JPH07210818A - Production of magnetic head - Google Patents

Abstract

PURPOSE:To work differences in the level of grooves with high accuracy by disposing the floating surfaces of many pieces of magnetic heads flush with a uniform plane and facilitating adjustment of the parallelism between the tape motion of a working machine and the working surfaces of these magnetic heads. CONSTITUTION:A working jig 7 and plural pieces of the magnetic head floating surfaces are arranged and placed on flat plate 8 in opposition thereto in such a manner that the working directions of the magnetic heads face the same direction. The side face of the working jig 7 and the side faces of the magnetic heads 1 are adhered and fixed and the working jig 7 adhered with the magnetic heads 1 is fixed by disposing the floating surfaces of the magnetic heads upward. The floating surfaces of the magnetic heads are made flush with the uniform plane by using an inclination adjusting jig capable of adjusting the inclination in two directions parallel and perpendicular with and to the working direction in such a manner that the specified height of the working surfaces of the magnetic heads is obtd. The prescribed points of the floating surfaces are ground by making adjustment while measuring the height of the working surfaces of the magnetic heads with respect to the longitudinal and transverse motions of the table of a working machine by this inclination adjusting jig, by which the slight differences in the level are worked.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to processing of a magnetic head, and more particularly to a method of processing a minute step on an air bearing surface.

[0002]

2. Description of the Related Art In a floating magnetic head, for example, FIG.
When the magnetic disk 3 is rotated, the magnetic head 1 floats above the magnetic disk 3 by about 0.1 μm.
Since the flying speed c is different between the outer circumference and the inner circumference of the magnetic disk 3 when the magnetic disk 3 is rotated, the flying height c is large at the outer circumference where the peripheral speed is fast and small at the inner circumference where the peripheral speed is slow. . On the other hand, in order to increase the storage density and obtain a large output, it is preferable that the flying height c from the magnetic disk 3 is small and that the entire surface of the magnetic disk 3 be constantly floated. However, since the flying height c differs between the inner and outer circumferences of the magnetic disk 3 as described above, there is a certain limit in increasing the recording density. Therefore, in order to make the magnetic head 1 float above the magnetic disk 3 in a constant manner, for example, as shown in FIG. 11 which is an AA cross-sectional view of the magnetic head of FIG. By providing the groove 5 having the step h, the flying height c of the inner and outer circumferences of the magnetic disk 3 is increased.
Has been taken to keep it constant.

[0003]

The processing accuracy of the step h of the groove 5 in FIG. 11 is extremely high unless the floating surface 2 is set to about ± 0.2 μm with respect to the reference surface 2 as a standard because the floating characteristic is deteriorated. Must be machined with precision. Regarding this step processing, when grinding or lapping is performed with the bottom surface 6 of the magnetic head 1 as a reference, there are variations in the height H of the magnetic head 1, an error in the inclination of the air bearing surface 2 with respect to the bottom surface 6 of the magnetic head 1, and a processing jig. It is very difficult to adjust the processing accuracy of the step h to ± 0.2 μm due to an error in the mounting accuracy of the above. Therefore, processing is generally performed by ion milling etc., but an expensive machine is required,
Further, it takes 30 minutes to 1 hour to process a depth of 1 μm, which is a very long processing time, resulting in poor productivity. The object of the present invention is to solve these problems.

[0004]

According to the present invention, a processing jig and a plurality of magnetic head air bearing surfaces are placed side by side so as to face a flat plate so that the magnetic heads are machined in the same direction. And the side surface of the magnetic head are adhered and fixed, and the processing jig to which the magnetic head is adhered is fixed with the air bearing surface of the magnetic head facing upward, so that the height of the processed surface of the magnetic head becomes constant with respect to the processing direction. Using a tilt adjusting jig that can adjust tilts in two directions, parallel and at right angles, align the air bearing surface of the magnetic head to a uniform plane, and use the tilt adjusting jig to move the magnetic head to the lateral and back-and-forth motions of the machine table. The height of the air bearing is adjusted while being measured, and a predetermined step on the air bearing surface is ground to form a minute step. Also, after attaching the magnetic head to the processing jig, apply a metal plate from the bottom side of the magnetic head attached to the processing jig to attach and fix the magnetic head and the processing jig, and then attach the magnetic head to the processing jig. Strengthen.

[0005]

In the present invention, since the heights of the air bearing surfaces of a large number of magnetic heads can be made uniform by the above means, the processing jig and the table on which the magnetic heads are mounted are moved in the processing direction (for example, the left-right direction) and the grooves are moved. Even when machining, even when machining in the direction perpendicular to the machining direction (for example, front-back direction) and positioning at the next groove position and machining, it is necessary to adjust the grindstone height only once A large number of heads can be processed simultaneously with high precision. Also, by attaching the backing plate to the magnetic head and the processing jig, the fixing strength between the processing jig and the magnetic head is increased,
It can be made to withstand the processing force during processing.

[0006]

EXAMPLES Examples will be described with reference to the drawings. First, as shown in FIG. 3, a processing jig 7 (a jig in which squareness and flatness are processed in advance with high accuracy) and air bearing surfaces 2 of a plurality of magnetic heads 1 have extremely high flatness such as optical flat. The side faces 9 of the processing jig 7 and the side faces 42 of the magnetic head 1 are closely attached and fixed by the adhesive 10 so as to face the flat plate 8 so that the processing directions of the magnetic heads are the same. As a result, the plurality of magnetic head air bearing surfaces 2 and the flat plate facing surface 14 of the processing jig 7 can be aligned on the same plane. At this time, the flat plate 8 is slightly coated with silicon oil or the like so that the bottom surface 6 of the magnetic head 1 is
The adhesive 10 that drips from the like can prevent the magnetic head 1 and the flat plate 8 from sticking to each other. Next, as shown in FIG. 4, a pad 12 is placed on the bottom surface 6 of the magnetic head, and the side surface 9 of the processing jig and the bottom surface 6 of the magnetic head are bonded with an adhesive 13. As a result, the magnetic head 1 is firmly fixed to the processing jig 7 so as to withstand the resistance during processing. If the adhesive hardens, the magnetic head 1 and the pad 12
The processing jig 7 to which is adhered is separated from the flat plate 8.

Next, the tilt adjustment of the magnetic head will be described with reference to FIGS. 5, 6 and 7. FIG. 5 shows an example of a mechanism for adjusting the inclination of the air bearing surface of the magnetic head with respect to the table motion of the processing machine. 6 is a cross-sectional view taken along the line AA in FIG. 5, and a screw 24 is provided near the end face 23 of the lever 21 shown in FIG. 6 and fixed to the bottom plate 20, and a tilt adjusting screw 26 is provided near the facing end face 25 of 23. Install. Depending on the rigidity of the jig, it is possible to make a cut 31 in the lever 21 to reduce the rotational torque of the tilt adjusting screw 26 and facilitate tilt adjustment. When the tilt adjusting screw 26 is rotated, the lever 21 swings up and down around the notch 31. A lever 28 is fixed with a screw 29 near the end face 27 of the lever 21 shown in the cross section BB of FIG. 5, and an adjusting screw 30 is attached near the other end face of the lever 28. Similar to the lever 21, depending on the rigidity of the jig, a cut 32 may be made in the lever 28 to reduce the rotational torque of the tilt adjusting screw 30 and facilitate tilt adjustment. When the tilt adjusting screw 30 is rotated,
The lever 28 swings up and down around the notch 32.

Next, as shown in FIG.
High-accuracy measuring means 4 such as an electric micro having these jigs fixed thereon and attached to a processing machine fixing portion 41 such as a processing machine column.
At 2, the measurement value change of the upper surface 14 (the flat plate facing surface 14 in FIG. 3) of the processing jig 7 when the processing machine table 40 is moved in the processing direction 22 is read. The tilt adjusting screw 30 of the lever 28 is adjusted so that the measured value becomes constant, and the tilt is adjusted so that the same plane is obtained. By the same operation, the processing machine table 40 is moved in the front-back movement table shown in the drawing in the direction 45 perpendicular to the processing direction 22, and the tilt adjusting screw 26 is adjusted. As described above with reference to FIG. 3, since the upper surface 14 of the processing jig 7 and the air bearing surface 2 of the magnetic head are flush with each other, the processing machine table movements 22, 4 are performed.
5, the magnetic head air bearing surface 2 is not inclined, and the machine table movements 22 and 45 are parallel to the magnetic head air bearing surface 2. As another example, as a method of adjusting the inclination of the magnetic head 1, a piezo element may be used and the height of 14 may be measured and automatically corrected.

Next, the vertical position and the front-back position of the grinder of the processing machine are adjusted, the air bearing surface of the magnetic head 1 is machined to a set dimension by the grindstone 50 of FIG. 1, and the air bearing surface 2 is used as a reference as shown in FIG. The groove 5 can be machined to the depth h with high precision for a plurality of magnetic heads. Even if the groove 5 cannot be machined to a predetermined size, the groove 5 is formed with the air bearing surface 2 as a reference.
By measuring the depth of and the position of the grindstone 50 is adjusted again and processed, the set dimension of the depth h can be processed.

As described above, according to the present invention, since the air bearing surfaces of a large number of magnetic heads are aligned on a uniform plane and the table motion of the processing machine and the parallelism of the processed surface of the magnetic head can be easily adjusted, Even if there is a height variation of the head or a parallel error of the air bearing surface with respect to the bottom surface of the magnetic head, the predetermined groove step can be processed with high accuracy. In addition, the machining time is greatly reduced and the productivity is good as compared with machining by ion milling or the like.

[Brief description of drawings]

FIG. 1 is an explanatory view of a grinding process according to the present invention.

FIG. 2 is a sectional view of a magnetic head after processing according to the present invention.

FIG. 3 is an explanatory view showing attachment of a processing jig and a magnetic head according to the present invention.

FIG. 4 is an explanatory view showing the attachment of the stopper according to the present invention.

FIG. 5 is a perspective view showing a jig according to the present invention.

FIG. 6 is a sectional view of a jig according to the present invention.

FIG. 7 is a sectional view of a jig according to the present invention.

FIG. 8 is a perspective view showing a jig adjusting procedure according to the present invention.

FIG. 9 is an explanatory diagram showing a flying state of a magnetic head.

FIG. 10 is a perspective view of a magnetic head applicable to the present invention.

FIG. 11 is a sectional view of a magnetic head applicable to the present invention.

[Explanation of symbols]

 1 magnetic head 2 air bearing surface 7 processing jig 12 backing plate 21 cross-shaped lever 28 lever h groove depth

Claims (2)

[Claims] 1. When processing a minute step on the air bearing surface of a magnetic head, a processing jig and a plurality of air bearing surfaces of the magnetic head are opposed to a flat plate, and the magnetic heads are placed side by side in the same direction, The side surface of the processing jig and the side surface of the magnetic head are adhered and fixed, and the processing jig to which the magnetic head is adhered is fixed with the air bearing surface of the magnetic head facing upward so that the height of the processed surface of the magnetic head becomes constant. Using a tilt adjusting jig capable of adjusting tilts in two directions parallel and at right angles to the working direction, the magnetic head air bearing surface is aligned to a uniform plane, and the tilt adjusting jig is used for lateral and longitudinal movements of the processing machine table. A method of manufacturing a magnetic head, characterized in that a fine step is formed by grinding a predetermined portion of an air bearing surface by adjusting a height of a magnetic head processed surface while measuring the height. 2. A magnetic head that adheres to the magnetic head according to claim 1 and is bonded and fixed to the magnetic head and the processing jig by pressing a metal plate from the bottom side of the magnetic head bonded to the processing jig. The method of manufacturing a magnetic head according to claim 1, wherein the attachment of a processing jig for the head is strengthened.