JPH09304024A - Shape measuring apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an apparatus for accurately and efficiently measuring the shape such as width and thickness of a thin plate-like product. SOLUTION: The shape measuring apparatus 1 comprises a sensor unit 20 mainly having an x-y axis actuator 10, a support rotating mechanism 22 and a pair of laser displacement meters 23, and a work base 30 having a reference surface. The displacement of a z-axis direction is measured by the meter 23 from both the front and rear surfaces of a solid active charcoal electrode plate placed on the reference surface while moving the member 23 along a predetermined route by the actuator 10. Thus, the thickness and warp of the material to be measured are calculated. The edge side of the material is sensed by the abrupt change of the displacement amount, and the length and width are calculated by position information by the actuator 10. The reflected light introducing direction is altered by the mechanism 22 capable of alleviating the influence of the disturbance of the reflected light by the z-axis direction step.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a width of a thin plate product,
The present invention relates to a device for measuring a shape such as a thickness.

[0002]

2. Description of the Related Art When measuring the size of a product such as a thin plate-like product that is thin and has low strength, contact measurement with a caliper or a micrometer causes the product to deform due to contact pressure. It is difficult to measure because it is damaged or destroyed. Therefore, as a non-contact measuring method, a method using a measuring microscope, a magnifying projector, or the like has been performed, but it requires extremely complicated operations such as alignment and reading of a scale, which is low in efficiency.

[0003]

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object thereof is to accurately and efficiently measure the shape such as the width and thickness of a thin plate product. To provide a device.

[0004]

In order to achieve the above object, the shape measuring apparatus of the present invention comprises the following constituent elements (a) (b) (c):
It is characterized by including (d) (e) (f) (g). (a) An xy-axis actuator position-controlled by a position controller is provided. (b) A sensor unit conveyed by the xy axis actuator is provided.

(C) The sensor unit includes a sensor bracket, a supporting and rotating mechanism provided at one end of the sensor bracket, and a pair of laser displacement gauges provided on the sensor bracket. (d) The support rotation mechanism is coupled to the xy axis actuator such that a central axis of a rotation shaft included in the support rotation mechanism and a moving plane of the xy axis actuator are orthogonal to each other. .

(E) The laser displacement gauges are arranged so as to face each other and the irradiation optical axis of the laser displacement gauges and the central axis of the rotation axis of the support rotation mechanism are aligned with each other. There is. (f) A work table having a reference plane parallel to the moving plane of the xy axis actuator is provided in the middle of the pair of laser displacement meters. (g) The work table has a measurement hole penetrating perpendicularly to the reference plane.

[0007]

BEST MODE FOR CARRYING OUT THE INVENTION In the shape measuring apparatus of the present invention,
The xy axis actuator is for bringing the sensor unit to a predetermined position. The movement of the x-y axis actuator is controlled by a position controller. At the time of continuous measurement, the sensor unit can be controlled to move according to a preset route.

The supporting and rotating mechanism of the sensor unit is
The sensor bracket is provided at one end of the sensor bracket, supports the sensor bracket rotatably around the irradiation ray axis of the laser displacement meter, and is connected to the xy axis actuator. The sensor bracket includes a pair of laser displacement meters. The laser displacement meter irradiates a measurement point with a laser beam condensed by a light projecting lens, and captures the laser beam diffused and reflected from the measurement point with an optical position detection element. This is for obtaining the amount of displacement of the measurement point (in the z-axis direction). That is, when the measurement point is moved across the measurement object,
Since the displacement amount in the z-axis direction at the terminal portion of the measurement object changes abruptly, the distance between the both terminals is obtained by obtaining the xy coordinate values of the both terminal portions when the displacement amount exceeds a threshold value set in advance. You can know the distance.

In the above operation, if the reflected light beam is blocked by a step or the like at the terminal portion of the object to be measured, an error may occur in the measurement. At this time, by rotating the sensor bracket by the supporting and rotating mechanism so that the light receiving portion of the laser displacement meter is parallel to the direction of the step, it is possible to reduce the influence of the shield of the reflected light beam due to the step or the like. The shape measuring device of the present invention includes a pair of laser displacement meters facing each other in the thickness direction of the measurement target in order to measure the thickness and warpage of the thin plate that is the measurement target. That is, the first laser displacement meter measures the distance L1 from the predetermined measurement reference plane to the front surface of the measurement object, and the second laser displacement meter measures the distance L1 from the measurement reference surface to the back surface of the measurement object. Measure L2. The thickness at the measurement position can be known by obtaining the difference between L1 and L2. In order to prevent the xy coordinate values of the measurement points from being different depending on the front and back of the measurement object, the pair of laser displacement meters have their irradiation optical axes coincident with each other, and the irradiation optical axes and the xy axis actuator are the same. Are arranged so as to be orthogonal to the moving plane of.

When the measurement target surface is mounted in contact with the measurement reference surface, the warpage can be obtained by measuring the distance between the measurement target surface and the measurement reference surface at a position other than the contact point. When simultaneously measuring the thickness and the warp at many measurement positions, a plurality of pairs of laser displacement gauges may be provided. The work table holds the object to be measured at a predetermined position, and also provides a reference surface for displacement measurement in the z-axis direction. The measurement hole orthogonal to the reference plane and penetrating therethrough is for passing the irradiation light and the reflected light of the laser displacement meter at the time of measurement by the laser displacement meter on the back surface side of the work table.

[0011]

EXAMPLE An example of the shape measuring apparatus of the present invention is shown in FIG.
Shown in The shape measuring apparatus 1 mainly includes an xy axis actuator 10, a sensor unit 20, and a work table 30. Bases 3 and 4 are erected on an upper surface 2 of an optical laboratory table installed horizontally, and an x-axis actuator 11 is provided horizontally on the base 3 by a bracket 5.
A guide module 13 is provided on the base 4 in parallel with the x-axis actuator 11. x-axis actuator 1
1 and the guide module 13, the y-axis actuator 12 is suspended, and one end of the y-axis actuator 12 is connected to the x-axis actuator 11 by a bracket 14. The movement plane of the xy axis actuator 10 is adjusted so as to be parallel to the upper surface 2 of the optical laboratory table.

The x-y axis actuator 10 is controlled and driven by a current sent from a position control device (not shown) through the cables 15 and 16. The sensor unit 20 mainly includes a sensor bracket 21, a support rotation mechanism 22, and a pair of laser displacement meters 23. The sensor bracket 21 is V-shaped, and an upper laser displacement meter 231 and a lower laser displacement meter 232 are provided to face each other in the V-shaped opening.
The xy stage 25 and the z stage 26 are adjusted so that the irradiation optical axes of the upper laser displacement meter 231 and the lower laser displacement meter 232 coincide with each other.

A support pivot mechanism 22 is coupled to the y-axis actuator 12 by a blanket 18. At this time,
The central axis of the rotation shaft 221 included in the support rotation mechanism 22 is x−.
It should be perpendicular to the plane of movement of the y-axis actuator 10. The end 211 of the sensor bracket 21 is coupled to the tip of the rotating shaft 221. At this time, the irradiation optical axis of the laser displacement meter 23 provided on the sensor bracket 21,
The support rotation mechanism is arranged so that the center axis of the rotation axis is the same.

The supporting and rotating mechanism is driven by being controlled by an electric current sent from a position control device (not shown) through the cable 16. The cable 18 is a laser displacement meter 2
3 for control and transmission of measurement data.
The work table 30 mainly includes a rotary stage 31 and a frame 3.
2. The inspection stage 33. The rotary stage 31 is provided on the bottom surface of the L-shaped frame 32, and
An inspection stage 33 is provided at the upper end of the. Work table 30
Is installed on the upper surface 2 of the optical laboratory table within the scanning range of the xy axis actuator 10.

The upper surface of the inspection stage 33 is finished into a smooth flat surface, which is used as a reference surface 331. Reference plane 331
Is parallel to the plane of movement of the xy axis actuator 10,
In addition, the laser displacement gauges 23 and 24 are adjusted so as to be positioned in the middle thereof. On the reference surface 331, two holding blocks 34 and four pilot pins 35 for fixing the position of the measuring object are provided. In addition, nine measurement holes 36 that are orthogonal to the reference surface 331 and penetrate the inspection stage 33 are provided.

The measurement hole 36 is provided so as to coincide with the thickness measurement location of the substrate to be described later. The pilot pin 35 is
When the objects to be described later are placed at specified measurement positions, two pieces are provided so as to abut each two adjacent sides of the objects to be extracted. The pressing block 34 is provided along the side of the object to be pressed that does not contact the pilot pin 35 when the object to be pressed is placed at a specified measurement position.

Using the above-mentioned shape measuring apparatus, the electrode plate of the solid activated carbon having the standard dimensions and the tolerances shown in Table 1 was used as the object 40, and the dimensions of each part were measured to make a pass / fail judgment. The length and width are measured at three positions, each being 7 mm inside from each side and the center of each side, and the thickness is measured at nine intersections of the length and width measurement lines.

[0018]

[Table 1]

Reference plane 331 and xy axis actuator 1
Since it is not always parallel to the moving plane of 0, the position of the reference plane 331 at the measurement position is measured in advance. At the thickness measurement position, the measurement hole 36 is provided on the work table 30.
, It is not possible to directly measure the position of the reference plane 331. Therefore, the measurement of the reference surface 331 was performed as follows.

The upper laser displacement meter 231 measures the positions of two points b and c on the reference plane 331 which is on a straight line crossing the measurement position a and interpolates a from the position information of b and c.
The position of was calculated. In addition, a flat plate is placed on the reference surface 331,
The measurement position a on the flat plate was measured by the lower laser displacement meter 232 from below the work table 30. The above-mentioned measurement of the reference plane position was performed at the above-mentioned nine thickness measurement points.

The dimensions of the object 40 to be processed were measured as follows. First, the to-be-rotated object 4 is made so that at least three out of the four pilot pins 35 come into contact with two sides of the to-be-rotated object 40.
0 is placed on the reference surface 331 and pressed by the pressing block 34. Next, by operating the xy axis actuator 10,
The laser displacement meter 23 is moved on the line of the measurement point of the length and the width, and the displacement amount at each position is measured. At this time, the support rotation mechanism 22 was operated to adjust the reflected light intake window of the upper laser displacement meter 231 to be in the direction orthogonal to the measurement line.

In the above measurement, the irradiation position of the laser displacement meter 23 is sequentially moved in the arrow direction starting from the point s as shown in FIG. 5 by program control, and the displacement amount of the laser displacement meter 23 and x during that time. -The position information of the y-axis actuator 10 was loaded into a computer, and the length, width, thickness, and warpage at the predetermined positions were calculated.

The measurement could be carried out in about 10 seconds per sheet. The measurement accuracy is ± 50 for the length and width.
The thickness was ± 5 μm.

[0024]

As described above, according to the present invention, it is possible to provide a shape measuring device for accurately and efficiently measuring the shape such as width and thickness of a thin plate product.

[Brief description of drawings]

FIG. 1 is a front view of a shape measuring apparatus according to an embodiment of the present invention.

FIG. 2 is a side view of the sensor unit according to the embodiment of the present invention.

FIG. 3 is a front view of the work table according to the embodiment of the present invention.

FIG. 4 is a plan view of an inspection stage according to an embodiment of the present invention.

FIG. 5 is an explanatory diagram showing a measurement path in the example of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Shape measuring device 2 Optical test bench upper surface 2 3 Base 4 Base 5 Bracket 10 x-y-axis actuator 11 x-axis actuator 13 Guide module 12 y-axis actuator 14 Bracket 15 Cable 16 Cable 17 Cable 18 Blanket 20 Sensor unit 21 Sensor bracket 211 Sensor bracket end 22 Support rotation mechanism 221 Rotation axis 23 Laser displacement meter 231 Upper laser displacement meter 232 Lower laser displacement meter 25 xy stage 26 z stage 30 Work table 31 Rotation stage 32 Frame 33 Inspection stage 331 Reference plane 34 Presser block 35 Pilot pin 36 Measuring hole 40 Target object

Claims (1)

[Claims] 1. A shape measuring device comprising the following components (a) and (b):
It is characterized by including (c) (d) (e) (f) (g). (a) An xy-axis actuator position-controlled by a position controller is provided. (b) A sensor unit conveyed by the xy axis actuator is provided. (c) The sensor unit includes a sensor bracket, a support rotation mechanism provided at one end of the sensor bracket, and a pair of laser displacement gauges provided on the sensor bracket. (d) The support rotation mechanism is coupled to the xy axis actuator such that a central axis of a rotation shaft included in the support rotation mechanism and a moving plane of the xy axis actuator are orthogonal to each other. . (e) The laser displacement gauges are arranged so as to face each other, and the irradiation optical axis of the laser displacement gauges and the central axis of the rotation axis of the support rotation mechanism are aligned with each other. (f) A work table having a reference plane parallel to the moving plane of the xy axis actuator is provided in the middle of the pair of laser displacement meters. (g) The work table has a measurement hole penetrating perpendicularly to the reference plane.