JPH0935229A - Production of slider for floating type magnetic head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method capable of producing a slider for a floating type magnetic head with which a specified flying height is obtainable with a simple mechanism. SOLUTION: This process has a stage for placing the slider 1 or a rotating member 9 for polishing in such a manner that a boundary line 12 of a difference in level enters approximately parallel between a pair of rails 2 and 3 and a stage for rotating the ratating member 9 for polishing and polishing the respective corner parts of a pair of the rails 2, 3 with the outer peripheral side part 13 of the first rotating member 10 for polishing and the inner peripheral ride part 15 of the second rotating member 11 for polishing. The corner parts of the one and the other rails 2, 3 are polished to polishing with abrasive grains 17 by the pressing energizing force of a suspension plate 21 and the rotating motion of a turn table and tapered surface parts 26 are formed in these parts when the rotating member 9 for polishing is rotated at a prescribed rotating speed and a prescribed number of revolutions. The accuracy of the allowances of chambering for the slopes of the tapered surface parts 26 is well and rapidly adjusted by changing the rotating speed of the ratting member 9 for polishing and the number of revolutions.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a slider for a floating type magnetic head used in a hard disk drive or the like.

[0002]

2. Description of the Related Art Currently, in hard disk devices,
High-density recording is being promoted. Along with this, in a slider for a floating magnetic head (hereinafter referred to as a slider) used in a hard disk device, a gap (hereinafter, referred to as a magnetic recording medium) between a magnetic gap forming portion of a magnetic head core joined to the slider. It is called the flying height.)
The need for lowering is emerging.

However, with a slider having a structure called a taper flat, the flying height changes depending on the peripheral speed, and due to the difference in peripheral speed between the inner circumference side and the outer circumference side of the magnetic disk, the outer circumference side has a large peripheral speed. , The flying height increases. As a result of the change in the flying height due to the change in the peripheral speed, the electromagnetic conversion characteristics of the magnetic head become unstable, which is not preferable.

Therefore, a constant flying height, so-called CFH
In order to obtain (Constant Flying Height), pressure equalizing means (TPC (Transverse Pressurization) is attached to the slider.
Contour)) is provided to obtain CFH.

For example, in the slider 1 shown in FIG.
As C, a step plane 5 slightly lower than the air bearing surface 4 is formed on the side edge of the rails 2 and 3 so that the flying height is maintained constant. In this case, the step plane 5 of the slider 1
Are formed by the ion milling method.

[0006]

By the way, the ion milling method includes a pretreatment step of applying a resist film and performing patterning, and an apparatus for carrying out the pretreatment step is required, and the mechanism is accordingly increased. However, there is a problem in that since it is complicated and highly precise, it requires a lot of adjustment to form a step plane, resulting in poor productivity.

The present invention has been made in view of the above circumstances, and manufactures a slider for a floating magnetic head capable of improving productivity by manufacturing a slider for a floating magnetic head capable of obtaining a constant flying height with a simple mechanism. The purpose is to provide a method.

[0008]

In order to achieve the above object, the present invention has a polishing rotary member having different heights at an inner peripheral portion and an outer peripheral portion with a boundary line along the rotation direction as a boundary, A slider, one end of which is held on the other end of an elastic member supported by a fixing member, and a pair of levitation rails projecting in parallel on a surface facing the magnetic recording medium is formed between the pair of rails. The step of placing the polishing rotary member on the polishing rotary member so that the boundary lines are substantially parallel to each other, and rotating the polishing rotary member so that each of the corners of the pair of rails has an inner peripheral portion and an outer peripheral portion of the polishing rotary member. And a step of polishing with a part.

In this case, the polishing rotary member may be a member coated with polishing abrasive grains or a member in which the polishing abrasive grains are sintered, or the polishing rotary member is polished into a member in which the polishing abrasive grains are sintered. It may be configured by applying abrasive grains. Further, the elastic member may be a long plate member, and the material may be rubber, a spring holding type contact pin, or a compressed air type contact pin.

[0010]

According to the structure of the present invention, when the polishing rotary member is rotated at the predetermined rotation speed for the predetermined number of times, the pressing biasing force of the elastic member and the rotary motion of the polishing rotary member cause the pair of slider rails to move. The corner portion is polished by abrasive grains to form a tapered surface portion having a predetermined inclination angle.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described below with reference to FIGS.
It will be described based on. In FIG. 2, the polishing apparatus 5 is provided with a rotary support 6. A rotary table 8 is rotatably supported on the rotary support 6 via a rotary shaft 7. A rotary member 9 for polishing is placed on the rotary table 8.

The polishing rotary member 9 includes a substantially circular first polishing rotary member 10 made of metal, and a second ring-shaped metallic second metal member provided so as to be fitted with the first polishing rotary member 10. The polishing rotary member 11 and the first and second polishing rotary members 10, 11 are joined together to form a step boundary line 12.

An outer peripheral portion 13 of the first polishing rotary member 10.
Has a height higher than that of the inner peripheral side portion 14 as shown in FIGS. 1 and 2. The inner peripheral side portion 15 of the second polishing rotary member 11 has a height higher than that of the outer peripheral side portion 16, and is higher than the outer peripheral side portion 13 of the first polishing rotary member 10 by a step D. Has become. Polishing abrasive grains 17 are applied to the outer peripheral side portion 13 of the first polishing rotary member 10 and the inner peripheral side portion 15 of the second polishing rotary member 11. In this embodiment, the outer peripheral portion 13 of the first polishing rotary member 10 constitutes the inner peripheral portion of the polishing rotary member 9, and the second polishing rotary member 11 is formed.
The inner peripheral side portion 15 constitutes the outer peripheral portion of the polishing rotation member 9.

A pair of upright columns 18 (only one of which is shown in the figure) are provided with the rotary table 8 in between. A two-layer ring-shaped fixed member 19 is attached to the pair of upright columns 18 so as to be on the polishing rotation member 9. In addition, instead of the pair of upright columns 18, the polishing rotary member 9
It may be a cylindrical body provided so as to be wound. Further, the fixing member 19 may have a one-layer ring shape, a disk shape, or a rectangular plate shape.

A supporting jig 20 is provided on the lower side of the fixing member 19.
One end side of an elastic suspension plate 21 such as steel is supported via. The other end of the suspension plate 21 extends obliquely downward toward the step boundary line 12. The slider 1 is detachably joined and held to the other end of the suspension plate 21.

As shown in FIG. 3, the slider 1 has a pair of levitation rails 2 on a surface of a slider body 22 having a substantially rectangular shape, which faces the magnetic recording medium (a surface opposite to the joint with the suspension plate 21). 3 is formed so as to project in parallel. A window 23 having a substantially triangular shape is formed at a corner of the slider body 22 on one rail 2 side. A magnetic head core 25 having a recording / reproducing gap 24 is joined to the side surface of the slider 1 so as to face the window 23 by a low melting point glass or the like. As described above, the slider 1 is held by being joined to the suspension plate 21, and one rail 2 is located on the inner peripheral side portion 15 of the second polishing rotation member 11 as shown in FIG. Rail 3 is located on the outer peripheral side portion 13 of the first polishing rotary member 10 (that is, the step boundary line 12 is inserted between the pair of rails 2 and 3), and the pair of rails 2 and 3 are Polishing rotary member 9 so as to be substantially parallel to the step boundary line 12
Placed on top.

In this polishing apparatus 5, first, one rail 2 of the slider 1 is an inner peripheral side portion 15 of the second polishing rotary member 11, and the other rail 3 is an outer peripheral side portion of the first polishing rotary member 10. The slider 1 is held by the suspension plate 21 such that the slider 1 is brought into contact with each other with an equal pressing force.

Next, the turntable 8 is rotated a predetermined number of times at a predetermined rotation speed. Then, the suspension plate 21
By the pressing urging force and the rotary motion of the rotary table 8, the corner portions of the rails 2 and 3 on the one side and the other side of the slider 1 are polished by the abrasive grains 17 and the taper of the inclination angle θ is formed on the corresponding portion as shown in FIG. The surface portion 26 is formed.

The precision of the inclined surface removal allowance of the tapered surface portion 26 can be adjusted satisfactorily and quickly by changing the rotation speed of the rotary table 8 and the number of rotations thereof. Further, the inclination angle θ of the tapered surface portion 26 can be set to an arbitrary angle by changing the step D of the step boundary line 12. In the above-mentioned conventional technique, it may take time and effort to adjust the accuracy by having a complicated mechanism, but in the present embodiment, such a problem can be improved. Moreover, productivity can be improved because the accuracy can be adjusted quickly.

The applicant of the present invention has made the inclination angle θ as described above.
And a slider 1 having a tapered surface portion 26 of θ _T
When the flying height is measured for the slider 1 having the step plane 5 shown in FIG. 11, the slider 1 shown in FIG. 11 can obtain a constant flying height (CFH) as shown by the dotted line A in FIG. As shown by the solid line B, the slider 1 having the taper surface portion 26 has substantially the same characteristics as the slider 1 shown in FIG. 11, and it has been verified that a good constant flying height is maintained.

In the above embodiment, the case where the polishing rotary member 9 is circular is taken as an example, but the present invention is not limited to this.
For example, a longitudinal member having a step may be used, one end side is fixed to the rotary shaft side, and the other end side is extended outward in the radial direction.

Next, a second embodiment of the present invention will be described with reference to FIG. The second embodiment differs from the first embodiment in that a polishing rotary member 9A shown in FIG. 6 is provided in place of the polishing rotary member 9 of the first embodiment, and other members and portions are the same as those of the first embodiment. This is equivalent to that shown, and the description and illustration of the equivalent members and parts will be omitted as appropriate.

The rotary member 9A for polishing is provided with abrasive grains 17
A substantially circular first polishing rotary member 10A that is obtained by sintering
It comprises a ring-shaped second polishing rotary member 11A formed by sintering abrasive grains 17 provided so as to be fitted with the polishing rotary member 10A, and the first and second polishing rotary members 1 are provided.
The junction between 0A and 11A forms a step boundary line 12.

Outer peripheral portion 1 of the first polishing rotary member 10A
3A is an inner peripheral side portion (not shown) similar to that shown in FIG.
The height is higher than. Second polishing rotary member 1
The inner peripheral side portion 15A of 1A is higher than the outer peripheral side portion (not shown), and is higher than the outer peripheral side portion 13A of the first polishing rotation member 10A by a step D. .
In this embodiment, the outer peripheral side portion 13A of the first polishing rotary member 10A constitutes the inner peripheral portion of the polishing rotary member 9, and the inner peripheral side portion 15A of the second polishing rotary member 11A is the polishing rotary member 9. Constitutes the outer peripheral portion of.

In the second embodiment, when the rotary table 8 (see FIG. 2) is rotated at a predetermined rotation speed for a predetermined number of times,
The corners of the rails 2 and 3 on one side and the other side of the slider 1 are
The taper surface portion 2 having a predetermined inclination angle is polished by the polishing abrasive grains 17 sintered on the second polishing rotating members 10A and 11A.
6 are formed.

As shown in FIG. 7, the first embodiment of the second embodiment
The abrasive grains 17 may be applied onto the outer peripheral side portion 13A of the polishing rotary member 10A and the inner peripheral side portion 15A of the second polishing rotary member 11A, as used in the first embodiment. In the apparatus shown in FIG. 7, when the rotary table 8 (see FIG. 2) is rotated a predetermined number of times at a predetermined rotational speed, the corners of the rails 2 and 3 on one side and the other side of the slider 1 are subjected to the first and second polishing. Abrasive grains 1 sintered and applied to the rotating members 10A, 11A for use
7 and 17 and the taper surface portion 2 having an inclination angle θ
6 are formed. Further, the inclination angle θ of the tapered surface portion 26 can be set to an arbitrary angle by changing the step D of the step boundary line 12.

Next, a third embodiment of the present invention will be described with reference to FIG. The third embodiment is different in that a substantially rectangular elastic member 27 made of rubber shown in FIG. 8 is provided in place of the suspension plate 21 of the first embodiment, and other members and portions are the same as those of the first embodiment. This is equivalent to that shown in the example, and the description and illustration of the equivalent members and parts will be omitted as appropriate.

In this polishing apparatus 5, when the rotary table 8 is rotated at a predetermined rotational speed for a predetermined number of times, one of the slider 1 and the other of the slider 1 is caused by the pressing biasing force of the rubber elastic member 27 and the rotary motion of the rotary table 8. The corners of the rails 2 and 3 (see FIG. 4) are polished by the abrasive grains 17 (see FIG. 1) to form the taper surface portion 26 (see FIG. 4) having the inclination angle θ. The inclined surface allowance of the tapered surface portion 26 is the rotary table 8
The accuracy can be adjusted satisfactorily and quickly by changing the rotation speed and the number of rotations thereof. Also, the tapered surface portion 2
The inclination angle θ of 6 can be any angle by changing the step D of the step boundary line 12. The productivity can be improved because the accuracy can be adjusted quickly.

Next, a fourth embodiment of the present invention will be described with reference to FIG. The fourth embodiment differs from the suspension plate 21 of the first embodiment in that an elastic member 28 made of a spring-holding type contact pin shown in FIG. 9 is provided, and other members and portions are the same as those of the first embodiment. This is the same as that shown in the first embodiment, and the description and illustration of the equivalent members and parts will be omitted as appropriate. The elastic member 28 is the lower layer side plate portion 19A of the fixing member 19.
A pin 28A slidably housed in a hole formed in the front end of the pin 28A, which detachably joins the slider 1 to the tip side, and is interposed between the base end portion of the pin 28A and the upper layer side plate portion 19B of the fixing member 19. A spring member 28B that presses and urges the pin 28A is roughly configured.

In this polishing apparatus 29, when the rotary table 8 is rotated a predetermined number of times at a predetermined rotation speed, the elastic member 2 is rotated.
By the pressing biasing force of 8 and the rotary motion of the rotary table 8,
The corners of the rails 2 and 3 (see FIG. 4) on one side of the slider 1 are polished by the abrasive grains 17 (see FIG. 1) to form tapered surface portions 26 (see FIG. 4) having an inclination angle θ at the portions. It The precision of the inclined surface removal allowance of the tapered surface portion 26 can be adjusted favorably and quickly by changing the rotation speed of the rotary table 8 and the number of rotations thereof. The productivity can be improved because the accuracy can be adjusted quickly.

Next, a fifth embodiment of the present invention will be described with reference to FIG. The fifth embodiment differs from the first embodiment in that an elastic member 30 made of a compressed air type contact pin shown in FIG. 10 is provided in place of the suspension plate 21 of the first embodiment. This is the same as that shown in the first embodiment, and the description and illustration of the equivalent members and parts will be omitted as appropriate. The elastic member 30 includes the lower layer side plate portion 19 of the fixing member 19.
A pin 30A which is slidably accommodated in a hole formed in A and detachably joins the slider 1 to the tip side, and a fixing member 19
A cylindrical compressed air supply member 3 which is provided through the hole formed in the upper side plate portion 19B and slidably inserts the base end portion of the pin 30A to press and urge the pin 30A with compressed air.
It is generally composed of 0B.

In this polishing apparatus 31, when the rotary table 8 is rotated a predetermined number of times at a predetermined rotational speed, the elastic member 3 is rotated.
By the pressing biasing force of 0 and the rotary motion of the rotary table 8,
The corners of the rails 2 and 3 (see FIG. 4) on one side of the slider 1 are polished by the abrasive grains 17 (see FIG. 1) to form tapered surface portions 26 (see FIG. 4) having an inclination angle θ at the portions. It The precision of the inclined surface removal allowance of the tapered surface portion 26 can be adjusted favorably and quickly by changing the rotation speed of the rotary table 8 and the number of rotations thereof. The productivity can be improved because the accuracy can be adjusted quickly.

[0033]

According to the structure of the present invention, when the polishing rotary member is rotated a predetermined number of times at a predetermined rotation speed, the pressing biasing force of the elastic member and the rotary motion of the polishing rotary member cause the pair of sliders to move. The corners of the rail are polished by polishing abrasive grains to form a tapered surface portion with an inclination angle on the portion, and the accuracy of the inclined surface removal allowance of the tapered surface portion is changed by changing the rotation speed and the number of rotations of the polishing rotation member. Can be adjusted satisfactorily and quickly, so that it is possible to improve the time and labor required for the accuracy adjustment that could occur in the above-described conventional technique. Further, productivity can be improved because the accuracy can be adjusted quickly.

[Brief description of drawings]

FIG. 1 is a sectional view for explaining a manufacturing method according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional view showing a polishing apparatus for carrying out the method for manufacturing the slider for the floating magnetic head of the same.

FIG. 3 is a perspective view showing a floating magnetic head using a slider for a floating magnetic head obtained by the same manufacturing method.

FIG. 4 is a sectional view taken along the line AA of FIG.

FIG. 5 is a diagram showing the flying characteristics of the slider for the floating magnetic head and the slider obtained by the conventional technique.

FIG. 6 is a sectional view for explaining the manufacturing method according to the second embodiment of the present invention.

FIG. 7 is a cross-sectional view for explaining a manufacturing method performed by using a polishing rotary member in which polishing abrasives are applied to the first and second polishing rotary members of FIG.

FIG. 8 is a cross-sectional view for explaining the manufacturing method of the third embodiment of the present invention.

FIG. 9 is a sectional view for explaining the manufacturing method according to the fourth embodiment of the present invention.

FIG. 10 is a sectional view for explaining the manufacturing method according to the fifth embodiment of the present invention.

FIG. 11 is a sectional view showing a slider for a floating magnetic head obtained by an example of a conventional manufacturing method.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 slider 9 rotating member for polishing 10 first rotating member for polishing 11 second rotating member for polishing 12 step boundary line 13 outer peripheral side portion of first rotating member for polishing (inner peripheral portion of rotating member for polishing) 15 second polishing Inner peripheral portion of the rotary member for polishing (outer peripheral portion of the rotary member for polishing) 21 Suspension plate (elastic member)

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Genji Egawa 1743-1, Asana-cho, Iwata-gun, Shizuoka Prefecture Minebea Co., Ltd. Development Technology Center (72) Inventor Shigeyuki Adachi Asana-cho, Iwata-gun, Shizuoka 1743-1 Minebea Co., Ltd. Development Technology Center

Claims (8)

[Claims] 1. A polishing rotating member having different heights at an inner peripheral portion and an outer peripheral portion with a boundary line extending in the rotating direction as a boundary, and one end side is held at the other end side of an elastic member supported by a fixed member. And a slider in which a pair of levitation rails are formed to project in parallel on the surface facing the magnetic recording medium, and the slider is mounted on the polishing rotary member such that the boundary lines are substantially parallel between the pair of rails. Floating magnetic device comprising: a step of placing the polishing rotary member; and a step of rotating the polishing rotary member to polish each of the corners of the pair of rails at the inner peripheral portion and the outer peripheral portion of the polishing rotary member. Head slider manufacturing method. 2. The method for manufacturing a slider for a floating magnetic head according to claim 1, wherein the polishing rotary member is a member coated with polishing abrasive grains. 3. The method for manufacturing a slider for a floating magnetic head according to claim 1, wherein the polishing rotary member is a member obtained by sintering abrasive grains. 4. The method of manufacturing a slider for a floating magnetic head according to claim 1, wherein the polishing rotary member is formed by applying polishing abrasive grains to a member in which polishing abrasive grains are sintered. 5. The elastic member is an elongated plate member.
5. A method for manufacturing a slider for a floating magnetic head according to any one of items 1 to 4. 6. The method for manufacturing a slider for a floating magnetic head according to claim 1, wherein the elastic member is made of rubber. 7. The method for manufacturing a slider for a floating magnetic head according to claim 1, wherein the elastic member is made of a spring-pressing type contact pin. 8. The method of manufacturing a slider for a floating magnetic head according to claim 1, wherein the elastic member is made of a compressed air type contact pin.