JPH0969397A - Inductively coupled plasma generating device - Google Patents
Inductively coupled plasma generating deviceInfo
- Publication number
- JPH0969397A JPH0969397A JP7222999A JP22299995A JPH0969397A JP H0969397 A JPH0969397 A JP H0969397A JP 7222999 A JP7222999 A JP 7222999A JP 22299995 A JP22299995 A JP 22299995A JP H0969397 A JPH0969397 A JP H0969397A
- Authority
- JP
- Japan
- Prior art keywords
- side electrode
- igniter
- torch tube
- high voltage
- inductively coupled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009616 inductively coupled plasma Methods 0.000 title claims description 15
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 24
- 239000007789 gas Substances 0.000 description 19
- 229910052786 argon Inorganic materials 0.000 description 12
- 238000010586 diagram Methods 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Plasma Technology (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、誘導結合プラズマ発光
分析装置（ＩＣＰ−ＡＥＳ）や誘導結合プラズマ質量分
析装置（ＩＣＰ−ＭＳ）に係り、特に、プラズマ点火装
置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inductively coupled plasma optical emission spectrometer (ICP-AES) and an inductively coupled plasma mass spectrometer (ICP-MS), and more particularly to a plasma ignition device.
【０００２】[0002]
【従来の技術】ＩＣＰ−ＡＥＳやＩＣＰ−ＭＳは、誘導
結合プラズマを用いて試料を励起させ、生じた光やイオ
ンを精密に測定することにより、分析するものであり、
極めて安定なプラズマを必要とする。2. Description of the Related Art ICP-AES and ICP-MS are for analyzing a sample by exciting it with an inductively coupled plasma and measuring the generated light and ions precisely.
It requires a very stable plasma.
【０００３】プラズマ発生部は、図２に示すように、２
〜３回巻きの出力コイル２内に三重管構造のトーチ管３
を配置し、トーチ管３の外部にイグナイタ５の高電圧側
電極６を配置する構成となっている。トーチ管３内にア
ルゴンガスを流し、高周波電力を出力コイル２に印加、
イグナイタ５をオンにすると、高電圧側電極６にパルス
状の高電圧が印加され、トーチ管３内のイグナイタの高
電圧側電極６と出力コイル２の間で放電が起こる。出力
コイル２は、その一端が接地されているため、イグナイ
タの接地側電極として動作する。この放電で生じた電子
群が、出力コイル２の高周波磁界により加速され、なだ
れ現象的に電離がおこり、誘導結合プラズマ４を生成す
る。As shown in FIG. 2, the plasma generating part is
~ Triple turn torch tube 3 in output coil 2 with 3 turns
And the high voltage side electrode 6 of the igniter 5 is arranged outside the torch tube 3. Argon gas is caused to flow in the torch tube 3 and high frequency power is applied to the output coil 2.
When the igniter 5 is turned on, a pulsed high voltage is applied to the high voltage side electrode 6, and a discharge occurs between the high voltage side electrode 6 of the igniter in the torch tube 3 and the output coil 2. Since the output coil 2 has one end grounded, it operates as a ground side electrode of the igniter. The electron group generated by this discharge is accelerated by the high frequency magnetic field of the output coil 2 and ionizes in an avalanche phenomenon to generate the inductively coupled plasma 4.
【０００４】一般的に、放電現象は、湿度や放電電極の
表面状態等に左右されやすい。従来例では、特に高湿度
下で、放電が起こりにくくなり、プラズマが点火しない
ことがあった。この対策として、イグナイタ５の高電圧
側電極６を出力コイル２に近づけたり、イグナイタ５の
出力電圧をより大きくするといったことがなされてき
た。前者の場合、プラズマ点火後、プラズマと高電圧側
電極６間で放電が起こり、プラズマが不安定になること
があった。また、トーチ管外部で高電圧側電極６と出力
コイル２の間で放電が起こり、プラズマが点火しないこ
とがあった。後者の場合、上記現象に加え、放電時のノ
イズが大きくなり、制御系の誤動作を引き起こすことも
あった。Generally, the discharge phenomenon is easily influenced by humidity and the surface condition of the discharge electrode. In the conventional example, the discharge is less likely to occur and the plasma may not ignite particularly under high humidity. As measures against this, the high voltage side electrode 6 of the igniter 5 has been brought closer to the output coil 2 or the output voltage of the igniter 5 has been increased. In the former case, after plasma ignition, discharge may occur between the plasma and the high-voltage side electrode 6, and the plasma may become unstable. In addition, discharge may occur between the high voltage side electrode 6 and the output coil 2 outside the torch tube, and plasma may not ignite. In the latter case, in addition to the above phenomenon, noise at the time of discharge becomes large, which may cause malfunction of the control system.
【０００５】[0005]
【発明が解決しようとする課題】本発明の目的は、確実
に点火し安定なプラズマを発生させることのできる誘導
結合プラズマ発生装置を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide an inductively coupled plasma generator capable of reliably igniting and generating stable plasma.
【０００６】[0006]
【課題を解決するための手段】放電現象は、主に気体の
種類，圧力，電極の幾何学的配置および電圧印加条件に
支配される。ここでは、気体はアルゴンガス、圧力は１
気圧であり、印加電圧は放電時の制御系へのノイズを最
小限に抑えるためにできるだけ低いほうがよい。これら
のことより、電極の幾何学的配置を最適化する必要があ
る。The discharge phenomenon is mainly governed by the type of gas, pressure, geometrical arrangement of electrodes, and voltage application conditions. Here, the gas is argon gas and the pressure is 1.
Atmospheric pressure, and the applied voltage should be as low as possible in order to minimize noise to the control system during discharge. For these reasons, it is necessary to optimize the electrode geometry.
【０００７】従来例では、出力コイル２をイグナイタ５
の接地側電極として利用していたため、電極の配置上の
制限があった。そこで、イグナイタの高電圧側電極６に
対する接地側電極を別途設け、一対の放電ギャップを形
成することにより、電極の配置上の制限を小さくでき
る。In the conventional example, the output coil 2 is connected to the igniter 5
Since it was used as the ground side electrode of, the arrangement of the electrodes was limited. Therefore, by separately providing a ground side electrode for the high voltage side electrode 6 of the igniter and forming a pair of discharge gaps, it is possible to reduce restrictions on the arrangement of the electrodes.
【０００８】請求項に挙げたように、電極の配置上、三
つの方法が考えられる。すなわち、 (1）両電極をトーチ管の外側に配置する場合。出力コイ
ルと干渉しない距離を保ち、トーチ管の外側で放電しな
い最短の距離で両電極を配置すればよい。As mentioned in the claims, three methods can be considered for the arrangement of the electrodes. That is, (1) When both electrodes are placed outside the torch tube. It is sufficient to maintain a distance that does not interfere with the output coil and arrange both electrodes at the shortest distance that does not discharge outside the torch tube.
【０００９】(2）電極の一方をトーチ管の外側に、他方
をトーチ管の内側に配置する場合。出力コイルと干渉し
ない距離を保ち、一方の電極をトーチ管の近くに、他方
の電極をトーチ管内のアルゴンガスの流れる部位で管壁
に接しないように配置すればよい。(2) One of the electrodes is arranged outside the torch tube and the other is arranged inside the torch tube. A distance that does not interfere with the output coil may be maintained, one electrode may be arranged near the torch tube, and the other electrode may be arranged so as not to come into contact with the tube wall at a portion of the torch tube where the argon gas flows.
【００１０】(3）両電極をトーチ管の内側に配置する場
合。出力コイルと干渉しない距離を保ち、トーチ管内の
アルゴンガスの流れる部位で１０〜２０mmの電極間距離
をもって配置すればよい。アルゴンガスは、放電破壊電
圧が低い上に、両電極ともガスに接しているため、三つ
の中で最も放電しやすい。(3) When both electrodes are arranged inside the torch tube. The distance between the output coils may be maintained, and the distance between the electrodes in the torch tube where the argon gas flows may be 10 to 20 mm. Since argon gas has a low discharge breakdown voltage and both electrodes are in contact with the gas, argon gas is the most easily discharged.
【００１１】[0011]
【作用】イグナイタの高電圧側電極に対して接地側電極
を別途設けることによって、両電極間の配置を最適に設
定できるため、比較的低い電圧で確実に放電させること
ができ、安定なプラズマを確実に点火できる。By providing the ground side electrode separately from the high voltage side electrode of the igniter, the arrangement between both electrodes can be optimally set, so that it is possible to surely discharge at a relatively low voltage and to generate stable plasma. Can ignite reliably.
【００１２】[0012]
【実施例】以下、図面を参照しながら本発明を詳述す
る。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below with reference to the drawings.
【００１３】図１に本発明の一実施例を示す。高周波発
生部１は、周波数２７.１２ＭＨｚ，最大出力１.０ｋＷ
の能力をもち、インピーダンスマッチング機能を内蔵
する。高周波発生部１の高周波出力は、出力コイル２に
入力される。出力コイル２は、直径３mmの銅パイプを材
料とし、内径２５mmで３回巻きとし、巻きピッチ４mmと
した。また、出力コイル２の一端は高周波発生部１に接
続され、他端は接地される。出力コイル２の中央部にト
ーチ管３を配置する。トーチ管３は、石英製で三重管構
造とし、中心部から順に、試料およびキャリアガス(約
０.７ ｌ／min），補助ガス（約１ ｌ／min），プラズ
マガス（約１６ ｌ／min）を流す。トーチ管３の下部に
イグナイタ５の高電圧側電極６と接地側電極７をトーチ
管を挟んで対称の位置に配置する、干渉を避けるため出
力コイル２から約４０mm離した。イグナイタ５の出力
は、波高値１５ｋＶ，パルス幅５０μｓのパルス出力と
した。また、高電圧側電極６および接地側電極７は、ス
テンレス製で直径１mmの針状電極とした。FIG. 1 shows an embodiment of the present invention. The high frequency generator 1 has a frequency of 27.12 MHz and a maximum output of 1.0 kW
It has the ability of and has a built-in impedance matching function. The high frequency output of the high frequency generator 1 is input to the output coil 2. The output coil 2 is made of a copper pipe having a diameter of 3 mm, is wound 3 times with an inner diameter of 25 mm, and has a winding pitch of 4 mm. Further, one end of the output coil 2 is connected to the high frequency generator 1, and the other end is grounded. The torch tube 3 is arranged in the center of the output coil 2. The torch tube 3 is made of quartz and has a triple tube structure. The sample and carrier gas (about 0.7 l / min), auxiliary gas (about 1 l / min), and plasma gas (about 16 l / min) are arranged in this order from the center. ) Flow. The high voltage side electrode 6 and the ground side electrode 7 of the igniter 5 are arranged at the lower part of the torch tube 3 at symmetrical positions with the torch tube interposed, and they are separated from the output coil 2 by about 40 mm to avoid interference. The output of the igniter 5 was a pulse output having a peak value of 15 kV and a pulse width of 50 μs. Further, the high voltage side electrode 6 and the ground side electrode 7 are needle electrodes made of stainless steel and having a diameter of 1 mm.
【００１４】次に動作を説明する。トーチ管３にアルゴ
ンガスを流す。トーチ管３内部の空気が完全に抜けきる
まで待つ。次に高周波発生部１の出力を出力コイル２に
入力する。これに続いてイグナイタ５をオンにすると、
高電圧側電極６と接地側電極７間に高電圧パルスが印加
され、トーチ管３内部でパルス放電が発生する。この放
電により生成された電子群が、アルゴンガスに流されて
出力コイル２近辺に達する。この電子群は、出力コイル
２のつくる高周波磁界により加速され、アルゴンガスを
次々に電離し、プラズマが成長する。そして最終的に安
定した誘導結合プラズマ４を生成する。Next, the operation will be described. Argon gas is passed through the torch tube 3. Wait until the air inside the torch tube 3 is completely exhausted. Next, the output of the high frequency generator 1 is input to the output coil 2. If you turn on the igniter 5 subsequently,
A high voltage pulse is applied between the high voltage side electrode 6 and the ground side electrode 7, and a pulse discharge is generated inside the torch tube 3. The electron group generated by this discharge is made to flow in the argon gas and reaches the vicinity of the output coil 2. This electron group is accelerated by the high frequency magnetic field generated by the output coil 2, ionizes argon gas one after another, and plasma grows. Finally, stable inductively coupled plasma 4 is generated.
【００１５】ここでは、イグナイタ５は単発のパルス出
力としたが、プラズマが点火するまで連続的にパルス出
力を出してもよいし、また、ＤＣ出力でもよい。Although the igniter 5 has a single pulse output here, it may have a continuous pulse output until the plasma is ignited, or may have a DC output.
【００１６】空気およびアルゴンガスの放電破壊電界
は、それぞれ３０ｋＶ／cm、６.７ ｋＶ／cmである。
トーチ管３の直径は２０mmであることより、高電圧側電
極６と接地側電極７のギャップ長は約２０mmとなり、ト
ーチ管３内部のアルゴンガス中で放電を起こすには１
３.４ｋＶ 以上の高電圧が必要となる。また、トーチ管
３の外部での両電極のギャップ長は約３１mmであり、ト
ーチ管３外部での空気中放電を起こさないためには、イ
グナイタ５の出力電圧は９３ｋＶ以下でなければならな
い。放電時のノイズを抑えるため、ここでは、イグナイ
タ５の出力電圧は１５ｋＶとした。尚、トーチ管３の外
表面での沿面放電を避けるため、高電圧側電極６および
接地側電極７は、トーチ管３に接触しないように配置し
た方がよい。The discharge breakdown electric fields of air and argon gas are 30 kV / cm and 6.7 kV / cm, respectively.
Since the diameter of the torch tube 3 is 20 mm, the gap length between the high voltage side electrode 6 and the ground side electrode 7 is about 20 mm, and it takes 1 to generate a discharge in the argon gas inside the torch tube 3.
A high voltage of 3.4 kV or more is required. The gap length of both electrodes outside the torch tube 3 is about 31 mm, and the output voltage of the igniter 5 must be 93 kV or less in order to prevent discharge in the air outside the torch tube 3. In order to suppress noise during discharging, the output voltage of the igniter 5 is set to 15 kV here. In order to avoid creeping discharge on the outer surface of the torch tube 3, it is preferable that the high voltage side electrode 6 and the ground side electrode 7 are arranged so as not to contact the torch tube 3.
【００１７】次に実施例２について説明する。図３に示
すように高電圧側電極６をトーチ管３の下部の外側に、
接地側電極７をトーチ管３内部のプラズマガスを流す部
位に配置した。トーチ管３内の電極は出力コイル２から
の干渉を受けやすい。このため、接地側電極７は、高電
圧側電極６との距離を約２０mmに保ったままできるだけ
出力コイル２から離れた位置に配置した方がよい。Next, a second embodiment will be described. As shown in FIG. 3, the high voltage side electrode 6 is provided outside the lower part of the torch tube 3,
The ground-side electrode 7 was placed inside the torch tube 3 at a portion where the plasma gas was passed. The electrodes in the torch tube 3 are susceptible to interference from the output coil 2. Therefore, it is preferable that the ground side electrode 7 is arranged as far as possible from the output coil 2 while keeping the distance from the high voltage side electrode 6 at about 20 mm.
【００１８】実施例３では、図４に示すように高電圧側
電極６と接地側電極７の両方をトーチ管３内のプラズマ
ガスを流す部位に配置した。出力コイル２からの干渉を
避けるため、両電極間の距離を約２０mmに保ったままで
きるだけ出力コイル２から離れた位置に配置した方がよ
い。この場合、両電極ともアルゴンガス内にあるため、
３実施例のうちで最も放電が起こりやすい。In the third embodiment, as shown in FIG. 4, both the high voltage side electrode 6 and the ground side electrode 7 are arranged in the torch tube 3 at the portion where the plasma gas flows. In order to avoid interference from the output coil 2, it is preferable to place the electrodes as far as possible from the output coil 2 while keeping the distance between both electrodes at about 20 mm. In this case, since both electrodes are in argon gas,
The discharge is most likely to occur among the three examples.
【００１９】以上のように本実施例によれば、プラズマ
点火時のイグナイタ５による放電が確実に起こるため、
確実に点火し安定した誘導結合プラズマ４を生成でき
る。As described above, according to this embodiment, since the discharge by the igniter 5 at the time of plasma ignition surely occurs,
It is possible to reliably ignite and generate stable inductively coupled plasma 4.
【００２０】[0020]
【発明の効果】本発明によれば、イグナイタの高電圧側
電極に対する接地側電極を設けることにより、イグナイ
タによる放電が確実に起こるため、確実に点火し安定し
た誘導結合プラズマを生成できる。According to the present invention, by providing the ground side electrode with respect to the high voltage side electrode of the igniter, discharge by the igniter is surely generated, so that it is possible to surely ignite and generate stable inductively coupled plasma.
【図１】本発明の実施例１の説明図。FIG. 1 is an explanatory diagram of a first embodiment of the present invention.
【図２】従来技術の説明図。FIG. 2 is an explanatory diagram of a conventional technique.
【図３】本発明の実施例２の説明図。FIG. 3 is an explanatory diagram of a second embodiment of the present invention.
【図４】本発明の実施例３の説明図。FIG. 4 is an explanatory diagram of Embodiment 3 of the present invention.
１…高周波発生部、２…出力コイル、３…トーチ管、４
…誘導結合プラズマ、５…イグナイタ、６…高電圧側電
極、７…接地側電極。1 ... High frequency generator, 2 ... Output coil, 3 ... Torch tube, 4
Inductively coupled plasma, 5 ... Igniter, 6 ... High voltage side electrode, 7 ... Ground side electrode.
Claims (4)
グナイタを備えた誘導結合プラズマ発生装置において、
前記イグナイタの高電圧側電極と対向して接地側電極を
設けることを特徴とする誘導結合プラズマ発生装置。1. An inductively coupled plasma generator comprising a high frequency generator, an output coil, a torch tube and an igniter,
An inductively coupled plasma generation device, wherein a ground side electrode is provided so as to face the high voltage side electrode of the igniter.
圧側電極と接地側電極の両方をトーチ管の外側に配置す
る誘導結合プラズマ発生装置。2. The inductively coupled plasma generator according to claim 1, wherein both the high voltage side electrode and the ground side electrode of the igniter are arranged outside a torch tube.
圧側電極と接地側電極の一方をトーチ管の外側に配置
し、他方をトーチ管内に配置する誘導結合プラズマ発生
装置。3. The inductively coupled plasma generator according to claim 1, wherein one of the high voltage side electrode and the ground side electrode of the igniter is arranged outside the torch tube and the other is arranged inside the torch tube.
圧側電極と接地側電極の両方をトーチ管内に配置する誘
導結合プラズマ発生装置。4. The inductively coupled plasma generator according to claim 1, wherein both the high voltage side electrode and the ground side electrode of the igniter are arranged in a torch tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7222999A JPH0969397A (en) | 1995-08-31 | 1995-08-31 | Inductively coupled plasma generating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7222999A JPH0969397A (en) | 1995-08-31 | 1995-08-31 | Inductively coupled plasma generating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0969397A true JPH0969397A (en) | 1997-03-11 |
Family
ID=16791239
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7222999A Pending JPH0969397A (en) | 1995-08-31 | 1995-08-31 | Inductively coupled plasma generating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0969397A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007188690A (en) * | 2006-01-12 | 2007-07-26 | Matsushita Electric Ind Co Ltd | Atmospheric plasma treating method and device |
| US7371992B2 (en) | 2003-03-07 | 2008-05-13 | Rapt Industries, Inc. | Method for non-contact cleaning of a surface |
| JP2008204870A (en) * | 2007-02-21 | 2008-09-04 | Matsushita Electric Ind Co Ltd | Atmospheric pressure plasma generator and ignition method |
| EP4215025A4 (en) * | 2020-09-18 | 2024-10-09 | Fluidigm Canada Inc | Inductively coupled plasma based atomic analysis systems and methods |
-
1995
- 1995-08-31 JP JP7222999A patent/JPH0969397A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7371992B2 (en) | 2003-03-07 | 2008-05-13 | Rapt Industries, Inc. | Method for non-contact cleaning of a surface |
| JP2007188690A (en) * | 2006-01-12 | 2007-07-26 | Matsushita Electric Ind Co Ltd | Atmospheric plasma treating method and device |
| JP2008204870A (en) * | 2007-02-21 | 2008-09-04 | Matsushita Electric Ind Co Ltd | Atmospheric pressure plasma generator and ignition method |
| JP4609440B2 (en) * | 2007-02-21 | 2011-01-12 | パナソニック株式会社 | Atmospheric pressure plasma generator and ignition method |
| EP4215025A4 (en) * | 2020-09-18 | 2024-10-09 | Fluidigm Canada Inc | Inductively coupled plasma based atomic analysis systems and methods |
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