JPH09277527A - Ink jet head - Google Patents

Ink jet head

Info

Publication number
JPH09277527A
JPH09277527A JP9542296A JP9542296A JPH09277527A JP H09277527 A JPH09277527 A JP H09277527A JP 9542296 A JP9542296 A JP 9542296A JP 9542296 A JP9542296 A JP 9542296A JP H09277527 A JPH09277527 A JP H09277527A
Authority
JP
Japan
Prior art keywords
pressure chamber
piezoelectric element
island
diaphragm
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9542296A
Other languages
Japanese (ja)
Inventor
Masao Kunida
雅夫 國田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP9542296A priority Critical patent/JPH09277527A/en
Publication of JPH09277527A publication Critical patent/JPH09277527A/en
Pending legal-status Critical Current

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  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

PROBLEM TO BE SOLVED: To ensure adhesive and sealing properties even when the width of the top part of a partition of a pressure room is narrowed and to prevent pressure from leaking to the adjoining pressure room by dividing a piezoelectric element into a plurality of parts by the first wide and sharrow channels and the second narrow and deep channels. SOLUTION: A diaphragm 40 has an island 42 being an island-like thick part and the number of these islands is two-fold of pressure rooms 32 of a pressure room plate 30. The apex part of the even numbered island 42 is bonded to the free end part 22 of a piezoelectric element 20 and the back face of the odd numbered island 42 is bonded to the top part 36 of the partition 34 of a pressure room plate. The piezoelectric element 20 is divided into a plurality of parts by the first wide and shallow channels 24 and the second narrow and deep channels each with the same axial line as this channel 24. Practically, channel processing is performed by means of a wire saw in such a way that the first wide and shallow channels 24 with a channel width of approximately 100μm are processed by using a thick wire with a diameter of approximately 90μm. Strong tension is applicable to the thick wire to process a precise channel position.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、インクジェットヘ
ッドの改良に関する。
TECHNICAL FIELD The present invention relates to an improvement of an inkjet head.

【0002】[0002]

【従来の技術】従来のダイヤフラムは、複数に分割され
た圧電素子と同数の島状厚肉部であるアイランドを設け
てある。ダイヤフラムのアイランドは、圧電素子の自由
端部と対向し接合する。ダイヤフラムの薄肉部は、圧力
室板隔壁の頂部が接合する。
2. Description of the Related Art A conventional diaphragm is provided with islands which are island-shaped thick-walled parts in the same number as a plurality of divided piezoelectric elements. The island of the diaphragm faces and joins the free end of the piezoelectric element. The thin portion of the diaphragm is joined to the top of the partition wall of the pressure chamber plate.

【0003】圧力室板とダイヤフラムの接合は、圧力室
板隔壁の頂部に接着剤を塗布した後にダイヤフラムを押
圧する。圧力室板隔壁の頂部はダイヤフラムの薄肉部に
対向しているため、圧力室板隔壁の頂部とダイヤフラム
との間の接着剤に押圧力が十分に加わらない構成であ
る。
The pressure chamber plate and the diaphragm are joined by pressing the diaphragm after applying an adhesive to the top of the partition wall of the pressure chamber plate. Since the top of the pressure chamber plate partition faces the thin portion of the diaphragm, the pressing force is not sufficiently applied to the adhesive between the top of the pressure chamber plate partition and the diaphragm.

【0004】接着剤は、塗布による厚さムラが生じる。
接着の厚さムラは、圧力室板とダイヤフラムとの接着密
封性を阻害する要因となる。厚さムラの低減には、圧力
室板とダイヤフラムに押圧力を加え、接着剤を押圧し凹
凸を低減する事が重要である。 圧力室の間隔が広く圧
力室隔壁の頂部の幅も十分に確保できる場合には、従来
の構成であっても圧力室隔壁の頂部とダイヤフラムとの
接着密封性は、ほぼ確保できた。
The adhesive causes unevenness in thickness due to application.
The uneven adhesion thickness is a factor that hinders the adhesive sealing between the pressure chamber plate and the diaphragm. In order to reduce the thickness unevenness, it is important to apply a pressing force to the pressure chamber plate and the diaphragm to press the adhesive to reduce the unevenness. When the distance between the pressure chambers is wide and the width of the top of the partition wall of the pressure chamber can be sufficiently secured, the adhesive sealing property between the top portion of the partition wall of the pressure chamber and the diaphragm can be almost secured even with the conventional configuration.

【0005】近来、画像品質を高める高解像度化の要望
が強い。この要望の具現化は、圧力室の間隔を狭め、単
位長さ内に設ける圧力室数を増加する事である。圧力室
間隔が従来の半分となるのに伴い、隔壁頂部の幅も約半
分となる。
Recently, there is a strong demand for higher resolution for improving image quality. The realization of this demand is to narrow the intervals between the pressure chambers and increase the number of pressure chambers provided within a unit length. As the space between the pressure chambers is halved, the width of the top of the partition wall is halved.

【0006】従来の構成のままで、隔壁頂部の幅を約半
分とし接着すると、わずかに残る接着剤の凹凸により接
着密封性を確保できない。この結果、隣接圧力室への圧
力漏れが生じ、インク吐出性能が低下する欠点があっ
た。
If the width of the top of the partition wall is reduced to about half with the conventional structure and bonding is performed, the adhesive sealing property cannot be ensured due to the slight remaining unevenness of the adhesive. As a result, there is a drawback that pressure leakage to the adjacent pressure chamber occurs and the ink ejection performance deteriorates.

【0007】また、高解像度化に伴い圧電素子の分割数
も増大する。圧電素子のランド幅は、所定の駆動力を得
るため一定の幅が必要である。従って圧電素子の分割数
の増大は、著しい溝幅低減が必要である。
Further, as the resolution is increased, the number of divisions of the piezoelectric element also increases. The land width of the piezoelectric element needs to be constant in order to obtain a predetermined driving force. Therefore, an increase in the number of divisions of the piezoelectric element requires a remarkable reduction in groove width.

【0008】溝加工はワイヤーソーで行う。狭溝加工に
は細いワイヤーを用いるが、細いワイヤーは断線しやす
いため高い張力を加える事が出来ない。このためワイヤ
ー間隔は、圧電素子と接触した時点での圧電素子の僅か
な傷や欠け等の影響を受けやすい。従って、狭溝加では
溝位置のズレが大きくなる欠点があった。
Grooving is performed with a wire saw. A thin wire is used for narrow groove processing, but it is not possible to apply high tension because the thin wire is easily broken. For this reason, the wire interval is easily affected by slight scratches or chipping of the piezoelectric element at the time of contact with the piezoelectric element. Therefore, the addition of the narrow groove has a drawback that the deviation of the groove position becomes large.

【0009】[0009]

【発明が解決しようとする課題】本案の目的は、圧力室
隔壁の頂部の幅が狭くなっても接着密封性を確保でき、
隣接圧力室への圧力漏れを無くす事である。更に、圧電
素子の分割数の増大に伴う幅狭溝の加工において、溝位
置精度を確保するの確保する事である。両者の目的達成
により、単位長さ内に設ける圧力室数を増加する要求を
達成し、インクジェットヘッドの高解像度化の要望に答
える事である。
SUMMARY OF THE INVENTION The object of the present invention is to ensure adhesive sealability even if the width of the top of the pressure chamber partition wall is narrowed.
It is to eliminate the pressure leak to the adjacent pressure chamber. Further, it is necessary to ensure the groove position accuracy in the processing of the narrow groove as the number of divisions of the piezoelectric element increases. By achieving the objectives of both, the demand for increasing the number of pressure chambers provided within the unit length is achieved, and the demand for higher resolution of the inkjet head is met.

【0010】[0010]

【課題を解決するための手段】上記課題を解決するた
め、インクを吐出する複数のノズル穴を有するノズル板
と、ノズル数とほぼ同数に分割されインク吐出のエネル
ギー供給源である圧電素子と、ノズル数とほぼ同数の溝
を有しここを圧力室とする圧力室板と、島状厚肉部であ
るアイランドを有するダイヤフラムとを有し、圧力室板
とダイヤフラムとを接合することで圧力室を形成し、ダ
イヤフラムと圧電素子とを接合する事で圧電素子の変位
を圧力室内のインクに伝えるインクジェットヘッドであ
って、ダイヤフラムの島状厚肉部であるアイランドの数
が圧力室板の圧力室の2倍数であり、偶数番のアイラン
ドの先端部が圧電素子の頂部に接合し、奇数番のアイラ
ンドの背面が圧力室板隔壁の頂部に接合し、圧電素子
が、幅が広く浅い第一の溝と、幅が狭く深い第二の溝と
により、複数に分割する。
In order to solve the above-mentioned problems, a nozzle plate having a plurality of nozzle holes for ejecting ink, a piezoelectric element that is an energy supply source for ink ejection divided into almost the same number as the number of nozzles, It has a pressure chamber plate having a number of grooves which is almost the same as the number of nozzles and which serves as a pressure chamber, and a diaphragm having an island that is an island-shaped thick portion, and the pressure chamber is formed by joining the pressure chamber plate and the diaphragm. An ink jet head that transfers the displacement of the piezoelectric element to the ink in the pressure chamber by joining the diaphragm and the piezoelectric element to each other, and the number of islands that are island-shaped thick portions of the diaphragm is equal to the pressure chamber of the pressure chamber plate. The tip of the even-numbered island is joined to the top of the piezoelectric element, the back of the odd-numbered island is joined to the top of the pressure chamber plate partition, and the piezoelectric element is wide and shallow. A groove, the width is narrow and deep second groove is divided into a plurality.

【0011】[0011]

【発明の実施の形態】図1は本発明にかかわるインクジ
ェットヘッドの一実施例を示す断面図である。ノズル板
10は、インクを吐出する複数のノズル穴12を有す
る。圧電素子20は、インク吐出のエネルギー供給源で
あり、ノズル穴12数とほぼ同数に溝加工により分割さ
れている。圧力室板30はノズル穴12数とほぼ同数の
溝を有し、インク流路でもある圧力室を形成する。
1 is a sectional view showing an embodiment of an ink jet head according to the present invention. The nozzle plate 10 has a plurality of nozzle holes 12 for ejecting ink. The piezoelectric element 20 is an energy supply source for ejecting ink, and is divided by groove processing into almost the same number as the nozzle holes 12. The pressure chamber plate 30 has as many grooves as there are nozzle holes 12 and forms a pressure chamber that is also an ink flow path.

【0012】図3において、ダイヤフラム40は、島状
厚肉部であるアイランド42を有する。ダイヤフラム4
0のアイランド42の数は、圧力室板30の圧力室32
の2倍数を設ける。偶数番のアイランド42の先端部は
圧電素子20の自由端部22に接合し、奇数番のアイラ
ンド42の背面は圧力室板隔壁34の頂部36に接合す
る。
In FIG. 3, the diaphragm 40 has an island 42 which is an island-shaped thick portion. Diaphragm 4
The number of zero islands 42 is equal to the number of pressure chambers 32 of the pressure chamber plate 30.
2 times the number of The tip of the even-numbered island 42 is joined to the free end 22 of the piezoelectric element 20, and the back of the odd-numbered island 42 is joined to the top 36 of the pressure chamber plate partition 34.

【0013】圧電素子20の両側部には圧電素子側部2
8が設けてあり、ダイヤフラム40の両側部にも厚肉部
であるダイヤフラム側部44が設けてある。
Piezoelectric element side portions 2 are provided on both sides of the piezoelectric element 20.
8 is provided, and diaphragm side portions 44, which are thick portions, are also provided on both sides of the diaphragm 40.

【0014】圧力室板30は、ダイヤフラム40を接合
する事で圧力室32を形成する。圧力室板30とダイヤ
フラム40の接合は、スクリーン印刷法や転写方法でエ
ポキシ接着剤を塗布した後、圧力室板30とダイヤフラ
ム40を押圧した状態で加熱し硬化する。
The pressure chamber plate 30 forms a pressure chamber 32 by joining the diaphragm 40. To bond the pressure chamber plate 30 and the diaphragm 40, after applying an epoxy adhesive by a screen printing method or a transfer method, the pressure chamber plate 30 and the diaphragm 40 are heated and cured while being pressed.

【0015】圧力室板30の頂部36に対応してアイラ
ンド42を設けてあり、それぞれのアイランド42はほ
ぼ同じ高さであるので、上記押圧力は頂部36とアイラ
ンド42の間の接着剤にも十分に加わり、確実な接着密
封性が確保できる。
Since the islands 42 are provided corresponding to the tops 36 of the pressure chamber plates 30, and the respective islands 42 have almost the same height, the above pressing force also applies to the adhesive between the tops 36 and the islands 42. It can be added sufficiently to ensure reliable adhesive sealing.

【0016】圧力室板30とダイヤフラム40の接合
後、フレーム50を接合する。フレーム50の接合方法
は、フレーム50にスクリーン印刷法や転写方法でエポ
キシ接着剤を塗布し、ダイヤフラム40を挟む状態で圧
力室板30とフレーム50を加圧する。その後に加熱し
接着剤を硬化させる。
After joining the pressure chamber plate 30 and the diaphragm 40, the frame 50 is joined. As a method of joining the frame 50, an epoxy adhesive is applied to the frame 50 by a screen printing method or a transfer method, and the pressure chamber plate 30 and the frame 50 are pressed while sandwiching the diaphragm 40. After that, it is heated to cure the adhesive.

【0017】圧力室板30とダイヤフラム40とフレー
ム50が一体となった状態で、ノズル板10を接合する
面を同一面に仕上げる。その仕上面に、ノズル板10を
接合する。ノズル板10の接合は、圧力室板30の頂部
36にエポキシ接着剤をスクリーン印刷法や転写方法で
塗布し、ノズル板10を押圧下状態で加熱硬化する。
With the pressure chamber plate 30, the diaphragm 40, and the frame 50 integrated, the surfaces for joining the nozzle plates 10 are finished to be the same surface. The nozzle plate 10 is bonded to the finished surface. To bond the nozzle plate 10, an epoxy adhesive is applied to the top portion 36 of the pressure chamber plate 30 by a screen printing method or a transfer method, and the nozzle plate 10 is heated and cured while being pressed.

【0018】ダイヤフラム40は、アイランド42と圧
電素子20の自由端部22と接合し、圧電素子20の変
位を圧力室内のインクに伝える。
The diaphragm 40 joins the island 42 and the free end 22 of the piezoelectric element 20 and transmits the displacement of the piezoelectric element 20 to the ink in the pressure chamber.

【0019】ダイヤフラム40と圧電素子20の自由端
部22の接合は、自由端部22と圧電素子側部28にエ
ポキシ接着剤をスクリーン印刷法や転写方法で塗布し、
圧力室板30に接合されたダイヤフラム40に押圧す
る。同時に、圧電素子側部28にも接着剤を塗布し押圧
し硬化するので、圧電素子側部28とダイヤフラム側部
44も接合される。
The diaphragm 40 and the free end portion 22 of the piezoelectric element 20 are joined by applying an epoxy adhesive to the free end portion 22 and the piezoelectric element side portion 28 by a screen printing method or a transfer method.
The diaphragm 40 joined to the pressure chamber plate 30 is pressed. At the same time, since the adhesive is applied to the piezoelectric element side portion 28 and pressed and cured, the piezoelectric element side portion 28 and the diaphragm side portion 44 are also joined.

【0020】圧電素子20は、幅が広く浅い第一の溝2
4と、第一の溝と同一軸線上で幅が狭く深い第二の溝2
6とにより、複数に分割している。本実施例では、ワイ
ヤーソーによる溝加工を行っている。まず、直径約90
μmの太いワイヤーを用い溝幅約100μmの広く浅い
第一の溝24を加工する。太いワイヤーは強い張力が加
えられるので、圧電素子20の表面のわずかな凹凸や欠
けに影響されず、正確な溝位置が可能である。
The piezoelectric element 20 has a wide and shallow first groove 2
4 and the second groove 2 which is narrow and deep on the same axis as the first groove 2
It is divided into plural by 6 and 6. In the present embodiment, groove processing is performed with a wire saw. First, the diameter is about 90
A wide and shallow first groove 24 having a groove width of about 100 μm is processed using a thick wire of μm. Since a strong tension is applied to the thick wire, accurate groove position is possible without being affected by slight unevenness or chipping on the surface of the piezoelectric element 20.

【0021】次に、直径約40μmの細いワイヤーを用
い溝幅約50μmの狭い深い第二の溝26を加工する。
細いワイヤー位置は、第一の溝24の中央部に合わせて
設定する。細いワイヤーは第一の溝24に案内されるの
で、正確な溝位置が得られる。
Then, a narrow deep second groove 26 having a groove width of about 50 μm is processed using a thin wire having a diameter of about 40 μm.
The position of the thin wire is set according to the central portion of the first groove 24. Since the thin wire is guided in the first groove 24, an accurate groove position can be obtained.

【0022】また、圧電素子20とダイヤフラム40と
の接合時の位置ズレが生じた場合であっても、第一の溝
24が有るため、奇数番号のアイランド42は圧電素子
20の自由端部22との機械的な当接を防止できる。
Even when the piezoelectric element 20 and the diaphragm 40 are misaligned when they are joined to each other, the odd-numbered islands 42 have the free ends 22 of the piezoelectric element 20 because of the first groove 24. It is possible to prevent mechanical contact with.

【0023】[0023]

【発明の効果】本発明によれば、奇数番のアイランドの
背面と圧力室板隔壁の頂部とにより接着剤を確実に押圧
できる。これにより、圧力室板隔壁の頂部の幅が狭くて
も接着剤塗布ムラを確実な押圧力で均質化し、圧力室板
隔壁の頂部とダイヤフラムとの接着密封性が確保でき
る。
According to the present invention, the adhesive can be surely pressed by the back surface of the odd-numbered island and the top of the partition wall of the pressure chamber plate. As a result, even if the width of the top of the pressure chamber plate partition is narrow, the adhesive application unevenness can be homogenized with a certain pressing force, and the adhesive sealing property between the top of the pressure chamber plate partition and the diaphragm can be secured.

【0024】また、本発明によれば、圧電素子を幅が広
く浅い第一の溝と幅が狭く深い第二の溝とにより複数に
分割するので、高い溝位置精度が得られる。更に、幅が
広く浅い第一の溝の形状効果により圧電素子と奇数番号
のダイヤフラムとの当接が防止ができ、単位長さ内に設
ける圧電素子数を多くすることが出来る。これにより圧
力室間隔を狭めた単位長さ内に設ける圧力室数の増加を
達成できる。
Further, according to the present invention, since the piezoelectric element is divided into a plurality of first grooves having a wide width and a shallow width and second grooves having a narrow width and a deep width, a high groove position accuracy can be obtained. Further, due to the shape effect of the first groove having a wide width and a shallow width, it is possible to prevent contact between the piezoelectric element and the diaphragm of odd number, and it is possible to increase the number of piezoelectric elements provided within the unit length. As a result, it is possible to increase the number of pressure chambers provided within a unit length in which the pressure chamber interval is narrowed.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係わるインクジェットヘッドの一実施
例を示す主要断面図である。
FIG. 1 is a main sectional view showing an embodiment of an inkjet head according to the present invention.

【図2】本実施例の水平部分垂直断面図である。FIG. 2 is a horizontal partial vertical sectional view of the present embodiment.

【図3】本実施例の要部断面図である。FIG. 3 is a cross-sectional view of an essential part of this embodiment.

【符号の説明】[Explanation of symbols]

10 ノズル板 20 圧電素子 30 圧力室板 40 ダイヤフラム 50 フレーム 10 Nozzle Plate 20 Piezoelectric Element 30 Pressure Chamber Plate 40 Diaphragm 50 Frame

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 インクを吐出する複数のノズル穴を有す
るノズル板と、ノズル数とほぼ同数に分割されインク吐
出のエネルギー供給源である圧電素子と、ノズル数とほ
ぼ同数の溝を有しここを圧力室とする圧力室板と、島状
厚肉部であるアイランドを有するダイヤフラムとを有
し、 圧力室板とダイヤフラムとを接合することで圧力室を形
成し、ダイヤフラムと圧電素子とを接合する事で圧電素
子の変位を圧力室内のインクに伝えるインクジェットヘ
ッドであって、 ダイヤフラムの島状厚肉部であるアイランドの数が圧力
室板の圧力室の2倍数であり、偶数番のアイランドの先
端部が圧電素子の頂部に接合し、奇数番のアイランドの
背面が圧力室板隔壁の頂部に接合し、 圧電素子が、幅が広く浅い第一の溝と、第一の溝と同一
軸線上で幅が狭く深い第二の溝とにより、複数に分割し
ている事を特徴とするインクジェットヘッド。
1. A nozzle plate having a plurality of nozzle holes for ejecting ink, a piezoelectric element which is an energy supply source for ink ejection divided into substantially the same number as the number of nozzles, and a groove having substantially the same number as the number of nozzles. A pressure chamber plate having a pressure chamber as a pressure chamber, and a diaphragm having an island that is an island-shaped thick portion. The pressure chamber is formed by joining the pressure chamber plate and the diaphragm, and the diaphragm and the piezoelectric element are joined. This is an inkjet head that transfers the displacement of the piezoelectric element to the ink in the pressure chamber, and the number of islands, which are island-shaped thick portions of the diaphragm, is twice the number of pressure chambers in the pressure chamber plate, The tip is joined to the top of the piezoelectric element, the back surface of the odd numbered island is joined to the top of the pressure chamber plate partition, and the piezoelectric element is on the same axial line as the first groove that is wide and shallow and the first groove. Is narrow An inkjet head characterized by being divided into a plurality of parts by a deep second groove.
JP9542296A 1996-04-17 1996-04-17 Ink jet head Pending JPH09277527A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9542296A JPH09277527A (en) 1996-04-17 1996-04-17 Ink jet head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9542296A JPH09277527A (en) 1996-04-17 1996-04-17 Ink jet head

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Publication Number Publication Date
JPH09277527A true JPH09277527A (en) 1997-10-28

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JP9542296A Pending JPH09277527A (en) 1996-04-17 1996-04-17 Ink jet head

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0931654A1 (en) * 1998-01-23 1999-07-28 Océ-Technologies B.V. Ink jet nozzle head
US6878298B2 (en) 1999-03-25 2005-04-12 Fuji Xerox Co., Ltd. Ink jet recording head and method for manufacturing the same
JP2011056859A (en) * 2009-09-11 2011-03-24 Ricoh Co Ltd Liquid delivering head and image forming apparatus
US8173203B2 (en) 2007-02-16 2012-05-08 Brother Kogyo Kabushiki Kaisha Method of manufacturing piezoelectric actuator and method of manufacturing liquid transporting apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0931654A1 (en) * 1998-01-23 1999-07-28 Océ-Technologies B.V. Ink jet nozzle head
US6878298B2 (en) 1999-03-25 2005-04-12 Fuji Xerox Co., Ltd. Ink jet recording head and method for manufacturing the same
US6942815B2 (en) * 1999-03-25 2005-09-13 Fuji Xerox Co., Ltd. Ink jet recording head and method for manufacturing the same
US8173203B2 (en) 2007-02-16 2012-05-08 Brother Kogyo Kabushiki Kaisha Method of manufacturing piezoelectric actuator and method of manufacturing liquid transporting apparatus
JP2011056859A (en) * 2009-09-11 2011-03-24 Ricoh Co Ltd Liquid delivering head and image forming apparatus

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