JPH09323236A - Feeder - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the unintended behavioral factor of a movable carriage. SOLUTION: In a fixed pedestal 10, a v-groove guide 11 whose sectional form vertical to an X direction or traveling direction of a movable carriage 20 is made up into a V-shaped form and extending in the X direction, and a flat guide 12 whose sectional form vertical to the X direction flat and extending in the X direction are formed there. In addition, two V-groove side guided spheres 21 and 22 having a spherical surface and a part of this surface comes into contact with two surfaces forming the V type of the V-groove guide, and one flat side guided sphere 23 having a spherical surface and a part this surface comes into contact with a flat surface of the flat guide 12 both are locked to the movable carriage 20.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a feeding device provided with a fixed pedestal and a movable base, and for feeding an object placed on the movable base in a fixed direction.

[0002]

2. Description of the Related Art As a conventional feeding device, for example, FIG.
There is something like that shown in This feeder has a fixed base 1
And a movable table 5 that moves in a fixed direction with respect to the fixed base 1.
And a drive mechanism 7 for moving the movable table 5 in a fixed direction with respect to the fixed base 1.

A V-groove guide 2 and a flat guide 3 extending in a fixed direction are formed on the upper surface of the fixed base 1.
In addition, the fixed base 1 extends on a lower surface of the movable table 5 in a certain direction.
The convex guided guide 6 that enters the V groove guide 2 is formed. For the V groove guide 2 and the flat guide 3 of the fixed base 1,
A large number of rollers 4, 4, ... Are arranged respectively. The drive mechanism 7 includes a bolt member 8a extending in a certain direction,
It has a nut member 8b screwed to the bolt member 8a and fixed to the moving table 5, and a motor 9 for rotating the bolt member 8a. This feeding device rotates the bolt member 8a of the drive mechanism 7 to move the nut member 8b in a fixed direction, so that the moving table 5 to which the nut member 8b is fixed is moved along the guides 2 and 3 to a fixed position. It moves in the direction.

The above feeding device is used, for example, when the shape of the object 51 to be measured is measured as shown in FIG. In this case, the object to be measured 51 is placed on the moving table 5,
The measurement probe 52, which does not move relative to the fixed base 1 in the X direction, is arranged so as to come into contact with the object to be measured 51.
At the same time, the measured object 51 is moved in the X direction, and the shape of the measured object 51 is measured from the displacement of the measuring probe in the Z direction at this time.

[0005]

However, in such a conventional technique, since a large number of rollers 4, 4, ..., In many cases, dozens or more rollers are provided, each roller 4, 4 ,. Variation in diameter and rolling variation,
The movable table 5 is moved to the movable table 5 due to looseness of the female screw of the nut member 8b with respect to the male screw of the bolt member 8a of the drive mechanism 7 or change in the meshing relationship between the rotating male screw of the bolt member 8a and the female screw of the nut member 8b. There is a problem that unintended delicate behavior occurs. Such an unintended behavior of the movable table 5 causes a problem in the feeding accuracy when the object to be conveyed is precisely fed by the feeding device, and is a serious problem particularly when the feeding device is used for the shape measurement described above. Becomes

Therefore, the present invention pays attention to such a conventional problem, reduces the factors of the unintended behavior of the mobile platform as much as possible, and the behavior reproducibility even when a subtle behavior occurs in the mobile platform. It is an object of the present invention to provide a feeder having

[0007]

In a feeder for achieving the above object, a fixed pedestal has a V-shaped cross section perpendicular to a fixed direction which is a moving direction of a movable table. A V-groove guide extending in a predetermined direction and a flat guide having a flat cross-sectional shape perpendicular to the constant direction and extending in the constant direction are formed, and the movable table has a spherical surface. Two V-groove-side guided spheres, a part of which comes into contact with the two surfaces forming the V-shape of the V-groove guide, and one of which has a spherical surface and a part of the spherical surface comes into contact with the flat surface of the flat guide. The flat-side guided sphere is fixed.

Here, the V-groove-side guided sphere and the flat guided sphere do not have to be perfect spheres whose entire outer circumferences are spherical, and at least only the portion facing each guide is spherical. It also includes.

In the feeding device, each of the contact points at which the two V-groove-side guided spheres and the two surfaces forming the V-shape of the V-groove guide contact each other, and one flat-side guided sphere. It is preferable that a contact point at which the flat surface of the flat guide comes in contact with a flat surface is parallel to the predetermined direction.

Further, the spherical surfaces of the V-groove side guided sphere and the flat side guided sphere may be formed of a resin having a small friction coefficient with respect to each guide.

Further, in the above-mentioned feeding device, the drive mechanism extends in the constant direction by a distance equal to or more than the moving distance of the movable base, and both ends thereof are attached to the movable base, and with respect to the constant direction. A thin plate material having elasticity in a vertical direction, a pair of rollers for sandwiching the thin plate material, and a pair of the rollers sandwiching the thin plate material, the pair of rollers are each rotatable. It is preferable to have a roller support means that supports the fixed pedestal so that it cannot move relative to the fixed pedestal, and a roller rotation mechanism that rotates one of the pair of rollers.

It is desirable that this drive mechanism has a holding force adjusting means for adjusting the force for holding the thin plate member by the pair of rollers.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION A feeding device as an embodiment according to the present invention will be described below with reference to the drawings.

As shown in FIG. 4, the feeding device in this embodiment is mounted on a fixed base 10 and on the fixed base 10 so as to be movable in a fixed direction (hereinafter referred to as the X direction). The movable table 20, a drive mechanism 30 for moving the movable table 20 in the X direction, and a linear encoder 40 for detecting the relative movement amount of the movable table 20 in the X direction with respect to the fixed base 10.
And a controller 45 for controlling the drive amount of the drive mechanism 30 according to the signal from the linear encoder 40.

As shown in FIGS. 1 to 3, the fixed pedestal 10 has a V-shaped cross section perpendicular to the X direction and has an X shape.
Drive in which a V-shaped groove guide 11 extending in the X direction, a flat guide 12 having a flat cross section perpendicular to the X direction and extending in the X direction, and extending in the X direction and part of a drive mechanism 30 are housed. A mechanism housing recess 13 is formed.

As shown in FIGS. 1 to 3, the movable table 20 has two V-groove-side guided guides each having a spherical surface and a part of the spherical surface is in contact with two surfaces forming the V-shape of the V-groove guide 11. Sphere 21,
22 and one flat-side guided spherical body 23 having a spherical surface and a part of the spherical surface contacting the flat surface of the flat guide 12 are fixed. The surface of each of the guided spheres 21, 22, 23 is formed of tetrafluoroethylene resin (trade name: Teflon) in order to reduce frictional resistance with each of the guides 11, 12. As shown in FIG. 3, the V-groove side guided sphere 22 contacts the V-groove guide 11 at two points 22a and 22b, and the flat side guided sphere 23 and the flat guide 12 and one point 23a.
Touch with. Therefore, the three guided spheres 21, 22, 22
There are a total of five contact points between the guide 23 and each of the guides 11 and 12. As shown in FIG. 3, the angle of V of the V-groove guide 11, the level of the flat surface of the flat guide 12, and the diameters of the guided spheres 21, 22, and 23 are three guided spheres 21 and 21, respectively.
Contact points between the guides 2 and 23 and the guides 11 and 12 are formed so as to be within a plane A perpendicular to the z direction.

As shown in FIG. 5, the drive mechanism 30 includes a thin plate member 31 extending in the X direction and having an elastic force in the Z direction, a pair of rollers 32, 33 for holding the thin plate member 31, and a pair of rollers 32, 32. It includes a roller support base 34 that rotatably supports 33, and a roller rotation mechanism 39 that rotates one of the pair of rollers 32 and 33.

As shown in FIG. 2, the length of the thin plate member 31 in the X direction is longer than the moving distance of the moving table 20 in the X direction. Both ends of the thin plate member 31 in the X direction are fixed to the thin plate member support brackets 25, 25 provided on the lower surface of the moving table 20. In this embodiment, the thin plate member 31 is formed of a spring member having a thickness of 0.1 to 1.0 mm.

As shown in FIG. 5, the two rollers 32 and 33 (hereinafter, one is referred to as the driving roller 32 and the other is referred to as the driven roller 33) are arranged in the z direction, and their respective rotation axes are y.
In the state of being extended in the direction, the roller support 34 is rotatably supported about each rotation axis. Roller support 34
Is a drive roller support arm 35 that supports the rotation shaft of the drive roller 32, a driven roller support arm 36 that supports the rotation shaft of the driven roller 33, and each roller support arm 35, 3.
It has a support base body 37 for supporting 6, and a holding force adjusting screw 38 for adjusting the holding force for holding the thin plate material 31 by the driving roller 32 and the driven roller 33. The driven roller support arm 36 is swingably provided with respect to the support base body 37. The drive roller support arm 35 is fixed to the support base body 37. Each support arm 35, 36
As shown in FIG. 3, the contact point 31 a between the thin plate member 31 and each roller 32, 33 supported by each support arm 35, 36.
However, the three guided spheres 21 and 22 and the guides 11 and 1
It is provided on the support base body 37 at a position within a plane A including each contact point with 2. The contact point between the driving roller 32 and the thin plate member 31 and the contact point between the driven roller 33 and the thin plate member 31 are different in the Z direction, but since the thin plate member 31 is thin, as a practical problem, Both contact points can be considered to exist at the same position. That is, the contact point between the drive roller 32 and the thin plate member 31 and the contact point between the driven roller 33 and the thin plate member 31 are substantially within the plane A. As shown in FIG. 5, a screw hole is formed at the tip of the driven roller support arm 36 and the tip of the drive roller support arm 35, and the holding force adjusting screw 38 is screwed into the screw hole. This holding power adjustment screw 3
By the screwing operation of 8, the driven roller 33 and the driving roller 32
The interval between and changes, and the holding force by the two rollers 32 and 33 is adjusted. The support base body 37 is fixed to the bottom of the drive mechanism housing recess 13 of the fixed base 10.

The roller rotation mechanism 39 includes a motor 39a,
It has a rotational driving force transmission member 39b for transmitting the rotational force of the motor 39a to the rotary shaft of the drive roller 32. The motor 39a is fixed to the side surface of the fixed base 10.

The linear encoder 40 extends in the X direction,
Linear scale 4 fixed to the side surface of fixed pedestal 10
1 and a sensor 42 fixed on the side surface of the movable table 20 and at a position facing the linear scale 41. The sensor and the controller 45 are connected by a position signal line so that the signal from the sensor 42 is sent to the controller 45. Further, the motor 39a of the drive mechanism 30 and the controller 45
And are connected by a drive signal line.

In this embodiment, the guides 11 and 12 that are in sliding contact with the guided spheres 21, 22, and 23 are
In order to suppress the deformation due to the temperature change due to friction or the like as much as possible, it is formed of a casting having a small coefficient of thermal expansion. Further, depending on the required accuracy, both the two surfaces of the V-groove guide 11 forming the V-groove and the flat surface of the flat guide 12 have a flatness of 1 μm.
m, surface roughness 1 nm or less.

Next, the operation of the feeding device described above will be described. From the controller 45 to the motor 3 of the drive mechanism 30
The drive signal is output to 9a, the motor 39a is driven,
When the drive roller 32 of the drive mechanism 30 rotates, the thin plate member 31 held between the drive roller 32 and the driven roller 33 moves in the X direction with respect to the fixed base 10 as shown in FIGS. 6 and 7. To do. This thin plate material 31 is used for the moving table 20.
Since the movable table 20 is fixed to the thin plate material 31
The moving table 20 also moves with the movement. At this time, the guided spheres 21, 22, 22 formed on the movable table 20.
23 is each guide 11 formed on the fixed pedestal 10,
Since the movement direction is restricted to the X direction by 12,
The movable table 20 moves straight in the X direction without tilting. The moving amount of the moving table 20 is determined by the linear encoder 40.
The controller 45 controls the drive amount of the motor 39a based on the detection result.

Here, each guided sphere 21, 22, 23
The contact relationship between the guides 11 and 12 will be described.
As described above, in this embodiment, the total number of contact points between the three guided spheres 21, 22, 23 and the guides 11, 12 is five. By the way, when a certain plate material is made to stand still in space, it is necessary to support this plate material at three points. Therefore, in this embodiment, it is assumed that the moving table 20
The fixed pedestal 10 and the fixed pedestal 10 are flat guides 1 as shown in FIG.
2 and the flat side guided sphere 23 at the contact 23a, the V groove guide 11 and the first V groove side guided sphere 21 at the (+) Y side contact 21a, the V groove guide 11 and the second V groove side It is assumed that the contact point 22a on the (+) Y side with the guided sphere 22 is in contact only at a total of three points.

However, when a force in the (-) Y direction is applied to the movable table 20 in this state, the movable table 20 is moved to the (-) Y direction.
It will move in the direction. Therefore, (-) Y of the movable table 20
In order to regulate the movement in the direction, the (−) Y-side contact 21b between the V-groove guide 11 and the first V-groove-side guided spherical body 21,
Alternatively, the V groove guide 11 and the second V groove side guided spherical body 22
The movable base 20 needs to contact the fixed pedestal 10 at the (−) Y side contact point 22b. Therefore, the movable table 20 and the fixed pedestal 10 have the three points 21a, 22a and 23a described above.
Besides, the V groove guide 11 and the first V groove side guided spherical body 21
It is assumed that the contact point 21b on the (−) Y side of and is also in contact.

However, even in this state, for example, when a force in the (-) Y direction acts on the moving table 20 at a point deviated from the center of the first V-groove side guided spherical body 21, the moving table 20 is moved. Is the first V-groove-side guided spherical body 21 in the XY plane.
Will rotate around. Therefore, in order to restrict the rotation of the moving table 20 about the first V-groove side guided sphere 21, the (-) Y side of the V-groove guide 11 and the second V-groove side guided sphere 22 is regulated. Also at the contact 22b, the moving table 2
0 and the fixed pedestal 10 must be in contact with each other.

As described above, in order for the movable table 20 to move straight in the X direction without tilting or rotating, it is necessary to contact the fixed base 10 at a minimum of five points. Here, in this embodiment, the movable table 20 and the fixed pedestal 10 have a minimum number of 5 required to move the movable table 20 straight in the X direction without tilting or rotating.
The points 21a, 22a, 22b, 23a and 23b are in contact with each other. Therefore, in this embodiment, since the movable table 20 and the fixed pedestal 10 are not in contact with each other at an unnecessary point, the movable table 20 has a large number of rollers 4, 4, unlike the prior art shown in FIG.
It can be said that there are less factors of unintended behavior than those that make line contact with.

Further, the flat-side guided spherical body 23 comes into contact with the flat guide 12, and the two V-groove-side guided spherical bodies 21 and 22.
If both fit within the V groove of the V groove guide 11,
For example, of the two V-groove side guided spheres 21 and 22,
The second V-groove-side guided sphere 22 is extremely small, and the lower surface of the movable table 20 contacts the upper surface of the fixed pedestal 10, so that the second
Except for the case where the V-groove-side guided spherical body 22 of FIG.
Even if there is some variation in the diameter of 23, the movable table 20 and the fixed pedestal 10 have the five contact points 21 described above.
a, 22a, 22b, 23a, 23b make sure contact. That is, in this embodiment, the movable base 20 and the fixed base 10 are surely brought into contact with each other at a planned point even if there are some variations in the diameters and sphericities of the guided spheres 21, 22, 23. If the V-groove guide 11 is accurately formed, the movable table 20 moves in the X direction without any behavior. On the other hand, in the prior art shown in FIG. 8, if there are slight variations in the diameters and shapes of the rollers 4, 4, ...
However, even if it is formed accurately, there is a possibility that the roller 4 that does not contact the moving table 20 will be present and that the moving table 20 will behave unintentionally. Therefore, in this embodiment, the movable table 20 is always in contact with the movable table 20 at a predetermined point.
It can be said that there are few factors of unintended behavior as compared with the conventional technique in which there is a roller 4 that sometimes contacts with each other and sometimes does not contact each other.

Further, in this embodiment, the thin plate member 31 having elasticity in the direction perpendicular to the X direction which is the moving direction.
Since the moving table 20 is moved in the X direction by moving the rollers 32 and 33, there is a diameter error in the rollers 32 and 33 and a relative position error between the rollers 32 and 33 with respect to the thin plate material 31. Further, even if the vibration of the motor 39a is transmitted to the drive roller 32 and the drive roller 32 vibrates, all of these are absorbed by the thin plate material 31, so that the behavior caused by the drive mechanism 30 does not occur. . On the other hand, in the conventional technique shown in FIG. 8, the nut member 8b for the male screw of the bolt member 8a of the drive mechanism 7 is provided.
Of the female screw of the bolt member 8a, the change of the meshing relationship between the male screw of the bolt member 8a and the female screw of the nut member 8b, and the directivity of the nut member 8b with respect to the moving direction. The behavior that does not occur will occur.

Further, in the prior art shown in FIG. 8, although the screw is not loose, the screw does not move smoothly due to the crease between the teeth caused by the manufacturing error of the teeth and the deformation of the teeth due to the movement. In order to prevent this, a gap, that is, backlash is always provided between the teeth. Therefore, a movement error in the X direction occurs when the movement of the moving table 5 is started. On the other hand, in this embodiment, the gripping force adjusting screw 38 is turned so that the driving roller 32 and the driven roller 33 cause the thin plate member 31 to move.
The gripping force for gripping is adjusted so that the rollers 32 and 33 move against the thin plate member 31 even when the moving table 20 starts moving.
Each roller 32,3 should be in rolling contact without slipping
If a frictional force between the thin plate member 3 and the thin plate member 31 is secured, a movement error in the X direction at the time of starting the movement of the moving table 20 can be avoided.

As described above, it can be said that this embodiment has very few behavior factors of the movable table 20 in both the guide type and the drive type. However, also in this embodiment, if each surface forming the V groove of the V groove guide 11 and the flat surface of the flat guide 12 are not flat with high precision and parallel to the X direction, the movable table is not provided. 20
Will behave. In this embodiment, even if there are some variations in the diameters and sphericities of the guided spheres 21, 22, 23, or even if the guides 11, 12 are not accurately formed, as described above, Mobile stand 2
0 and the fixed pedestal 10 surely contact at a predetermined point. Therefore, after moving the moving table 20 once in the X direction,
When the movable table 20 is returned to the original position and moved again in the X direction, the same behavior is exhibited during the initial movement and the subsequent movement, that is, there is behavior reproducibility. On the other hand, in the prior art shown in FIG. 8, if there are slight variations in the diameters and shapes of the rollers 4, 4, ... Even if the guides 2, 3 are accurately formed, 4, 4,
There is no reproducibility of behavior because of the difference in the rolling direction of.
If the behavior is reproducible as in this embodiment, as described in “Prior Art”, when performing the shape measurement using the feeding device, if the behavior of the movable table 20 is grasped in advance, the shape measurement value An accurate shape can be obtained by subtracting the behavior amount from the.

If the position of the flat guide 12 is displaced to the (+) Z side in the Z direction from the position of the V groove guide 11 by a large amount, the contact between the rollers 32 and 33 and the thin plate member 31 is assumed. A moment about the point 31a acts on the movable table 20. However, in this embodiment, the contact points 21a, 21b, 22a, 22 between the three guided spheres 21, 22, 23 and the guides 11, 12 respectively.
b, 23a, and the contact point 31a between the rollers 32, 33 and the thin plate member 31 are located within the one plane A, the above moment does not act on the moving table 20,
The movable table 20 can be stably run.

Since the behavior factor can be reduced in both the guide format and the drive format in this embodiment, even if only one of the guide format and the drive format in this embodiment is adopted, the behavior is reduced. Factors can be reduced. That is, in this embodiment, the behavior factor can be reduced even if the conventional drive type is used only for the drive type or the conventional guide type is used only for the guide type.

[0034]

According to the present invention, the movable base and the fixed base are brought into contact with each other at the minimum number of contact points which can regulate the movement of the movable base in a direction other than the intended movement direction, and each planned contact is made. Since the points always make sure contact, the behavior factors of the moving table can be reduced. In addition, as described above, the movable base and the fixed base reliably contact each other at predetermined contact points, so that reproducibility of the behavior can be ensured.

Further, even if a drive mechanism having a thin plate material is provided, vibration and the like from the drive source of the drive mechanism can be absorbed by the thin plate material, so that the movement factor of the moving table can be reduced. You can

[Brief description of drawings]

FIG. 1 is a plan view of a feeding device as an embodiment according to the present invention.

FIG. 2 is a sectional view taken along line II-II in FIG.

3 is a sectional view taken along line III-III in FIG.

FIG. 4 is an overall perspective view of a feeding device as an embodiment according to the present invention.

FIG. 5 is a perspective view of a drive mechanism as one embodiment according to the present invention.

FIG. 6 is a plan view of a feeding device (after movement) according to an embodiment of the present invention.

7 is a sectional view taken along line VII-VII in FIG.

FIG. 8 is a perspective view of a conventional feeding device.

FIG. 9 is an explanatory diagram showing a shape measuring method using a conventional feeding device.

[Explanation of symbols]

10 ... Fixed base, 11 ... V groove guide, 12 ... Flat guide, 20 ... Moving base 21, 22 ... V groove side guided sphere,
23 ... Flat side guide sphere, 30 ... Driving mechanism, 31 ... Thin plate material, 32 ... Driving roller, 33 ... Followed roller, 34 ... Roller support base, 38 ... Holding force adjusting screw, 39 ... Roller rotating mechanism, 39a ... Motor, 40 ... Linear encoder, 45 ...
Controller.

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Keiji Inada 3 2-3 Marunouchi, Chiyoda-ku, Tokyo Inside Nikon

Claims (7)

[Claims] 1. A fixed base, a movable base that moves in a fixed direction with respect to the fixed base, and a drive mechanism that moves the movable base in the fixed direction with respect to the fixed base. In the feeding device that feeds the object placed on the fixed direction, the fixed base has a V-shaped groove guide having a V-shaped cross section perpendicular to the fixed direction and extending in the fixed direction. And a flat guide having a flat cross-sectional shape perpendicular to the constant direction and extending in the constant direction, the moving base has a spherical surface, and a part of the spherical surface is the V groove guide. Two V-groove-side guided spheres that contact the two surfaces forming the V-shape, and one flat-side guided sphere that has a spherical surface and a part of the spherical surface contacts the flat surface of the flat guide, A feeder characterized by being fixed. 2. The feeding device according to claim 1, wherein each of said two V-groove-side guided spheres and each of the two surfaces forming said V-shape of said V-groove guide are in contact with each other, and said one flat surface. The feeding device, wherein a contact point at which the side guided spherical body and the flat surface of the flat guide come into contact is in one plane parallel to the certain direction. 3. The feeding device according to claim 1, wherein the spherical surfaces of the V-groove side guided sphere and the flat side guided sphere are formed of a resin having a small friction coefficient with respect to each guide. And the feeder. 4. The feeding device according to claim 1, 2 or 3, wherein the drive mechanism is longer than a moving distance of the movable table in the constant direction and extends in the constant direction, and both ends of the drive mechanism are in the movable table. A thin plate member that is attached and has elasticity in a direction perpendicular to the certain direction, a pair of rollers that holds the thin plate member, and a pair of rollers that sandwich the thin plate member, and a pair of rollers. Roller supporting means for supporting each of the rollers so as to be rotatable and immovable relative to the fixed base; and a roller rotating mechanism for rotating one of the pair of rollers. Feeding device. 5. The feeding device according to claim 4, wherein a contact point at which the pair of rollers and the thin plate member contact each other,
Each of the contact points at which the two V-groove-side guided spheres and the two surfaces forming the V-shape of the V-groove guide contact each other, and one flat-side guided sphere and the flat surface of the flat guide contact each other. The contact point is substantially in a plane parallel to the fixed direction. 6. A fixed base, a movable base that moves in a fixed direction with respect to the fixed base, and a drive mechanism that moves the movable base in the fixed direction with respect to the fixed base. In the feeding device that feeds the object placed on the fixed direction, in one of the fixed base and the movable base, a guide extending in the fixed direction is formed, and the fixed base and On the other side of the movable table, a guided member that moves relative to the one side along the guide formed on the one side and makes the relative movement direction of the other side to the constant direction is attached. The drive mechanism is not less than a moving distance of the movable table in the constant direction and extends in the constant direction, and both ends thereof are attached to the movable table to provide elasticity in a direction perpendicular to the constant direction. Holding the thin plate material and holding the thin plate material A pair of rollers, and a pair of rollers that support the pair of rollers such that the pair of rollers are rotatable and cannot move relative to the fixed pedestal, with the thin plate material sandwiched between the pair of rollers. A roller rotating mechanism that rotates one of the rollers. 7. The feeding device according to claim 4, 5 or 6, wherein the drive mechanism has a holding force adjusting means for adjusting a force for holding the thin plate member by a pair of the rollers. And the feeder.