JPH09275074A5 - - Google Patents

Info

Publication number
JPH09275074A5
JPH09275074A5 JP1997006469A JP646997A JPH09275074A5 JP H09275074 A5 JPH09275074 A5 JP H09275074A5 JP 1997006469 A JP1997006469 A JP 1997006469A JP 646997 A JP646997 A JP 646997A JP H09275074 A5 JPH09275074 A5 JP H09275074A5
Authority
JP
Japan
Prior art keywords
alignment mark
alignment
element marks
imaging device
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997006469A
Other languages
English (en)
Japanese (ja)
Other versions
JPH09275074A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP9006469A priority Critical patent/JPH09275074A/ja
Priority claimed from JP9006469A external-priority patent/JPH09275074A/ja
Publication of JPH09275074A publication Critical patent/JPH09275074A/ja
Publication of JPH09275074A5 publication Critical patent/JPH09275074A5/ja
Pending legal-status Critical Current

Links

JP9006469A 1996-02-05 1997-01-17 アライメント方法 Pending JPH09275074A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9006469A JPH09275074A (ja) 1996-02-05 1997-01-17 アライメント方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP1887296 1996-02-05
JP8-18872 1996-02-05
JP9006469A JPH09275074A (ja) 1996-02-05 1997-01-17 アライメント方法

Publications (2)

Publication Number Publication Date
JPH09275074A JPH09275074A (ja) 1997-10-21
JPH09275074A5 true JPH09275074A5 (cg-RX-API-DMAC10.html) 2004-12-24

Family

ID=26340619

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9006469A Pending JPH09275074A (ja) 1996-02-05 1997-01-17 アライメント方法

Country Status (1)

Country Link
JP (1) JPH09275074A (cg-RX-API-DMAC10.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4276140B2 (ja) 2004-06-25 2009-06-10 株式会社日立ハイテクノロジーズ 走査電子顕微鏡及び寸法校正用試料
US7525671B2 (en) * 2006-04-11 2009-04-28 Micronic Laser Systems Ab Registration method and apparatus therefor
JP6271920B2 (ja) * 2013-09-06 2018-01-31 キヤノン株式会社 計測装置、計測方法、リソグラフィ装置、及び物品の製造方法
JP2024143060A (ja) 2023-03-30 2024-10-11 キヤノントッキ株式会社 アライメント方法およびアライメント装置

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