JPH09300342A - Tilting device for wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide the tilting device of a wire saw capable of automatically performing an alignment of crystal azimuth. SOLUTION: A foundation table 42 is secured on a work field table 28 vertically elevationally moving with respect to the wire row surface, and provided on the foundation table 42 is a swinging table 44 to swing vertically with respect to the wire row surface on the circumference about the center O of of an ingot 32. In addition, a rotation table 46 is installed on the swinging table 44, which rotates on the plane surface orthogonally intersecting the swinging surface of the swinging table 44 about the center O of the ingot 32, then a support table 48 is fixed on the rotating table 46 for supporting the ingot 32. As such, the ingot 32 supported swings and rotates on two surfaces orthogonally crossed with each other and can be inclined at an arbitrary angle relative to the wire row surface.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw tilting device, and more particularly to a wire saw tilting device for cutting a single crystal material such as a semiconductor ingot.

[0002]

2. Description of the Related Art When a single crystal material such as a semiconductor ingot is cut with a wire saw, it is necessary to incline the ingot by a predetermined angle with respect to the wire row surface so that the cut surface has a predetermined crystal orientation. For this reason, the wire saw is provided with a chilling device for inclining the ingot to be cut by a predetermined angle with respect to the wire row surface.

The conventional chilling apparatus has adopted a system in which an ingot is supported so as to be swingable horizontally and vertically with respect to the wire row surface, and the supported ingot is manually tilted and fixed.

[0004]

However, since the above-mentioned conventional chilling device is of a manual type, it has a drawback that it takes time to align the crystal orientation and work efficiency is poor. The present invention has been made in view of such circumstances, and an object of the present invention is to provide a wire saw chilling device capable of automatically performing crystal orientation alignment.

[0005]

In order to achieve the above object, the present invention relates to a wire saw tilting device for inclining an ingot at a predetermined angle with respect to a wire row surface, the base being swingable to the base. A swing base that swings around a central portion of the axis of the ingot on a plane that includes the axis of the ingot supported and that is perpendicular to the wire row surface, and swings the swing base. An oscillating drive device for driving, an oscillating table fixing means for fixing the oscillating table to the base, and an ingot that supports the ingot and is rotatably provided on the oscillating table and supports A rotary table that rotates on a plane orthogonal to the swing surface of the swing table around the center, a rotary drive device that drives the rotary table to rotate, and the rotary table is fixed to the swing table. A rotating table fixing means, or Characterized in that it comprises.

According to the present invention, the ingot supported on the turntable swings or rotates on the two surfaces orthogonal to each other by driving the swing driving device and the rotation driving device.
That is, the ingot swings perpendicularly to the wire row surface on the circumference around the center of the ingot by driving the swing driving device, and by driving the rotation driving device, It rotates about the center of the ingot on a plane orthogonal to the oscillating surface. Then, by adjusting the swing amount and the rotation amount of the ingot, the ingot can be inclined at an arbitrary angle with respect to the wire row surface.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of a wire saw chilling device according to the present invention will be described in detail below with reference to the accompanying drawings. FIG. 1 is a configuration diagram of an embodiment of a wire saw to which a chilling device according to the present invention is applied.

As shown in the figure, the wire 14 wound around the wire reel 12 passes through the wire running path formed by the guide rollers 16, 16 ,.
Horizontal wire row 2 wrapped around A, 18B, 18C
Form 0. The wires 14 forming the wire row 20 are
A wire reel (not shown) is wound up through a wire running path on the other side which is formed symmetrically with the wire row 20 interposed therebetween.

A wire guide device 22, a dancer roller 24, and a wire cleaning device 26 are provided in the wire running paths formed on both sides of the wire row 20 (only one side is shown). Guides the wires 14 from the wire reel 12 at a constant pitch. Further, the dancer roller 24 applies a constant tension to the traveling wire 14, and the wire cleaning device 26 removes the slurry (processing liquid) attached during processing from the wire 14. Regarding the configuration of the wire cleaning device 26,
It will be described in detail later.

A motor (not shown) capable of rotating in the forward and reverse directions is connected to each of the pair of wire reels 12 and one grooved roller 18C among the three reels.
4 drives the motor to reciprocate at high speed between the wire reels 12. A work feed table 28 is installed above the wire row 20 so as to vertically move up and down with respect to the wire row 20. The work feed table 28 is provided with a chilling device 30, and the ingot 32 is the chilling device 30.
It is held at the bottom of and is set to an arbitrary tilt angle.

In the wire saw 10 constructed as described above, the ingot 32 is cut by lowering the work feed table 28 toward the wire row 20 and pressing the ingot 32 against the wire row 20 traveling at high speed. . At this time, the wire row 20 is supplied with slurry from a slurry tank 34 through a nozzle (not shown),
The ingot 32 is cut into wafers by a lapping action of abrasive grains contained in the slurry.

The slurry supplied at the time of processing is collected in the slurry tank 34 via a slurry collecting plate 38 provided below the wire row 20, and is circulated and used while replenishing the shortage. At this time, the slurry absorbs heat generated during processing and rises in temperature, so that the slurry is cooled to a constant temperature via the heat exchanger 36. Further, reference numeral 40 in the drawing denotes a cleaning liquid tank, in which the cleaning liquid used in the wire cleaning device 26 is stored.

FIG. 2 is a front view showing the structure of the tilting device 30, and FIG. 3 is a side view thereof. Also,
FIG. 4 is a sectional view taken along line AA in FIG. 2 to 4
As shown in FIG. 4, the tilting device 30 includes a base 42 fixed to the work feed table 28 and a base 4
2, a swing table 44 that swings in a direction perpendicular to the wire row 20, a rotary table 46 that is provided on the swing table 44 and rotates, and an ingot 32 that is provided on the rotary table 46. The supporting base 48 which supports is comprised as a main part.

As shown in FIGS. 3 and 4, the base 42 is formed in a gate shape, and its upper plate 42A is integrally fixed to the lower surface of the work feed table 28.
Guide rails 50, 50 are arranged on both side plates 42B, 42B of the base 42, respectively.
As shown in FIG. 2, 0 and 50 are formed in an arc shape. The guide rail 50 has a radius R centered on the center O of the ingot 32 supported by the support base 48.
It is formed with the same curvature as the circle.

As shown in FIGS. 3 and 4, the rocking base 44 has a cylindrical body 44A and a body 44A.
The upper plate 44B is fixed to the upper end of A, and the upper plates 44C and 44C are provided vertically on both sides of the upper plate 44B. The upper side plates 44C, 44 of the swing base 44
As shown in FIG. 2, C has a pair of sliders 5 respectively.
2, 52 are fixed, and the sliders 52, 52 are
It is slidably supported by guide rails 50, 50 arranged on the base 42. Therefore, the swing base 44 is
Sliding along the guide rails 50, 50, as a result, the swing base 44 swings around the center O of the ingot 32.

The oscillating drive of the oscillating table 44 is performed by the oscillating table driving motor 5 provided on the work feed table 28.
4 and the drive mechanism is configured as follows. FIG.
As shown in FIG. 5, a projecting piece 56 is fixed to the center of the upper end of one upper plate 44C. An arcuate surface having the same curvature as that of the guide rail 50 is formed on the upper end surface of the projecting piece 56, and a rack 56A is formed on the arcuate surface. The rack 56A includes the rocking table drive motor 54.
The pinion gear 58 fixed to the rotary shaft is engaged with the rotary base driving motor 54. By rotating the rotary base drive motor 54, the rotational force is transmitted to the rack 56A and the rotary base 44 swings.

In the figure, numeral 60 is a gas damper,
By pressing the rocking base 44 in a certain direction (left direction in the drawing),
The backlash between the rack 56A and the pinion gear 58 that occurs during swing drive is removed. Further, the swing base 44 is fixed by an air cylinder 62 provided on the upper plate 44B of the swing base 44, and the fixing mechanism thereof is configured as follows.

As shown in FIG. 4, the upper plate 44 of the swing base 44 is
A support plate 64 is vertically erected on B.
On the other hand, a pressing plate 66 is fixed to the side plate 44B on one side of the base 42 in contact with the support plate 64.
The rocking base fixing cylinder 62 fixes the rocking base 44 to the base 42 by extending the rod 64A and pressing the pressing plate 66 against the support plate 64.

As shown in FIG. 4, the rotary table 46 comprises a rotary shaft 46A and a rotary table 46B integrally fixed coaxially to the lower end of the rotary shaft 46A.
The rotary shaft 46A of the rotary table 46 is housed in the body 44A of the rocking table 44, and the bearings 68, 68,
It is rotatably supported by the rocking base 44 via 68. Therefore, the rotary table 46 has a rotary shaft 46A.
Rotate around.

The rotary drive of the rotary base 46 is performed by a rotary base drive motor 70 installed on the upper plate 44A of the swing base 44.
The drive mechanism is configured as follows. As shown in FIGS. 4 and 5, the upper end of the rotary shaft 46A is
The worm wheel 72 is integrally fixed coaxially with the rotating shaft 46A. The worm wheel 72 is meshed with a worm gear 74 that is integrally fixed to the rotary shaft of the rotary base drive motor 70. By rotating the rotary base drive motor 70, the rotational force is applied to the worm wheel 70. It is transmitted and the turntable 46 rotates.

The backlash between the worm wheel 72 and the worm gear 74 that occurs during rotational driving is caused by a constant tension spring (not shown) provided between the upper plate 44B of the swing base 44 and the rotary table 46B of the rotary base 46. Remove. That is, the backlash is removed by pressing the rotary table 46 in a constant rotational direction by the urging force of the constant tension spring.

The rotary table 46 is fixed by a pair of rotary table fixing cylinders 76, 76 provided at both ends of the upper plate 44B of the rocking table 44, and the fixing mechanism is constructed as follows. It As shown in FIGS. 2, 3 and 5, the rotary table fixing cylinder 7 is supported on both ends of the upper plate 44B of the swing table 44 by supporting members 78 formed in a gate shape.
6, 76 are provided. This rotary base fixed cylinder 7
6 is supplied with air from an air supply means (not shown),
The cylinder rod 76A extends downward. On the other hand, at both ends of the turntable 46B of the turntable 46,
A pair of pressing plates 80, 80 formed in an inverted L shape are erected vertically. The upper end horizontal bent portion 80A of the pressing plate 80 formed in the inverted L shape is formed on the swing base 4
4 is provided so as to be in contact with the upper plate 44B, and slides on the upper plate 44B when the rotary table 46 rotates. The pair of rotary base fixed cylinders 76, 76 extends the rods 76A, 76A thereof to push the pressing plate 8
The upper horizontal folding parts 80A and 80A of 0 and 80 are attached to the upper plate 4
4B by pressing the rotary table 46
Fix to 4.

As shown in FIGS. 2 and 4, the support base 48 is a support frame 48A formed in a U-shaped frame, and a work block that can be fitted to the inner circumference of the support frame 48A. The support frame 48A is integrally fixed to the lower surface of the turntable 46B of the turntable 46. The ingot 32 is integrally fixed to the work block 48B of the support base 48 via the slice base 84, and the work block 48B is fitted to the support frame 48 to be mounted on the tilting device 30.

Further, the mounted ingot 32 is fixed by a pair of support base fixing cylinders 82, 82 provided on the rotary table 46B of the rotary base 46, and its fixing mechanism is constructed as follows. As shown in FIG. 2, a pair of support base fixing cylinders 82, 82 are provided at both ends of the rotary table 46B of the rotary base 46. The cylinder rod 82A of the support base fixing cylinder 82 is housed in a communication hole 84 formed in the rotary table 46B, and when air is supplied to the support base fixing cylinder 82, the cylinder rod 82A expands and moves downward from the hole. Project. The protruding cylinder rod 82A presses and fixes the work block 48B fitted to the support frame 48A of the support base 48.

The operation of the embodiment of the chilling device for a wire saw according to the present invention constructed as described above is as follows. First, the ingot 32 is integrally fixed to the work block 48B of the support base 48 via the slice base 84. At this time, the center O of the ingot 32 is fixed so as to match the center of the work block 48B.

Next, the work block 48B to which the ingot 32 is fixed is fitted to the support frame 48A of the support base 48. Then, the support base fixing cylinders 82, 82 are driven to fix the work block 48B. That is, air is supplied to the support base fixing cylinders 82, 82, and the cylinder rods 82A, 82A are extended to press and fix the work block 48B to the support frame 48A. As a result, the ingot 32 is attached to the tilting device 30,
The axis is parallel to the wire row surface 20, and the end face is parallel to the wire row 20 (reference state).

Since the crystal orientation of the mounted ingot 32 is known in advance, the ingot 32 is tilted at a predetermined angle with respect to the wire row surface 20 based on the crystal orientation. The tilting is performed as follows by a combination of the rotation of the ingot 32 in the direction along the wire row surface 20 and the rotation in the direction perpendicular to the wire row surface 20. First, ingot 3
2 is rotated in the direction along the wire row surface 20.

First, the rotary base drive motor 70 is driven to rotate the rotary base 46 by a preset angle. As a result, the ingot 32 rotates about the center O of the ingot 32 in the direction along the wire row surface 20 by the set angle, so that after the rotation, the rotary base fixed cylinders 76, 7 are rotated.
6 is driven to fix the rotary table 46 to the rocking table 44. That is, air is supplied to the rotary base fixing cylinders 76, 76, and the cylinder rods 76A, 76A are extended to press and fix the pressing plates 80, 80 to the upper plate 44B of the swing base 44.

Next, the ingot 32 is rotated in a direction perpendicular to the wire row surface 20. First, the rocking table drive motor 54 is driven to rock the rocking table 46 by a preset angle. As a result, the ingot 32 is
Since the ingot 32 swings by a set angle in the direction perpendicular to the wire row surface 20 around the center O of the ingot 32, the swing base fixing cylinder 62 is driven after the swing to move the swing base 44 to the base 42.
Fixed to. That is, air is supplied to the rocking base fixing cylinder 62, and the cylinder rod 62A thereof is extended so that the pressing plate 66 provided on the base 44 is moved to the upper plate 4 of the rocking base 44.
It is pressed and fixed to the support plate 64 provided in 4B.

By the series of operations described above, the ingot 32 is inclined at a predetermined angle with respect to the wire row surface 20, so that cutting is started in this state. That is, the work feed table 28 is driven to vertically lower the ingot 32, and the ingot 32 is pressed against the wire row 20 traveling at a high speed to cut into wafers. As described above, according to the wire saw tilting apparatus of the present embodiment, the tilting operation of the ingot 32 can be automatically performed, so that the crystal orientation can be quickly adjusted.

Further, by using the guide rails 50, 50 formed in an arc shape as the guide of the swing base 44,
The inner space of the guide rails 50, 50 can be effectively used. That is, the drive device of the turntable 46 and the like can be housed in the space inside the guide rails 50, 50, and the tilting device 30 can be made compact.

[0032]

As described above, according to the present invention,
The tilting operation can be automated, and the crystal orientation of the ingot can be easily and quickly adjusted.

[Brief description of drawings]

FIG. 1 is a configuration diagram of an embodiment of a wire saw to which a chilling device according to the present invention is applied.

FIG. 2 is a front view showing the configuration of a chilling device.

FIG. 3 is a side view of FIG.

FIG. 4 is a sectional view taken along line AA of FIG. 2;

FIG. 5 is a sectional view taken along line BB of FIG. 2;

[Explanation of symbols]

 10 ... Wire saw 12 ... Wire reel 14 ... Wire 18A-18C ... Grooved roller 20 ... Wire row 28 ... Work feed table 30 ... Chilling device 32 ... Ingot 42 ... Base 44 ... Oscillating stand 46 ... Rotating stand 46A ... 48 ... Support base 50 ... Guide rail 52 ... Slider

Claims (3)

[Claims] 1. A wire saw tilting device for inclining an ingot at a predetermined angle with respect to a wire row surface, comprising: a base; and an axis line of an ingot swingably mounted on and supported by the base, A rocking base that rocks on a plane perpendicular to the row surface around the center of the axis of the ingot, a rocking drive device that rocks and drives the rocking base, and the rocking base is the base. Rocking table fixing means for fixing to the table; and a rocking surface of the rocking table centered on a central portion of the axis line of the ingot that supports the ingot and is rotatably provided on the rocking table. A rotary table that rotates on a plane orthogonal to each other, a rotary drive device that rotationally drives the rotary table, and a rotary table fixing unit that fixes the rotary table to the swing table,
A wire saw chilling device comprising: 2. The wire saw tilting device according to claim 1, wherein the swing base is swingably supported by an arc-shaped guide rail provided on the base via a slider. 3. The wire saw chilling device according to claim 1, wherein the rotary table is pivotally supported by a rotary shaft rotatably supported by the swing table.