JP3419999B2 - Angular velocity sensor - Google Patents
Angular velocity sensorInfo
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- JP3419999B2 JP3419999B2 JP21244196A JP21244196A JP3419999B2 JP 3419999 B2 JP3419999 B2 JP 3419999B2 JP 21244196 A JP21244196 A JP 21244196A JP 21244196 A JP21244196 A JP 21244196A JP 3419999 B2 JP3419999 B2 JP 3419999B2
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- electrode
- axis direction
- angular velocity
- axis
- excitation
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Description
【０００１】[0001]
【発明の属する技術分野】この発明は、振動子素子の伸
縮振動と屈曲振動を利用して回転角速度を検出する角速
度センサに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an angular velocity sensor for detecting a rotational angular velocity by utilizing stretching vibration and bending vibration of a vibrator element.
【０００２】[0002]
【従来の技術】所定方向に沿って振動している振動子、
例えば直交座標軸平面（Ｘ−Ｙ平面）におけるＸ軸に沿
って振動している振動子がＹ軸の回りに回転すると、振
動子に（Ｘ−Ｙ平面と直交する）Ｚ軸方向にコリオリの
力が生じる。このコリオリの力は角速度の大きさに比例
して定まることから、コリオリの力を振動子の撓み変位
量として間接的に、圧電素子の圧電効果、容量変化など
で直接的に測定すれば、振動子のＹ軸の回りに作用した
回転角速度の大きさを求めることができる。このため、
振動する振動子を角速度検出素子として車両や航空機等
に搭載し、その走行或いは飛行軌跡を記録したり旋回時
に発生するヨーレイトを検出することが行われている。
また、この角速度検出素子をロボットに搭載して、その
姿勢制御等にも応用されている。2. Description of the Related Art A vibrator vibrating along a predetermined direction,
For example, when a vibrator vibrating along the X axis in the orthogonal coordinate axis plane (XY plane) rotates around the Y axis, the Coriolis force is applied to the vibrator in the Z axis direction (perpendicular to the XY plane). Occurs. Since this Coriolis force is determined in proportion to the magnitude of the angular velocity, if the Coriolis force is indirectly measured as the deflection displacement of the vibrator, and is directly measured by the piezoelectric effect of the piezoelectric element, capacitance change, etc. The magnitude of the rotational angular velocity acting around the Y axis of the child can be obtained. For this reason,
BACKGROUND ART A vibrating vibrator is mounted on a vehicle, an aircraft, or the like as an angular velocity detecting element to record a traveling or flight locus thereof and to detect a yaw rate generated during turning.
Further, this angular velocity detecting element is mounted on a robot and applied to posture control of the robot.
【０００３】図８は水晶を用いた従来の「片持ちばり」
の角速度センサの要部を示す図である。同図において、
（ａ）は平面図、（ｂ）は図８（ａ）をＡ方向から見た
図、（ｃ）は図８（ａ）をＢ方向から見た図、（ｄ）は
図８（ａ）をＣ方向から見た図である。同図において、
１は振動子素子（水晶板）、２−１〜２−４は励振用の
電極板、３−１〜３−４は角速度検出用の電極板であ
り、励振用の電極板２−１〜２−４を励振電極２の構成
要素とし、角速度検出用の電極板３−１〜３−４を検出
電極３の構成要素としている。励振用の電極板２−１〜
２−４は振動子素子１の一方の端１−１の表裏および左
右の面に、検出用の電極板３−１〜３−４は振動子素子
１の他方の端１−２の左右の面に形成されている。この
図において、振動子素子１の他方の端１−２側は、基端
部（固定端）とされている。FIG. 8 shows a conventional "cantilever beam" using quartz.
It is a figure which shows the principal part of the angular velocity sensor of FIG. In the figure,
8A is a plan view, FIG. 8B is a view of FIG. 8A viewed from the A direction, FIG. 8C is a view of FIG. 8A viewed from the B direction, and FIG. It is the figure which looked at from the C direction. In the figure,
Reference numeral 1 is a transducer element (quartz plate), 2-1 to 2-4 are excitation electrode plates, 3-1 to 3-4 are angular velocity detection electrode plates, and excitation electrode plates 2-1 to 2-1. 2-4 are constituent elements of the excitation electrode 2, and electrode plates 3-1 to 3-4 for angular velocity detection are constituent elements of the detection electrode 3. Excitation electrode plates 2-1 to 2-1
2-4 are on the front and back surfaces and the left and right surfaces of one end 1-1 of the transducer element 1, and the detection electrode plates 3-1 to 3-4 are on the left and right sides of the other end 1-2 of the transducer element 1. Is formed on the surface. In this figure, the other end 1-2 side of the transducer element 1 is a base end portion (fixed end).
【０００４】この角速度センサにおいては、図８（ｂ）
に示されるように、励振用の電極板２−１と２−３とが
端子Ｐ１に共通に接続され、また励振用の電極板２−２
と２−４とが端子Ｐ２に共通に接続され、この端子Ｐ１
とＰ２との間に交流電圧（励振振動信号）ｅが印加され
る。このため、ある時は図８（ｂ）中に矢印で示す如く
電界が発生し、次には逆方向の電界が発生することによ
り、振動子素子１の一方の端１−１が左右に振動（屈曲
振動）する。In this angular velocity sensor, as shown in FIG.
, The excitation electrode plates 2-1 and 2-3 are commonly connected to the terminal P1, and the excitation electrode plate 2-2
And 2-4 are commonly connected to a terminal P2, and this terminal P1
An alternating voltage (excitation vibration signal) e is applied between P2 and P2. Therefore, at some time, an electric field is generated as shown by an arrow in FIG. 8B, and then an electric field in the opposite direction is generated, so that one end 1-1 of the vibrator element 1 vibrates to the left and right. (Flexural vibration).
【０００５】ここで、振動子素子１の振動方向（励振方
向）をＸ軸方向、このＸ軸方向と直交する図８（ａ）に
おける紙面内の方向（振動子素子１の長手方向）をＹ軸
方向、このＸ−Ｙ平面と直交する方向（振動子素子１の
板面に垂直な方向）をＺ軸方向とした場合、Ｙ軸の回り
に回転角速度が作用すると、すなわち振動子素子１がＹ
軸の回りに回転すると、コリオリの力によりＺ軸方向の
振動成分が生じ、振動子素子１が表裏方向に振動（屈曲
振動）する。この振動成分の大きさはコリオリの力に比
例しているので、振動子素子１の他方の端１−２には回
転角速度に比例した大きさで振動の方向に応じた極の電
荷が発生する。Here, the vibration direction (excitation direction) of the vibrator element 1 is the X-axis direction, and the direction in the plane of FIG. 8 (a) orthogonal to the X-axis direction (longitudinal direction of the vibrator element 1) is Y. When the axial direction, the direction orthogonal to this XY plane (the direction perpendicular to the plate surface of the transducer element 1) is the Z-axis direction, the rotational angular velocity acts around the Y axis, that is, the transducer element 1 Y
When it rotates around the axis, a Coriolis force causes a vibration component in the Z-axis direction, and the vibrator element 1 vibrates in the front-back direction (flexural vibration). Since the magnitude of this vibration component is proportional to the Coriolis force, a pole charge corresponding to the direction of vibration is generated at the other end 1-2 of the vibrator element 1 in a magnitude proportional to the rotational angular velocity. .
【０００６】これにより、図８（ｃ）に示されるよう
に、検出用の電極板３−１と３−４とを共通に接続した
端子Ｐ３と、検出用の電極板３−２と３−３とを共通に
接続した端子Ｐ４との間に、ある時には矢印の方向、次
には逆方向の電荷が発生し、コリオリの力に応じた電圧
信号ｅs が得られる。この電圧信号ｅs の大きさによっ
て、Ｙ軸の回りに作用する回転角速度の大きさを知るこ
とができる。また、この電圧信号ｅs は基本的にサイン
カーブとして得られ、この電圧信号ｅs の波形と励振振
動信号ｅの波形（励振波形）とを位相比較することによ
り、その位相の進み遅れで回転角速度の方向を知ること
ができる。As a result, as shown in FIG. 8C, the terminal P3 commonly connecting the detection electrode plates 3-1 and 3-4, and the detection electrode plates 3-2 and 3-. 3, a charge is generated in the direction of the arrow and then in the opposite direction at a certain point, and a voltage signal es corresponding to the Coriolis force is obtained. From the magnitude of this voltage signal es, the magnitude of the rotational angular velocity acting around the Y axis can be known. Further, this voltage signal es is basically obtained as a sine curve, and the waveform of this voltage signal es and the waveform of the excitation vibration signal e (excitation waveform) are phase-compared, and the advance or delay of the phase causes the rotation angular velocity to change. You can know the direction.
【０００７】なお、端子Ｐ１とＰ２との間に印加される
励振振動信号ｅの振幅は、図示せぬ温度補償回路によっ
て、温度変化により素子の諸定数、振動姿態が変化して
も、一定の振幅に保たれる。また、端子Ｐ１とＰ２との
間に印加される励振振動信号ｅに対して、端子Ｐ３とＰ
４との間に得られる電圧信号ｅs は桁違いに小さい。The amplitude of the excitation vibration signal e applied between the terminals P1 and P2 is constant even if the constants of the element and the vibration mode are changed by the temperature change by a temperature compensating circuit (not shown). Kept in amplitude. Further, with respect to the excitation vibration signal e applied between the terminals P1 and P2, the terminals P3 and P
The voltage signal es obtained between 4 and 4 is orders of magnitude smaller.
【０００８】[0008]
【発明が解決しようとする課題】しかしながら、このよ
うな従来の角速度センサによると、励振側も検出側も屈
曲振動を利用しているので、高さ方向の寸法が大とな
る。すなわち、一般的に、この種の角速度センサは、Ｙ
軸を高さ方向とし、Ｙ軸の回りに作用する回転角速度を
検出するものとして用いられる。従って、コリオリの力
を検出するために、Ｙ軸方向を立てて使用する必要があ
り、製品の高さが非常に大きくなり小型化（薄型化）す
ることができない。However, according to such a conventional angular velocity sensor, since bending vibration is utilized on both the excitation side and the detection side, the size in the height direction becomes large. That is, in general, this kind of angular velocity sensor is
It is used to detect the rotational angular velocity acting around the Y axis with the axis in the height direction. Therefore, in order to detect the Coriolis force, it is necessary to stand up and use the Y-axis direction, and the height of the product becomes very large, and it is not possible to make it compact (thin).
【０００９】本発明はこのような課題を解決するために
なされたもので、その目的とするところは、高さ方向へ
の薄型化を促進することのできる角速度センサを提供す
ることにある。The present invention has been made to solve the above problems, and an object of the present invention is to provide an angular velocity sensor capable of promoting a reduction in thickness in the height direction.
【００１０】[0010]
【課題を解決するための手段】このような目的を達成す
るために、第１発明（請求項１に係る発明）は、その長
手方向をＹ軸方向，このＹ軸方向と直交する方向をＸ軸
方向，Ｘ−Ｙ平面と直交する方向をＺ軸方向とする振動
子素子と、交流電圧の印加を受けて振動子素子をＹ軸方
向へ伸縮振動させる励振電極と、振動子素子をＹ軸方向
へ伸縮振動させならがＺ軸の回りに回転させたときＸ軸
方向に生ずる屈曲振動によって生ずる電荷を取り出す検
出電極とを設け、励振電極による振動子素子のＹ軸方向
への伸縮振動を１次モードとし、振動子素子をＹ軸方向
へ伸縮振動させならがＺ軸の回りに回転させたときＸ軸
方向に生ずる屈曲振動を２次モードとしたものである。
この発明によれば、励振電極に交流電圧を印加すると、
振動子素子がＹ軸方向へ１次モードで伸縮振動する。こ
の状態で、Ｚ軸の回りに回転角速度が作用すると、すな
わち振動子素子がＺ軸の回りに回転すると、振動子素子
は、コリオリの力がＹ軸と直交するＸ軸方向に働き、そ
の結果Ｘ軸方向に２次モードで屈曲振動する。そして、
この屈曲振動によって生ずる電荷が検出電極より取り出
され、この取り出された電荷に基づいてＺ軸の回りに作
用する回転角速度が検出される。この場合、Ｚ軸を高さ
方向として、Ｚ軸の回りに作用する回転角速度を検出す
ることができる。In order to achieve such an object, the first invention (the invention according to claim 1) is such that the longitudinal direction thereof is the Y-axis direction, and the direction orthogonal to the Y-axis direction is the X-axis direction. A vibrator element whose axial direction is the Z-axis direction that is orthogonal to the XY plane, an excitation electrode that expands and vibrates the vibrator element in the Y-axis direction when an AC voltage is applied, and a vibrator element A detection electrode for extracting electric charges generated by bending vibration generated in the X-axis direction when rotated about the Z-axis in the Y-axis direction of the vibrator element by the excitation electrode.
Stretching vibration to 1st mode
Stretching vibration to X axis when rotated around Z axis
The bending vibration generated in the direction is the secondary mode .
According to this invention, when an AC voltage is applied to the excitation electrode,
The vibrator element expands and contracts in the first-order mode in the Y-axis direction. In this state, when the rotational angular velocity acts around the Z axis, that is, when the transducer element rotates around the Z axis, the transducer element acts in the X axis direction orthogonal to the Y axis, and as a result, Flexural vibration occurs in the secondary mode in the X-axis direction. And
The electric charge generated by this bending vibration is extracted from the detection electrode, and the rotational angular velocity acting around the Z axis is detected based on the extracted electric charge. In this case, the rotational angular velocity acting around the Z axis can be detected with the Z axis as the height direction.
【００１１】第２発明（請求項２に係る発明）は、第１
発明において、振動子素子のＹ軸方向の先端部に第１の
検出電極を形成し、振動子素子の基端部と先端部との間
に第２の検出電極を形成し、この第２の検出電極と第１
の検出電極との間に励振電極を形成したものである。こ
の発明によれば、励振電極に交流電圧を印加することに
より、振動子素子がＹ軸方向へ１次モードで伸縮振動す
る。この状態で、Ｚ軸の回りに回転角速度が作用する
と、振動子素子がＸ軸方向に２次モードで屈曲振動す
る。そして、この屈曲振動によって生ずる電荷が第１お
よび第２の検出電極より取り出され、この取り出された
電荷に基づいてＺ軸の回りに作用する回転角速度が検出
される。 The second invention (the invention according to claim 2) is the first invention.
In the invention, the first element is attached to the tip of the transducer element in the Y-axis direction.
Forming the detection electrode, between the base and tip of the transducer element
A second detection electrode is formed on the first detection electrode and the second detection electrode and the first detection electrode.
An excitation electrode is formed between the detection electrode and the detection electrode. This
According to the invention of, the application of alternating voltage to the excitation electrode
Causes the oscillator element to vibrate in the Y-axis direction in the first-order mode.
It In this state, the rotational angular velocity acts around the Z axis.
And the oscillator element flexurally vibrates in the X-axis direction in the secondary mode.
It The electric charge generated by this bending vibration is the first
And the second detection electrode, and the extracted
Rotational angular velocity acting around Z-axis is detected based on electric charge
To be done.
【００１２】第３発明（請求項３に係る発明）は、第２
発明において、検出電極を構成する電極板の一部を分割
したものである。この発明によれば、例えば検出電極を
４枚構成の電極板とした場合、その電極板の一部（例え
ば、２枚）が分割される。これにより、その分割された
電極板の間を通して、第１の励振電極と第２の励振電極
との間のリード電極による接続が可能となる。 The third invention (the invention according to claim 3) is the second invention .
In the invention, a part of the electrode plate constituting the detection electrode is divided.
It was done. According to this invention, for example, the detection electrode is
In the case of a four-electrode plate, a part of the electrode plate (for example,
If so, 2) will be divided. This divided it
A first excitation electrode and a second excitation electrode are provided between the electrode plates.
A lead electrode can be connected between
【００１３】第４発明（請求項４に係る発明）は、その
長手方向をＹ軸方向，このＹ軸方向と直交する方向をＸ
軸方向，Ｘ−Ｙ平面と直交する方向をＺ軸方向とする振
動子素子と、交流電圧の印加を受けて振動子素子をＸ軸
方向へ屈曲振動させる励振電極と、振動子素子をＸ軸方
向へ屈曲振動させならがＺ軸の回りに回転させたときＹ
軸方向に生ずる伸縮振動によって生ずる電荷を取り出す
検出電極とを設け、励振電極による振動子素子のＸ軸方
向への屈曲振動を２次モードとし、振動子素子をＸ軸方
向へ屈曲振動させながらＺ軸の回りに回転させたときＹ
軸方向に生ずる伸縮振動を１次モードとしたものであ
る。 この発明によれば、励振電極に交流電圧を印加する
と、振動子素子がＸ軸方向へ２次モードで屈曲振動す
る。この状態で、Ｚ軸の回りに回転角速度が作用する
と、振動子素子がＹ軸方向に１次モードで伸縮振動す
る。そして、この伸縮振動によって生ずる電荷が検出電
極より取り出され、この取り出された電荷に基づいてＺ
軸の回りに作用する回転角速度が検出される。この場
合、Ｚ軸を高さ方向として、Ｚ軸の回りに作用する回転
角速度を検出することができる。 [0013] The fourth invention (the invention according to claim 4), the
The longitudinal direction is the Y-axis direction, and the direction orthogonal to this Y-axis direction is X
Vibration with the axial direction and the direction orthogonal to the XY plane as the Z-axis direction
The oscillator element and the transducer element on the X-axis when an AC voltage is applied
Exciting electrodes that flexurally vibrate in the direction
If bending vibration is applied to the direction, when it is rotated around the Z axis, Y
Extract electric charge generated by stretching vibration generated in the axial direction
A detection electrode is provided, and the X-axis direction of the vibrator element is defined by the excitation electrode.
Bending vibration in the direction is set to the secondary mode, and the oscillator element is in the X-axis
When rotating around the Z axis while bending and vibrating in the direction Y
Stretching vibration generated in the axial direction is the first mode
It According to this invention, an AC voltage is applied to the excitation electrode.
And the oscillator element bends and vibrates in the secondary mode in the X-axis direction.
It In this state, the rotational angular velocity acts around the Z axis.
And the transducer element vibrates in the Y-axis direction in the first-order mode.
It The electric charge generated by this stretching vibration is detected.
It is taken out from the pole and Z
The rotational angular velocity acting about the axis is detected. This place
If the Z axis is the height direction, rotation that acts around the Z axis
The angular velocity can be detected.
【００１４】第５発明（請求項５に係る発明）は、第４
発明において、振動子素子のＹ軸方向の先端部に第１の
励振電極を形成し、振動子素子の基端部と先端部との間
に第２の励振電極を形成し、この第２の励振電極と第１
の励振電極との間に検出電極を形成したものである。こ
の発明によれば、第１および第２の励振電極に交流電圧
を印加することにより、振動子素子がＸ軸方向へ２次モ
ードで屈曲振動する。この状態で、Ｚ軸の回りに回転角
速度が作用すると、振動子素子がＹ軸方向に１次モード
で伸縮振動する。そして、この伸縮振動によって生ずる
電荷が検出電極より取り出され、この取り出された電荷
に基づいてＺ軸の回りに作用する回転角速度が検出され
る。The fifth invention (the invention according to claim 5) is the fourth invention .
In the invention, the first element is attached to the tip of the transducer element in the Y-axis direction.
Form the excitation electrode, and place it between the base and tip of the transducer element.
A second excitation electrode is formed on the first excitation electrode and the first excitation electrode
The detection electrode is formed between the excitation electrode and. This
According to the invention, an AC voltage is applied to the first and second excitation electrodes.
Is applied to cause the transducer element to move in the secondary direction in the X-axis direction.
Flexing and vibrating in the mode. In this state, the rotation angle around the Z axis
When the speed acts, the transducer element is in the first-order mode in the Y-axis direction.
Stretch and vibrate with. And it is caused by this stretching vibration
Electric charges are extracted from the detection electrode, and the rotational angular velocity acting around the Z axis is detected based on the extracted charges.
【００１５】[0015]
【００１６】[0016]
【００１７】[0017]
図１はこの発明の説明に入る前の参考例を示す角速度セ
ンサの要部を示す図であり、同図（ａ）は平面図、同図
（ｂ）は左側面図、同図（ｃ）は右側面図、同図（ｄ）
は同図（ａ）を裏面側から見た図である。FIG. 1 is a diagram showing a main part of an angular velocity sensor showing a reference example before starting the description of the present invention. FIG. 1 (a) is a plan view, FIG. 1 (b) is a left side view, and FIG. 1 (c). Is a right side view, same figure (d)
[Fig. 4] is a view of the same figure (a) viewed from the back side.
【００１８】図１において、４は振動子素子（水晶
板）、５（５−１，５−２）は第１の励振電極、６（６
−１，６−２）は第２の励振電極、７（７−１〜７−
４）は第１の検出電極、８（８−１〜８−４）は第２の
検出電極、９−１，９−２は第１の励振電極５と第２の
励振電極６とを接続するリード電極である。In FIG. 1, 4 is a transducer element (quartz plate), 5 (5-1, 5-2) are first excitation electrodes, and 6 (6
-1, 6-2) is the second excitation electrode, 7 (7-1 to 7-)
4) is the first detection electrode, 8 (8-1 to 8-4) is the second detection electrode, and 9-1 and 9-2 connect the first excitation electrode 5 and the second excitation electrode 6. It is a lead electrode.
【００１９】振動子素子４は、板状とされ、Ｙ軸方向へ
長く、Ｘ軸方向へ短く、Ｚ軸方向へ薄く形成されてい
る。また、振動子素子４は、その中心Ｐｃを基端部４−
０として支持されており、そのＹ軸方向の一方側の先端
部４−１に励振電極５が、他方側の先端部４−２に励振
電極６が形成されている。また、振動子素子４の基端部
４−０と一方側の先端部４−１との間に第１の検出電極
７が、他方側の先端部４−２との間に第２の検出電極８
が形成されている。なお、振動子素子４の周囲に、図４
（ａ）に示すように、サポータ４−３を一体的に設ける
ようにしてもよい。また、図４（ｂ）に示すように、サ
ポータ４−３を一体的に設けると共に、先端部４−１，
４−２の形状を竜頭状としてもよい。The vibrator element 4 has a plate shape, is long in the Y-axis direction, short in the X-axis direction, and thin in the Z-axis direction. Further, the vibrator element 4 has its center Pc at the base end 4-
The excitation electrode 5 is formed on the tip portion 4-1 on one side in the Y-axis direction, and the excitation electrode 6 is formed on the tip portion 4-2 on the other side. In addition, the first detection electrode 7 is provided between the base end portion 4-0 of the transducer element 4 and the tip end portion 4-1 on one side, and the second detection electrode 7 is provided between the base end portion 4-0 and the tip end portion 4-2 on the other side. Electrode 8
Are formed. It should be noted that, in the vicinity of the vibrator element 4, as shown in FIG.
As shown in (a), the supporter 4-3 may be integrally provided. Further, as shown in FIG. 4B, the supporter 4-3 is integrally provided, and the tip portions 4-1 and 4-1 are provided.
The shape of 4-2 may be a crown shape.
【００２０】励振電極５は電極板５−１，５−２をその
構成要素としている。励振電極６は電極板６−１，６−
２をその構成要素としている。電極板５−１，５−２は
振動子素子４の一方側の先端部４−１の左右の面に形成
されている。電極板６−１，５−２は振動子素子４の他
方側の先端部４−２の左右の面に形成されている。The excitation electrode 5 has electrode plates 5-1 and 5-2 as its constituent elements. The excitation electrodes 6 are electrode plates 6-1 and 6-
2 is its component. The electrode plates 5-1 and 5-2 are formed on the left and right surfaces of the tip portion 4-1 on one side of the transducer element 4. The electrode plates 6-1 and 5-2 are formed on the left and right surfaces of the tip portion 4-2 on the other side of the transducer element 4.
【００２１】検出電極７は電極板７−１〜７−４をその
構成要素としている。検出電極８は電極板８−１〜８−
４をその構成要素としている。電極板７−１〜７−４は
振動子素子４の基端部４−０と一方側の先端部４−１と
の間の表裏および左右の面に形成されている。電極板８
−１〜８−４は振動子素子４の基端部４−０と他方側の
先端部４−２との間の表裏および左右の面に形成されて
いる。The detection electrode 7 has the electrode plates 7-1 to 7-4 as its constituent elements. The detection electrodes 8 are electrode plates 8-1 to 8-
4 is its component. The electrode plates 7-1 to 7-4 are formed on the front and back surfaces and the left and right surfaces between the base end portion 4-0 of the transducer element 4 and the one end portion 4-1. Electrode plate 8
-1 to 8-4 are formed on the front and back surfaces and the left and right surfaces between the base end portion 4-0 of the transducer element 4 and the tip end portion 4-2 on the other side.
【００２２】なお、電極板７−１および８−１は、リー
ド電極９−１を振動子素子４の表面に形成する必要上、
電極板７−１１，７−１２および８−１１，８−１２に
分割されている。また、電極板７−２および８−２もリ
ード電極９−２を振動子素子４の裏面に形成する必要
上、電極板７−２１，７−２２および８−２１，８−２
２に分割されている。The electrode plates 7-1 and 8-1 are required to form the lead electrode 9-1 on the surface of the vibrator element 4,
It is divided into electrode plates 7-11, 7-12 and 8-11, 8-12. Further, the electrode plates 7-2 and 8-2 also need to have the lead electrode 9-2 formed on the back surface of the vibrator element 4, and therefore the electrode plates 7-21, 7-22 and 8-21, 8-2 are also required.
It is divided into two.
【００２３】図２は図１における各電極の接続関係を分
かり易いように示した結線図である。すなわち、この角
速度センサにおいては、第１の励振電極５の電極板５−
１と第２の励振電極６の電極板６−１とがリード電極９
−１を介して端子Ｔ１に共通に接続され、第１の励振電
極５の電極板５−２と第２の励振電極６の電極板６−２
とがリード電極９−２を介して端子Ｔ２に共通に接続さ
れる。FIG. 2 is a connection diagram showing the connection relationship of each electrode in FIG. 1 for easy understanding. That is, in this angular velocity sensor, the electrode plate 5-of the first excitation electrode 5 is
1 and the electrode plate 6-1 of the second excitation electrode 6 form the lead electrode 9
-1 is commonly connected to the terminal T1 and the electrode plate 5-2 of the first excitation electrode 5 and the electrode plate 6-2 of the second excitation electrode 6 are connected.
And are commonly connected to the terminal T2 via the lead electrode 9-2.
【００２４】また、第１の検出電極７の電極板７−１
（７−１１，７−１２）と７−２（７−２１，７−２
２）とが端子Ｔ３に共通に接続され、第１の検出電極７
の電極板７−３と７−４とが端子Ｔ４に共通に接続され
る。また、第２の検出電極８の電極板８−１（８−１
１，８−１２）と８−２（８−２１，８−２２）とが端
子Ｔ４に共通に接続され、第２の検出電極８の電極板８
−３と８−４とが端子Ｔ３に共通に接続される。The electrode plate 7-1 of the first detection electrode 7 is also provided.
(7-11, 7-12) and 7-2 (7-21, 7-2)
2) is commonly connected to the terminal T3, and the first detection electrode 7
The electrode plates 7-3 and 7-4 are commonly connected to the terminal T4. In addition, the electrode plate 8-1 (8-1 of the second detection electrode 8)
1, 8-12) and 8-2 (8-21, 8-22) are commonly connected to the terminal T4, and the electrode plate 8 of the second detection electrode 8 is provided.
-3 and 8-4 are commonly connected to the terminal T3.
【００２５】〔検出動作〕端子Ｔ１とＴ２との間に交流
電圧（励振振動信号）ｅを印加する。これにより、励振
電極５の電極板５−１と５−２との間および励振電極６
の電極板６−１と６−２との間に、ある時は図２中に矢
印で示す如く電界が発生し、次には逆方向の電界が発生
することにより、振動子素子４がＹ軸方向へ１次モード
で伸縮振動する。すなわち、振動子素子４がＹ軸方向へ
伸びたり、縮んだりし、この伸縮運動を所定周期で繰り
返す。この場合、この伸縮振動の周波数Ｆ１は、下記
（１）式で示される。
Ｆ１＝Ｋ１・（１／２Ｌ） ・・・・（１）
ただし、Ｋ１：定数（＝（Ｅ／ρ）1/2 ）、Ｅ：弾性定
数、ρ：密度、Ｌ：振動子素子４のＹ軸方向の長さ。[Detection Operation] An AC voltage (excitation vibration signal) e is applied between the terminals T1 and T2. Thereby, between the electrode plates 5-1 and 5-2 of the excitation electrode 5 and the excitation electrode 6
2 between the electrode plates 6-1 and 6-2, an electric field is generated as indicated by an arrow in FIG. Stretching vibration occurs in the primary mode in the axial direction. That is, the vibrator element 4 expands or contracts in the Y-axis direction, and this expansion and contraction movement is repeated at a predetermined cycle. In this case, the frequency F1 of this stretching vibration is expressed by the following equation (1). F1 = K1 · (1 / 2L) ··· (1) However, K1: constant (= (E / ρ) 1/2 ), E: elastic constant, ρ: density, L: Y of the transducer element 4. Axial length.
【００２６】ここで、振動子素子４のＺ軸の回りに回転
角速度が作用すると、コリオリの力によりＸ軸方向へ１
次モードでの屈曲振動が生じる。すなわち、図３に示す
ように、振動子素子４の中心Ｐｃを支点として、一次モ
ードのカーブで屈曲振動する。この場合、この屈曲振動
の周波数Ｆ２は、下記（２）式で示される。
Ｆ２＝Ｋ２・｛Ｗ／（Ｌ／２）2 ｝ ・・・・（２）
ただし、Ｋ２：定数（＝（λａ2 ／４π）・（Ｅｇ／３
ρ）1/2 ）、Ｅ：弾性定数、ｇ：重力加速度、ρ：密
度、Ｌ：振動子素子４のＹ軸方向の長さ、λａ：振動子
形状で決まる固有値（１次）、Ｗ：振動子素子４のＸ軸
方向の長さ。Here, when a rotational angular velocity acts on the transducer element 4 around the Z-axis, the Coriolis force causes 1 in the X-axis direction.
Flexural vibration occurs in the next mode. That is, as shown in FIG. 3, the bending vibration occurs in the curve of the primary mode with the center Pc of the vibrator element 4 as a fulcrum. In this case, the bending vibration frequency F2 is expressed by the following equation (2). F2 = K2 · {W / (L / 2) 2 } ··· (2) where K2: constant (= (λa 2 / 4π) · (Eg / 3
ρ) 1/2 ), E: elastic constant, g: gravitational acceleration, ρ: density, L: length of the transducer element 4 in the Y-axis direction, λa: eigenvalue (first order) determined by the transducer shape, W: The length of the transducer element 4 in the X-axis direction.
【００２７】この屈曲振動において、その振動成分の大
きさはコリオリの力に比例しているので、振動子素子４
に形成された検出電極７および８には回転角速度に比例
した大きさで振動の方向に応じた極の電荷が発生する。
これにより、電極板７−１，７−２，８−３，８−４を
共通に接続した端子Ｔ３と、電極板７−３，７−４，８
−１，８−２を共通に接続した端子Ｔ４との間に、ある
時には矢印の方向、次には逆方向の電荷が発生し、コリ
オリの力に応じた電圧信号ｅs が得られる。In this bending vibration, since the magnitude of the vibration component is proportional to the Coriolis force, the vibrator element 4
In the detection electrodes 7 and 8 formed in the above, electric charges of a pole having a size proportional to the rotational angular velocity and corresponding to the direction of vibration are generated.
As a result, the terminal T3 commonly connected to the electrode plates 7-1, 7-2, 8-3, 8-4 and the electrode plates 7-3, 7-4, 8 are connected.
Between the terminal T4 to which -1, 8-2 are connected in common, charge is generated in the direction of the arrow and then in the opposite direction at some time, and a voltage signal es corresponding to the Coriolis force is obtained.
【００２８】この電圧信号ｅs の大きさによって、Ｚ軸
の回りに作用する回転角速度の大きさを知ることができ
る。また、この電圧信号ｅs は基本的にサインカーブと
して得られ、この電圧信号ｅs の波形と励振振動信号ｅ
の波形とを位相比較することにより、その位相の進み遅
れで回転角速度の方向を知ることができる。From the magnitude of this voltage signal es, the magnitude of the rotational angular velocity acting around the Z axis can be known. Further, this voltage signal es is basically obtained as a sine curve, and the waveform of this voltage signal es and the excitation vibration signal e
By comparing the phase with the waveform of, the direction of the rotational angular velocity can be known from the advance or delay of the phase.
【００２９】以上の説明から分かるように、この参考例
によれば、振動子素子４のＺ軸を高さ方向として、Ｚ軸
の回りに作用する回転角速度を検出することができるの
で、角速度センサの高さ方向の薄型化を促進することが
できるようになる。As can be seen from the above description, according to this reference example , the rotational angular velocity acting around the Z axis of the transducer element 4 can be detected with the Z axis as the height direction. Therefore, it becomes possible to promote the reduction in thickness of the angular velocity sensor in the height direction.
【００３０】また、この参考例によれば、振動子素子４
の励振周波数（伸縮振動周波数Ｆ１）は、振動子素子４
のＹ軸方向長さ（Ｌ）のみで、検出側周波数（屈曲振動
周波数Ｆ２）は、振動子素子４のＹ軸方向長さ（Ｌ）と
Ｘ軸方向長さ（Ｗ）で決定されるため、Ｗ寸法を変化さ
せてＦ１＝Ｆ２とすることが可能となる。Further, according to this reference example , the vibrator element 4
The excitation frequency (stretching vibration frequency F1) of
Since the detection side frequency (flexural vibration frequency F2) is determined only by the Y-axis direction length (L) and the X-axis direction length (W) of the transducer element 4, , W dimensions can be changed so that F1 = F2.
【００３１】なお、この参考例では、振動子素子４の中
心Ｐｃを基端部としてそのＹ軸方向の一方側に励振電極
５および検出電極７を、他方側に励振電極６および検出
電極７を形成するようにしたが、片側にのみ励振電極お
よび検出電極を形成するようにしてもよい。また、一方
側（他方側）に励振電極を、他方側（一方側）に検出電
極を形成するようにしてもよい。In this reference example , the excitation electrode 5 and the detection electrode 7 are provided on one side in the Y-axis direction with the center Pc of the vibrator element 4 as the base end, and the excitation electrode 6 and the detection electrode 7 are provided on the other side. Although it is formed, the excitation electrode and the detection electrode may be formed on only one side. Further, the excitation electrode may be formed on one side (the other side) and the detection electrode may be formed on the other side (the one side).
【００３２】また、この参考例では、電極５，６を励振
電極とし電極７，８を検出電極としたが、電極５，６を
検出電極とし電極７，８を励振電極とするようにしても
よい。この場合、励振電極７，８に励振振動信号ｅを印
加すると、振動子素子４がＸ軸方向へ１次モードで屈曲
振動する。この状態で、Ｚ軸の回りに回転角速度が作用
すると、振動子素子４がＹ軸方向に１次モードで伸縮振
動する。この伸縮振動によって生ずる電荷が検出電極
５，６より取り出され、この取り出された電荷に基づい
てＺ軸の回りに作用する回転角速度が検出される。In this reference example , the electrodes 5 and 6 are excitation electrodes and the electrodes 7 and 8 are detection electrodes. However, the electrodes 5 and 6 may be detection electrodes and the electrodes 7 and 8 may be excitation electrodes. Good. In this case, when the excitation vibration signal e is applied to the excitation electrodes 7 and 8, the vibrator element 4 flexurally vibrates in the X-axis direction in the primary mode. In this state, when the rotational angular velocity acts around the Z axis, the transducer element 4 stretches and vibrates in the Y axis direction in the primary mode. The electric charge generated by this stretching vibration is taken out from the detection electrodes 5 and 6, and the rotational angular velocity acting around the Z axis is detected based on the taken out electric charge.
【００３３】〔実施の形態：伸縮振動１次モード、屈曲
振動２次モード〕
図５はこの発明の一実施の形態を示す角速度センサの要
部を示す図であり、同図（ａ）は平面図、同図（ｂ）は
左側面図、同図（ｃ）は右側面図、同図（ｄ）は同図
（ａ）を裏面側から見た図である。[ Embodiment : Stretching vibration first-order mode, flexural vibration second-order mode] FIG. 5 is a view showing a main part of an angular velocity sensor according to an embodiment of the present invention, and FIG. The figure, the same figure (b) is a left side view, the same figure (c) is a right side view, and the same figure (d) is the figure which looked at the same figure (a) from the back side.
【００３４】これらの図において、１０は振動子素子
（水晶板）、１１（１１−１，１１−２）は第１の励振
電極、１２（１２−１，１２−２）は第２の励振電極、
１３（１３−１〜１３−４）は第１の検出電極、１４
（１４−１〜１４−４）は第２の検出電極、１５（１５
−１〜１５−４）は第３の検出電極、１６（１６−１〜
１６−４）は第４の検出電極、１７−１，１７−２は第
１の励振電極１１と第２の励振電極１２とを接続するリ
ード電極である。In these figures, 10 is a vibrator element (quartz plate), 11 (11-1, 11-2) is the first excitation electrode, and 12 (12-1, 12-2) is the second excitation electrode. electrode,
13 (13-1 to 13-4) is a first detection electrode, 14
(14-1 to 14-4) are second detection electrodes, 15 (15
-1 to 15-4) is a third detection electrode, 16 (16-1 to 16-1)
16-4) is a fourth detection electrode, and 17-1 and 17-2 are lead electrodes for connecting the first excitation electrode 11 and the second excitation electrode 12.
【００３５】振動子素子１０は、板状とされ、Ｙ軸方向
へ長く、Ｘ軸方向へ短く、Ｚ軸方向へ薄く形成されてい
る。また、振動子素子１０は、その中心Ｐｃを基端部１
０−０として支持されており、そのＹ軸方向の一方側の
先端部１０−１に第１の検出電極１３が、他方側の先端
部１０−２に第３の検出電極１５が形成されている。ま
た、振動子素子１０の基端部１０−０と一方側の先端部
１０−１との間（基端部１０−０より）に第２の検出電
極１４が、他方側の先端部１０−２との間（基端部１０
−０より）に第４の検出電極１６が形成されている。ま
た、第１の検出電極１３と第２の検出電極１４との間に
第１の励振電極１１が、第３の検出電極１５と第４の検
出電極１６との間に第２の励振電極１２が形成されてい
る。なお、振動子素子１０の周囲に、図４（ａ）に示す
ように、サポータ１０−３を一体的に設けるようにして
もよい。また、図４（ｂ）に示すように、サポータ１０
−３を一体的に設けると共に、先端部１０−１，１０−
２の形状を竜頭状としてもよい。The vibrator element 10 has a plate shape, is long in the Y-axis direction, short in the X-axis direction, and thin in the Z-axis direction. Further, the vibrator element 10 has its center Pc at the base end portion 1
It is supported as 0-0, and the first detection electrode 13 is formed at the tip 10-1 on one side in the Y-axis direction, and the third detection electrode 15 is formed at the tip 10-2 on the other side. There is. Further, the second detection electrode 14 is provided between the base end portion 10-0 of the transducer element 10 and the tip end portion 10-1 on one side (from the base end portion 10-0), and the tip end portion 10- on the other side. Between 2 (proximal end 10
The fourth detection electrode 16 is formed on (from −0). Further, the first excitation electrode 11 is provided between the first detection electrode 13 and the second detection electrode 14, and the second excitation electrode 12 is provided between the third detection electrode 15 and the fourth detection electrode 16. Are formed. Note that a supporter 10-3 may be integrally provided around the vibrator element 10 as shown in FIG. In addition, as shown in FIG.
-3 is integrally provided, and tip portions 10-1 and 10-
The shape of 2 may be a crown shape.
【００３６】励振電極１１は電極板１１−１，１１−２
をその構成要素としている。励振電極１２は電極板１２
−１，１２−２をその構成要素としている。電極板１１
−１，１１−２は検出電極１３と１４との間の左右の面
に形成されている。電極板１２−１，１２−２は検出電
極１５と１６との間の左右の面に形成されている。The excitation electrodes 11 are electrode plates 11-1 and 11-2.
Is its constituent element. The excitation electrode 12 is the electrode plate 12
-1, 12-2 are the constituent elements. Electrode plate 11
-1, 11-2 are formed on the left and right surfaces between the detection electrodes 13 and 14. The electrode plates 12-1 and 12-2 are formed on the left and right surfaces between the detection electrodes 15 and 16.
【００３７】検出電極１３は電極板１３−１〜１３−４
をその構成要素としている。検出電極１４は電極板１４
−１〜１４−４をその構成要素としている。検出電極１
５は電極板１５−１〜１５−４をその構成要素としてい
る。検出電極１６は電極板１６−１〜１６−４をその構
成要素としている。電極板１３−１〜１３−４は振動子
素子１０の一方側の先端部１０−１の表裏および左右の
面に形成されている。The detection electrodes 13 are electrode plates 13-1 to 13-4.
Is its constituent element. The detection electrode 14 is an electrode plate 14
-1 to 14-4 are used as its constituent elements. Detection electrode 1
5 has the electrode plates 15-1 to 15-4 as its constituent elements. The detection electrode 16 has electrode plates 16-1 to 16-4 as its constituent elements. The electrode plates 13-1 to 13-4 are formed on the front and back surfaces and the left and right surfaces of the tip portion 10-1 on one side of the vibrator element 10.
【００３８】電極板１４−１〜１４−４は振動子素子１
０の基端部１０−０と一方側の先端部１０−１との間
（基端部１０−０より）の表裏および左右の面に形成さ
れている。電極板１５−１〜１５−４は振動子素子１０
の他方側の先端部１０−２の表裏および左右の面に形成
されている。電極板１６−１〜１６−４は振動子素子１
０の基端部１０−０と他方側の先端部１０−２との間
（基端部１０−０より）の表裏および左右の面に形成さ
れている。The electrode plates 14-1 to 14-4 are vibrator elements 1
It is formed on the front and back surfaces and the left and right surfaces between the base end portion 0-0 of 0 and the tip end portion 10-1 on one side (from the base end portion 10-0). The electrode plates 15-1 to 15-4 are the vibrator elements 10
Is formed on the front and back surfaces and the left and right surfaces of the other end portion 10-2. Electrode plates 16-1 to 16-4 are transducer elements 1
It is formed on the front and back surfaces and the left and right surfaces between the base end portion 0-0 of 0 and the tip end portion 10-2 on the other side (from the base end portion 10-0).
【００３９】なお、電極板１４−１および１６−１は、
リード電極１７−１を振動子素子１０の表面に形成する
必要上、電極板１４−１１，１４−１２および１６−１
１，１６−１２に分割されている。また、電極板１４−
２および１６−２もリード電極１７−２を振動子素子１
０の裏面に形成する必要上、電極板１４−２１，１４−
２２および１６−２１，１６−２２に分割されている。The electrode plates 14-1 and 16-1 are
Since it is necessary to form the lead electrode 17-1 on the surface of the vibrator element 10, the electrode plates 14-11, 14-12 and 16-1 are required.
It is divided into 1, 16-12. Also, the electrode plate 14-
2 and 16-2 also connect the lead electrode 17-2 to the vibrator element 1
Since it is necessary to form it on the back surface of 0, the electrode plates 14-21, 14-
22 and 16-21, 16-22.
【００４０】また、この実施の形態では、後述する振動
子素子１０の２次モードでの屈曲振動において、その振
動による歪が最大となる箇所に検出電極１３〜１６を、
最小となる箇所に励振電極１１および１２を形成してい
る（図７参照）。Further, in this embodiment, in flexural vibration of the vibrator element 10 to be described later in the secondary mode, the detection electrodes 13 to 16 are provided at the locations where the distortion due to the vibration is maximum.
The excitation electrodes 11 and 12 are formed at the minimum position (see FIG. 7).
【００４１】図６は図５における各電極の接続関係を分
かり易いように示した結線図である。すなわち、この角
速度センサにおいては、第１の励振電極１１の電極板１
１−１と第２の励振電極１２の電極板１２−１とがリー
ド電極１７−１を介して端子Ｔ１に共通に接続され、第
１の励振電極１１の電極板１１−２と第２の励振電極１
２の電極板１２−２とがリード電極１７−２を介して端
子Ｔ２に共通に接続される。FIG. 6 is a connection diagram showing the connection relationship of each electrode in FIG. 5 for easy understanding. That is, in this angular velocity sensor, the electrode plate 1 of the first excitation electrode 11 is
1-1 and the electrode plate 12-1 of the second excitation electrode 12 are commonly connected to the terminal T1 via the lead electrode 17-1, and the electrode plate 11-2 of the first excitation electrode 11 and the second Excitation electrode 1
The second electrode plate 12-2 is commonly connected to the terminal T2 via the lead electrode 17-2.
【００４２】また、第１の検出電極１３の電極板１３−
１と１３−２とが端子Ｔ３に共通に接続され、第１の検
出電極１３の電極板１３−３と１３−４とが端子Ｔ４に
共通に接続される。また、第２の検出電極１４の電極板
１４−１（１４−１１，１４−１２）と１４−２（１４
−２１，１４−２２）とが端子Ｔ４に共通に接続され、
第２の検出電極１４の電極板１４−３と１４−４とが端
子Ｔ３に共通に接続される。Further, the electrode plate 13- of the first detection electrode 13
1 and 13-2 are commonly connected to the terminal T3, and the electrode plates 13-3 and 13-4 of the first detection electrode 13 are commonly connected to the terminal T4. Also, the electrode plates 14-1 (14-11, 14-12) and 14-2 (14) of the second detection electrode 14 are
, -21, 14-22) are commonly connected to the terminal T4,
The electrode plates 14-3 and 14-4 of the second detection electrode 14 are commonly connected to the terminal T3.
【００４３】また、第３の検出電極１５の電極板１５−
１と１５−２とが端子Ｔ４に共通に接続され、第３の検
出電極１５の電極板１５−３と１５−４とが端子Ｔ３に
共通に接続される。また、第４の検出電極１６の電極板
１６−１（１６−１１，１６−１２）と１６−２（１６
−２１，１６−２２）とが端子Ｔ３に共通に接続され、
第４の検出電極１６の電極板１６−３と１６−４とが端
子Ｔ４に共通に接続される。Further, the electrode plate 15- of the third detection electrode 15
1 and 15-2 are commonly connected to the terminal T4, and the electrode plates 15-3 and 15-4 of the third detection electrode 15 are commonly connected to the terminal T3. Further, the electrode plates 16-1 (16-11, 16-12) and 16-2 (16) of the fourth detection electrode 16 are
-21, 16-22) are commonly connected to the terminal T3,
The electrode plates 16-3 and 16-4 of the fourth detection electrode 16 are commonly connected to the terminal T4.
【００４４】〔検出動作〕端子Ｔ１とＴ２との間に励振
振動信号ｅを印加する。これにより、励振電極１１の電
極板１１−１と１１−２との間および励振電極１２の電
極板１２−１と１２−２との間に、ある時は図６中に矢
印で示す如く電界が発生し、次には逆方向の電界が発生
することにより、振動子素子１０がＹ軸方向へ１次モー
ドで伸縮振動する。すなわち、振動子素子１０がＹ軸方
向へ伸びたり、縮んだりし、この伸縮運動を所定周期で
繰り返す。この場合、この伸縮振動の周波数Ｆ１は、前
記の（１）式で示される。[Detection Operation] The excitation vibration signal e is applied between the terminals T1 and T2. As a result, between the electrode plates 11-1 and 11-2 of the excitation electrode 11 and between the electrode plates 12-1 and 12-2 of the excitation electrode 12, when there is an electric field as indicated by an arrow in FIG. Occurs, and then an electric field in the opposite direction is generated, so that the transducer element 10 expands and contracts in the Y-axis direction in the primary mode. That is, the vibrator element 10 expands or contracts in the Y-axis direction, and this expansion and contraction movement is repeated at a predetermined cycle. In this case, the frequency F1 of this stretching vibration is expressed by the above-mentioned formula (1).
【００４５】ここで、振動子素子１０のＺ軸の回りに回
転角速度が作用すると、コリオリの力によりＸ軸方向へ
２次モードでの屈曲振動が生じる。すなわち、図７に示
すように、振動子素子１０の中心Ｐｃを支点として、２
次モードのカーブで屈曲振動する。この場合、この屈曲
振動の周波数Ｆ３は、下記（３）式で示される。
Ｆ３＝Ｋ３・｛Ｗ／（Ｌ／２）2 ｝ ・・・・（３）
ただし、Ｋ３：定数（＝（λｂ2 ／４π）・（Ｅｇ／３
ρ）1/2 ）、Ｅ：弾性定数、ｇ：重力加速度、ρ：密
度、Ｌ：振動子素子１０のＹ軸方向の長さ、λｂ：振動
子形状で決まる固有値（２次）、Ｗ：振動子素子１０の
Ｘ軸方向の長さ。When a rotational angular velocity acts on the vibrator element 10 around the Z axis, Coriolis force causes bending vibration in the secondary mode in the X axis direction. That is, as shown in FIG. 7, with the center Pc of the transducer element 10 as a fulcrum,
Bending vibration occurs in the curve of the next mode. In this case, the frequency F3 of this bending vibration is expressed by the following equation (3). F3 = K3 · {W / (L / 2) 2 } ... (3) where K3: constant (= (λb 2 / 4π) · (Eg / 3
ρ) 1/2 ), E: elastic constant, g: gravitational acceleration, ρ: density, L: length of the transducer element 10 in the Y-axis direction, λb: eigenvalue (secondary) determined by the shape of the transducer, W: The length of the transducer element 10 in the X-axis direction.
【００４６】この屈曲振動において、その振動成分の大
きさはコリオリの力に比例しているので、振動子素子１
０に形成された検出電極１３〜１６には回転角速度に比
例した大きさで振動の方向に応じた極の電荷が発生す
る。これにより、電極板１３−１，１３−２，１４−
３，１４−４，１５−３，１５−４，１６−１，１６−
２を共通に接続した端子Ｔ３と、電極板１３−３，１３
−４，１４−１，１４−２，１５−１，１５−２，１６
−３，１６−４を共通に接続した端子Ｔ４との間に、あ
る時には矢印の方向、次には逆方向の電荷が発生し、コ
リオリの力に応じた電圧信号ｅs が得られる。In this bending vibration, since the magnitude of the vibration component is proportional to the Coriolis force, the vibrator element 1
On the detection electrodes 13 to 16 formed at 0, electric charges of a pole having a size proportional to the rotational angular velocity and corresponding to the direction of vibration are generated. Thereby, the electrode plates 13-1, 13-2, 14-
3, 14-4, 15-3, 15-4, 16-1, 16-
2 is commonly connected to the terminal T3 and the electrode plates 13-3, 13
-4, 14-1, 14-2, 15-1, 15-2, 16
Between the terminal T4 and the terminal T4 to which -3 and 16-4 are commonly connected, electric charges are generated in the direction of the arrow and then in the opposite direction at some time, and the voltage signal es corresponding to the Coriolis force is obtained.
【００４７】この電圧信号ｅs の大きさによって、Ｚ軸
の回りに作用する回転角速度の大きさを知ることができ
る。また、この電圧信号ｅs は基本的にサインカーブと
して得られ、この電圧信号ｅs の波形と励振振動信号ｅ
の波形とを位相比較することにより、その位相の進み遅
れで回転角速度の方向を知ることができる。From the magnitude of the voltage signal es, the magnitude of the rotational angular velocity acting around the Z axis can be known. Further, this voltage signal es is basically obtained as a sine curve, and the waveform of this voltage signal es and the excitation vibration signal e
By comparing the phase with the waveform of, the direction of the rotational angular velocity can be known from the advance or delay of the phase.
【００４８】なお、この実施の形態では、振動子素子１
０の中心Ｐｃを基端部としてそのＹ軸方向の一方側に励
振電極１１および検出電極１３，１４を、他方側に励振
電極１２および検出電極１５，１６を形成するようにし
たが、片側にのみ励振電極および検出電極を形成するよ
うにしてもよい。また、一方側（他方側）に励振電極
を、他方側（一方側）に検出電極を形成するようにして
もよい。In this embodiment, the vibrator element 1
Although the excitation electrode 11 and the detection electrodes 13 and 14 are formed on one side in the Y-axis direction with the center Pc of 0 as the base end and the excitation electrode 12 and the detection electrodes 15 and 16 are formed on the other side, one side is formed. Only the excitation electrode and the detection electrode may be formed. Further, the excitation electrode may be formed on one side (the other side) and the detection electrode may be formed on the other side (the one side).
【００４９】また、この実施の形態では、電極１１，１
２を励振電極とし電極１３〜１６を検出電極としたが、
電極１１，１２を検出電極とし電極１３〜１６を励振電
極とするようにしてもよい。この場合、励振電極１３〜
１６に励振振動信号ｅを印加すると、振動子素子１０が
Ｘ軸方向へ２次モードで屈曲振動する。この状態で、Ｚ
軸の回りに回転角速度が作用すると、振動子素子１０が
Ｙ軸方向に１次モードで伸縮振動する。この伸縮振動に
よって生ずる電荷が検出電極１１，１２より取り出さ
れ、この取り出された電荷に基づいてＺ軸の回りに作用
する回転角速度が検出される。Further, in this embodiment, the electrodes 11, 1
2 is an excitation electrode and electrodes 13 to 16 are detection electrodes,
The electrodes 11 and 12 may be used as detection electrodes and the electrodes 13 to 16 may be used as excitation electrodes. In this case, the excitation electrode 13-
When the excitation vibration signal e is applied to 16, the vibrator element 10 flexurally vibrates in the secondary mode in the X-axis direction. In this state, Z
When the rotational angular velocity acts around the axis, the vibrator element 10 expands and contracts in the Y-axis direction in the primary mode. The electric charges generated by this stretching vibration are extracted from the detection electrodes 11 and 12, and the rotational angular velocity acting around the Z axis is detected based on the extracted charges.
【００５０】以上Ｙ軸方向への伸縮振動とＸ−Ｙ平面内
の屈曲振動との組合せによるものについて述べたが、Ｚ
軸方向の屈曲振動に対応した電極を構成すれば、Ｙ軸方
向への伸縮振動とＺ−Ｙ平面内の屈曲振動とを組合せ
て、Ｘ軸の回りに作用する回転角速度を検出することが
可能となる。The combination of the stretching vibration in the Y-axis direction and the bending vibration in the XY plane has been described above.
If an electrode that supports bending vibration in the axial direction is configured, it is possible to detect the rotational angular velocity acting around the X axis by combining the stretching vibration in the Y axis direction and the bending vibration in the Z-Y plane. Becomes
【００５１】[0051]
【発明の効果】以上説明したことから明らかなように本
発明によれば、振動子素子の伸縮振動と屈曲振動を利用
することにより、Ｚ軸を高さ方向としてＺ軸の回りに作
用する回転角速度を検出することが可能となり、高さ方
向への薄型化を促進することができるようになる。As is apparent from the above description, according to the present invention, by utilizing the stretching vibration and the bending vibration of the vibrator element, the rotation acting around the Z axis with the Z axis as the height direction. It becomes possible to detect the angular velocity, and it is possible to promote the thinning in the height direction.
【図１】 本発明の説明に入る前の参考例を示す角速度
センサの要部を示す図である。FIG. 1 is a diagram showing a main part of an angular velocity sensor showing a reference example before starting a description of the present invention.
【図２】 図１における各電極の接続関係を分かり易い
ように示した結線図である。FIG. 2 is a connection diagram showing a connection relationship of each electrode in FIG. 1 for easy understanding.
【図３】 この角速度センサにおける振動子素子の屈曲
振動（１次モード）状況を例示する図である。FIG. 3 is a diagram illustrating a state of bending vibration (first mode) of a vibrator element in this angular velocity sensor.
【図４】 振動子素子の周囲に一体的にサポータを設け
た例を示す図である。FIG. 4 is a diagram showing an example in which a supporter is integrally provided around a vibrator element.
【図５】 本発明の一実施の形態を示す角速度センサの
要部を示す図である。5 is a drawing showing the essential components of the angular velocity sensor shown in the form status of an embodiment of the present invention.
【図６】 図５における各電極の接続関係を分かり易い
ように示した結線図である。FIG. 6 is a connection diagram showing the connection relationship of each electrode in FIG. 5 for easy understanding.
【図７】 この角速度センサにおける振動子素子の屈曲
振動（２次モード）状況を例示する図である。FIG. 7 is a diagram illustrating an example of a bending vibration (second mode) of a vibrator element in this angular velocity sensor.
【図８】 従来の角速度センサの要部を示す図である。FIG. 8 is a diagram showing a main part of a conventional angular velocity sensor.
４…振動子素子、４−０…基端部、４−１…一方側の先
端部、４−２…他方側の先端部、５（５−１，５−２）
…第１の励振電極、６（６−１，６−２）…第２の励振
電極、７（７−１〜７−４）…第１の検出電極、８（８
−１〜８−４）…第２の検出電極、９−１，９−２…リ
ード電極、１０…振動子素子、１０−０…基端部、１０
−１…一方側の先端部、１０−２…他方側の先端部、１
１（１１−１，１１−２）…第１の励振電極、１２（１
２−１，１２−２）…第２の励振電極、１３（１３−１
〜１３−４）…第１の検出電極、１４（１４−１〜１４
−４）…第２の検出電極、１５（１５−１〜１５−４）
…第３の検出電極、１６（１６−１〜１６−４）…第４
の検出電極、１７−１，１７−２…リード電極。4 ... Transducer element, 4-0 ... Base end part, 4-1 ... One end part, 4-2 ... Other end part, 5 (5-1, 5-2)
... 1st excitation electrode, 6 (6-1, 6-2) ... 2nd excitation electrode, 7 (7-1 to 7-4) ... 1st detection electrode, 8 (8
-1 to 8-4) ... Second detection electrodes, 9-1, 9-2 ... Lead electrodes, 10 ... Transducer element, 10-0 ... Base end portion, 10
-1 ... Tip on one side, 10-2 ... Tip on the other side, 1
1 (11-1, 11-2) ... 1st excitation electrode, 12 (1
2-1 and 12-2) ... Second excitation electrode, 13 (13-1)
~ 13-4) ... 1st detection electrode, 14 (14-1 to 14)
-4) ... Second detection electrode, 15 (15-1 to 15-4)
... Third detection electrode, 16 (16-1 to 16-4) ... Fourth
Detection electrodes, 17-1, 17-2 ... Lead electrodes.
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) G01C 19/56 G01P 9/04 ─────────────────────────────────────────────────── ─── Continuation of front page (58) Fields surveyed (Int.Cl. 7 , DB name) G01C 19/56 G01P 9/04
Claims (5)
と直交する方向をＸ軸方向，Ｘ−Ｙ平面と直交する方向
をＺ軸方向とする振動子素子と、 交流電圧の印加を受けて前記振動子素子をＹ軸方向へ伸
縮振動させる励振電極と、 前記振動子素子をＹ軸方向へ伸縮振動させならがＺ軸の
回りに回転させたときＸ軸方向に生ずる屈曲振動によっ
て生ずる電荷を取り出す検出電極とを備え、 前記励振電極による振動子素子のＹ軸方向への伸縮振動
が１次モードであり、前記振動子素子をＹ軸方向へ伸縮
振動させならがＺ軸の回りに回転させたときＸ軸方向に
生ずる屈曲振動が２次モードである ことを特徴とする角
速度センサ。1. A transducer element whose longitudinal direction is the Y-axis direction, a direction orthogonal to this Y-axis direction is the X-axis direction, and a direction orthogonal to the XY plane is the Z-axis direction, and an AC voltage is applied. An excitation electrode that receives and causes the vibrator element to expand and contract in the Y-axis direction, and a flexural vibration that occurs in the X-axis direction when the vibrator element expands and contracts in the Y-axis direction and is rotated around the Z-axis. A stretching electrode in the Y-axis direction of the transducer element , which is provided with a detection electrode for taking out electric charges, by the excitation electrode.
Is the first-order mode, and expands and contracts the transducer element in the Y-axis direction.
If you want to vibrate, rotate it around the Z-axis
An angular velocity sensor characterized in that the bending vibration that occurs is in the secondary mode .
いて、振動子素子のＹ軸方向の先端部に第１の検出電極
が形成され、振動子素子の基端部と前記先端部との間に
第２の検出電極が形成され、この第２の検出電極と前記
第１の検出電極との間に励振電極が形成されていること
を特徴とする角速度センサ。2. The angular velocity sensor according to claim 1 , wherein the first detection electrode is provided at the tip of the transducer element in the Y-axis direction.
Is formed between the base end portion of the transducer element and the tip end portion.
A second detection electrode is formed, and the second detection electrode and the
An angular velocity sensor characterized in that an excitation electrode is formed between the first detection electrode and the first detection electrode .
いて、検出電極を構成する電極板の一部が分割されてい
ることを特徴とする角速度センサ。3. The angular velocity sensor according to claim 2, wherein a part of the electrode plate forming the detection electrode is divided.
An angular velocity sensor, characterized in that that.
と直交する方向をＸ軸方向，Ｘ−Ｙ平面と直交する方向
をＺ軸方向とする振動子素子と、 交流電圧の印加を受けて前記振動子素子をＸ軸方向へ屈
曲振動させる励振電極と、 前記振動子素子をＸ軸方向へ屈曲振動させならがＺ軸の
回りに回転させたときＹ軸方向に生ずる伸縮振動によっ
て生ずる電荷を取り出す検出電極とを備え、 前記励振電極による振動子素子のＸ軸方向への屈曲振動
が２次モードであり、前記振動子素子をＸ軸方向へ屈曲
振動させながらＺ軸の回りに回転させたときＹ軸方向に
生ずる伸縮振動が１次モードである ことを特徴とする角
速度センサ。4. The longitudinal direction is the Y-axis direction, and this Y-axis direction
The direction orthogonal to the X-axis direction, the direction orthogonal to the XY plane
Is in the Z-axis direction and the oscillator element is bent in the X-axis direction when an AC voltage is applied.
Excitation electrodes for bending vibration and bending of the vibrator element in the X-axis direction are required for the Z-axis.
Due to the stretching vibration that occurs in the Y-axis direction when rotated around
Bending vibration in the X-axis direction of the vibrator element by the excitation electrode , the detection electrode taking out electric charges generated by
Is the secondary mode, bending the transducer element in the X-axis direction
When rotated around the Z axis while vibrating, in the Y axis direction
An angular velocity sensor characterized in that the stretching vibration that occurs is in the first-order mode .
いて、振動子素子のＹ軸方向の先端部に第１の励振電極
が形成され、振動子素子の基端部と前記先端部との間に
第２の励振電極が形成され、この第２の励振電極と前記
第１の励振電極との間に検出電極が形成されていること
を特徴とする角速度センサ。5. The angular velocity sensor according to claim 4, wherein a first excitation electrode is formed at a tip portion of the transducer element in the Y-axis direction, and a first end portion of the transducer element and a base end portion of the transducer element are formed. An angular velocity sensor, characterized in that a second excitation electrode is formed between the tip and the detection electrode, and a detection electrode is formed between the second excitation electrode and the first excitation electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21244196A JP3419999B2 (en) | 1996-08-12 | 1996-08-12 | Angular velocity sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21244196A JP3419999B2 (en) | 1996-08-12 | 1996-08-12 | Angular velocity sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1054721A JPH1054721A (en) | 1998-02-24 |
| JP3419999B2 true JP3419999B2 (en) | 2003-06-23 |
Family
ID=16622669
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21244196A Expired - Fee Related JP3419999B2 (en) | 1996-08-12 | 1996-08-12 | Angular velocity sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3419999B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005024310A (en) * | 2003-06-30 | 2005-01-27 | Kyocera Kinseki Corp | Inertia sensor |
| CN103954351B (en) * | 2014-04-29 | 2016-06-01 | 北京遥测技术研究所 | The measuring method of the micro-angular oscillation of a kind of space vehicle |
-
1996
- 1996-08-12 JP JP21244196A patent/JP3419999B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH1054721A (en) | 1998-02-24 |
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