JPH0927123A - Production of magnetic recording medium and device therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To avoid such a problem that a material to be vapor deposited is wound up on a cooling can and to obtain a normal travelling state of the material to be vapor deposited by forming a conductive film on the material before a magnetic layer is formed. SOLUTION: This producing device 10 is equipped with a device 20 for formation of a conductive film which is connected to a vacuum chamber 1 through a connecting pipe 24. The device 20 for formation of a conductive film consists of a vacuum chamber 21 for formation of a conductive film which is connected to the vacuum chamber 1, a travelling device 22 disposed in the vacuum chamber so as to travel a continuous tape 5 as the material to be vapor deposited, a high frequency electric furnace 23 disposed beneath the tape 5, and a conductive material housed in the high frequency electric furnace 23. In this device, a high frequency current is applied on a coil 34 to heat an aluminum material in a crucible 33. The aluminum material is continuously molten and vaporized by the heat. The aluminum vapor deposits on the tape 5 while the tape 5 rotates along the circumference direction of a cooling can 32. During this process, an aluminum conductive film is formed on the tape 5.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for manufacturing a vapor-deposited magnetic recording medium in which vapor of a magnetic material is vapor-deposited to form a magnetic layer, and more particularly to a method and apparatus capable of preventing charging.

[0002]

2. Description of the Related Art As an example of an apparatus for producing a vapor-deposited magnetic recording medium, a vacuum vessel, a traveling apparatus for traveling a series of materials to be vapor-deposited inside the vacuum vessel, and a traveling apparatus arranged below the material to be vapor-deposited. Some include an evaporation source containing a magnetic material and an electron beam generator for irradiating the magnetic material of the evaporation source with an electron beam. Then, the magnetic material of the evaporation source is irradiated with an electron beam, so that the magnetic material is irradiated with the electron beam to be melted and continued to evaporate, and the vapor is vapor-deposited on the material to be vapor-deposited.

[0003]

In the above conventional manufacturing apparatus, since the electron beam generator skips the electrons at the accelerating voltage, the emitted electrons scatter when reaching the magnetic material, and other than the magnetic material. Also, it is incident on other members such as the material to be vapor-deposited.

When electrons are incident on the material to be vapor deposited, the material to be vapor deposited is charged, so that the material to be vapor deposited is attached to the cooling can that constitutes the traveling device, and the material to be vapor deposited is cooled near the winding roll. There is a problem that the vapor deposition target material is caught in the cooling can without being separated from the can.

This phenomenon is caused by a thin film of a magnetic material (metal film).
However, it does not occur when a film is formed on the material to be vapor-deposited for a certain length in the traveling direction. It is considered that this is because the electrons incident on the material to be evaporated are dissipated through the metal film.

The present invention is intended to provide a method and an apparatus for manufacturing a magnetic recording medium which solves the above-mentioned problems and enables normal running of a material to be vapor-deposited.

[0007]

According to the method of manufacturing a magnetic recording medium of the present invention, a series of materials to be vapor-deposited are run in a vacuum, and a vapor of magnetic material from an evaporation source is vapor-deposited on the material to be vapor-deposited to form a magnetic layer. In the method of manufacturing a magnetic recording medium for forming a magnetic recording medium, a conductive film is formed on a material to be vapor-deposited before forming a magnetic layer.

[0008] Then, a coating material prepared by dissolving and dispersing carbon black, a binder composed of vinyl chloride resin and polyurethane, and a lubricant composed of tridecyl stearate and palmitic acid in an organic solvent is first prepared for the deposition target material. It is preferable that the conductive film is formed by applying a predetermined length to the portion.

An apparatus for manufacturing a magnetic recording medium according to the present invention comprises a vacuum container, a traveling device arranged in the vacuum container for traveling a series of materials to be vapor-deposited, and a magnetic material disposed below the material to be vapor-deposited. In a magnetic recording medium manufacturing apparatus including an evaporation source to be housed and an electron beam generator for irradiating a magnetic material of the evaporation source with an electron beam, the manufacturing apparatus is configured to form a conductive film communicating with the vacuum container. Vacuum container, a traveling device arranged in the vacuum container for traveling a series of materials to be vapor-deposited, a high-frequency electric furnace arranged below the material to be vapor-deposited, and a conductive material contained in the high-frequency electric furnace. And a conductive film forming device made of a conductive material.

Further, the magnetic recording medium manufacturing apparatus of the present invention comprises a vacuum container, a traveling device arranged in the vacuum container for traveling a series of materials to be vapor-deposited, and a magnetic device arranged below the material to be vapor-deposited. In a magnetic recording medium manufacturing apparatus including an evaporation source containing a material and an electron beam generator for irradiating the magnetic material of the evaporation source with an electron beam, the manufacturing apparatus is a conductive device communicating with the vacuum container. A film forming vacuum container, a traveling device which is disposed in the vacuum container and runs a series of materials to be vapor-deposited, and an ultrasonic spray which is disposed below the material to be vaporized and sprays a conductive monomer toward the material to be vapor-deposited. The apparatus is characterized by comprising an apparatus and a conductive film forming apparatus including a plasma gun apparatus for irradiating a material to be vapor-deposited with a conductive monomer with plasma.

The present invention forms a conductive film on a material to be vapor-deposited before forming a magnetic layer, and thus before operating an electron beam generator that operates to form a magnetic layer. According to the present invention, the conductive film is already formed on the material to be vapor-deposited when the electron beam generator is activated.

When the electron beam generator operates to irradiate the magnetic material with an electron beam, scattered electrons are incident on the material to be deposited. The electrons incident on the material to be vaporized are dissipated through the conductive film formed on the material to be vaporized, thereby preventing the material to be vaporized from being charged.

The material to be vapor-deposited leaves the cooling can without sticking to the cooling can and runs toward the winding roll.

An apparatus for forming a conductive film is
It must be free from the scattering of electrons. For example, instead of an electron beam, induction heating can be used to melt the conductive material.

Examples of the conductive material include metals and semiconductors. When utilizing induction heating, it is desirable that this conductive material be a low melting point material (eg, A
l, Zn, etc.). Further, in order to reduce the cupping of the material to be vapor-deposited, the conductive material is preferably a soft substance (for example, Al).

[0016]

Embodiments of the present invention will be described below.

A method of forming a conductive film by coating will be described below.

Example 1 Before forming a magnetic layer, a carbon film is formed on a PET (polyethylene terephthalate) film. The carbon film is formed by a coating method.

The coating material to be applied is carbon black (trade name Ketjen Black, manufactured by Lion Akzo), together with a binder and a lubricant, and an organic solvent (toluene, MEK,
It is dissolved and dispersed in a cyclohexanone 2/2/3 mixed solvent). The binder is made of vinyl chloride resin and polyurethane, and the lubricant is made of tridecyl stearate and palmitic acid.

The composition of the paint is shown below.

[0021] Next, a method for producing a coating material will be shown. First, Ketjen Black and MR
110 and UR8300 are mixed, an organic solvent is added so that the solid content becomes 70%, and the mixture is kneaded with a planetary mixer for 60 minutes. Then, the solid content is reduced to 40% and the mixture is subjected to a sand mill (5 hours). After that, the solid content is dropped to 30%, and at the same time, a mixed solution of tridecylstearic acid and palmitic acid is added to obtain a final paint.

The coating material prepared as described above is applied to a PET film. Coating is performed with a gravure coater. The coating film thickness was set to 10 μm and the film was formed for 5 m. After film formation 1
The film was dried at 00 ° C., the film was rewound, and the film was mounted in a deposition type magnetic recording medium manufacturing apparatus. The surface resistance of the carbon film is
It was 2.7 × 10 −2 (Ω).

The electron beam generator was activated when the carbon film was wound on the take-up roll from the cooling can. Electron gun output 9kW, magnetic material Co (100%), film running speed
A magnetic layer was formed at 0.6 m / min and the amount of introduced oxygen was 60 sccm.
After the film formation, the part covered with the carbon film was removed.

When the film was formed in this manner, the magnetic layer could be formed without any trouble in running the film.

For comparison, a magnetic layer was formed on a PET film having no carbon film using the same apparatus under the same conditions as above. Immediately after starting the evaporation by operating the electron beam generator, the film stuck to the cooling can and the film was caught in the cooling can.

FIG. 1 is a block diagram of an apparatus 10 for manufacturing a magnetic recording medium according to the present invention. The present apparatus includes a vacuum container 1, a traveling device 2, an evaporation source, that is, a crucible 3, and an electron beam generator 4.

The vacuum container 1 communicates with a conductive film forming vacuum container 21 to be described later at its connection port 39. In this vacuum container 1, a series of materials to be vapor-deposited, that is, a traveling device 2 for traveling a synthetic resin tape 5 is arranged. The traveling device 2 includes a guide roll 6, a winding roll 7, and a cooling can 8. The crucible 3 is arranged below the cooling can 8, and cooling water is introduced through a cooling pipe 9. The magnetic metal 12 is housed in this crucible. The electron beam generator 4 is of a magnetic field deflection type, in which an electron beam emitted from an electron gun 11 is bent by magnetic lines of force from an N pole to an S pole, and directed toward a magnetic metal 12 in a crucible. Has become.

An oxygen gas supply pipe 19 is arranged between the cooling can 8 and the shield plate 14. This oxygen gas supply pipe 19
Has its tip located near the end of the vapor deposition region so as to form an oxide layer on the magnetic layer. Oxygen gas supply pipe 19
The rear end is connected to the oxygen cylinder 15.

In the device 10 thus constructed,
When the electron beam is applied to the magnetic metal 12 by the electron gun 11, the magnetic metal 12 is irradiated with the electron beam, melts, and continues to evaporate. The tape 5 rotates in the circumferential direction on the cooling can while receiving the vapor deposition of the magnetic metal vapor, during which a magnetic layer is formed on the tape. At the end of the vapor deposition region, oxygen is supplied from the oxygen gas supply pipe 19, and this oxygen gas combines with the vapor deposition particles of the magnetic layer to form an oxide layer as a protective layer on the magnetic layer. The tape 5 on which the oxide layer is formed is wound by the winding roll 7.

This manufacturing apparatus 10 comprises a conductive film forming apparatus 2
0 is provided. The device 20 includes a vacuum container 21 and
The traveling device 22, the high-frequency electric furnace 23, and the conductive material in the electric furnace are used.

The vacuum container 21 communicates with the inside of the vacuum container 1 via a communication pipe 24. Vacuum pump means is connected to the outlet 25 of the vacuum container 21. The vacuum pump means includes a turbo molecular pump 26 connected in series, a mechanical booster pump (pressurizing pump for increasing the exhaust amount) 27, and a rotary pump 28. In addition, each of the vacuum containers 1 and 21 has a cryopump 2 which is a built-in vacuum pump for capturing gas molecules.
9 is connected. The vacuum containers 1 and 21 are maintained in a predetermined vacuum state by these vacuum pump means.

A traveling device 22 is arranged in the vacuum container 21. The traveling device 22 includes a feed roll 30, a guide roll 31, and a cooling can 32. The tape 5 is hung on the traveling device 22,
The tape 5 passes from the traveling device 22 through the communication pipe 24 and continues to the traveling device 2 in the vacuum container 1.

A high frequency electric furnace 23 is arranged below the tape 5. The high-frequency electric furnace 23 includes a crucible 33 containing an aluminum material, a coil 34 wound around the crucible 33, a high-frequency oscillator 35 for flowing a high-frequency alternating current through the coil 34, and a matching unit 36. . Cooling water is passed through the coil 34 to cool it. When high-frequency alternating current is introduced from the high-frequency oscillator 35 into the coil 34, the crucible 3 inside the coil 34
An eddy current is induced in the aluminum material in 3 and the heat causes the aluminum material to melt.

In the device 20 thus constructed,
When a high-frequency alternating current is passed through the coil 34 to heat the aluminum material in the crucible 33, the aluminum material receives the heat, melts, and continues to evaporate. The tape 5 rotates in the circumferential direction on the cooling can 32 while receiving vapor deposition of aluminum material vapor, and an aluminum film (conductive film) is formed on the tape in the meantime.

Example 2 A magnetic layer was formed using the above apparatus shown in FIG.

First, the conductive film forming apparatus 20 is operated. For induction heating, 10 KHz and 40 KW were applied.
Aluminum was used as the conductive material, and the running speed of the tape was set to 0.6 m / min. After the device 20 was activated, when the first aluminum film reached the take-up roll 7, the device 20 was stopped and the device 10 was activated. In this case, the output of the electron gun was 9 kW, Co (100%) was used as the magnetic material, and the oxygen introduction amount was 70 sccm.

The tape ran normally without sticking to the cooling can 8.

For comparison, when only the device 10 was operated, there was a phenomenon in which the tape stuck to the cooling can 8 and was caught in the cooling can.

FIG. 2 is a block diagram of an apparatus 40 for manufacturing a magnetic recording medium according to the present invention. The same components as those shown in FIG. 1 are designated by the same reference numerals, and the description thereof will be omitted.

The manufacturing apparatus 40 includes a conductive film forming apparatus 5
0 is provided. This device 50 is provided below the tape 5 and includes an ultrasonic spraying device 51 for spraying a conductive monomer onto the tape 5 and a plasma gun device 52 for irradiating the tape 5 sprayed with the conductive monomer with plasma. Contains.

The ultrasonic spraying device 51 includes an ultrasonic oscillator 53.
Including a vibrator (not shown), and a horn 54,
The vibration of the vibrator excited by the ultrasonic oscillator 53 is transmitted to the horn 54 to which the conductive monomer is supplied. Then, by supplying the monomer to a horn that is vibrating ultrasonically, uniform droplets of the monomer are created and sprayed. According to this ultrasonic spraying device 51, uniform droplets can be formed even if the monomer supply rate is low.

As shown in FIG. 3, the plasma gun device 52 includes a rectangular waveguide 55, a microwave oscillator 56, an isolator 57, a power monitor 58, a stub tuner 59, a quartz glass window 60, and a quartz glass window 60. Plasma reaction chamber 6
1, a source gas (hydrogen gas) inlet pipe 62, and an electron cyclotron resonance (electron cyclotron resonance)
ron resonance (hereinafter, abbreviated as ECR). The isolator 57 is
The microwave attenuator reduces the electromagnetic field intensity of microwaves by absorbing a part of microwave energy. The three-stub tuner 59 is connected in parallel to the waveguide 55 and is used for impedance matching. The quartz glass window 60 serves as a window for introducing microwaves into the plasma reaction chamber 61. The ECR electromagnet 63 is for obtaining high-density plasma even at low pressure by the action of a magnetic field.

In the apparatus 50 constructed as described above, the ultrasonic atomizing apparatus 51 is operated to supply the conductive monomer to the horn 54 together with the diluent. The ultrasonically vibrated horn 54 creates uniform droplets of the monomer,
Sprayed onto tape 5. The tape 5 sprayed with the monomer is then irradiated with hydrogen plasma by the plasma gun device 52. This causes plasma polymerization,
A conductive layer made of a conductive polymer layer is formed.

Example 3 A magnetic layer was formed using the apparatus 40 shown in FIG.
Hereinafter, specific examples will be described.

A 6 μm thick PET film is passed through the apparatus of FIG. An ultrasonic spray device 51 ultrasonically sprays an acetonitrile solution of aniline (0.05 wt%). The output of ultrasonic spray was 1 kW and the frequency was 25 kHz. Immediately after the ultrasonic spraying, hydrogen plasma is irradiated by the plasma gun device 52 to form a polymerized layer on the PET film. The microwave output was 300 W and the frequency was 2.45 GHz. The raw material hydrogen gas had a purity of 99.999% and the flow rate was 100 sccm. An electrostatic deflection electrode 64 (FIG. 3) was installed at the tip of the plasma gun to capture hydrogen ions and electrons in the plasma. By doing so, only hydrogen radicals (active species) are emitted from the plasma gun and therefore the film is not charged. The voltage between the electrodes was set to 100V.

After the conductive layer is formed in this way, when the first conductive layer reaches the winding roll 7, the device 40
Activated. In this case, the output of the electron gun was 10 KW, Co (100%, manufactured by Mitsubishi Materials) was used as the magnetic material, and the oxygen introduction amount was 55 sccm.
The running speed of the film was 0.6 m / min. Magnetic material (C
When o) started to dissolve, the apparatus 50 was stopped. The overlapping part of the conductive layer and the magnetic layer in the film was not used as a product.

When the film was formed as described above, the film could be formed without any trouble in running the film.

For comparison, when only the device 40 was operated, the film was charged and stuck to the cooling can, causing a problem that the film was caught.

[0049]

According to the manufacturing method and apparatus of the present invention, the material to be vapor-deposited is prevented from being charged, and as a result, the material to be vapor-deposited is stuck to the cooling can, and the material to be vapor-deposited is caught in the cooling can. Such a problem is solved.

[Brief description of drawings]

FIG. 1 is a configuration diagram of an apparatus for manufacturing a magnetic recording medium according to the present invention.

FIG. 2 is a configuration diagram of another magnetic recording medium manufacturing apparatus according to the present invention.

FIG. 3 is a configuration diagram of a plasma gun device provided in the manufacturing apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Vacuum container 2 Traveling device 3 Crucible 4 Electron beam generator 5 Tape (material to be deposited) 8 Cooling can 10 Manufacturing device 12 Magnetic metal 20 Conductive film forming device 21 Vacuum container 22 Traveling device 23 High frequency electric furnace 32 Cooling can 40 Manufacturing Device 50 Conductive Film Forming Device 51 Ultrasonic Spraying Device 52 Plasma Gun Device 53 Ultrasonic Oscillator 54 Horn

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hirohide Mizutani 2606 Akabane Kai, Haga-gun, Tochigi Prefecture Kao Stock Company Research Institute (72) Inventor Katsumi Sasaki 2606 Akabane Kai-cho, Haga-gun, Tochigi Research Institute Kao Stock Company (( 72) Inventor Yuzo Matsuo, 2606, Akao, Kabane, Haga-gun, Tochigi Prefecture, Kao Institute of Stock Companies (72) Inventor, Akira 2606, Akabane, Kai-cho, Haga-gun, Tochigi, Institute of Kao Corporation

Claims (4)

[Claims] 1. A method of manufacturing a magnetic recording medium, comprising: forming a magnetic layer by running a series of materials to be vapor-deposited in vacuum and evaporating a magnetic material vapor from an evaporation source onto the material to be vapor-deposited. A method for manufacturing a magnetic recording medium, characterized in that a conductive film is formed on the material to be vapor-deposited before the step. 2. A coating material prepared by dissolving and dispersing carbon black, a binder composed of vinyl chloride resin and polyurethane, and a lubricant composed of tridecyl stearate and palmitic acid in an organic solvent at the beginning of the deposition of a material to be vapor-deposited. 2. The method for manufacturing a magnetic recording medium according to claim 1, wherein the conductive film is formed by applying a predetermined length to the portion. 3. A vacuum container, a traveling device arranged in the vacuum container for traveling a series of materials to be vapor-deposited, an evaporation source arranged below the material to be vapor-deposited for accommodating a magnetic material, and the evaporation source. A magnetic recording medium manufacturing apparatus including an electron beam generator for irradiating the magnetic material with an electron beam, wherein the manufacturing apparatus includes a conductive film forming vacuum container communicating with the vacuum container, and the inside of the vacuum container. And a high-frequency electric furnace arranged below the material to be vapor-deposited, and a conductive film forming apparatus made of a conductive material accommodated in the high-frequency electric furnace. An apparatus for manufacturing a magnetic recording medium, comprising: 4. A vacuum container, a traveling device for traveling a series of materials to be vapor-deposited arranged in the vacuum container, an evaporation source arranged below the material to be vapor-deposited for containing a magnetic material, and an evaporation source. A magnetic recording medium manufacturing apparatus including an electron beam generator for irradiating the magnetic material with an electron beam, wherein the manufacturing apparatus includes a conductive film forming vacuum container communicating with the vacuum container, and the inside of the vacuum container. A traveling device for moving a series of vapor deposition target materials, an ultrasonic spraying device disposed below the vapor deposition target material for spraying a conductive monomer toward the vapor deposition target material, and an object sprayed with the conductive monomer. An apparatus for manufacturing a magnetic recording medium, comprising: a conductive film forming apparatus including a plasma gun device for irradiating a vapor deposition material with plasma.