JPH09277192A - Microprobe formation method for sheet metal - Google Patents

Abstract

PROBLEM TO BE SOLVED: To drill a pore having a very small diameter through a sheet metal by cutting a projected dowel with a punch having an end of very small diameter. SOLUTION: After a back plate 4 is attached to the reverse side of a sheet metal 1 in a planar contact state, a punch 3 is used for pressing formation. In other words, the punch 3 is pushed under the prescribed pressure from the reverse side of the sheet metal 1 along the vertical direction, and this pressing process is stopped, upon the arrival of the front edge 3a of the punch 3 at the reverse side plane of the sheet metal 1. As a result of this pressing process using the punch 3, a dowel la having a very small diameter comes to project from the reverse side of the sheet metal 1, and intrudes in the back plate 4. Thereafter, the sheet metal 1 is detached from the back plate 4 and, then, the dowel 1a of very small diameter projected from the reverse side of the sheet metal 1 is removed with a cutter 11.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a thin plate having a diameter of several μm.
The present invention relates to a method for forming fine holes in a thin plate for forming fine through holes of m to several hundreds of μm using a pressing technique.

[0002]

2. Description of the Related Art A thin plate having fine holes is often used as a component of various precision instruments. As a method for forming such fine holes, generally, chemical etching or laser processing using a Young laser beam is predominant. That is, the chemical etching process includes a step of applying a photosensitive material to a thin thin plate having a thickness of several tens to several hundreds of micrometers, a photoresist forming step of performing exposure for forming predetermined fine holes, and a chemical etching process. The fine holes are formed through many precise steps such as the step of performing the above, the step of removing the photoresist, the washing step, and the like. On the other hand, laser processing is a method in which a laser beam emitted from a laser cutting machine has a diameter of several μm to several tens of μm suitable for a fine hole, and the thin plate is irradiated with this laser beam to form fine holes by melting. Is.

[0003]

However, the above-mentioned etching process has many problems and poor productivity because it requires highly skilled and precise techniques, and inevitably leads to an increase in the cost of processed products. In addition, since laser cutting machines required for laser processing are extremely expensive equipment, depreciation costs and maintenance costs for this equipment will also inevitably rise, which also increases costs and makes thin plates. Since it is difficult to optically control the beam shape of the laser beam itself to be irradiated, there is also a problem that the fine holes cannot be formed into a predetermined shape.

Therefore, in view of the above problems, the present invention is to provide a method for forming fine holes in a thin plate which can form fine holes having a predetermined shape with simple and inexpensive equipment and a small number of steps.

[0005]

A method for forming fine holes in a thin plate according to claim 1 is to press the tip of a punch formed in a small diameter from the front surface of the thin plate having plasticity to the flat surface on the back surface side. Project a small diameter dowel on the back side,
After that, the dowels are cut along the back surface of the thin plate to form fine holes penetrating from the front surface to the back surface.

According to the method for forming fine holes in a thin plate in claim 1, a thin plate can be formed by a simple inexpensive equipment such as a punch having a tip with a minute diameter and a cutting tool for cutting a dowel and a minimum number of steps. It is possible to form a hole having a minute diameter. Further, the diameter of the hole formed in the thin plate is determined by the diameter and shape of the tip of the punch, and by controlling the punch tip, a uniform hole shape can be formed with high quality.

According to a second aspect of the present invention, in the method for forming fine holes in a thin plate, a backing plate having a plasticity lower than that of a punch is attached to the back surface of the thin plate, and the punch is pressed from the front surface of the thin plate to project to the back surface of the thin plate. It is characterized in that a dowel with a small diameter is inserted into the backing plate.

According to the second aspect of the present invention, since the area of the dowel projecting on the back surface of the thin plate can be suppressed to a minimum by additionally providing the backing plate, the fine holes corresponding to the diameter and shape of the tip of the punch are formed. It can be formed into a thin plate.

According to a third aspect of the present invention, in the method of forming fine holes in a thin plate, the tip side of the punch is formed into a substantially conical shape or a substantially polygonal pyramid shape, and the end surface of the tip is a flat surface having a small diameter or a substantially spherical surface having a large radius of curvature. It is characterized by being formed in.

According to the third aspect, only the tip for forming the minute hole has a minute diameter, so that the punch itself can be firmly attached to the apparatus and the tapered hole can be formed in the thin plate. If the tip surface is formed into a flat surface or a substantially spherical surface, the number of shots can be increased, productivity is improved, and uniform and stable micropores can be formed.

The method for forming fine holes in a thin plate according to claim 4 is characterized in that the fine holes are formed in a substantially funnel shape by a punch formed in a substantially conical shape or a substantially polygonal pyramid shape.

According to the fourth aspect, by forming the fine holes in a substantially funnel shape, the punch can be easily detached from the thin plate after pressing, and deformation of the thin plate can be prevented.

A method for forming fine holes in a thin plate according to a fifth aspect is characterized in that a dowel protruding on the back surface of the thin plate is cut by sliding a cutting tool having a cutting blade attached to the back surface of the thin plate. There is.

According to the fifth aspect, the dowel protruding on the back surface of the thin plate can be efficiently cut by a simple and inexpensive device by the sliding motion of the cutting tool, and the productivity is greatly improved.

[0015]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows a thin plate 1 manufactured by the method for forming fine holes in a thin plate according to the present invention. Thin plate 1
Is a metal material having a plasticity of several tens of μm to 1 mm, for example, a metal material such as iron, stainless steel, aluminum, copper, or brass, or a synthetic resin material having plasticity. The thin plate 1 is provided with substantially funnel-shaped fine holes 2 which are wide on the front surface and are tapered toward the back surface. The diameter D0 of the fine holes 2 on the back surface side is formed in the range of several μm to several hundred μm, and the fine holes 2 are formed by the method described below.

FIG. 2 shows a press forming step for the thin plate 1. That is, the punch 3 used in this press forming step is made of, for example, a super hard metal material having high hardness and abrasion resistance. The tip side of the punch 3 is formed into a substantially conical shape, and the tip surface 3a has a diameter D2 of several μm to several hundred μm in accordance with the diameter of the fine holes 2 of the thin plate 1.
In addition to being formed to have a small diameter that forms a circle, the tip surface 3a is formed to be a flat surface or a substantially spherical surface having a large radius of curvature. As described above, by forming the tip end surface 3a as described above, the deformation of the punch 3 due to the pressing operation is small, so that the number of shots in the forming process can be increased, and therefore, the productivity is improved and the uniform stability is obtained. There is an effect that the minute pores can be formed.

Further, a backing plate 4 is attached to the back surface of the thin plate 1 in a surface-bonded state. This backing plate 4 is a punch 3
Lower hardness and more plastic, such as iron,
A metal material such as stainless steel, aluminum, copper, or brass, or a synthetic resin material having plasticity is used.

As described above, after the backing plate 4 is attached to the back surface of the thin plate 1 in a surface-bonded state, the punch 3 presses and forms it. That is, the punch 3 is pressed from the surface of the thin plate 1 from the vertical direction by a predetermined pressure, and the tip surface 3 of the punch 3 is pressed.
The pressing is terminated when a reaches the plane on the back side of the thin plate 1 or when it slightly projects from the plane on the back side as shown in FIG. This pressing can be ended at a fixed position by bringing the contact member 5 fixed to the punch 3 into contact with the surface of the thin plate 1. Further, the contact member 5 may be brought into contact with a stopper (not shown) provided in the pressing device. When adjustment is required to improve the accuracy of the pressing end position, a fine adjustment mechanism may be provided on the contact member 5 or the stopper.

As a result of pressing by the punch 3, the thin plate 1
A small diameter dowel 1a projects from the back surface of the dowel 1 and the dowel 1a is recessed in the backing plate 4. Then, a substantially funnel-shaped hole is formed on the surface side of the thin plate 1. As described above, since the sagging of the rising corner portion of the dowel 1a can be reduced by additionally providing the pad plate 4 having a plasticity lower in hardness than the punch 3, the area (outer diameter) of the dowel 1a is minimized. Therefore, as described later, there is an effect that the fine holes 2 according to the diameter and shape of the tip of the punch 3 can be formed in the thin plate 1.

When a plurality of dowels 1a are formed on the thin plate 1 in the press forming step, a single punch 3 may be used to sequentially project the dowels 1a at predetermined positions on the thin plate 1. Alternatively, a plurality of punches may be arranged at predetermined positions on a punch fixing tool (not shown), and a plurality of dowels 1a may be formed on the thin plate 1 so as to project at the same time. Also in this case, it is desirable that the contact member provided on the fixture is brought into contact with the surface of the thin plate 1, or the contact member is brought into contact with a stopper (not shown).

When the protrusion is formed, a dent remains on the backing plate 4 attached to the back surface of the thin plate 1. Dowel 1a again on this dent
If desired, the desired accuracy may not be obtained.
Therefore, when the dowels 1a are sequentially projected, the contact plate 4
It is preferable to sequentially move the positions of and to form the dowel 1a at a new flat surface position each time. In this case, since the dowel 1a itself has a very small diameter, it is sufficient that the contact plate 4 also moves a minute distance.
Can have a consumable element, but can have a substantially low unit price.

Thereafter, the thin plate 1 is removed from the backing plate 4, and then a cutting step for cutting the dowel 1a having a minute diameter protruding on the back surface is performed. That is, the thin plate 1 protruding from the dowel 1a is installed in the cutting machine 10. The cutting machine 10 includes a cutting blade 11 that slides in parallel while being attached to the back surface of the thin plate 1, a pressing plate 12 that presses the thin plate 1 against the cutting blade 11, and a coil spring that elastically biases the pressing plate 12. And an elastic body 13 including the same.

The cutting blade 11 is, for example, the dowel 1a.
A through hole 11a having a polygonal shape such as a circle or a quadrangle which is formed to be sufficiently larger is provided, and a blade portion 11b on a side which is joined to the back surface of the thin plate 1 and cuts the dowel 1a, as shown by a solid line in FIG. It is configured with an acute angle. The angle of the blade portion 11b may be perpendicular to the back surface of the thin plate 1 as shown by the chain double-dashed line in FIG. The cutting blade 11 configured in this way slides in parallel in the direction shown by the arrow in FIG. 4 while being in contact with the back surface of the thin plate 1 by a driving device and a cutting blade guide (not shown).

As shown in FIG. 5, the cutting blade 11 slides until it passes through the dowel 1a, so that the dowel 1 is removed.
a is cut on the same surface as the back surface of the thin plate 1 and separated. Through the above cutting process, the fine holes 2 penetrating from the front surface to the back surface are formed in the thin plate 1. At this time, since the tip end surface of the punch 3 is formed into a flat surface or a substantially spherical surface, the cutting locus is substantially equal to the tip end surface of the punch 3 or is a parallel surface that is slightly separated, so that The hole diameter is substantially equal to the diameter of the tip surface of the punch 3.

Further, since the diameter of the fine holes 2 is determined by the depth into which the punch 3 is finally inserted, the punch 3 after being pressed.
A certain accuracy is required for the position of the tip 3a. Therefore, in order to keep the accuracy of the pressing end constant, the contact member 5 fixed to the punch 3 may be brought into contact with the surface of the thin plate 1, or the end position may be managed by a stopper provided in the pressing device. desirable. In addition, if the tip shape of the punch 3 is formed to be straight by at least the depth of the dowel 1a, the variation in the diameter of the fine holes 2 due to the depth into which the punch 3 is inserted can be eliminated.

In each of the above-mentioned embodiments, an example in which the fine holes are formed in a circular shape is shown, but it is needless to say that they may be formed in an elliptical shape, a long hole, or a polygonal shape of a triangle or more. . In addition, the cutting tool can also adopt a cutting method by sandwiching the cutting blade from both sides with respect to the dowel, depending on the case, a polishing method with a grindstone or abrasive grains, or a milling grinding method using a rotary blade, etc. It is also possible to cut by known means. Further, although the fine holes are formed in a substantially funnel shape, the taper angle is not limited to the illustrated angle, and large and small angles can be arbitrarily selected, and can be appropriately changed without departing from the present invention.

[0027]

As described above, according to the present invention, a small-diameter hole can be formed in a thin plate by a simple and inexpensive equipment such as a punch having a minute diameter at its tip and a cutting tool for cutting a dowel. Since it can be formed by the minimum number of steps, the manufacturing cost can be significantly reduced. Moreover, since the diameter of the hole formed in the thin plate is determined by the diameter and shape of the tip of the punch, a uniform hole shape can be formed with high quality by controlling the punch tip.

[Brief description of drawings]

FIG. 1 is a cross-sectional view showing a thin plate manufactured by a method for forming fine holes of the present invention.

FIG. 2 is a cross-sectional view showing a pressure forming step of the present invention.

FIG. 3 is an enlarged cross-sectional view showing a dowel protrudingly formed on a thin plate.

FIG. 4 is a cross-sectional view showing an initial state of a cutting process.

FIG. 5 is a cross-sectional view showing an end state of a cutting process.

[Explanation of symbols]

 1 Thin Plate 1a Dowel 2 Micro Hole 3 Punch 3a Tip 4 Patch Plate 10 Cutting Machine 11 Cutting Blade

Claims (5)

[Claims] 1. A method for forming fine through-holes in a thin plate such as a metal plate or a synthetic resin plate, wherein a tip of a punch having a small diameter is formed from the front surface of the thin plate having plasticity to the flat surface on the back surface side. To a thin plate characterized by comprising a press forming step of pressing and projecting a small diameter dowel on the back surface side, and a cutting step of cutting the dowel along the back surface of the thin plate to penetrate fine holes. Method for forming fine pores. 2. A backing plate having a plasticity lower than that of a punch is attached to the back surface of the thin plate, the punch is pressed from the front surface of the thin plate, and a dowel having a minute diameter protruding to the back surface of the thin plate is attached to the backing plate. The method for forming fine holes in a thin plate according to claim 1, wherein the thin plate is recessed. 3. The thin plate according to claim 1, wherein the punch has a tip end side formed into a substantially conical shape or a substantially polygonal pyramid shape, and an end surface of the tip end is formed into a flat surface having a minute diameter or a substantially spherical surface having a large radius of curvature. Method for forming fine pores. 4. The method for forming fine holes in a thin plate according to claim 1, wherein the fine holes are formed in a substantially funnel shape by a punch having a substantially conical shape or a substantially polygonal pyramid shape. 5. The fine holes in the thin plate according to claim 1, wherein the dowel protruding on the back face of the thin plate is cut by sliding a cutting tool having a cutting blade attached to the back face of the thin plate. Forming method.