it is difficult to obtain a uniform gel film. In addition, 0.2 ≦
More preferably, n ≦ 1.6. When n ≧ 0.2, the sol becomes more difficult to mix with the supporting aqueous solution, and a film having higher transparency can be obtained. By setting n ≦ 1.6, a film with higher strength can be obtained.

【0006】上記原料に1.4≦H2 O/Si≦4.0
(モル比)となるように水を添加し、加水分解・重縮合
反応を行うことが望ましい。H2 O/Si<1.4(モ
ル比)では、未反応のアルコキシ基が残り、独立膜の強
度が劣化し易い。逆に、H2O/Si>4.0(モル
比)では、オルガノアルコキシシランが多量に含まれる
場合は分相が起こり易く、光学的に均一なゲル膜が得ら
れ難くなる。テトラアルコキシシランが多量に含まれる
場合には、支持液層にゾルが移行し易く、膜が得られ難
くなる。水の添加量は1.4≦H2 O/Si≦2.5
(モル比)とするのが更に好ましい。
For the above raw materials, 1.4 ≦ H 2 O / Si ≦ 4.0
It is desirable to add water so as to have a (molar ratio) and carry out the hydrolysis / polycondensation reaction. When H 2 O / Si <1.4 (molar ratio), unreacted alkoxy groups remain and the strength of the independent film is apt to deteriorate. On the other hand, when H 2 O / Si> 4.0 (molar ratio), when a large amount of organoalkoxysilane is contained, phase separation easily occurs and it becomes difficult to obtain an optically uniform gel film. When the tetraalkoxysilane is contained in a large amount, the sol easily migrates to the supporting liquid layer, which makes it difficult to obtain a film. The amount of water added is 1.4 ≦ H 2 O / Si ≦ 2.5
(Mole ratio) is more preferable.

【0007】反応溶液のpHは反応溶液調製直後の初期
値で7.0以下が好ましい。pH>7.0の条件では、
所望の反応が進行し難い。反応の進行を速めるため酸触
媒を添加し反応溶液の初期pHを5.0以下とするのが
更に好ましい。使用する酸触媒は特に限定されず、硝
酸、塩酸等の無機酸触媒、酢酸などの有機酸触媒が常法
に従って使用される。
The pH of the reaction solution is preferably 7.0 or less as an initial value immediately after preparation of the reaction solution. Under the condition of pH> 7.0,
It is difficult for the desired reaction to proceed. It is more preferable to add an acid catalyst to make the initial pH of the reaction solution 5.0 or less in order to accelerate the reaction. The acid catalyst used is not particularly limited, and inorganic acid catalysts such as nitric acid and hydrochloric acid and organic acid catalysts such as acetic acid are used according to a conventional method.

【0008】また、原料に多量のメチルトリアルコキシ
シランを用いる場合には、結晶の析出を抑制するため、
特願平6−332515に記載したように、この原料に
可溶の金属キレート化合物を添加することが好ましい。
金属キレート化合物を用いない場合には、特願平6−8
7497に記載したように、水の添加を二段階に分ける
等の複雑な操作が必要となる。
Further, when a large amount of methyltrialkoxysilane is used as a raw material, in order to suppress crystal precipitation,
As described in Japanese Patent Application No. 6-332515, it is preferable to add a soluble metal chelate compound to this raw material.
When a metal chelate compound is not used, Japanese Patent Application No. 6-8
As described in 7497, complicated operations such as dividing the addition of water into two stages are required.

【0009】上記条件を満たすキレート化合物として
は、β−ジケトン類(1,3−ジオキソプロピレン類を
有する化合物)の金属キレート、大環状ポリエーテル化
合物金属キレート、o,o’−ジヒドロキシ芳香族アゾ
化合物金属キレート、o−サリチリデンアミノフェノー
ルおよびその誘導体の金属キレート等が挙げられる。金
属イオンの種類は特に限定されないが、配位子との錯体
生成定数の大きいものを選ぶ必要がある。具体的に例と
して、トリス(アセチルアセトナト)アルミニウム(I
II)、トリス(エチルアセトアセタト)アルミニウム
(III)、トリス(ジエチルマロナト)アルミニウム
(III)、ビス(アセチルアセトナト)銅(II)、
テトラキス(アセチルアセトナト)ジルコニウム(I
V)、トリス(アセチルアセトナト)クロム(II
I)、トリス(アセチルアセトナト)コバルト(II
I)、および酸化チタン(II)アセチルアセトネート
((CH3 COCHCOCH3 2 TiO)等のβ−ジ
ケトン類金属キレート、希土類金属のβ−ジケトン類金
属キレート、18−クラウン−6−カリウムキレート化
合物塩、12−クラウン−4−リチウムキレート化合物
塩、15−クラウン−5−ナトリウムキレート化合物塩
等の大環状ポリエーテル化合物金属キレート、o,o’
−ジヒドロキシアゾベンゼンのアルミニウム、コバル
ト、銅、チタン等の金属キレート、o−サリチリデンア
ミノフェノラト銅(II)、o−サリチリデンアミノフ
ェノラトアルミニウム(III)等の金属キレート等が
挙げることができる。これらの金属キレート化合物がシ
ラノールと相互作用し、重合反応をコントロールする働
きをすると考えられる。添加量に関しては、その効果に
応じてメチルトリアルコキシシランに対して0.001
〜5モル%の範囲で添加するのが好ましい。0.001
モル%より少ないと、結晶析出抑制効果が得られ難い。
逆に5モル%より多く添加すると、キレート化合物が析
出したり、ゲルの性質に影響を及ぼすおそれがある。金
属キレート化合物は反応系へ配位子成分と金属成分を別
々に添加し、その場でキレート化してもよい。金属キレ
ート化合物の添加量はメチルトリアルコキシシランに対
して0.01〜1モル%とするのが更に好ましい。
As the chelate compound satisfying the above conditions, metal chelates of β-diketones (compounds having 1,3-dioxopropylenes), metal chelates of macrocyclic polyether compounds, and o, o'-dihydroxy aromatic azo compounds. Examples thereof include compound metal chelates, metal chelates of o-salicylidene aminophenol and its derivatives, and the like. The type of metal ion is not particularly limited, but it is necessary to select one having a large complex formation constant with the ligand. As a specific example, tris (acetylacetonato) aluminum (I
II), tris (ethylacetoacetato) aluminum (III), tris (diethylmalonato) aluminum (III), bis (acetylacetonato) copper (II),
Tetrakis (acetylacetonato) zirconium (I
V), tris (acetylacetonato) chromium (II
I), tris (acetylacetonato) cobalt (II
I) and β-diketone metal chelates such as titanium (II) acetylacetonate ((CH 3 COCHCOCH 3 ) 2 TiO), β-diketone metal chelates of rare earth metals, and 18-crown-6-potassium chelate compounds Macrocyclic polyether compound metal chelate such as salt, 12-crown-4-lithium chelate compound salt, 15-crown-5-sodium chelate compound salt, o, o ′
-Metal chelates of aluminum, cobalt, copper, titanium, etc. of dihydroxyazobenzene, metal chelates of o-salicylidene aminophenolato copper (II), o-salicylidene aminophenolato aluminum (III), and the like. it can. It is considered that these metal chelate compounds interact with silanol to control the polymerization reaction. Regarding the amount of addition, depending on the effect, it is 0.001 relative to methyltrialkoxysilane.
It is preferably added in the range of ˜5 mol%. 0.001
If it is less than mol%, it is difficult to obtain the effect of suppressing crystal precipitation.
On the contrary, if it is added in an amount of more than 5 mol%, a chelate compound may be precipitated or the properties of the gel may be affected. The metal chelate compound may be prepared by adding a ligand component and a metal component separately to the reaction system and chelating in situ. The addition amount of the metal chelate compound is more preferably 0.01 to 1 mol% with respect to methyltrialkoxysilane.

【0010】一方、原料に多量のテトラアルコキシシラ
ンを用いる場合には、均一なゾルを得るため、アルコー
ルを添加する方が好ましい。
On the other hand, when a large amount of tetraalkoxysilane is used as the raw material, it is preferable to add alcohol in order to obtain a uniform sol.

【0011】上記の方法で作製したゾルを支持水溶液上
に展開させるが、ゲル膜が十分固化するまで液面に留ま
るように水溶性無機金属塩類を水に溶かし、支持水溶液
の密度を調整する。支持水溶液の密度は1.05g/c
3 以上とするのが好ましい。このような水溶液を支持
液として用いることにより、ゲル膜中の未反応アルコキ
シ基の加水分解・重縮合を進行させ、より強固なネット
ワークを持ったゲル膜とすることができると共に、生成
したアルコールを効率よくゲル膜から除去することも可
能である。また、ゾルとの親和性や表面張力を調整する
ため、支持液中にアルコール、アミン等極性を持つ有機
溶媒や界面活性剤を添加しても良い。
The sol prepared by the above method is spread on the supporting aqueous solution, and the density of the supporting aqueous solution is adjusted by dissolving the water-soluble inorganic metal salt in water so that the gel film remains on the liquid surface until it is sufficiently solidified. The density of the supporting aqueous solution is 1.05 g / c
It is preferably m 3 or more. By using such an aqueous solution as a supporting liquid, hydrolysis and polycondensation of unreacted alkoxy groups in the gel film can be promoted, and a gel film having a stronger network can be formed, and the produced alcohol can be removed. It can also be efficiently removed from the gel film. Further, in order to adjust the affinity with the sol and the surface tension, a polar organic solvent such as alcohol or amine or a surfactant may be added to the supporting liquid.

【0012】ゾル液に関しては、初期の出発原料は極性
が低く、反応が進むにつれて水が消費され、オリゴマー
のシラノール基が増えると共にアルコールが生成するた
め溶媒の極性がオリゴマーを溶解するのに都合良い値に
なる。重合が更に進むと、オリゴマーの極性が減少す
る。従って、支持水溶液上に展開させるゾルはオリゴマ
ーが支持水溶液層に移行しないよう、オリゴマーの水に
対する溶解度の調整が重要となる。即ち、有機基の含有
量とアルコールの濃度の調整および重合度のコントロー
ルが必要である。粘度が5×10-3Pas以上でゲル化
するまでのゾルを用いるのが好ましい。粘度がこれより
低いと、シラノールを多く含んだ低分子が多く、支持水
溶液に溶けやすくなる。一方、支持水溶液に関しては、
オルガノアルコキシシランを多量に含む原料から出発し
たゾルでは、重合が進行すると、支持水溶液との親和性
が小さくなり、展開し難くなるため、支持水溶液にアル
コール等の水溶性有機溶媒を添加して親和性を調整す
る。有機基が多い場合、支持水溶液中のアルコールなど
の水溶性有機溶媒は30vol%以下であることが好ま
しい。これより多い場合、ゾルが支持液層に溶け込み、
膜が形成し難くなる。テトラアルコキシシランを多量に
含む原料から出発したゾルの場合には、ゾルが支持液層
に溶け込まないよう、水溶性有機溶媒は10vol%以
下であることが好ましい。具体的には、一定の反応時間
経過後、支持水溶液中の有機溶媒濃度を変えて、ゾルが
展開し易い支持水溶液組成を選べばよい。
With respect to the sol liquid, the initial starting material has a low polarity, water is consumed as the reaction proceeds, the silanol groups of the oligomer increase, and alcohol is formed, so that the polarity of the solvent is convenient for dissolving the oligomer. It becomes a value. As the polymerization proceeds further, the polarity of the oligomer decreases. Therefore, it is important to adjust the solubility of the oligomer in water so that the oligomer does not migrate to the supporting aqueous solution layer in the sol developed on the supporting aqueous solution. That is, it is necessary to adjust the content of organic groups and the concentration of alcohol and control the degree of polymerization. It is preferable to use a sol having a viscosity of 5 × 10 −3 Pas or more until gelation. If the viscosity is lower than this, there are many low-molecular compounds containing a large amount of silanol, and they are easily dissolved in the supporting aqueous solution. On the other hand, regarding the supporting aqueous solution,
In a sol starting from a raw material containing a large amount of organoalkoxysilane, as the polymerization proceeds, the affinity with the supporting aqueous solution becomes small and it becomes difficult to develop.Therefore, a water-soluble organic solvent such as alcohol is added to the supporting aqueous solution to improve the affinity. Adjust sex. When there are many organic groups, the water-soluble organic solvent such as alcohol in the supporting aqueous solution is preferably 30 vol% or less. If there is more than this, the sol will dissolve in the supporting liquid layer,
It becomes difficult to form a film. In the case of a sol starting from a raw material containing a large amount of tetraalkoxysilane, the water-soluble organic solvent content is preferably 10 vol% or less so that the sol does not dissolve in the supporting liquid layer. Specifically, after a certain reaction time has elapsed, the concentration of the organic solvent in the supporting aqueous solution may be changed to select the supporting aqueous solution composition in which the sol easily develops.

【0013】本発明の方法で得られた膜は液面という自
由表面上で形成されるため、表面平滑性の高い透明な独
立膜を作製することができる。また、容器サイズおよび
広がらせるゾルの量を変えることで、独立ゲル膜の膜厚
を容易にコントロールすることができる。
Since the film obtained by the method of the present invention is formed on the free surface which is the liquid surface, a transparent independent film having a high surface smoothness can be prepared. Further, the thickness of the independent gel film can be easily controlled by changing the container size and the amount of sol to be spread.

【0014】また、出発原料にAl、Zr、Ti、G
e、B等のアルコキシドを添加することにより、多成分
系の独立ゲル膜を形成することができる。膜の上に、更
に異なった組成の重合可能なゾルを加え、組成分布をも
たらすことも可能で、独立の複合膜を得ることもでき
る。
The starting materials are Al, Zr, Ti and G.
By adding an alkoxide such as e or B, a multi-component independent gel film can be formed. It is also possible to add a polymerizable sol of different composition onto the membrane to bring about a compositional distribution and to obtain an independent composite membrane.

【0015】実施例1 メチルトリエトキシシラン(信越化学工業、LS−18
90、以下MTES)に、蒸留水とMTESのモル比が
1.25:1になるように蒸留水を添加した。蒸留水中
の10wt%の水は触媒として0.1Nの硝酸を用い
た。最初は2相の状態であるが、室温で攪拌を続ける
と、加水分解・重縮合反応が進むにつれて均一になり、
10分間以内に透明になった。密閉の状態で室温で2日
間静置した後、反応によって生成したアルコールを理論
値の70%エバポレーターで蒸発させ、オリゴマーを得
た。更にMTESに対し0.1モル%のトリス(アセチ
ルアセトナト)アルミニウム(III)(以下Al(A
cAc)3 )を添加し、50℃で30分間保持した後、
MTES1モル当たり0.5モルの蒸留水を追加した。
密閉状態で攪拌を続け、均一な溶液になってから、40
℃で15時間静置した。得られたゾルの密度は1.01
g/cm3 であり、粘度は13×10-3Pasであっ
た。このゾルを密度が1.125g/cm3 のNaCl
支持水溶液500mlが入ったトレー(20×30c
m)に3ml滴下し、均一に展開させた。室温で3日間
静置して、厚さ約50μmの透明なゲル膜を得た。
Example 1 Methyltriethoxysilane (Shin-Etsu Chemical Co., Ltd., LS-18)
90, hereinafter MTES), distilled water was added so that the molar ratio of distilled water and MTES was 1.25: 1. As 10 wt% water in distilled water, 0.1N nitric acid was used as a catalyst. Initially it is in a two-phase state, but if stirring is continued at room temperature, it will become uniform as the hydrolysis / polycondensation reaction proceeds,
It became transparent within 10 minutes. After leaving it in a sealed state at room temperature for 2 days, the alcohol produced by the reaction was evaporated by a 70% theoretical evaporator to obtain an oligomer. Furthermore, 0.1 mol% of tris (acetylacetonato) aluminum (III) (hereinafter Al (A
cAc) 3 ) was added and kept at 50 ° C. for 30 minutes,
0.5 mol of distilled water was added per mol of MTES.
Continue stirring in a sealed state until a uniform solution is obtained, then
It was left still at 15 ° C for 15 hours. The density of the obtained sol is 1.01
It was g / cm 3 and the viscosity was 13 × 10 −3 Pas. This sol was treated with NaCl having a density of 1.125 g / cm 3 .
A tray (20 x 30c) containing 500 ml of the supporting aqueous solution.
3 ml was added dropwise to m) and uniformly spread. The mixture was allowed to stand at room temperature for 3 days to obtain a transparent gel film having a thickness of about 50 μm.

【0016】実施例2 実施例1のゾルを密度が1.125g/cm3 のNaC
l水溶液450mlとエタノール50mlの混合液(密
度:1.11g/cm3 )が入ったトレー(20×30
cm)に3ml滴下した。室温で3日間静置して、厚さ
約50μmの透明なゲル膜を得た。
Example 2 The sol of Example 1 was treated with NaC having a density of 1.125 g / cm 3 .
A tray (20 × 30) containing a mixed solution of 450 ml of aqueous solution and 50 ml of ethanol (density: 1.11 g / cm 3 ).
cm). The mixture was allowed to stand at room temperature for 3 days to obtain a transparent gel film having a thickness of about 50 μm.

【0017】比較例1 実施例1のゾルを500mlのイオン交換水の入ったト
レー(20×30cm)に3ml滴下した。支持液の密
度が小さいため、底に滴の状態で沈澱し、粒状のゲルに
なった。
Comparative Example 1 3 ml of the sol of Example 1 was dropped on a tray (20 × 30 cm) containing 500 ml of ion-exchanged water. Due to the low density of the supporting liquid, it precipitated in the form of drops on the bottom and became a granular gel.

【0018】比較例2 実施例1のゾルを密度が1.125g/cm3 のNaC
l水溶液330mlとエタノール170mlの混合液が
入ったトレー(20×30cm)に3ml滴下した。ゾ
ルが支持液に溶け込み、膜が得られなかった。
Comparative Example 2 The sol of Example 1 was treated with NaC having a density of 1.125 g / cm 3 .
3 ml was dropped onto a tray (20 × 30 cm) containing a mixed solution of 330 ml of 1 l aqueous solution and 170 ml of ethanol. The sol dissolved in the supporting liquid, and no film was obtained.

【0019】実施例3 MTESに蒸留水とMTESのモル比が1.25:1に
なるように蒸留水を添加した。蒸留水中の10wt%の
水は触媒として0.1Nの硝酸を用いた。均一になって
から密閉の状態で室温で2日間静置した後、反応によっ
て生成したアルコールを理論値の80%エバポレーター
で蒸発させた。次に、MTESに対し0.1モル%のA
l(AcAc)3 とMTES1モル当たり0.5モルの
水を添加し、50℃で密閉状態で30分間攪拌し、溶液
Aを得た。次に、テトラエトキシシラン(以下TEO
S)とエタノールと水を1:2:1.5の比率(モル
比)で混合した。蒸留水中の10wt%の水は触媒とし
て0.1Nの硝酸を用いた。室温で密閉状態で2日間反
応させた後、その溶液からTEOS1モルに対して3モ
ルのエタノールをエバポレーターで蒸発させ、溶液Bを
得た。得られた溶液Aと溶液BをMTES:TEOS=
1:1になるように混合した。密閉状態で30分間反応
させた後、混合溶液中のTEOS1モル当たり1モルの
水を添加し、その液を40℃で密閉状態で20時間保持
した。得られたゾルの密度は1.02g/cm3 であ
り、粘度は13×10-3Pasであった。このゾルを密
度が1.125g/cm3 のNaCl支持水溶液500
mlが入ったトレー(20×30cm)に3ml滴下
し、均一に展開させた。直ちにゲル化が起こり、透明な
膜厚約60μmのゲル膜を得た。
Example 3 Distilled water was added to MTES so that the molar ratio of distilled water and MTES was 1.25: 1. As 10 wt% water in distilled water, 0.1N nitric acid was used as a catalyst. After becoming homogeneous, the mixture was allowed to stand in a sealed state at room temperature for 2 days, and then the alcohol produced by the reaction was evaporated by an evaporator at 80% of the theoretical value. Next, 0.1 mol% of A with respect to MTES
1 (AcAc) 3 and 0.5 mol of water per mol of MTES were added, and the mixture was stirred at 50 ° C. for 30 minutes in a sealed state to obtain a solution A. Next, tetraethoxysilane (hereinafter TEO
S), ethanol and water were mixed at a ratio (molar ratio) of 1: 2: 1.5. As 10 wt% water in distilled water, 0.1N nitric acid was used as a catalyst. After reacting in a sealed state at room temperature for 2 days, 3 mol of ethanol was evaporated from the solution with respect to 1 mol of TEOS by an evaporator to obtain a solution B. The obtained solution A and solution B are MTES: TEOS =
Mix 1: 1. After reacting in a sealed state for 30 minutes, 1 mol of water was added per 1 mol of TEOS in the mixed solution, and the liquid was kept in a sealed state at 40 ° C. for 20 hours. The obtained sol had a density of 1.02 g / cm 3 and a viscosity of 13 × 10 −3 Pas. This sol was added to a NaCl supporting aqueous solution having a density of 1.125 g / cm 3 500
3 ml was dropped on a tray (20 × 30 cm) containing ml and uniformly spread. Immediate gelation occurred and a transparent gel film having a thickness of about 60 μm was obtained.

【0020】実施例4 MTESに蒸留水とMTESのモル比が1.25:1に
なるように蒸留水を添加した。蒸留水中の10wt%の
水は触媒として0.1Nの硝酸を用いた。均一になって
から密閉の状態で室温で2日間静置した後、反応によっ
て生成したアルコールを理論値の80%エバポレーター
で蒸発させた。次に、ジメチルジエトキシシラン(以下
DMDE)とAl(AcAc)3 と水を、MTES:D
MDE:Al(AcAc)3 :H2 O=1:1:0.0
01:2.5(モル比)になるように添加した。密閉状
態で50℃で約10分間攪拌してから、40℃で45時
間保持した。得られたゾルの密度は0.96g/cm3
であり、粘度は8×10-3Pasであった。このゾルを
密度が1.125g/cm3 のNaCl支持水溶液50
0mlが入ったトレー(20×30cm)に3ml滴下
し、均一に展開させた。1週間でゲル化が起こり、透明
な膜厚約50μmのゲル膜を得た。
Example 4 Distilled water was added to MTES so that the molar ratio of distilled water and MTES was 1.25: 1. As 10 wt% water in distilled water, 0.1N nitric acid was used as a catalyst. After becoming homogeneous, the mixture was allowed to stand in a sealed state at room temperature for 2 days, and then the alcohol produced by the reaction was evaporated by an evaporator at 80% of the theoretical value. Next, dimethyldiethoxysilane (hereinafter DMDE), Al (AcAc) 3, and water were mixed with MTES: D.
MDE: Al (AcAc) 3 : H 2 O = 1: 1: 0.0
It was added so as to be 01: 2.5 (molar ratio). The mixture was stirred in a sealed state at 50 ° C. for about 10 minutes and then kept at 40 ° C. for 45 hours. The density of the obtained sol is 0.96 g / cm 3.
And the viscosity was 8 × 10 −3 Pas. 50 g of this sol was added to a NaCl supporting aqueous solution having a density of 1.125 g / cm 3.
3 ml was dropped on a tray (20 × 30 cm) containing 0 ml and uniformly spread. Gelation occurred in one week, and a transparent gel film having a thickness of about 50 μm was obtained.

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 C23C 24/08 C23C 24/08 C ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Internal reference number FI technical display location C23C 24/08 C23C 24/08 C

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】オルガノアルコキシシランを含有する出発
原料を加水分解・重縮合させて得られたゾルをそのゾル
が不溶の支持水溶液上に展開し、ゲル化させることを特
徴とする独立ゲル膜の形成方法。
1. A self-supporting gel film, characterized in that a sol obtained by hydrolyzing and polycondensing a starting material containing an organoalkoxysilane is spread on a supporting aqueous solution in which the sol is insoluble and gelled. Forming method.
【請求項2】ゾルが不溶の支持水溶液は密度が1.05
g/cm3 以上の水溶液であることを特徴とする請求項
1に記載の独立ゲル膜の形成方法。
2. A supporting aqueous solution in which the sol is insoluble has a density of 1.05.
The method for forming an independent gel film according to claim 1, which is an aqueous solution of g / cm 3 or more.
【請求項3】粘度が室温で5×10-3Pas以上で、ゲ
ル化するまでのゾルを用いることを特徴とする請求項1
または2に記載の独立ゲル膜の形成方法。
3. A sol which has a viscosity of 5 × 10 −3 Pas or more at room temperature and which has not gelled yet is used.
Alternatively, the method for forming an independent gel film according to the item 2.
【請求項4】支持水溶液中に含まれる水溶性有機溶媒の
体積分率は30%以下であることを特徴とする請求項1
乃至3のいずれかに記載の独立ゲル膜の形成方法。
4. The volume fraction of the water-soluble organic solvent contained in the supporting aqueous solution is 30% or less.
4. The method for forming an independent gel film according to any one of 3 to 3.
【請求項5】式:Rn SiO(4-n)/2 (0<n≦1.
7)(Rはメチル基、エチル基、n−プロピル基、イソ
プロピル基、フェニル基、ビニル基から選ばれる有機
基)で示されるネットワーク構成単位が三次元網目構造
を形成するように反復結合しているポリシロキサンが主
成分であることを特徴とする請求項1乃至4のいずれか
に記載の独立ゲル膜の形成方法。
5. The formula: R n SiO (4-n) / 2 (0 <n ≦ 1.
7) (R is an organic group selected from a methyl group, an ethyl group, an n-propyl group, an isopropyl group, a phenyl group, and a vinyl group) is repeatedly bonded so as to form a three-dimensional network structure. The method for forming an independent gel film according to any one of claims 1 to 4, wherein said polysiloxane is a main component.
JP25943295A 1995-09-12 1995-09-12 Formation of independent gel film by sol-gel method Pending JPH0977509A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25943295A JPH0977509A (en) 1995-09-12 1995-09-12 Formation of independent gel film by sol-gel method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25943295A JPH0977509A (en) 1995-09-12 1995-09-12 Formation of independent gel film by sol-gel method

Publications (1)

Publication Number Publication Date
JPH0977509A true JPH0977509A (en) 1997-03-25

Family

ID=17334014

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25943295A Pending JPH0977509A (en) 1995-09-12 1995-09-12 Formation of independent gel film by sol-gel method

Country Status (1)

Country Link
JP (1) JPH0977509A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001003901A1 (en) * 1999-07-07 2001-01-18 Nippon Sheet Glass Co., Ltd. Article having uneven surface and method for producing the same
WO2004085145A1 (en) * 2003-03-27 2004-10-07 Nippon Steel Corporation Stainless-steel foils with inorganic/organic hybrid film coating
JP2014098110A (en) * 2012-11-15 2014-05-29 Osaka Gas Chem Kk Composition for outermost surface of roller and/or mold

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001003901A1 (en) * 1999-07-07 2001-01-18 Nippon Sheet Glass Co., Ltd. Article having uneven surface and method for producing the same
US6555236B1 (en) 1999-07-07 2003-04-29 Nippon Sheet Glass Company, Ltd. Articles having an uneven surface and production process therefor
WO2004085145A1 (en) * 2003-03-27 2004-10-07 Nippon Steel Corporation Stainless-steel foils with inorganic/organic hybrid film coating
US8586190B2 (en) 2003-03-27 2013-11-19 Nippon Steel & Sumikin Materials Co., Ltd. Inorganic—organic hybrid-film-coated stainless-steel foil
JP2014098110A (en) * 2012-11-15 2014-05-29 Osaka Gas Chem Kk Composition for outermost surface of roller and/or mold

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