JPH09294965A - Cleaning method and cleaning apparatus - Google Patents

Cleaning method and cleaning apparatus

Info

Publication number
JPH09294965A
JPH09294965A JP11374196A JP11374196A JPH09294965A JP H09294965 A JPH09294965 A JP H09294965A JP 11374196 A JP11374196 A JP 11374196A JP 11374196 A JP11374196 A JP 11374196A JP H09294965 A JPH09294965 A JP H09294965A
Authority
JP
Japan
Prior art keywords
cleaning
tank
arm
cleaned
swing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP11374196A
Other languages
Japanese (ja)
Inventor
Hajime Takimoto
肇 滝本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP11374196A priority Critical patent/JPH09294965A/en
Publication of JPH09294965A publication Critical patent/JPH09294965A/en
Withdrawn legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To clean effectively even when the cleaning power of cleaning liquid is poor and the shape of a cleaning object is complex by cleaning with a swing arm rotated normally/reversely during vertical swing of cleaning object receiving basket. SOLUTION: A shaft shaped swing arm 3 the lower part of which is put into/from a cleaning tank 5 is installed above the tank 5. A spiral groove is cut on the periphery of the arm 3. A motor 1 in which the rotational speed is variable and the rotational direction can be made normal/reverse is attached to the upper end of the arm 3. In cleaning a work by the motor 1, the arm 3 is rotated by the motor 1, the position of the arm 3 is detected by limit switches 18 of the upper and lower ends attached to a support plate 23 mounted on a fixed table 2, and the arm 3 is reciprocated vertically between them. The work is not only swung vertically but also rotated normally/reversely by the reciprocating motion of the arm 3.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、光学部品,電子部
品または精密部品類等の洗浄方法および洗浄装置に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning method and a cleaning device for optical parts, electronic parts or precision parts.

【0002】[0002]

【従来の技術】従来、光学部品,電子部品または精密部
品類等の洗浄方法は、洗浄装置のアーム下端部にワーク
(被洗浄物)を保持した状態で洗浄液を満たした超音波
洗浄槽内へ挿入し、アームに上下揺動を主体とした動き
をさせて洗浄する方法が通常であった。この上下揺動
は、超音波伝達方向(洗浄液深方向)の超音波のキャビ
テーションの定在波の分布を均一化させるためである。
2. Description of the Related Art Conventionally, a method of cleaning optical parts, electronic parts, precision parts, etc., has been performed by placing an ultrasonic cleaning tank filled with a cleaning liquid with a work (object to be cleaned) held at a lower end of an arm of a cleaning device. The usual method is to insert the arm and make the arm move up and down to wash the arm. This vertical swing is for uniformizing the distribution of standing waves of cavitation of ultrasonic waves in the ultrasonic wave transmission direction (cleaning liquid depth direction).

【0003】また、例えば特開昭59−166282号
公報には、超音波振動子が取り付けられた槽において、
被洗浄物表面に洗浄液流が衝突するように被洗浄物を往
復または回転させつつ、これに超音波を印加する洗浄方
法が開示されている。さらに、例えば特開昭52−98
360号公報には、洗浄槽内において、シャフトにより
被洗浄物を収納した「カゴ状物」を揺動運動させ、被洗
浄物を洗浄する方法が開示されている。この際、被洗浄
物の保持に特殊なカゴ状物を使用している。
Further, for example, in Japanese Patent Laid-Open No. 59-166282, in a tank equipped with an ultrasonic transducer,
There is disclosed a cleaning method in which an object to be cleaned is reciprocated or rotated so that the cleaning liquid flow collides with the surface of the object to be cleaned, and ultrasonic waves are applied to the object. Further, for example, JP-A-52-98
Japanese Unexamined Patent Publication No. 360 discloses a method of cleaning an object to be cleaned by swinging a "cage-shaped object" containing the object to be cleaned by a shaft in a cleaning tank. At this time, a special basket-like material is used to hold the object to be cleaned.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、前記各
従来技術には以下のような欠点があった。すなわち、超
音波洗浄槽内で被洗浄物を上下揺動する方法において
は、上下揺動が超音波洗浄の補助的な手段にすぎないた
め、積極的な洗浄液中の液流を発生させる手段とはなっ
ていない。例えば、上下揺動の速度は通常5cmの揺動
幅の場合、片道2秒程度が通常の一般値であった。
However, the above-mentioned respective prior arts have the following drawbacks. That is, in the method of rocking the object to be cleaned up and down in the ultrasonic cleaning tank, the rocking up and down is merely an auxiliary means for ultrasonic cleaning, and therefore a means for actively generating a liquid flow in the cleaning liquid is used. It's not. For example, as for the vertical swing speed, when the swing width is usually 5 cm, the normal value is about 2 seconds each way.

【0005】この場合、被洗浄物に付着した汚れがそれ
によって剥離されるような液流速ではない。このため、
超音波がこの上下揺動により均一となり効果的に作用し
たとしても、それは超音波媒体である洗浄液が水系のも
のの場合に限られる。これは、一般に超音波のキャビテ
ーションは非水系の溶剤において、水系の洗剤等に比較
すると顕著に超音波効果が低下するからである。従っ
て、炭化水素系の溶剤等を用いた安価で汎用的な洗浄の
場合、超音波の物理的な効果は殆ど望めない。
In this case, the liquid flow rate is not such that the dirt adhering to the object to be cleaned is peeled off by it. For this reason,
Even if the ultrasonic waves become uniform by this vertical swing and act effectively, it is limited to the case where the cleaning liquid as the ultrasonic medium is of a water-based type. This is because ultrasonic cavitation generally significantly reduces the ultrasonic effect in a non-aqueous solvent as compared to an aqueous detergent. Therefore, in the case of inexpensive general-purpose cleaning using a hydrocarbon solvent or the like, the physical effect of ultrasonic waves can hardly be expected.

【0006】一方、液流による積極的な洗浄として回転
を用いる方法がある。しかし、これはバレル等の専用で
複雑な洗浄カゴを要するという問題があった。また、洗
浄カゴの複雑さから被洗浄物の取り出しが複雑であると
いう作業上の問題も内在している。回転は通常一方向に
低速であり、複雑な形状の被洗浄物や洗浄性の悪い固体
状の汚れ、あるいは洗浄液自体の粘度が高く洗浄しにく
い汚れの場合、単純な回転では大きな液流を発生させる
ことはできず、それらの洗浄には問題がある。
On the other hand, there is a method of using rotation as an active cleaning by a liquid flow. However, this has a problem that it requires a dedicated and complicated cleaning basket such as a barrel. In addition, there is an inherent work problem in that it is complicated to take out the object to be cleaned due to the complexity of the cleaning basket. Rotation is usually slow in one direction, and a large amount of liquid flow is generated by simple rotation when the object to be cleaned has a complicated shape, solid dirt with poor cleaning performance, or dirt that has high viscosity and is difficult to clean. Cannot be made, and cleaning them is problematic.

【0007】請求項1〜4の課題は、洗浄液自体の洗浄
能力が低く、複雑な形状物でも効果的に洗浄が行える洗
浄方法および洗浄装置の提供にある。
It is an object of the first to fourth aspects to provide a cleaning method and a cleaning device which have a low cleaning ability of the cleaning liquid itself and can effectively clean even a complicated shape.

【0008】[0008]

【課題を解決するための手段】請求項1の発明は、洗浄
液を入れた洗浄槽内で被洗浄物を収納した洗浄物受けカ
ゴを揺動アームを介して上下揺動し、前記被洗浄物を洗
浄する洗浄方法において、前記洗浄物受けカゴの上下揺
動時に揺動アームが正逆回転して洗浄することを特徴と
する洗浄方法である。
According to a first aspect of the present invention, a cleaning object receiving basket containing an object to be cleaned is vertically swung by a swing arm in a cleaning tank containing a cleaning liquid, and the cleaning object is washed. In the cleaning method for cleaning, the swinging arm rotates forward and backward to perform cleaning when the cleaning item receiving basket is vertically swung.

【0009】請求項2の発明は、前記洗浄物受けカゴの
上下揺動時に、揺動が下方へ向かうときは洗浄物受けカ
ゴが正回転し、揺動が上方へ向かうときは洗浄物受けカ
ゴが逆回転することを特徴とする請求項1記載の洗浄方
法である。
According to a second aspect of the present invention, when the wash item receiving basket is vertically swung, the wash item receiving basket rotates normally when the swing action is downward, and the wash item receiving basket is performed when the swing action is upward. Is reversely rotated, The cleaning method according to claim 1.

【0010】請求項3の発明は、前記洗浄槽の底部にフ
ァンを有し、該ファンが前記洗浄物受けカゴの回転と逆
回転に同期して駆動することを特徴とする請求項1記載
の洗浄方法である。
According to a third aspect of the present invention, a fan is provided at the bottom of the cleaning tank, and the fan is driven in synchronization with the rotation and the reverse rotation of the cleaning object receiving basket. It is a cleaning method.

【0011】請求項4の発明は、洗浄液を入れた洗浄槽
と、被洗浄物を収納する洗浄物受けカゴと、該洗浄物受
けカゴを下端に支持する揺動アームと、該揺動アームを
回転させながら前記洗浄物受けカゴを洗浄槽内で上下動
するとともに、正逆回転させる可逆可変な駆動手段とを
具備したことを特徴とする洗浄装置である。
According to a fourth aspect of the present invention, there is provided a cleaning tank containing a cleaning liquid, a cleaning object receiving basket for storing an object to be cleaned, a swing arm for supporting the cleaning object receiving basket at a lower end, and the swing arm. A cleaning device comprising: a reversible variable drive means for moving the cleaning product receiving basket up and down in a cleaning tank while rotating, and for rotating the cleaning product forward and backward.

【0012】本発明では、洗浄槽内で被洗浄物を載置あ
るいは収納する洗浄物受け台を上下揺動と同時に正逆回
転させる。上下揺動アームの軸は螺旋状に切り欠いてあ
り、モーターによる回転動力が洗浄物受け台の上下動と
正逆回転とを同時に発生させる。モーターの回転方向を
ある時間で正負逆転させれば、ある決まった上下揺動幅
と回転数とにより上下揺動回転運動が周期的に発生す
る。また、上下揺動アーム軸の螺旋溝のピッチによって
も揺動速度を変えることが可能である。洗浄物受け台を
円形対称とすることにより、回転による回転軸のブレを
低減でき、耐久性が増す。
According to the present invention, the cleaning object receiving table on which the object to be cleaned is placed or stored in the cleaning tank is vertically swung and simultaneously rotated in the forward and reverse directions. The shaft of the vertically swinging arm is notched in a spiral shape, and the rotational power of the motor causes vertical movement and forward / reverse rotation of the washing object pedestal at the same time. If the rotation direction of the motor is reversed in the positive and negative directions for a certain period of time, vertical swinging rotary motion is periodically generated with a certain vertical swinging width and number of rotations. The swing speed can also be changed by the pitch of the spiral groove of the vertical swing arm shaft. By making the wash-basin pedestal circularly symmetric, it is possible to reduce the blurring of the rotating shaft due to the rotation and improve the durability.

【0013】汚れの付着した被洗浄物が洗浄物受け台に
載せられた後、洗浄液中に浸漬して上下揺動と正逆回転
の複合運動が上下揺動アームを介して加えられる。この
ような複合運動により、上下揺動による液深方向(縦)
の直線的な往復運動と正逆回転による水平の液面方向
(横)の運動とが被洗浄物に加えられる。これにより、
液深方向(縦)の上下の液流と液面方向(横)の往復の
渦流との両方が加わった複合的な液流が発生する。
After the dirty object to be cleaned is placed on the cleaning object cradle, it is immersed in the cleaning liquid and a combined motion of vertical swing and forward / reverse rotation is applied through the vertical swing arm. Due to such a combined movement, vertical movement causes liquid depth (vertical)
The linear reciprocating motion of the and the horizontal motion in the liquid level direction (transverse direction) by the forward and reverse rotation are applied to the object to be cleaned. This allows
A composite liquid flow in which both the upper and lower liquid flows in the liquid depth direction (vertical) and the reciprocating vortex flow in the liquid surface direction (horizontal) are generated.

【0014】上記の複雑な液流のため、一部では条件に
よって乱流となる可能性もある。このような液流の中に
被洗浄物は曝されるため、あらゆる方向の液流を受け
る。これにより、汚れと洗浄液の比重差の関係や被洗浄
物の形状との関係により、洗浄液の浸透性が著しく悪い
箇所への浸透性を助長し、同様な効果で被洗浄物の表面
に膨潤(洗浄液による溶解の途中の段階)した汚れや、
被洗浄物表面の近傍に存在する汚れを効果的に剥離溶解
することができる。
Due to the above-mentioned complicated liquid flow, there is a possibility that a turbulent flow will be generated depending on the conditions in some cases. Since the object to be cleaned is exposed to such a liquid flow, it receives the liquid flow in all directions. As a result, due to the relationship of the specific gravity difference between the dirt and the cleaning liquid and the shape of the object to be cleaned, the permeation of the cleaning liquid to a place where the permeability is extremely poor is promoted, and the surface of the object to be cleaned swells with the same effect ( Dirt in the middle of dissolution with the cleaning solution),
It is possible to effectively remove and dissolve stains existing near the surface of the object to be cleaned.

【0015】本発明での運動方式は縦,横の直交する動
きであるため、比較的この二者の液流同士の衝突による
液流の減衰を比較的低減できる点で、エネルギー効率の
面でも有利といえる。洗浄性の面においても、あらゆる
方向に対して原理的にカバーできるので、洗浄性能の向
上が達成できる。
Since the motion system of the present invention is a vertical and horizontal orthogonal motion, the damping of the liquid flow due to the collision of the liquid flows of the two can be relatively reduced, and also in terms of energy efficiency. It can be said to be advantageous. Also in terms of cleanability, since it can cover all directions in principle, improvement in cleanability can be achieved.

【0016】また、本発明では上下揺動の上端および下
端において回転方向が逆転する機構となっている。この
回転方向が変わる瞬間に被洗浄物の回転方向に伴って動
いていた液流の慣性的な動きに対し、被洗浄物には外部
より全く反対方向の回転が加えられるため、被洗浄物表
面において大きな剥離,剪断力が発生する。これによ
り、被洗浄物の物理的洗浄力は向上する結果となる。
Further, in the present invention, the rotation direction is reversed at the upper and lower ends of the vertical swing. At the moment the rotation direction changes, the inertial movement of the liquid flow that was moving along with the rotation direction of the object to be cleaned is rotated in the opposite direction from the outside, so the surface of the object to be cleaned is rotated. Large peeling and shearing force are generated at. As a result, the physical cleaning power of the object to be cleaned is improved.

【0017】本発明においては、洗浄液自体の洗浄能力
が低い場合の補助手段として大変効果的である。また、
複雑な形状物の洗浄に特に効果的である。さらに、固体
状の洗浄しにくい汚れに対し、単位時間当たりの汚れに
接触する液の更新度合いが頻繁であり、これによって汚
れの拡散を促進して落としにくい汚れの洗浄性が飛躍的
に向上する。
The present invention is extremely effective as an auxiliary means when the cleaning ability of the cleaning liquid itself is low. Also,
It is especially effective for cleaning complicated shapes. Further, for solid stains that are difficult to clean, the degree of renewal of the liquid that contacts the stains per unit time is frequent, which promotes diffusion of stains and dramatically improves the cleanability of stains that are difficult to remove. .

【0018】また、洗浄槽の底部にファン(撹拌子)を
設け、被洗浄物に対して回転渦流を衝突させる。さら
に、被洗浄物の回転とは逆方向の渦流を衝突させる。こ
れにより、剥離剪断力が増して洗浄性が向上する。
Further, a fan (stirring member) is provided at the bottom of the cleaning tank to make the rotating vortex flow collide with the object to be cleaned. Further, a vortex flow in the direction opposite to the rotation of the object to be cleaned is made to collide. Thereby, the peeling shearing force is increased and the cleaning property is improved.

【0019】[0019]

【発明の実施の形態】BEST MODE FOR CARRYING OUT THE INVENTION

(実施の形態1)図1〜図6は本実施の形態を示し、図
1は洗浄装置の正面図、図2〜図4はグラフ、図5a〜
dは洗浄工程を示す概略図、図6aおよびbは洗浄サン
プルの斜視図および平面図である。5は洗浄槽で、この
洗浄槽5の上方にはその下端部が洗浄槽5に出入りする
軸状の揺動アーム3が設けられている。揺動アーム3の
外周には螺旋溝が切られている。揺動アーム3の上端に
は、回転速度が可変可能で、且つ回転方向が正逆可能な
モーター1が取り付けられており、モーター1の回転を
揺動アーム3へ直接伝達できるように構成されている。
(Embodiment 1) FIGS. 1 to 6 show the present embodiment, FIG. 1 is a front view of a cleaning apparatus, FIGS. 2 to 4 are graphs, and FIGS.
6d and 6b are a perspective view and a plan view of a cleaning sample. A cleaning tank 5 is provided with a shaft-like swinging arm 3 above and below the cleaning tank 5, the lower end of which is moved in and out of the cleaning tank 5. A spiral groove is cut on the outer circumference of the swing arm 3. A motor 1 whose rotation speed is variable and whose rotation direction is reversible is attached to the upper end of the swing arm 3, and the rotation of the motor 1 is directly transmitted to the swing arm 3. There is.

【0020】揺動アーム3の下端には、洗浄物を収納・
載置する洗浄物受けカゴ4が取り付けられている。洗浄
物受けカゴ4は洗浄液の流出入を自在とした四方が網状
に囲まれて上方が開口したステンレス金属製バットであ
る。揺動アーム3の中央付近には、揺動アーム3の螺旋
溝と螺合するボールナット付き固定台2が取り付けられ
ている。前記モーター1は、固定台2に立設された上下
方向案内レール31によって上下方向のみ移動するよう
に案内支持されている。
At the lower end of the swinging arm 3, a cleaning product is stored.
A wash item receiving basket 4 to be placed is attached. The cleaning object receiving basket 4 is a stainless metal bat which is surrounded by meshes on all four sides and allows the cleaning liquid to flow in and out freely. A fixed base 2 with a ball nut that is screwed into the spiral groove of the swing arm 3 is attached near the center of the swing arm 3. The motor 1 is guided and supported by a vertical guide rail 31 provided upright on the fixed base 2 so as to move only in the vertical direction.

【0021】前記固定台2は、その端縁部にボールネジ
部19aおよびガイド部19bを有し、ボールネジ部1
9aは洗浄機本体20に回転自在に立設する螺旋溝の形
成されたスライド柱21に螺合している。そして、洗浄
機能とは別機能の搬入搬出機能のモーターAによって、
各回転伝達ギヤを介してスライド柱21を回転させ、ボ
ールネジ19aを介して固定台2を上下動させる。ま
た、ガイド部19bは洗浄機本体20に立設した円柱2
2に嵌合し、固定台2を上下方向のみ案内する。
The fixed base 2 has a ball screw portion 19a and a guide portion 19b at the end edge thereof, and the ball screw portion 1
9a is screwed to a slide column 21 having a spiral groove formed on the main body 20 of the washing machine so as to be rotatable. And by the motor A of the carry-in / carry-out function which is a function different from the cleaning function,
The slide column 21 is rotated via each rotation transmission gear, and the fixed base 2 is moved up and down via the ball screw 19a. In addition, the guide portion 19b is a column 2 that is erected on the main body 20 of the washing machine.
2 and guides the fixed base 2 only in the vertical direction.

【0022】以上の構成から成る洗浄装置の動作を以下
に説明する。まず、モーターAにより固定台2を上昇さ
せた位置において、洗浄物受けカゴ4を洗浄槽5の液面
から露呈した状態とし、被洗浄物(ワーク)を洗浄物受
けカゴ4に入れる。次に、スイッチを入れてモーターA
を作動し、洗浄物受けカゴ4が洗浄槽5に入った位置で
モーターAによる送りが停止し、その停止の指令により
図示省略したリレーが作動し、次いでモータ1が作動し
て洗浄を開始する。
The operation of the cleaning apparatus having the above structure will be described below. First, at the position where the fixing table 2 is raised by the motor A, the cleaning object receiving basket 4 is exposed from the liquid surface of the cleaning tank 5, and the object to be cleaned (work) is placed in the cleaning object receiving basket 4. Next, switch on the motor A
When the cleaning product receiving basket 4 enters the cleaning tank 5, the feeding by the motor A is stopped, a relay (not shown) is activated by the stop command, and then the motor 1 is activated to start cleaning. .

【0023】モータ1によるワークの洗浄では、モータ
1の駆動によって揺動アーム3が回転することになり、
揺動アーム3の位置は図1に示すように、固定台2に立
設した支持板23に備えられた上端・下端のリミットス
イッチ18により検出し、この間で揺動アーム3自体が
上下方向に往復運動する。この往復運動により、ワーク
の上下揺動がなされることになり、且つ上下揺動ととも
に正逆の回転運動もすることになる。
In cleaning the work by the motor 1, the swing arm 3 is rotated by driving the motor 1.
As shown in FIG. 1, the position of the swing arm 3 is detected by the upper and lower limit switches 18 provided on the support plate 23 provided upright on the fixed base 2, and the swing arm 3 itself moves vertically in the meantime. Move back and forth. Due to this reciprocating motion, the work is vertically swung, and in addition to the vertical swing, forward and reverse rotational motion is also performed.

【0024】モータ1のモータ回転速度を変えることに
より、上下揺動速度と回転速度とは比例関係が保たれつ
つ可変となる。モータ回転速度は洗浄物受けカゴ4の回
転速度を減速または加速するものであり、モータ回転速
度と上下揺動速度とは図2に示すような比例関係とな
る。本実施の形態では、揺動アーム3の螺旋溝のピッチ
を25mm,モータ1の回転速度を24rpmにするの
で、洗浄物受けカゴ4の上下移動速度は600mm/m
inとなる。
By changing the motor rotation speed of the motor 1, the vertical swing speed and the rotation speed are variable while maintaining a proportional relationship. The motor rotation speed decelerates or accelerates the rotation speed of the cleaning product receiving basket 4, and the motor rotation speed and the vertical swing speed have a proportional relationship as shown in FIG. In the present embodiment, since the pitch of the spiral groove of the swing arm 3 is 25 mm and the rotation speed of the motor 1 is 24 rpm, the vertical movement speed of the cleaning object receiving basket 4 is 600 mm / m.
becomes in.

【0025】また、螺旋溝のピッチが異なるいくつかの
揺動アーム3とボールナット付きの固定台2とを別途用
意し、これらを取り外して交換することによっても洗浄
物受けカゴ4の上下揺動速度を可変とすることができ
る。ボールネジピッチと上下揺動速度・回転速度との関
係を図3および図4に示す。これにより、ピッチと上下
揺動速度とが比例することが分かる。上下揺動自在の動
きは、行きと帰りでモータ1の正負を逆転させることに
より実現させている。
Further, by separately preparing some swinging arms 3 having different pitches of spiral grooves and a fixing base 2 with a ball nut, and detaching and replacing them, the washing object receiving basket 4 swings up and down. The speed can be variable. The relationship between the ball screw pitch and the vertical swing speed / rotation speed is shown in FIGS. 3 and 4. From this, it can be seen that the pitch is proportional to the vertical swing speed. The vertically swingable movement is realized by reversing the positive and negative of the motor 1 on the way back and forth.

【0026】上記により、洗浄が終了した時点での洗浄
物受けカゴ4の位置は洗浄槽5に入った位置の上端で一
旦止まる。その後、モーターAの作動によって更に最上
端に移動し、被洗浄物(ワーク)を入れた位置に達す
る。そして、被洗浄物を洗浄物受けカゴ4から取り出
す。以上のようにして本実施の形態の洗浄装置は用いら
れるものである。
Due to the above, the position of the cleaning object receiving basket 4 at the time of completion of the cleaning temporarily stops at the upper end of the position where it enters the cleaning tank 5. After that, the operation of the motor A causes the motor A to further move to the uppermost end and reach the position where the object to be cleaned (workpiece) is placed. Then, the object to be cleaned is taken out from the cleaning object receiving basket 4. The cleaning apparatus according to the present embodiment is used as described above.

【0027】次に、上記洗浄装置を用いた洗浄工程を図
5a〜dに基づいて示す。各工程において用いられる各
装置の概略を説明すると、図5aおよびbは図1の洗浄
装置に加えて、洗浄槽5内の洗浄液を洗浄槽5の下部か
ら循環ポンプ9およびフィルタ8を介して洗浄槽5の上
方に循環させる構成となっている。
Next, a cleaning process using the above cleaning device will be described with reference to FIGS. The outline of each device used in each step will be described with reference to FIGS. 5A and 5B. In addition to the cleaning device of FIG. 1, the cleaning liquid in the cleaning tank 5 is cleaned from the lower part of the cleaning tank 5 via the circulation pump 9 and the filter 8. It is configured to circulate above the tank 5.

【0028】また、図5cの液の除去工程において、エ
アー吹き付け用容器の上部にはエアー吹き付け口10が
開口し、容器の底部に配置された液切り用の洗浄物受け
台11上に被洗浄物が載置された状態で、この被洗浄物
に付着して搬入された洗浄液が落下して溜まる、あるい
はエアーによって飛散された洗浄液が溜まるように液受
けが配備されている。
Further, in the liquid removing step of FIG. 5c, the air blowing port 10 is opened in the upper portion of the air blowing container, and the cleaning object receiving base 11 for draining is placed at the bottom of the container to be cleaned. A liquid receiver is provided so that the cleaning liquid that has adhered to and is carried into the object to be cleaned drops and accumulates, or the cleaning liquid that has been scattered by air accumulates in the state where the object is placed.

【0029】さらに、図5dの乾燥工程において、被洗
浄物を充分に乾燥するための温風乾燥機は、送風機16
によってエアーがヒーター15およびHEPAフィルタ
ー14を介して供給され、乾燥機内で被洗浄物を乾燥す
る構成となっている。
Further, in the drying step of FIG. 5D, the warm air dryer for sufficiently drying the object to be cleaned is the blower 16
The air is supplied through the heater 15 and the HEPA filter 14 to dry the object to be cleaned in the dryer.

【0030】上記洗浄工程を具体的に説明すると、図1
に示す洗浄装置を図5aおよびbで示すように2連で準
備し、そのうちの第1段階の洗浄槽5Aに炭化水素系溶
剤(商品名「クリンゾール3000」、パラフィン系飽
和炭化水素)を投入し、上記上下揺動系を備えた装置に
よって洗浄を実施する。また、第2段階の洗浄槽5Bに
IPAを投入し、上記上下揺動系を備えた装置によって
洗浄を実施する。
The above cleaning step will be described in detail with reference to FIG.
As shown in FIGS. 5a and 5b, the cleaning apparatus shown in FIG. 5 is prepared in two sets, and a hydrocarbon solvent (trade name “Crinsol 3000”, paraffin saturated hydrocarbon) is charged into the first-stage cleaning tank 5A. Cleaning is performed by an apparatus equipped with the vertical swing system. Further, IPA is put into the cleaning tank 5B of the second stage, and cleaning is performed by the device having the above-mentioned vertical swing system.

【0031】洗浄サンプルとして、図6aおよびbに示
すように、止まり穴41(φ1mm,深さ10mm)が
2箇所、貫通孔42(φ2mm)が2箇所あり、寸法が
1辺20mmの立方体のアルミブロックを各々2個使用
する。これを、金属精密加工用オイルのカット201
(商品名、三菱石油(株)製)に浸漬し、オイルを約
0.1g付着させて被洗浄物とし、外観品質と残留油分
との確認をするものとする。
As a cleaning sample, as shown in FIGS. 6A and 6B, there are two blind holes 41 (φ1 mm, depth 10 mm), two through holes 42 (φ2 mm), and a cubic aluminum piece with a side of 20 mm. Use two blocks each. This is the oil cut 201 for precision metal processing.
It shall be immersed in (trade name, manufactured by Mitsubishi Petroleum Co., Ltd.) and about 0.1 g of oil should be adhered to it to make it an object to be cleaned, and the appearance quality and residual oil content shall be confirmed.

【0032】図5で示すように、第1の洗浄槽5Aで、
次に第2の洗浄槽5Bで被洗浄物を順次移し替えなが
ら、常温において各3分の洗浄を実施し(図5aおよび
b)、エアーブロー1分をその後に実施し(図5c)、
80℃の温風乾燥機により3分間乾燥を行った(図5
d)。
As shown in FIG. 5, in the first cleaning tank 5A,
Next, while sequentially transferring the objects to be cleaned in the second cleaning tank 5B, cleaning is performed at room temperature for 3 minutes each (FIGS. 5a and 5b), and air blowing is performed for 1 minute after that (FIG. 5c).
Drying was carried out for 3 minutes with a warm air dryer at 80 ° C (Fig. 5).
d).

【0033】第1段階の洗浄槽5Aでの上下揺動速度
は、ストローク50mmのところを10sec往復と
し、回転速度は24rpmとした。回転方向は揺動アー
ムの下降・上昇に合わせて回転方向が変わる正逆回転で
ある。10sec往復とは、50mmのところを片道5
sec、往復10secからなることを示し、60mm
/minに相当する。第2段階の洗浄槽5Bでの回転速
度,揺動ストロークおよび揺動速度とも第1段階と同じ
条件である。
The vertical swing speed in the cleaning tank 5A in the first stage was set to reciprocate for 10 seconds at a stroke of 50 mm, and the rotation speed was 24 rpm. The rotation direction is forward / reverse rotation in which the rotation direction changes as the swing arm descends and rises. A 10-second round trip means one way at 50 mm.
sec, round trip 10 seconds, 60 mm
/ Min. The rotation speed, the swing stroke, and the swing speed in the cleaning tank 5B in the second stage are the same as those in the first stage.

【0034】オイル分付着量約0.1gのワークを洗浄
した結果、本実施の形態ではオイル分付着量0.1mg
未満となった。この結果を表1に示す。比較例として、
第1段階・第2段階のそれぞれを上下揺動のみ、回転の
みとしたデータも示す。
As a result of cleaning a work having an oil content of about 0.1 g, the present embodiment has an oil content of 0.1 mg.
Was less than. Table 1 shows the results. As a comparative example,
Also shown are data in which only the vertical swing and the rotation only are performed in the first and second stages.

【0035】[0035]

【表1】 [Table 1]

【0036】この比較例の上下揺動条件は、本実施の形
態と同様に50mmストローク,往復10secの揺動
とし、回転の条件も本実施の形態と同様に24rpmの
正逆回転とした。
The vertical swing condition of this comparative example was 50 mm stroke and reciprocating 10 sec as in this embodiment, and the rotation condition was 24 rpm forward / reverse rotation as in this embodiment.

【0037】本実施の形態によれば、比較例の洗浄デー
タに比べ、外観品質および油分残渣量ともに良好な結果
が得られた。
According to the present embodiment, as compared with the cleaning data of the comparative example, good results were obtained in terms of appearance quality and amount of oil residue.

【0038】(実施の形態2)図7および図8は本実施
の形態を示し、図7はピッチが付着したレンズの側面
図、図8a〜cは洗浄工程を示す概略図である。本実施
の形態では、前記実施の形態1と全く同様な装置を用い
て、レンズに付着したピッチの洗浄を実施した。但し、
第1槽および第2槽には投げ込み方式の超音波振動子を
配置した点のみが異なっている。
(Embodiment 2) FIGS. 7 and 8 show the present embodiment, FIG. 7 is a side view of a lens to which a pitch is attached, and FIGS. 8A to 8C are schematic views showing a cleaning process. In the present embodiment, cleaning of the pitch adhered to the lens was carried out by using the same apparatus as in the first embodiment. However,
The only difference is that the first tank and the second tank are provided with a throw-in type ultrasonic transducer.

【0039】図7に示すように、レンズ形状はφ25凸
レンズ(硝材BK−7)、φ18メニスカスレンズ(硝
材FSL−5)で、洗浄ピッチはK−3,K−8,K−
6と少量の松ヤニおよび密鑞の混合物(日本アランダム
製)とを用いた。各成分の比率は1:1:1:1での混
合を行った。これらを溶かし、レンズ面に刷毛を用いて
ピッチを塗布した。
As shown in FIG. 7, the lens shape is φ25 convex lens (glass material BK-7), φ18 meniscus lens (glass material FSL-5), and the cleaning pitch is K-3, K-8, K-.
6 and a small amount of a mixture of pine resin and denim (manufactured by Nippon Alundum) were used. Mixing was performed at a ratio of each component of 1: 1: 1: 1. These were melted and a pitch was applied to the lens surface using a brush.

【0040】図8a〜cに本装置を用いた洗浄工程を示
す(図5のa〜cと同様である)。第1槽には、オリン
パスケミテック(株)製EE−4110を、第2槽には
IPAを投入した。EE−4110はテルペン類および
脂肪族炭化水素を成分とする溶剤である。第1槽にのみ
前記実施の形態1と同様な回転併用揺動アームを洗浄槽
に設置しているが、第2槽は上下揺動のみである。ま
た、第1槽および第2槽共に洗浄槽の底には超音波振動
子が設置され、上下揺動との併用作動がなされる。
8A to 8C show a cleaning process using the present apparatus (similar to FIGS. 5A to 5C). EE-4110 manufactured by Olympus Chemitec Co., Ltd. was put in the first tank, and IPA was put in the second tank. EE-4110 is a solvent containing terpenes and aliphatic hydrocarbons. Only the first tank is provided with the rotary and swing oscillating arm similar to that of the first embodiment in the cleaning tank, but the second tank is only vertically oscillated. Further, both the first tank and the second tank are provided with ultrasonic transducers at the bottom of the cleaning tank, and are operated in combination with vertical swing.

【0041】使用した超音波の仕様は28kHz/60
0Wとした。ピッチ洗浄において超音波振動子を併設し
たのは、液流のみではピッチの効果的な洗浄ができない
ためである。揺動アームの正逆回転の速度を120rp
mとし、揺動速度を50mmストローク,往復2sec
(片道1sec)とした。
The specifications of the ultrasonic waves used are 28 kHz / 60
It was set to 0W. The reason why the ultrasonic transducer is provided in the pitch cleaning is that the pitch cannot be effectively cleaned only by the liquid flow. Rotational speed of the swing arm is 120 rp
m, swing speed 50 mm stroke, reciprocating 2 sec
(One-way 1 sec).

【0042】洗浄サンプルとして図7に示すピッチ付き
のレンズを用い、第1槽より洗浄を実施した。第1槽の
液温を50℃、第2槽の液温を常温とした。各槽5分づ
つの洗浄を実施した後、エアーブローを3分かけて乾燥
を行った。各槽3分の洗浄をした後、IPAをエアーで
30秒程度の液切りを実施し、レンズ表面のピッチの落
ち具合を調べた。その結果を表2に示す。比較例とし
て、第1槽にて本実施の形態で行っていた回転併用上下
揺動を無くし、超音波のみの条件で洗浄したデータを記
載する。なお、第2槽以降は本実施の形態と同様に超音
波洗浄〜エアー液切りを実施した。
Cleaning was carried out from the first tank using the lens with pitch shown in FIG. 7 as a cleaning sample. The liquid temperature in the first tank was 50 ° C., and the liquid temperature in the second tank was room temperature. After each tank was cleaned for 5 minutes, air was blown for 3 minutes to dry it. After washing for 3 minutes in each tank, IPA was drained with air for about 30 seconds to examine the degree of pitch drop on the lens surface. The results are shown in Table 2. As a comparative example, data obtained by eliminating the combined vertical rotation and rotation performed in the first tank in the first tank and cleaning under the condition of only ultrasonic waves will be described. In the second and subsequent tanks, ultrasonic cleaning to air drainage were carried out in the same manner as in the present embodiment.

【0043】[0043]

【表2】 [Table 2]

【0044】本実施の形態によれば、ピッチ等の固形物
の溶解洗浄に対し、単なる超音波洗浄(比較例)に比べ
て極めて有効であることが分かった。
According to the present embodiment, it has been found that it is extremely effective in cleaning solids such as pitches by dissolution as compared with simple ultrasonic cleaning (comparative example).

【0045】(実施の形態3)図9aおよびbは本実施
の形態の洗浄工程を示す概略図である。本実施の形態で
は、図1と全く同様な装置を用いて洗浄液切り性を調べ
た。この狙いは洗浄液を次工程へ極力持ち込まないよう
にするものである。本発明における正逆回転と上下揺動
との併用は洗浄ばかりではなく、被洗浄物のワークに付
着した液を空気中にて切るのにも有効であり、その検証
のために本実施の形態のテストを行った。
(Embodiment 3) FIGS. 9A and 9B are schematic views showing the cleaning process of this embodiment. In the present embodiment, the cleaning liquid draining property was examined by using the same device as in FIG. This aim is to prevent the cleaning solution from being brought into the next process as much as possible. The combined use of forward / reverse rotation and vertical swing in the present invention is effective not only for cleaning but also for cutting the liquid adhering to the workpiece to be cleaned in the air. Was tested.

【0046】図9aは被液切りワークの槽への浸漬状態
を図示し、図9bは槽から引き上げた状態の変化を図示
したものである。槽の構成としては、単槽の炭化水素系
洗浄液のみであり、この単槽に同様な正逆回転揺動併用
のアームが設置されている。洗浄物は前記実施の形態2
のピッチの実験で使用したカゴに並べたレンズである
(n=40枚/カゴ)。レンズはピッチ等の汚れが付着
していない清浄なレンズを用いた。
FIG. 9a shows a state in which the liquid-removed workpiece is immersed in the tank, and FIG. 9b shows a change in the state of being pulled up from the tank. The configuration of the tank is only a single tank of hydrocarbon-based cleaning liquid, and a similar arm for forward / reverse rotation swing is installed in this single tank. The washed product is the same as in the second embodiment.
It is a lens arranged in the basket used in the pitch experiment (n = 40 sheets / basket). The lens used was a clean lens free from dirt such as pitch.

【0047】洗浄槽への浸漬前後において、被洗浄物に
付着した液の重量の変化を電子天秤で測定した。揺動ア
ームの正逆回転速度を120rpm、揺動速度を50m
mストローク,往復2sec(片道1sec)とした
(前記実施の形態2と同条件)結果を表3に示す。比較
例として、洗浄槽上で引き上げた状態のみで強制的に液
切りを一切しない場合についてテストしたデータを記載
する。
Before and after the immersion in the cleaning tank, the change in the weight of the liquid adhering to the object to be cleaned was measured by an electronic balance. Forward / reverse rotation speed of the swing arm is 120 rpm, swing speed is 50 m
Table 3 shows the results obtained by setting m strokes and reciprocating 2 sec (one-way 1 sec) (same conditions as in the second embodiment). As a comparative example, the data of the test in which the liquid is forcibly drained only in the state of being pulled up on the cleaning tank is described.

【0048】[0048]

【表3】 [Table 3]

【0049】洗浄槽の液温は常温とし、浸漬後2分間の
液切りを実施した。比較例も空気中放置を2分間行っ
た。これによると、本実施の形態の正逆回転揺動併用の
液切りにより、次槽に持ち出す液量は約10g→5gへ
と1/2程度に低減された。
The liquid temperature in the cleaning tank was normal temperature, and the liquid was drained for 2 minutes after the immersion. The comparative example was also left in the air for 2 minutes. According to this, the amount of liquid taken out to the next tank was reduced to about 1/2 from about 10 g to 5 g by the liquid draining of the present embodiment, which is used in combination with forward and reverse rotation swing.

【0050】本実施の形態によれば、液切りによって次
槽液の寿命が2倍程度長くなることが分かった。
According to the present embodiment, it was found that the life of the next tank liquid is doubled by draining.

【0051】(実施の形態4)図10a〜cは本実施の
形態の洗浄工程を示す概略図である。本実施の形態で
は、前記実施の形態2と同様な洗浄装置において、洗浄
槽の底部にファン(撹拌子)を付加した装置にて洗浄を
実施した(図10a参照)。洗浄条件およびサンプルは
前記実施の形態2と全く同様である。ここでは、回転併
用の揺動アームと撹拌子との回転方向を逆にしている。
(Embodiment 4) FIGS. 10A to 10C are schematic views showing the cleaning process of this embodiment. In the present embodiment, in the same cleaning device as in the second embodiment, cleaning is performed by a device in which a fan (stirring member) is added to the bottom of the cleaning tank (see FIG. 10a). The washing conditions and the sample are exactly the same as those in the second embodiment. Here, the rotation directions of the swing arm for both rotation and the stirrer are reversed.

【0052】揺動アームの正逆回転速度を60rpm、
揺動速度を50mmストローク,往復4sec(片道2
sec)とした。撹拌子の回転方向は揺動アームの回転
方向と常に逆であり、回転速度を60rpmとした。洗
浄槽の第1槽は正逆回転併用の揺動アームと撹拌子とを
有しており、第2槽は超音波振動子を有している。
The rotation speed of the swing arm is 60 rpm,
Swing speed is 50mm stroke, reciprocating 4sec (one way 2
sec). The rotation direction of the stirrer was always opposite to the rotation direction of the swing arm, and the rotation speed was 60 rpm. The first tank of the cleaning tank has a swing arm for both forward and reverse rotations and an agitator, and the second tank has an ultrasonic transducer.

【0053】第1槽には前記実施の形態2と同様なEE
−4110(液温50℃)を使用し、第2槽にはIPA
(常温)を使用した。各槽5分づつの洗浄を行った後、
液切り槽にて3分間のエアーブローを行って乾燥させ
た。洗浄結果を、前記実施の形態2および比較例を記載
した表2に併記する。
The same EE as in the second embodiment is used in the first tank.
-4110 (liquid temperature 50 ° C) is used, and IPA is used in the second tank.
(Normal temperature) was used. After washing each tank for 5 minutes,
Air was blown for 3 minutes in the draining tank to dry. The cleaning results are also shown in Table 2 which describes the second embodiment and the comparative example.

【0054】本実施の形態によれば、ピッチ残りの不良
が40コ中2コであり、前記実施の形態2とほぼ同等の
良好な洗浄結果となった。
According to the present embodiment, the defective pitch remaining was 2 out of 40, and the good cleaning result was almost the same as that of the second embodiment.

【0055】[0055]

【発明の効果】請求項1〜4の効果は、洗浄槽中の洗浄
性アップおよび次槽への液の持ち込みを極端に低減でき
る。
The effects of the first to fourth aspects are that the cleaning performance in the cleaning tank can be improved and the carry-in of the liquid to the next tank can be extremely reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】実施の形態1を示す洗浄装置の正面図である。FIG. 1 is a front view of a cleaning device showing a first embodiment.

【図2】実施の形態1を示すグラフである。FIG. 2 is a graph showing the first embodiment.

【図3】実施の形態1を示すグラフである。FIG. 3 is a graph showing the first embodiment.

【図4】実施の形態1を示すグラフである。FIG. 4 is a graph showing the first embodiment.

【図5】a〜dは実施の形態1の洗浄工程を示す概略図
である。
5A to 5D are schematic views showing a cleaning process according to the first embodiment.

【図6】aおよびbは実施の形態1の洗浄サンプルの斜
視図および平面図である。
6A and 6B are a perspective view and a plan view of the cleaning sample according to the first embodiment.

【図7】実施の形態2を示すレンズの側面図である。FIG. 7 is a side view of the lens according to the second embodiment.

【図8】a〜cは実施の形態2の洗浄工程を示す概略図
である。
8A to 8C are schematic diagrams showing a cleaning process according to the second embodiment.

【図9】aおよびbは実施の形態3の洗浄工程を示す概
略図である。
9A and 9B are schematic diagrams showing a cleaning process according to the third embodiment.

【図10】a〜cは実施の形態4の洗浄工程を示す概略
図である。
10A to 10C are schematic diagrams showing a cleaning process according to the fourth embodiment.

【符号の説明】[Explanation of symbols]

1,A モータ 2 固定台 3 揺動アーム 4 洗浄物受けカゴ 5 洗浄槽 20 洗浄機本体 21 スライド柱 22 円柱 23 支持板 31 案内レール 1, A motor 2 fixed base 3 swing arm 4 washing object receiving basket 5 washing tank 20 washing machine body 21 slide column 22 column 23 support plate 31 guide rail

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 洗浄液を入れた洗浄槽内で被洗浄物を収
納した洗浄物受けカゴを揺動アームを介して上下揺動
し、前記被洗浄物を洗浄する洗浄方法において、前記洗
浄物受けカゴの上下揺動時に揺動アームが正逆回転して
洗浄することを特徴とする洗浄方法。
1. A cleaning method for cleaning an object to be cleaned by vertically swinging a cleaning object receiving basket containing an object to be cleaned in a cleaning tank containing a cleaning liquid through a swing arm. A washing method characterized in that the swing arm rotates forward and backward to wash when the basket swings up and down.
【請求項2】 前記洗浄物受けカゴの上下揺動時に、揺
動が下方へ向かうときは洗浄物受けカゴが正回転し、揺
動が上方へ向かうときは洗浄物受けカゴが逆回転するこ
とを特徴とする請求項1記載の洗浄方法。
2. When the cleaning item receiving basket swings up and down, the cleaning item receiving basket rotates normally when the swing is downward, and the cleaning item receiving basket rotates reversely when the swing is upward. The cleaning method according to claim 1, wherein:
【請求項3】 前記洗浄槽の底部にファンを有し、該フ
ァンが前記洗浄物受けカゴの回転と逆回転に同期して駆
動することを特徴とする請求項1記載の洗浄方法。
3. The cleaning method according to claim 1, wherein a fan is provided at the bottom of the cleaning tank, and the fan is driven in synchronization with the rotation and the reverse rotation of the cleaning object receiving basket.
【請求項4】 洗浄液を入れた洗浄槽と、被洗浄物を収
納する洗浄物受けカゴと、該洗浄物受けカゴを下端に支
持する揺動アームと、該揺動アームを回転させながら前
記洗浄物受けカゴを洗浄槽内で上下動するとともに、正
逆回転させる可逆可変な駆動手段とを具備したことを特
徴とする洗浄装置。
4. A cleaning tank containing a cleaning liquid, a cleaning object receiving basket for containing an object to be cleaned, a swing arm for supporting the cleaning object receiving basket at a lower end, and the cleaning while rotating the swing arm. A cleaning device comprising: a reversible variable drive means for vertically moving the object receiving basket in a cleaning tank and rotating the container in a normal direction.
JP11374196A 1996-05-08 1996-05-08 Cleaning method and cleaning apparatus Withdrawn JPH09294965A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11374196A JPH09294965A (en) 1996-05-08 1996-05-08 Cleaning method and cleaning apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11374196A JPH09294965A (en) 1996-05-08 1996-05-08 Cleaning method and cleaning apparatus

Publications (1)

Publication Number Publication Date
JPH09294965A true JPH09294965A (en) 1997-11-18

Family

ID=14619960

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11374196A Withdrawn JPH09294965A (en) 1996-05-08 1996-05-08 Cleaning method and cleaning apparatus

Country Status (1)

Country Link
JP (1) JPH09294965A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013208514A (en) * 2012-03-30 2013-10-10 Tosei Kk Device and method for washing and drying
JP2014517155A (en) * 2011-06-24 2014-07-17 エーシーエム リサーチ (シャンハイ) インコーポレーテッド Method and apparatus for forming a uniform metal film on a substrate
KR101438550B1 (en) * 2012-10-31 2014-09-15 한전케이피에스 주식회사 Bowl auto-cleaning device of diesel engine heavy fuel oil/light oil purifier
CN106311640A (en) * 2016-08-26 2017-01-11 安徽云图信息技术有限公司 Communication equipment cleaning device
CN106391632A (en) * 2016-12-09 2017-02-15 无锡银联齿轮传动机械有限公司 Rotation supporting structure of rotation transmission shaft of small component cleaning machine
CN108655068A (en) * 2018-05-15 2018-10-16 鲁锋 A kind of Chinese medicine working process cleaning equipment with jet cleaning function
CN109201621A (en) * 2018-09-07 2019-01-15 许国武 A kind of metal wrist strap indicating quartz electronic wristwatch gap depth descaling rinsing device

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014517155A (en) * 2011-06-24 2014-07-17 エーシーエム リサーチ (シャンハイ) インコーポレーテッド Method and apparatus for forming a uniform metal film on a substrate
US9666426B2 (en) 2011-06-24 2017-05-30 Acm Research (Shanghai) Inc. Methods and apparatus for uniformly metallization on substrates
JP2013208514A (en) * 2012-03-30 2013-10-10 Tosei Kk Device and method for washing and drying
KR101438550B1 (en) * 2012-10-31 2014-09-15 한전케이피에스 주식회사 Bowl auto-cleaning device of diesel engine heavy fuel oil/light oil purifier
CN106311640A (en) * 2016-08-26 2017-01-11 安徽云图信息技术有限公司 Communication equipment cleaning device
CN106391632A (en) * 2016-12-09 2017-02-15 无锡银联齿轮传动机械有限公司 Rotation supporting structure of rotation transmission shaft of small component cleaning machine
CN108655068A (en) * 2018-05-15 2018-10-16 鲁锋 A kind of Chinese medicine working process cleaning equipment with jet cleaning function
CN109201621A (en) * 2018-09-07 2019-01-15 许国武 A kind of metal wrist strap indicating quartz electronic wristwatch gap depth descaling rinsing device
CN109201621B (en) * 2018-09-07 2021-06-04 许国武 Metal wrist strap pointer type quartz electronic watch gap deep descaling and cleaning device

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