JPH09280868A - Tuning fork type angular velocity detection sensor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To efficiently obtain a large detection signal by juxtaposing an excitation electrode and a detection electrode in a same distance on one leg of tuning fork type oscillators at least making the neighborhood of the slide edge of a leg part as a starting point, and performing excitation and detection in the neighborhood of the slide edge where distortion is the largest. SOLUTION: A first excitation electrode 5 and a first detection electrode 7 are juxtaposed in a same distance making the neighborhood of the slide edge of a leg part 4-1 of a crystal oscillator as a starting point. A second excitation electrode 6 and a second detection electrode 8 are juxtaposed in a same distance making the neighborhood of the side edge of a leg part 4-2 as a starting point. Then, the leg parts 4-1 and 4-2 vibrate right and left when applying an alternating voltage. When a turning angle velocity acts around the direction of the expansion and contraction, the Coriolis force produces a vibrational component in the orthogonal direction, and voltage signal is obtained corresponding to the Coriolis force, and the signal value makes it possible tow know a size of the turning angle velocity acting around the direction of the expansion and the contraction by the size. Since the electrodes 5 and 6 are formed near the slide edge, a detection signal is obtained in a sufficient size.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotational angular velocity that acts around the extension and contraction direction of a leg portion of a tuning fork type vibrator when the tuning fork type vibrator vibrates by applying an AC voltage to an excitation electrode. The present invention relates to a tuning fork type angular velocity detection sensor for detecting the magnitude and its rotation direction by comparing the magnitude of a voltage signal generated in a detection electrode and a phase of an excitation vibration signal.

[0002]

2. Description of the Related Art A vibrator vibrating along a predetermined direction,
For example, a vibrator vibrating along the X axis in the orthogonal coordinate plane (XZ plane) is orthogonal to the XZ plane.
When rotating about the axis, the Coriolis force is generated in the Z-axis direction on the vibrator due to the rotation angular velocity. Since the Coriolis force is determined in proportion to the magnitude of the angular velocity, the Coriolis force is indirectly used as the bending displacement amount of the vibrator, or directly as the strain amount by the piezoelectric effect of the piezoelectric element or the resistance change of the strain gauge. If it is measured, the magnitude of the rotational angular velocity acting around the Y-axis direction of the vibrator can be obtained. For this reason,
2. Description of the Related Art A vibrating vibrator is mounted on a vehicle, an aircraft, or the like as an angular velocity detecting element, and its running or flight trajectory is recorded, and yaw rate generated at the time of turning is detected.
Further, the angular velocity detecting element is mounted on a robot, and is applied to attitude control and the like.

FIG. 5 is a diagram showing a main part of a conventional tuning fork type angular velocity detection sensor using a tuning fork type crystal oscillator. In the figure, (a) is a plan view and (b) is a view of FIG. In FIG. 5, 1 is a tuning fork type crystal oscillator, 2-1 to 2-4 are excitation electrodes, 3-1 to 3-4 are detection electrodes, and excitation electrodes 2-1 to 2-4 are crystal oscillators 1. The detection electrodes 3-1 to 3-4 are provided on the upper, lower, left, and right surfaces of the tip of the one leg 1-1 and the other leg 1-2 of the crystal unit 1 is provided.
Are formed on the left and right surfaces of the tip of the.

In this tuning fork type angular velocity detection sensor,
The excitation electrodes 2-1 and 2-3 are commonly connected to the terminal P1, the excitation electrodes 2-2 and 2-4 are commonly connected to the terminal P2, and an AC voltage is applied between the terminals P1 and P2. Is applied. Therefore, at some time, an electric field is generated as shown by an arrow in FIG. 5B, and then an electric field in the opposite direction is generated. The other leg 1-2 also interlocks and vibrates left and right.

Here, the vibration direction of the leg portions 1-1 and 1-2 is the X-axis direction, and the direction within the plane of the drawing orthogonal to the X-axis direction, that is, the expansion / contraction direction of the leg portions 1-1 and 1-2 is Y. Axial direction, this X
When the direction orthogonal to the -Y plane (the direction perpendicular to the plate surface of the crystal unit 1) is the Z-axis direction, when the rotational angular velocity acts around the Y-axis direction, the Coriolis force causes the vibration component in the Z-axis direction. Occurs. Since the magnitude of this vibration component is proportional to the Coriolis force, the other leg 1-2 of the crystal resonator 1 has a magnitude proportional to the rotational angular velocity and a polar charge corresponding to the direction of vibration is generated. To do.

As a result, between the terminal P3 commonly connecting the detection electrodes 3-1 and 3-4 and the terminal P4 commonly connecting the detection electrodes 3-2 and 3-3, there is an arrow when present. , And then in the opposite direction, a voltage signal e corresponding to the Coriolis force is obtained. From the magnitude of the voltage signal e, the magnitude of the rotational angular velocity acting around the Y-axis direction can be known. Further, the voltage signal e is basically obtained as a sine curve, and by comparing the waveform of the voltage signal e and the excitation waveform in phase, the direction of the rotational angular velocity can be known from the advance or delay of the phase.

The amplitude of the AC voltage applied between the terminals P1 and P2 has a constant amplitude by a temperature compensating circuit (not shown) even if the constants of the element and the vibration mode change due to temperature changes. To be kept. Further, the voltage signal e obtained between the terminals P3 and P4 is orders of magnitude smaller than the AC voltage applied between the terminals P1 and P2.

[0008]

However, according to such a conventional tuning fork type angular velocity detection sensor, the vibration (excitation) of one leg portion 1-1 of the crystal resonator 1 causes the other leg portion 1 to vibrate.
-It's hard to get to -2. Therefore, the voltage signal e obtained between the terminals P3 and P4 becomes small, and there is a problem that it is difficult to obtain a sufficiently large detection signal. In addition, there is a problem that it takes time for the vibration of the one leg 1-1 to be transmitted to the other leg 1-2, so that the sensor rises slowly.

As another type of tuning fork type angular velocity detection sensor, as shown in FIG. 6, excitation electrodes 2-1 to 2-4 are formed at the tip of one leg 1-1 of the crystal unit 1. Then
There is a sensor in which detection electrodes 3-1 to 3-4 are formed at the root of the leg 1-1. However, in this tuning fork type angular velocity detection sensor, when the size is reduced, the excitation electrode 2-1 is attached to the leg portion 1-1.
2-4 and the detection electrodes 3-1 to 3-4 are difficult to configure. Further, since the excitation electrodes 2-1 to 2-4 are arranged at the tip of the leg portion 1-1, it is difficult to vibrate the leg portion 1-1 and it is difficult to obtain a detection signal having a sufficient magnitude.

Further, in the tuning fork type angular velocity detection sensor shown in FIG. 6, detection electrodes 3-1 to 3-4 are formed at the tip of one leg portion 1-1 of the crystal unit 1 to form the leg portion 1. It is conceivable to form the excitation electrodes 2-1 to 2-4 at the root of -1. In this case, since the excitation electrodes 2-1 to 2-4 are formed near the sliding end S of the leg portion 1-1, the leg portion 1-1 can be easily vibrated. However, in this case, the distortion is greatest near the sliding end S, whereas the distortion at the tip of the leg 1-1 is small, and a sufficiently large detection signal cannot be obtained.

The present invention has been made in order to solve such a problem, and an object thereof is to obtain a detection signal having a sufficiently large size, and to have a quick start-up as a sensor and to reduce the size. It is another object of the present invention to provide a tuning fork type angular velocity detection sensor that can be easily performed.

[0012]

In order to achieve such an object, a first invention (an invention according to claim 1) is that at least one leg portion of a tuning fork type vibrator is provided with a sliding end of the leg portion. The excitation electrode and the detection electrode are formed side by side within the same distance with the vicinity as a starting point. According to the present invention, the excitation electrode and the detection electrode are juxtaposed in the same distance with the vicinity of the sliding end of the leg portion having the largest strain as a starting point, and a large detection signal can be efficiently obtained.

The second invention (the invention according to claim 2) is the first invention.
In the invention, the ground electrode is formed between the excitation electrode and the detection electrode. According to this invention, the excitation electrode and the detection electrode are insulated by the ground electrode, and electrical leakage (crosstalk) and noise between them are suppressed.

According to a third aspect of the present invention (the invention according to claim 3), the first excitation electrode and the first detection electrode are provided on one leg of the tuning fork type vibrator with the vicinity of the sliding end of the leg as a starting point. Are juxtaposed within the same distance, and the second excitation electrode and the second detection electrode are juxtaposed within the same distance on the other leg, with the vicinity of the sliding end of the leg being the starting point. It is a thing. According to the present invention, the first excitation electrode and the first detection electrode are juxtaposed within the same distance, with the vicinity of the sliding end having the largest strain of one leg as a starting point, and the other leg of the other leg. The second excitation electrode and the second detection electrode are juxtaposed in the same distance with the vicinity of the sliding end having the largest strain as a starting point, and a large detection signal can be efficiently obtained.

The fourth invention (the invention according to claim 4) is the third invention.
In the invention, the first ground electrode is formed between the first excitation electrode and the first detection electrode, and the second excitation electrode and the second ground electrode are formed.
Forming a second ground electrode between the detection electrode and the first
Is connected to the first balance electrode formed at the tip of one leg, and the second ground electrode is connected to the second balance electrode formed at the tip of the other leg. .

According to the present invention, the first excitation electrode and the first excitation electrode
Between the second detection electrode and the second detection electrode is insulated by the first ground electrode, and between the second excitation electrode and the second detection electrode is insulated by the second ground electrode. (Crosstalk) and noise are suppressed. In addition, by adjusting the areas and thicknesses of the first and second balance electrodes, it is possible to adjust the mass balance between one leg and the other leg.

The fifth invention (the invention according to claim 5) is the first
In the invention and the third invention, the excitation electrode and the detection electrode are formed side by side between 0.4L and 0.6L with the vicinity of the sliding end of the leg as a starting point, where L is the total length of the leg. It is a thing. According to the present invention, the excitation electrode and the detection electrode are 0.4 L apart from the sliding end of the leg portion having the largest strain as a starting point.
They are juxtaposed between .about.0.6 L, and a sufficiently large detection signal in which the secondary mode vibration is suppressed can be obtained.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the present invention will be described in detail based on embodiments. FIG. 1 is a diagram showing a main part of a tuning fork type angular velocity detection sensor showing an embodiment of the present invention. FIG. 1 (a) is a plan view, FIG. 1 (b) is a left side view, and FIG. 1 (c). Is a right side view, and FIG. 6D is a view of FIG. FIG. 2 is a sectional view taken along line II-II in FIG.

In these figures, 4 is a tuning fork type crystal oscillator, 5 (5-1 to 5-3) are first excitation electrodes, and 6 (6-
1 to 6-3) is a second excitation electrode, 7 (7-1 to 7-4)
Is a first detection electrode, 8 (8-1 to 8-4) is a second detection electrode, 9 (9-1, 9-2) is a first ground electrode, 1
0 (10-1, 10-2) is the second ground electrode, 11
(11-1, 11-2) is the first balance electrode, 12
(12-1, 12-2) are second balance electrodes.

The first excitation electrode 5 and the first detection electrode 7 are formed side by side within the same distance L1 with the vicinity of the sliding end S1 of one leg 4-1 of the crystal unit 4 as a starting point. Has been done. The second excitation electrode 6 and the second detection electrode 8 are formed side by side within the same distance L2, starting from the vicinity of the sliding end S2 of the other leg 4-2 of the crystal unit 4 as a starting point. ing. In this embodiment, when the total length of the legs 4-1 and 4-2 is L, L1 and L2 (L1 = L2) are 0.4L.
It is set between ~ 0.6L.

In the first excitation electrode 5, the excitation electrode 5-
1, 5-2 are excitation electrodes 5-3 on the upper and lower surfaces of the leg 4-1.
Is formed on the right side surface (inner surface) of the leg 4-1. Second
In the excitation electrode 6, the excitation electrodes 6-1 and 6-2 are formed on the upper and lower surfaces of the leg portion 4-2, and the excitation electrode 6-3 is formed on the left side surface (inner surface) of the leg portion 4-3.

In the first detection electrode 7, the detection electrode 7-
1, 7-4 are the detection electrodes 7- on the upper and lower surfaces of the leg 4-1.
2, 7-3 are formed on the left side surface (outer surface). In the second detection electrode 8, the detection electrodes 8-1 and 8-4 are the legs 4
-2, the detection electrodes 8-2 and 8-3 are formed on the right and left surfaces (outer surface).

In the first ground electrode 9, the ground electrode 9-1 is on the upper surface of the leg 4-1 and between the excitation electrode 5-1 and the detection electrode 7-1, and the ground electrode 9-2 is the leg 4. −
It is formed on the lower surface of No. 1 and between the excitation electrode 5-2 and the detection electrode 7-4. In the second ground electrode 10, the ground electrode 10-1 is the upper surface of the leg 4-2 and the excitation electrode 6
-1 and the detection electrode 8-1, between the ground electrode 10-2
Is the lower surface of the leg 4-2 and the excitation electrode 6-2 and the detection electrode 8-
It is formed between 4 and.

In the first balance electrode 11, the balance electrode 11-1 is formed on the upper surface of the tip of the leg 4-1 and the balance electrode 11-2 is formed on the lower surface of the tip of the leg 4-1. In the second balance electrode 12, the balance electrode 1
2-1 is the balance electrode 12 on the upper surface of the tip of the leg 4-2.
-2 is formed on the lower surface of the tip of the leg 4-2.

In FIG. 2, the connection relationship of each electrode is shown as a connection diagram for easy understanding. That is, in the tuning fork type angular velocity sensor, the excitation electrodes 5-1 5-2 6-3 and are connected in common to the terminal _{T1 (T1 U, T1 D)} , and the excitation electrodes 6-1 6- 2 and 5-3 are terminals T2
(T2 _U , T2 _D ) are commonly connected. Further, the detecting electrodes 7-1 and 7-3 terminal T3 (T3 _U, T
3 _D) to be connected to a common, and detection electrodes 7-2 and 7-4 are connected in common to the terminal _{T4 (T4 U, T4 D)} , and the detecting electrodes 8-1 and 8-3 terminal T5 (T5 _U , T5 _D )
To be connected to a common, and detection electrodes 8-2 and 8-4 are connected in common to the terminal _{T6 (T6 U, T6 D)} .

Further, the ground electrode 9-1 and the balance electrode 11-1 and the ground electrodes 9-2 and balance electrodes 11-2 are commonly connected to the terminal _{T7 (T7 U, T7 D)} , ground electrodes 10-1 And balance electrode 12-
1, the ground electrode 10-2, and the balance electrode 12-2
And are commonly connected to the terminal T8 (T8 _U , T8 _D ).

In this embodiment, the excitation electrodes 5,
6 and the detection electrodes 7 and 8 have a thickness of 1000 to 1500 angstroms, and the ground electrodes 9 and 10 and the balance electrodes 11 and 12 have a thickness of 5000 angstroms or more. The ground electrodes 9 and 10 also serve as lead wires connecting the balance electrodes 11 and 12 to the terminals T7 and T8, and the balance electrodes 11 and 12 have a large area. In FIG. 2, the thickness of each electrode is shown to be the same for easy understanding.

In this angular velocity detection sensor, the terminal T
An alternating voltage is applied between 1 and T2. As a result, an electric field is generated as indicated by an arrow in FIG. 2 at one time, and then an electric field is generated in the opposite direction, so that the legs 4-1 and 4-2 of the crystal resonator 4 vibrate to the left and right. To do.

Here, the vibration directions of the leg portions 4-1 and 4-2 are the X1 and X2 axis directions, and the directions in the plane of the paper orthogonal to the X1 and X2 axis directions, that is, the leg portions 4-1 and 4-2. When the expansion / contraction direction is the Y1 and Y2 axis directions and the direction orthogonal to the XY plane (the direction perpendicular to the plate surface of the crystal unit 4) is the Z1 and Z2 axis directions, the Y1 and Y2 axis directions rotate. When the angular velocity acts, a Coriolis force causes a vibration component in the Z1 and Z2 axis directions.

Since the magnitude of this vibration component is proportional to the Coriolis force, the leg portions 4-1 and 4-2 of the crystal unit 4 have a magnitude proportional to the rotational angular velocity and correspond to the direction of vibration. Charge of the pole is generated. Thereby, the detection electrodes 7-1 and 7-
3 is commonly connected to the terminal T3 and the detection electrodes 7-2 and 7
-4 and a terminal T4 commonly connected, and a terminal T5 to which the detection electrodes 8-1 and 8-3 are commonly connected and a detection electrode 8-2 and 8-4 are commonly connected. Charge is generated between the terminal T6 and the terminal T6 in the direction of the arrow and then in the opposite direction at some time, and voltage signals e1 and e2 corresponding to the Coriolis force are obtained.

From the magnitudes of the voltage signals e1 and e2, the magnitude of the rotational angular velocity acting around the Y1 and Y2 axis directions, that is, around the Y axis direction can be known. Further, the voltage signals e1 and e2 are basically obtained as sine curves, and by comparing the waveforms of the voltage signals e1 and e2 with the excitation waveform, the direction of the rotational angular velocity can be known from the advance or delay of the phase. You can

In this embodiment, both leg parts 4-1 and
Since the rotational angular velocity acting around the Y-axis direction is detected by 4-2, the detection sensitivity thereof is higher than that in the case where it is detected by one leg.

Further, in this embodiment, the excitation electrode 5 and the detection electrode 7 start from the vicinity of the sliding end S1 of the leg portion 4-1, and the excitation electrode 6 and the detection electrode 8 form the leg portion 4-2. Since they are formed side by side within 0.4L to 0.6L with the vicinity of the sliding end S2 as the starting point, it is possible to obtain a sufficiently large detection signal in which the secondary mode vibration is suppressed.

That is, in this embodiment, since the excitation electrodes 5 and 6 are formed near the sliding ends S1 and S2 of the legs 4-1 and 4-2, the legs 4-1 and 4-2 are formed. It is easy to vibrate. In addition, the maximum strain is near the sliding ends S1 and S2,
Since the vibration components in the Z1 and Z2 axis directions are detected near the sliding ends S1 and S2 having large distortion, it is possible to obtain a detection signal having a sufficient magnitude. Also, the sliding end S
Exciting electrodes 5 and 6 are 0.4L, starting from around 1, S2
Since it is formed within ˜0.6 L, the CI value of the secondary mode vibration becomes larger than the CI value of the fundamental wave vibration, and the secondary mode vibration can be suppressed. Regarding the suppression of the second-order mode vibration, the applicant of the present invention published in Sho 56-
Since it is disclosed in Japanese Patent No. 41387, detailed description thereof is omitted here.

Further, in this embodiment, the excitation electrode 5 and the detection electrode 7 are formed side by side on the leg 4-1 and the excitation electrode 6 and the detection electrode 8 are formed side by side on the leg 4-2. Therefore, that is, since the excitation electrode and the detection electrode are arranged at the same location, the size can be easily reduced and the sensor can be started up quickly.

In addition, in this embodiment, the ground electrode 9 is provided between the excitation electrode 5 and the detection electrode 7, and the excitation electrode 6 is also provided.
Since the ground electrode 10 is formed between the excitation electrode 5 and the detection electrode 8, the excitation electrode 5 and the detection electrode 7 are insulated by the ground electrode 9, and the excitation electrode 6 and the detection electrode 8 are grounded. It is insulated by the electrode 10, and electrical leakage (crosstalk) and noise between the two are suppressed.

In addition, in this embodiment, the leg portions 4-1 and
By adjusting the area, thickness, etc. of the balance electrodes 11 and 12 provided at the tip of 4-2, the leg 4-1 and the leg 4-
It is possible to adjust the mass balance with respect to No. 2 and to stabilize the operation. In this case, the leg 4-
A method is conceivable in which the balance electrodes 11 and 12 are formed while vibrating 1, 4-2 and adjusting the mass balance. In addition, after forming the balance electrodes 11 and 12, a method may be considered in which the electrodes are partially removed and the mass balance is adjusted while vibrating the legs 4-1 and 4-2.

In this embodiment, the excitation electrodes 5 and 6 are arranged inside the leg portions 4-1 and 4-2, and the detection electrodes 7 and 8 are arranged inside the leg portions 4-1 and 4-2.
Is formed outside (see FIG. 3), the excitation electrodes 5 and 6 may be formed outside the legs 4-1 and 4-2 and the detection electrodes 7 and 8 may be formed inside (see FIG. 4). . In this case, if the detection electrodes 7 and 8 are formed on the outer side, the crystal oscillator 4 expands and contracts greatly, so that a large detection signal can be obtained.
In addition, forming the excitation electrodes 5 and 6 inside makes the manufacturing easier than forming the detection electrodes 7 and 8 inside.

That is, when the excitation electrodes 5 and 6 are formed inside, the excitation electrodes 5-3 and 6-3 are connected to the leg portion 4-.
Since these electrodes are located on the inner surfaces of 1 and 4-2 and are one electrode, they are easy to form. On the other hand, the detection electrodes 7 and 8
When the electrodes are formed inside, the detection electrodes 7-2, 7
-3, 8-2, 8-3 are located on the inner surfaces of the legs 4-1 and 4-2, and these electrodes are two electrodes, so it is difficult to form them.

In this embodiment, crystal is used as the tuning fork type vibrator, but the crystal is not limited to crystal. For example, barium titanate may be used, and various piezoelectric materials can be used. Further, although the tuning fork type vibrator is used in this embodiment, it can be applied to an H type vibrator. Further, in this embodiment, the excitation electrode and the detection electrode are formed on each of the legs 4-1 and 4-2, but they may be formed on either one of the legs 4-1 and 4-2. Good. That is, it is not always necessary to use both legs, and one leg may be used to detect the rotational angular velocity.

[0041]

As is apparent from the above description, according to the present invention, in the first invention, at least one leg of the tuning fork vibrator is provided with the excitation electrode with the vicinity of the sliding end of the leg as a starting point. Since the detection electrode and the detection electrode are formed side by side within the same distance, excitation and detection are performed near the sliding end with the largest strain, and a large detection signal can be efficiently obtained. Also, the rise as a sensor becomes faster,
Miniaturization is also possible easily.

In the second aspect of the invention, since the ground electrode is formed between the excitation electrode and the detection electrode in the first aspect of the invention, the excitation electrode and the detection electrode are insulated by the ground electrode, and the electrical connection between them is achieved. Leak (crosstalk)
And the noise will be suppressed.

In the third invention, the first excitation electrode and the first detection electrode are juxtaposed in the same distance on one leg of the tuning fork type oscillator with the vicinity of the sliding end of the leg as a starting point. Formed,
Since the second excitation electrode and the second detection electrode are juxtaposed in the same distance on the other leg with the vicinity of the sliding end of the leg as a starting point, both legs having the largest distortion are formed. Excitation and detection are performed near the sliding end, and a large detection signal can be efficiently obtained. Further, the sensor can be quickly started up, and the size can be easily reduced. Further, in the present invention, the detection sensitivity is increased as compared with the case where the rotational angular velocity is detected by one leg.

According to a fourth invention, in the third invention, a first ground electrode is formed between the first excitation electrode and the first detection electrode, and the second excitation electrode and the second detection electrode are formed. A second ground electrode is formed between them, the first ground electrode is connected to the first balance electrode formed at the tip of one leg, and the second ground electrode is connected at the tip of the other leg. Since it is connected to the formed second balance electrode, the space between the first excitation electrode and the first detection electrode is insulated by the first ground electrode, and the connection between the second excitation electrode and the second detection electrode is made. The second ground electrode is insulated by the second ground electrode, and electrical leakage (crosstalk) and noise between the two are suppressed. In addition, by adjusting the areas and thicknesses of the first and second balance electrodes, it is possible to adjust the mass balance between one leg and the other leg, which further stabilizes the operation. Will be able to.

In the fifth invention, in the first invention and the third invention, when the total length of the legs of the excitation electrode and the detection electrode is L, 0.4L to 0 with the vicinity of the sliding end of the leg as a starting point. .6
Since they are formed side by side between L, it is possible to obtain a detection signal of sufficient magnitude in which the secondary mode vibration is suppressed.

[Brief description of drawings]

FIG. 1 is a diagram showing a main part of a tuning fork type angular velocity detection sensor according to an embodiment of the present invention.

FIG. 2 is a sectional view taken along line II-II in FIG.

FIG. 3 is a perspective view showing an arrangement state of electrodes of the tuning fork type angular velocity detection sensor.

FIG. 4 is a perspective view showing an example in which an excitation electrode is formed outside the leg portion and a detection electrode is formed inside the leg portion.

FIG. 5 is a diagram showing a main part of a conventional tuning fork type angular velocity sensor using a tuning fork type crystal resonator.

FIG. 6 is a diagram showing another example of a conventional tuning fork type angular velocity sensor using a tuning fork type crystal resonator.

[Explanation of symbols]

4 ... Tuning fork type crystal unit, 4-1 and 4-2 ... Legs, 5 (5
-1 to 5-3) ... First excitation electrode, 6 (6-1 to 6-)
3) ... 2nd excitation electrode, 7 (7-1 to 7-4) ... 1st detection electrode, 8 (8-1 to 8-4) ... 2nd detection electrode, 9
(9-1, 9-2) ... First ground electrode, 10 (10
-1, 10-2) ... Second ground electrode, 11 (11-
1, 11-2) ... 1st balance electrode, 12 (12-
1, 12-2) ... Second balance electrode.

Claims (5)

[Claims] 1. A tuning fork type vibration device, and an excitation electrode and a detection electrode formed on at least one of legs of the tuning fork type vibration device. The tuning fork type vibration device is provided by applying an AC voltage to the excitation electrode. In a tuning fork type angular velocity detection sensor for detecting a rotational angular velocity acting around the extension and contraction direction of the leg portion based on a voltage signal generated in the detection electrode while vibrating a child, the excitation electrode and the detection electrode are the legs. A tuning fork type angular velocity detection sensor, which is formed by juxtaposing the same at the same distance with the vicinity of the sliding end of the section as a starting point. 2. The tuning fork type angular velocity detection sensor according to claim 1, wherein a ground electrode is formed between the excitation electrode and the detection electrode. 3. A tuning fork type oscillator, a first excitation electrode and a first detection electrode formed on one leg of the tuning fork type oscillator, and a second leg of the tuning fork type oscillator. A second excitation electrode and a second detection electrode,
And vibrating the tuning fork type vibrator by applying an AC voltage to the second excitation electrode, and acting around the extension and contraction direction of the leg portion based on the voltage signal generated at the first and second detection electrodes. In the tuning fork type angular velocity detection sensor for detecting the rotational angular velocity, the first excitation electrode and the first detection electrode are formed side by side within the same distance with the vicinity of the sliding end of the one leg as a starting point. A tuning fork type angular velocity detection sensor, wherein the second excitation electrode and the second detection electrode are formed side by side within the same distance with the vicinity of the sliding end of the other leg as a starting point. . 4. The first ground electrode according to claim 3, wherein a first ground electrode is formed between the first excitation electrode and the first detection electrode, and the second excitation electrode and the second detection electrode are formed. A second ground electrode is formed between them, the first ground electrode is connected to a first balance electrode formed at the tip of the one leg, and the second ground electrode is connected to the other leg. A tuning fork type angular velocity detection sensor, characterized in that the tuning fork type angular velocity detection sensor is connected to a second balance electrode formed at the tip of the section. 5. The excitation electrode and the detection electrode according to claim 1 or 3, wherein the total length of the leg portion is L.
Starting from the vicinity of the sliding ends of the legs, 0.4L to 0.6
A tuning fork type angular velocity detection sensor, which is formed in parallel between L.