JPH09310896A - Fan filter unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make uniform the distribution of wind velocity from a filter outlet surface and suppress the generation of noise. SOLUTION: A fan filter unit comprises a filter 7 for purifying air, a chamber 1 for supplying air to the filter 7, a blower fan 2, a motor 3 for driving the fan 2 and a casing 4 having a two-way outlet port for air blowing which are provided in the chamber 1, a shield plate 5 having an opening part in a part in the vicinity of a center in the downstream side of the casing 4 and a diffusion plate 6 made of a punching metal material in the downstream side of the opening part of the shield plate 5. Thus, the generation of noise can be suppressed and the distribution of the velocity of wind supplied from the filter is made uniform.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fan filter unit used in a clean room requiring a clean space such as a semiconductor factory or a food factory.

[0002]

2. Description of the Related Art In recent years, a fan filter unit of this kind has been required to have a uniform wind velocity distribution on a filter blowing surface and to suppress noise generated thereby.

Conventionally, a fan filter unit of this type generally has a structure as shown in FIG. Hereinafter, the configuration will be described with reference to FIG.

In the conventional fan filter unit, a fan 102 for feeding air into the chamber 101, a motor 103, a casing 104 for covering the fan 102 and the motor 103 are arranged, and a fan 105 for cleaning the air is formed. There is.

The air sent from the fan 102 and the motor 103 passed through the filter 105 and was blown out as clean air.

[0006]

In such a conventional fan filter unit, the air blown from the fan diffuses non-uniformly with respect to the filter, and the difference between the high speed part and the low speed part of the air blown from the filter is large. There was a problem that it became large and the wind speed distribution varied.

Further, there is a problem in that the noise generated by the fan filter unit is large because there is no means for blocking and absorbing the noise generated by the fan.

As a countermeasure for these problems, Japanese Patent Laid-Open No. 6-159 has been proposed.
There was a proposal by Japanese Patent No. 752, but it was not necessarily advantageous in terms of cost, such as that a sound deadening material was spread all over the inside of the chamber.

The present invention is to solve the above problems, and by providing a shielding plate having an opening and a perforated metal diffusion plate, it is possible to make the distribution of the wind speed blown out from the filter uniform, and A first object of the present invention is to provide a fan filter unit that also suppresses the propagation of noise generated from a motor.

A second object is to further suppress the propagation of generated noise with a relatively simple structure for attaching a sound deadening material, in which a porous sound deadening material is arranged on the shielding plate.

A third object is to have a reinforcing means having a length substantially equal to one side of the top surface of the chamber and having a substantially U-shaped cross section so that a person can ride on it and maintenance work can be performed easily. It is in.

A fourth object is to smoothly and easily carry-in and install in a clean room by using a reinforcing means having a hole at an end and provided with a handle.

[0013]

In order to achieve the above object, a fan filter unit of the present invention has a filter for cleaning air, a chamber adjacent to the filter for supplying air, and a top surface of the chamber. A suction fan is provided in the chamber, a fan for blowing air, a motor for driving the fan, a casing having a two-way outlet for blowing air, and an opening near the center on the downstream side of the casing. And a diffusion plate made of punching metal material on the downstream side of the opening of the shielding plate.

According to the present invention, since the shield plate for blocking and absorbing the noise generated from the fan motor is arranged, the noise generated from the fan motor can be suppressed, and since the diffusion plate is arranged, the speed of air blown out from the filter can be reduced. It is possible to provide a fan filter unit that can make the distribution uniform.

Another means is to construct the shielding plate with a porous sound deadening material. According to the present invention, it is possible to further suppress the propagation of generated noise with a relatively simple attachment structure of the sound deadening material in which the porous sound deadening material is arranged on the shielding plate.

Further, another means is a construction having a reinforcing means having a length approximately equal to one side of the top surface of the chamber and having a substantially U-shaped cross section.

Further, according to the present invention, by having the reinforcing means having substantially the same length as one side of the top surface of the chamber and having a substantially U-shaped cross section, a person can ride on it and maintenance work can be facilitated. It can be carried out.

The other means has a hole at the end and a reinforcing means provided with a handle.

Further, according to the present invention, by using the reinforcing means having the hole at the end and having the handle, the carrying-in and the construction in the clean room can be carried out smoothly and easily.

[0020]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention comprises a filter for cleaning air, a chamber adjacent to the filter for supplying air, and a suction hole on the top surface of the chamber. Fan, a motor for driving the fan, a casing having a two-way air outlet for blowing air, a shield plate having an opening near the center on the downstream side of the casing, and an opening of the shield plate. It is provided with a diffusion plate of punching metal material on the downstream side, and by providing a shielding plate having an opening and a diffusion plate of punching metal material with holes, the distribution of the wind speed blown out from the filter can be made uniform, The propagation of noise generated from the fan motor can also be suppressed.

Further, since the shielding plate is provided with a porous sound deadening material, and a relatively simple sound deadening material is attached to the shielding plate, the noise can be further propagated. Can be suppressed.

Further, the chamber is provided with a reinforcing means having a substantially U-shaped cross section and having substantially the same length as one side of the top surface of the chamber. It can be used as a scaffold for riding, and maintenance work in a clean room can be performed easily.

Further, the reinforcing means having a hole at the end and having a handle is provided. By using the reinforcing means having a hole at the end and having a handle, carrying in a clean room, Construction can be done smoothly and easily.

Embodiments of the present invention will be described below with reference to the drawings.

[0025]

【Example】

(Embodiment 1) As shown in FIG. 1, in a chamber 1 of a fan filter unit, a fan 2 for blowing air, a motor 3 for driving the fan 2, a casing 4 having a two-way outlet, and a casing 4 Downstream of about 50-100
About 50 to 75 of the horizontal cross-sectional area of the chamber 1 at the position of mm.
%, And a diffusion plate 6 made of a punching metal material is provided at a position approximately 50 to 100 mm downstream of the opening of the shielding plate 5. Further, the filter 7 is installed in the lower part of the chamber 1.

In the above structure, the fan 2 and the motor 3
The noise generated from the casing 4 is shielded by the shield plate 5,
Since the sound is absorbed, the total noise generated can be suppressed.
Further, the air sent from the fan 2 can be uniformly blown into the filter 7 by the shielding plate 5 and the diffusion plate 6, and the wind velocity distribution from the blowing surface of the filter 7 can be made uniform.

(Embodiment 2) As shown in FIG.
A porous sound deadening material 8 is arranged on the upstream surface of the.

In the above structure, the fan 2 and the motor 3
The noise generated from the casing 4 is insulated and absorbed only by disposing the porous sound deadening material 8 on the upstream surface of the shielding plate 5, so that the overall noise generated can be further suppressed.

(Embodiment 3) As shown in FIG. 3, reinforcing means 9 having a length approximately equal to one side of the top surface of the chamber 1 and a substantially U-shaped cross section is arranged.

In the above structure, since a person can ride on the reinforcing means 9, it is possible to easily perform maintenance work when a large number of fan filter units are installed as shown in FIG.

(Embodiment 4) As shown in FIG. 5, holes are made at both ends of the reinforcing means 9A, and the handles 10 are arranged.

In the above structure, since the chamber can be easily lifted and transported, it is possible to smoothly carry in and carry it in a clean room.

[0033]

As is apparent from the above embodiments, according to the present invention, since the shielding plate for cutting off and absorbing the noise generated from the fan motor is arranged, the noise generated from the fan motor can be suppressed, and Since the diffuser plate is arranged, it is possible to provide a fan filter unit capable of making the distribution of the wind velocity blown out from the filter uniform.

Further, according to the present invention, a fan filter unit capable of further suppressing the propagation of generated noise is provided by a relatively simple attachment structure of a sound deadening material in which a porous sound deadening material is arranged on a shielding plate. it can.

Further, according to the present invention, by having the reinforcing means having substantially the same length as one side of the top surface of the chamber and a substantially U-shaped cross section, it is possible for a person to ride on and facilitate maintenance work. A fan filter unit capable of performing can be provided.

Further, since the reinforcing means provided with the handle is arranged, it is possible to provide a fan filter unit which can be easily carried in and installed by a person and can be easily maintained even after installation in a clean room.

[Brief description of drawings]

FIG. 1 is a sectional view showing a configuration of a fan filter unit according to a first embodiment of the present invention.

FIG. 2 is a sectional view showing a configuration of a fan filter unit according to a second embodiment of the present invention.

FIG. 3 is a perspective view showing the outer appearance of a fan filter unit according to a third embodiment of the present invention.

FIG. 4 is a layout diagram showing a construction state of the general fan filter unit.

FIG. 5 is a perspective view showing a configuration of a reinforcing means of a fan filter unit according to a fourth embodiment of the present invention.

FIG. 6 is a cross-sectional view showing the configuration of a conventional fan filter unit.

[Explanation of symbols]

 1 Chamber 2 Fan 3 Motor 4 Casing 5 Shielding Plate 6 Diffuser 7 Filter 8 Silencing Material 9 Reinforcing Means 9A Reinforcing Means 10 Handle

Claims (4)

[Claims] 1. A filter for cleaning air, a chamber adjacent to the filter for supplying air, a fan for blowing air in the chamber, a motor for driving the fan, and a fan for blowing air. A fan filter unit comprising a casing having a direction outlet, a shielding plate having an opening near the center on the downstream side of the casing, and a diffusion plate made of punching metal material on the downstream side of the opening of the shielding plate. 2. The fan filter unit according to claim 1, wherein the shielding plate is provided with a porous sound deadening material. 3. The fan filter unit according to claim 1 or 2, further comprising a reinforcing means having a length substantially equal to one side of a top surface of the chamber and having a substantially U-shaped cross section. 4. The fan filter unit according to claim 3, further comprising a reinforcing means having a hole at an end and a handle.