JPH09290953A - Film peeling equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To perform the centering without damaging a surface of a substrate made of glass. SOLUTION: This film peeling equipment comprises a carrying roller 12 to move a substrate P to an upper surface of which a film is attached in the carrying direction supporting a lower side of the substrate, a centering means 14 to perform truing-up of side edge of the film by operating each side part of the substrate P, and a floating means 16 arranged below the carrying roller 12. The floating means 16 contains a plurality of rotary ball members 18, and each of the rotary ball members 18 is abutted on the lower surface of the substrate P, and lifts the substrate P upward so as to be separated from the carrying roller 12, and movably supports the substrate.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film peeling device for peeling a protective film attached to a substrate, and more specifically, one end of a protective film attached to one side of a substrate made of glass is separated from the substrate. The present invention relates to a film peeling device in a form in which a protective film having one end partially peeled off is completely separated from a substrate.

[0002]

2. Description of the Related Art In the production of printed wiring boards, copper foil is attached to both sides of a core plate made of glass fiber reinforced epoxy resin or the like to form a copper clad laminate, and both sides of the copper clad laminate are formed. A printed wiring board material in which a photoresist layer and a protective film are laminated is used. Then, both sides of this printed wiring board material are irradiated with a circuit pattern to expose the photoresist layer, and thereafter the protective films (hereinafter simply referred to as “film”) present on both surfaces are peeled off.

A film peeling device capable of peeling a film from at least one side of a substrate such as a printed wiring board material having a rectangular shape when viewed from above is disclosed in, for example, Japanese Patent Application Laid-Open No. 4-164770. This film peeling device includes a substrate conveying means, a clamping means, an end peeling means (end separating means), and a peeling means.

The substrate carrying means comprises a plurality of carrying rollers. The substrate carrying means moves the substrate having the film adhered on at least one surface in a substantially horizontal state, moves it in the carrying direction until its front end reaches the end peeling position, and stops it once, and further in the carrying direction. Transport. The edge stripping means is positioned at the edge stripping position and acts on the front edge of the substrate temporarily clamped by the clamping means to partially strip the front edge of the film from the substrate. The peeling means is a gas jetting means for jetting a gas between the substrate being moved in the transport direction and the front end of the film, and the film whose front end is partially peeled off from both sides of the substrate, respectively. It includes film peeling and conveying means for forcibly conveying the film upward and downward. The film peeling / conveying means is composed of a plurality of belt mechanisms.

Although not disclosed in the above publication, the substrate carrying means has a centering means for acting on both sides of the substrate to position the substrate at the center in the width direction of the substrate carrying means, that is, to align the width. It is equipped. The centering means includes a pair of support plates arranged along both sides of the substrate transfer means, and a plurality of centering pins that are upright at intervals along each of the support plates. Each of the support plates is supported by stationary frame bodies provided on both sides of the substrate transfer means via guide support means so as to be movable in the width direction of the substrate transfer means. An air cylinder for reciprocating each of the support plates in the width direction is interposed between each of the support plates and the corresponding stationary frame body.

The substrate is carried from the upstream side of the film peeling device onto the carrying roller of the substrate carrying means, and the centering means performs the centering action (width-shifting action) in a state where the substrate is positioned at a predetermined position. That is, when the support plates are moved by the respective air cylinders in the width direction and in the directions approaching each other by the same predetermined stroke, the centering pins in each of the support plates are also moved in accordance with the movement. A part of each outer peripheral surface abuts a corresponding side surface of the substrate to position the substrate at the center in the width direction. The centered substrate is conveyed toward the edge peeling means.

[0007]

In carrying out the centering operation by the above-mentioned centering means, the other surface of the substrate, that is, the lower surface, supported on the carrying roller is, as will be easily understood, the outer peripheral surface of the carrying roller. The contact portion is moved relative to each other in the axial direction. Such relative movement does not cause any particular problem when the substrate is the above-mentioned printed wiring board material.

However, when the substrate is made of glass, the relative movement causes sliding friction between the lower surface of the substrate and the outer peripheral surface of the conveying roller, and thus the lower surface of the glass substrate may be scratched. Maybe there. A typical example of the glass substrate is a color plasma display panel (hereinafter simply referred to as "PDP").
Can be mentioned. The principle of PDP is to irradiate a fluorescent substance with ultraviolet rays emitted when a gas enclosed between two glasses is discharged like a fluorescent lamp, to emit light. This is a flat display for a large screen that replaces the conventional cathode ray tube. Demand for TVs (for example, TVs for wall hangings) is expected, and has recently attracted attention among those skilled in the art.

One of the glasses constituting the PDP (display side)
A transparent electrode, a dielectric layer, a protective layer (MgO), etc. are formed in a thin film on one surface of the glass, and a partition, an electrode, a phosphor, etc. are formed in a thick film on the other surface of the glass. The thickness of each glass is about 1.8 mm to 3.0 mm, and the film is a thick film,
Each of the thin films has a thickness of a micron unit. Then, after the film is formed on each glass, it is completed through processes such as sealing, exhausting, and gas filling. In general, the PDP manufacturing process as described above includes, for example, a process of laminating a photoresist layer and a film, and performing exposure, development and the like. Therefore, as in the case of manufacturing the printed wiring board, it is necessary to peel the film from the glass substrate by using the film peeling apparatus of the above-described form also in the process of manufacturing the PDP.

In carrying out the process of peeling off the film attached to one surface of the glass substrate, it is, of course, strictly required not to scratch the surface of the glass. In view of the conventional film peeling apparatus from this point of view, when performing the centering operation by the above-mentioned centering means, the lower surface of the substrate (the surface opposite to the surface on which a film such as a dielectric layer is formed) is supported on the transport roller. surface)
However, the fact that there is a risk that the lower surface of the glass substrate is likely to be scratched as a result of being moved relative to the outer peripheral surface of the transport roller while causing sliding friction, which is not a permissible matter at all, is an improvement. Is being requested.

The present invention has been made on the basis of the above facts, and an object thereof is to provide an improved film peeling apparatus capable of performing a centering action without scratching a glass substrate. It is to be.

[0012]

According to the present invention, an end stripping means that acts on a substrate having a film adhered to one surface thereof to partially strip one end of the film from the substrate,
Substrate transport means including a plurality of transport rollers for moving the substrate toward the edge peeling means while supporting the other surface side, the substrate transport means acting on both side portions of the substrate. In the film peeling apparatus, which includes a centering unit for moving the substrate closer to the substrate, the substrate transporting unit includes a floating unit disposed below the floating unit, and the floating unit includes a support frame and the support frame. A plurality of rotary ball members rotatably disposed on the support frame and the support frame, and each of the rotary ball members comes into contact with the other surface of the substrate to separate the substrate from the transport roller. Such that the rotary ball members are movably supported by the upper position and the rotating ball members are separated from the other surface of the substrate downward to support the substrate on the transport roller. Lifting for positioning And a stage, film peeling apparatus characterized by, is provided.

Since the present invention is constructed as described above, before performing the centering action on the substrate, the floating means is actuated to lift the substrate upward so that it is separated from the transfer roller by each of the rotating ball members. It can be movably supported. If the centering operation is performed in this state, the substrate is moved relative to each of the rotating ball members, not to the relative movement of the transport roller. Therefore, as will be readily understood, there is substantially no relative sliding friction between the bottom surface of the substrate and each of the rotating ball members that are in contact therewith, and instead there is no relative rolling. Will be done. As a result, even if the substrate is made of glass, centering ensures that its lower surface is not scratched, so there is no risk of damaging the image-forming area of the substrate, and therefore its quality is desired. Guaranteed as follows.

[0014]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of a film peeling apparatus constructed according to the present invention will be described in detail below with reference to the accompanying drawings.

FIG. 1 schematically shows an embodiment of a main part of a film peeling apparatus including a novel centering means which is a feature of the present invention. Before describing the centering means, first, an overview of the entire film peeling apparatus will be described with reference to FIG. The film peeling apparatus indicated by reference numeral 2 as a whole includes a substrate conveying means 4, a clamping means 6, a substrate stop positioning means 7, an end peeling means 8 and a peeling means 10.
Contains. The substrate P shown by the two-dot chain line in FIG.
It is made of glass with a film attached to one surface (upper surface).

The substrate conveying means 4 arranged on the entrance side of the film peeling device 2 comprises a plurality of conveying rollers 12. The transport rollers 12 extend in the width direction so as to support the lower surface of the substrate P over the entire width in the width direction, and are arranged substantially horizontally at intervals in the transport direction F of the substrate P. These transport rollers 12 are drivingly coupled via a toothed belt so as to be rotationally driven by an electric motor, except for the transport roller 12a at the downstream end thereof (neither is shown). By rotating and driving each of the transport rollers 12, the substrate P can be moved in the transport direction F along the substrate transport surface PL. The substrate transfer means 4 also includes a floating means 14 and a centering means 16 which will be described in detail later. Floating means 14
Is provided with a plurality of rotating ball members 18, and the centering means 16 is provided with a plurality of centering pins 20. The centering means 16 is provided with pinch roller means 22 to be described later, and the pinch roller means 22 is provided with two pinch rollers 24 arranged on both sides of the substrate transport means 4 at intervals in the transport direction F. There is.

The clamp means 6 is provided with a pair of upper clamp members 25 and a pair of lower clamp members 26 which are arranged below each other and are spaced apart from each other.
Each of the upper clamp members 25 and the lower clamp members 26
Each of the non-operating positions separated from the substrate P upward and downward by an air cylinder (only one air cylinder 27 of the lower clamp member 26 is shown in FIG. 1) provided in association with each. And an operating position for clamping both side edges in the width direction on the upper surface and the lower surface of the substrate P with a predetermined pressure.
A table member 28 for supporting the peeling action of the end peeling means 8 from the lower side is mounted downstream of each of the lower clamp members 26. Table member 28
Are configured to be moved up and down integrally with each of the lower clamp members 26.

The stop positioning means 7 for the substrate P includes a stop position detector 30 mounted on the table member 28. The stop position detector 30 is composed of a reflection type optical sensor known per se. Reference numeral 32 is an overrun detector for detecting an overrun of the substrate P, and is arranged at a downstream side in the transport direction of the stop position detector 30.

An edge peeling means 8 is arranged at the downstream end of the substrate transport means 4. The end stripping means 8 includes a moving body 34 configured to be reciprocally moved in the width direction by an air cylinder (not shown), and a plurality of pressure contact rollers 36 supported by the moving body 34 so as to be vertically movable by an air cylinder (not shown). I have it. At least two of the pressure rollers 36
The horizontal axes are tilted in the width direction. The moving body uses an air cylinder to move the moving start position of one side of the substrate P,
It can reciprocate between the folding position on the other side. Further, the pressure roller 36 mounted on the moving body 34 is placed in a non-operating position which is separated upward from the upper surface of the substrate P by an air cylinder, and in an operating position where the upper surface of the substrate P is pressure-contacted to perform an end separation operation. It is configured to be selectively positioned.

The conveying roller 1 is provided on the downstream side of the end peeling means 8.
A transport roller 37 similar to that in No. 2 is arranged. A pair of pinch rollers 38 are arranged above the transport rollers 37 so as to be movable up and down by an air cylinder 39. Each of the pinch rollers 38 is arranged above and spaced apart in the width direction so as to face the transport roller 37, and the air cylinder 39 causes the non-acting position to be separated upward from the upper surface of the substrate P and the substrate P. It is configured to be selectively positioned at a working position where the widthwise side edge portion on the upper surface is brought into pressure contact with a predetermined pressure. The transport roller 37 cooperates with each of the pinch rollers 38 at the operating position of the pinch rollers 38 to hold the side edge portion of the substrate P in the width direction from below.

The peeling means 10 is provided on the downstream side of the conveying roller 37.
Is arranged. The peeling unit 10 includes a film peeling and conveying unit 40 and an air ejecting unit 42. The film peeling / conveying means 40 is provided in order to completely peel off the film partially peeled from the substrate P and convey it into a collection box (not shown) arranged below.
It includes an upper belt mechanism 44 and a lower belt mechanism 46. Each of the upper belt mechanism 44 and the lower belt mechanism 46 includes a plurality of belt wheels and a plurality of endless belts wound around them. Further, the air injecting means 42 is configured to inject compressed air in the upstream direction from a cylindrical member extending in the width direction. In the figure, numeral 48 indicates an auxiliary guide roller, and numeral 49 indicates a conveying roller. The upper belt mechanism 44, the lower belt mechanism 46, the auxiliary guide roller and the air ejecting means 42 may have substantially the same configuration as that disclosed in the above-mentioned Japanese Patent Application Laid-Open No. 4-164770, and therefore, further description is omitted. To do.

Upper belt mechanism 44 and lower belt mechanism 4
A plurality of pairs of wire guides 50 and 52 for guiding the film along the conveying path formed by the endless belt are provided in each of the parts 6. Each of the wire guide pairs 50 provided on the upper belt mechanism 44 includes an air cylinder 53.
Can be moved up and down freely. Reference numeral 54 is an electrostatic air blowing type static eliminator known per se, and is provided above the upper belt mechanism 44.

Another substrate carrying means 56 is arranged on the downstream side of the film peeling and carrying means 40. Substrate transfer device 2
The substrate transporting means 56 arranged on the exit side of the substrate is provided for transporting the substrate P, which is completely peeled off of the film and does not exist, further downstream, and is provided with a plurality of transporting rollers 58 similar to the transporting roller 12. Has been.

Next, referring mainly to FIGS. 2 and 3,
The substrate transfer device 4 including the transfer roller 12, the floating means 14 and the centering means 16 will be described in detail. First, the transport roller 12 will be described. The stationary frame means 60 is provided on both sides of the substrate transfer device 4 in the width direction.
Are arranged so as to extend in the transport direction F. Each of the stationary frame means 60 includes a side frame 62 made of a hollow member having a rectangular cross section, a horizontal frame 64 fixed to the side frame 62, and a vertical wall frame 66 fixed to the horizontal frame 64 at its lower end. A vertical pillar frame 67 is provided which is fixed to the lower surface of the side frame 62 and is arranged at intervals in the longitudinal direction of the side frame 62 (left-right direction in FIG. 2). The horizontal frame 64 and the vertical wall frame 66 are plate members. The transport roller 12 is supported between the vertical wall frames 66.

The conveying roller 12 is composed of a shaft 70 and a roller 72 fixed to the shaft 70. Both ends of the shaft 70 are rotatably supported by corresponding vertical wall frames 66 via bearings 74. The roller 72 is composed of a stainless pipe. With this configuration, dust is prevented from being generated from the roll itself, and the lower surface of the glass substrate P (which may be the surface of the display) is scratched as compared with a conventional transport roller having an outer peripheral surface lined with urethane rubber. This can be reliably prevented. The top of each of the transport rollers 12 has a horizontal transport surface P of the substrate P.
It is positioned to match L.

Next, the floating means 14 will be described. A horizontal horizontal frame 76 extending in the width direction is mounted between the pair of vertical pillar frames 67. An air cylinder 78 is attached to the center of the horizontal horizontal frame 76 having the L-shaped cross section (the center in the width direction of the substrate transfer means 4), and the output side of the air cylinder 78 is a vertical horizontal frame 80 extending in the substrate transfer direction. Is installed. Therefore, the vertical and horizontal frame 80 can be moved up and down by the air cylinder 78.
Four horizontal horizontal support plates 82 are mounted on the upper surface of the channel-shaped vertical horizontal frame member 80 at intervals in the transport direction. Each of the horizontal and horizontal support plates 82 is composed of an elongated plate member, and the central portion in the longitudinal direction thereof is a vertical and horizontal frame member 80.
Is fixed to the upper surface of the substrate, and both ends thereof extend so as to project in both width directions of the substrate transfer means 4. Vertical and horizontal frame member 8
0, each of the horizontal horizontal support plates 82 constitutes a support frame. Reference numeral C in FIG. 3 indicates a vertical center line passing through the center of the substrate transfer means 4 in the width direction.

Five ball rotation supports 84 are mounted on each of the horizontal horizontal support plates 82. As the ball rotating support 84, for example, those sold under the trade name "Ball Caster", model name "K142" by Taguigen Manufacturing Co., Ltd., or those having a similar structure are suitable. The ball rotation support 84 is the substrate P.
The rotating ball member 18 that directly abuts the lower surface of the rotating ball member 18 is made of a synthetic resin coating on the entire surface of a steel ball, or is itself formed of a synthetic resin (melamine resin as an example). What is
Is preferable in that the lower surface of the substrate P is not scratched. Each of the ball rotation supports 84 is composed of a rotation ball member 18 and a case that rotatably supports the rotation ball member 18 in all directions. A part of the rotation ball member 18 is exposed above the case. Is supported by the case.

The air cylinder 78 and the horizontal horizontal support plate 82
And each of the ball rotation supports 84 including the rotation ball member 18 constitute the floating means 14.
The tops of each of the rotating ball members 18 are positioned substantially coplanar. Each of the rotating ball members 18 is
The air cylinder 78 is configured to selectively position the substrate P at a non-acting position that is located below the transport surface PL and a working position that is above the transport surface PL. Since each of the horizontal and horizontal support plates 82 is positioned between the corresponding transport rollers 12, they do not interfere with each other when moving up and down.

Next, the centering means 16 will be described. Below each of the horizontal frames 64, a horizontal support plate 8 extending a predetermined length along both sides of the substrate transfer means 4.
6 are arranged. The horizontal support plate 86 is movably supported in the width direction via guide support means (not shown) provided in each of the horizontal frames 64 so as to extend in the width direction. Two guide means 90 are attached to each of the horizontal frames 64 at intervals in the carrying direction.
Each of the guide means 90 includes a support 92 mounted on the lower surface of the horizontal frame 64, and a channel-shaped guide rail 93 mounted on the lower surface of the support 92. On the other hand,
A guided member 94 is mounted on the upper surface of each horizontal support plate 86 so as to correspond to the guide rail 93.
Each of the four is movably fitted to the corresponding guide rail 93.

Four centering pins 20 are vertically fixed to each of the horizontal support plates 86. Thereby, each of the centering pins 20 is arranged so as to extend in the transport direction F along both sides of the transport means 4. A ring 20a is rotatably attached to the top of each centering pin 20. An air cylinder (not shown) is interposed between each of the horizontal support plates 86 and the corresponding stationary frame means 60. Therefore, the centering pin 2
0 indicates a non-acting position (a position indicated by a solid line in FIG. 3) in which a part of the outer peripheral surface of the ring 20a is separated from both side portions of the substrate P in the width direction by the air cylinder, and a part of the outer peripheral surface of the ring 20a. Is abutted on both sides of the substrate P and is selectively positioned at an operating position (position indicated by a two-dot chain line in FIG. 2) in which the substrate P is moved to the center in the width direction. Since each of the centering pins 20 is positioned between the transport rollers 12, they do not interfere with each other when reciprocating.

The pinch roller means 22 includes a horizontal support plate 86.
Each of the air cylinders 96 includes an air cylinder 96, and a support 98 mounted on the output side of the air cylinder 96. As shown in FIG. 2, the support 98 is T-shaped, and the pinch rollers 24 are rotatably supported at both ends of the T-shaped portion. Therefore, the two pinch rollers 24 are arranged on both sides of the substrate carrying means 4 at intervals in the carrying direction F. Since the air cylinders 96 are attached to the horizontal support plates 86, the pinch rollers 24 are reciprocally moved in the width direction together with the centering pins 20. The non-acting position (position shown by the solid line in FIG. 3) separated upward and the working position (position shown by the chain double-dashed line in FIG. 3) where the upper surface of the substrate P is brought into pressure contact with each other are selectively positioned. It is configured. Each of the pinch rollers 24 is arranged immediately above the two transport rollers 12b of the transport rollers 12, and in the working position, cooperates with the corresponding transport rollers 12b to form the widthwise side edge portion of the substrate P. The position is specified so that can be held.

Next, the operation of the film peeling device 2 configured as above will be described. The film peeling device 2 is automatically controlled by the control means including a microcomputer and various detectors, but these do not constitute the configuration of the present invention, and therefore the description thereof will be omitted.
Referring to FIG. 1, when a power switch (not shown) is turned on, the substrate P is loaded onto the transport roller 12 of the substrate transport means 4 on the inlet side from an apparatus (not shown) on the upstream side. Then, after the necessary data such as the substrate stop position is input to the control means, the apparatus automatically starts. First, the transport rollers 12 and 58, the upper belt mechanism 44, and the lower belt mechanism 46 of the substrate transport means 4 on the inlet side and the substrate transport means 56 on the outlet side are respectively activated. The substrate P is transported in the transport direction F by the transport roller 12. Substrate transfer means 4
When a detector (not shown) provided on the transport roller 12 detects the substrate P, the rotation of the transport roller 12 is stopped, and the substrate P is positioned at a predetermined position on the transport roller 12.

Air cylinder 7 of floating means 14
8 is actuated and the rotary ball member 18 is raised to the operating position. The substrate P is separated from the transport roller 12 and supported by the rotating ball member 18. Each of the centering pins 20 is then moved to the working position and the substrate P is centered on the rotating ball member 18. Since the lower surface of the substrate P rolls relatively on the rotating ball member 18, there is no sliding friction and the lower surface is not scratched. When the centering is completed, the rotating ball member 18 is lowered to the non-acting position, and the substrate P is again supported on the transport roller 12. The transport roller 12 is rotationally driven, and the transport of the substrate P is restarted.

When the stop position detector 30 detects the front end of the substrate P, the rotation of the carry roller 12 is stopped and the substrate P is stopped.
Movement stops. The substrate P is positioned at a predetermined reference stop position. Next, in order to move the substrate P from the reference stop position to the edge peeling position, the transport roller 12 is rotationally driven by a preset value, that is, the feed amount. This feed amount is detected by a rotary encoder (not shown) provided in association with one of the transport rollers 12, and the drive is stopped when it coincides with the set value.

After the substrate P is positioned at the end peeling position, the lower clamp member 26 and the table member 28 are raised to the working position, the upper clamp member 25 is lowered to the working position, and the pinch roller 24 is moved. It is lowered to the working position. Both side edges of the substrate P in the width direction are clamped or held by the upper clamp member 25 and the lower clamp member 26, and the pinch roller 24 and the transport roller 12b, respectively.

Then, at the movement start position of the moving body 34 of the edge peeling means 8, the pressure roller 36 is lowered to the working position, and is pressed against the upper surface of the end portion of the substrate P with a predetermined pressure. In this state, the moving body 34 is reciprocated between the movement start position and the turn-back position and returned to the movement start position. As a result, the pressing roller 36 is reciprocated in the width direction, and the end portion of the film on the substrate P is partially peeled off.

After the end peeling action of the film is performed, the pressure roller 36 is lifted from the working position to the non-working position. The lower clamp member 26 and the table member 28 are lowered to the non-acting position, the upper clamp member 25 is raised to the non-acting position, and the pinch roller 24 is further raised to the non-acting position. As described above, the restraint of the substrate P at the edge peeling position is released. The centering pin 20 is also moved to the inoperative position. Then, the transport roller 12 is rotationally driven, and the transport of the substrate P is started. The pinch roller 38 is lowered to the operating position at a predetermined timing, and the widthwise side edge of the substrate P is held between the pinch roller 38 and the transport roller 37 to move the substrate P in the transport direction.

When a sensor (not shown) detects the substrate P,
Compressed air is blown from the air jetting means 42 between the substrate P and the film partially peeled from the front end portion.
As a result, the peeling of the film is promoted, the front end of the film is deflected upward, is guided by the auxiliary guide roller 48, is sandwiched between the belts of the upper belt mechanism 44, and is conveyed upward. The substrate P is transported to the substrate transport means 56 on the exit side in a state where the film is completely peeled off. The film peeled from the substrate P has an upper belt mechanism 44 and a lower belt mechanism 46.
In this order, they are conveyed while being guided by the wire guide pairs 50 and 52, and are dropped into a collection box (not shown) below. The substrate P carried by the substrate carrying means 56 is carried out by the carrying roller 58 to the downstream apparatus.

Although the embodiments of the film peeling apparatus according to the present invention have been described above, the present invention is not limited to the above-mentioned embodiments, and various modifications and alterations can be made without departing from the scope of the present invention. It is possible. For example, the substrate to which the present invention is applied is glass, but the present invention is not limited to glass, and can be applied to substrates made of other easily scratched materials.

[0040]

According to the film peeling apparatus constructed according to the present invention, even if the substrate is made of glass, the centering action can be performed without scratching the surface. As a result, there is no risk of damaging the image-forming areas of the substrate, thus guaranteeing its quality as desired.

[Brief description of drawings]

FIG. 1 is a side view of a principal part schematically showing an embodiment of a film peeling apparatus configured according to the present invention.

FIG. 2 is a side view showing a part of a substrate carrying means included in the film peeling apparatus shown in FIG.

FIG. 3 is a partial cross-sectional view of a substrate carrying means included in the film peeling device shown in FIG.

[Explanation of symbols]

 2 Film Peeling Device 4 Substrate Conveying Means (Inlet Side) 6 Clamping Means 8 End Peeling Means 10 Peeling Means 12 Conveying Rollers 14 Floating Means 16 Centering Means 18 Rotating Ball Members 20 Centering Pins 40 Film Peeling Conveying Means 78 Air Cylinders 80 Vertical Horizontal Frame member 82 Horizontal horizontal support plate 84 Ball rotation support 90 Guide means P substrate PL Substrate P transport surface

Claims (1)

[Claims] 1. An end stripping means for acting on a substrate having a film adhered on one side to partially strip one end of the film from the substrate, and a state in which the other side of the substrate is supported. Substrate carrying means including a plurality of carrying rollers for moving toward the edge peeling means, wherein the substrate carrying means acts on both sides of the substrate to center the substrate. In the film peeling apparatus including, the substrate transfer means includes a floating means arranged below the floating means, and the floating means includes a support frame and a plurality of rotatably arranged on the support frame. Action of acting on the rotating ball member and the supporting frame so that each of the rotating ball members comes into contact with the other surface of the substrate and lifts the substrate upward away from the transport roller to movably support it. Position and the rotating bow Each of the members is provided with an ascending / descending means for selectively positioning the substrate away from the other surface of the substrate in a non-acting position for supporting the substrate on the transport roller. Film peeling device.