JPH09236504A - Piezoelectric pressure-sensitive sensor - Google Patents

Piezoelectric pressure-sensitive sensor

Info

Publication number
JPH09236504A
JPH09236504A JP10639196A JP10639196A JPH09236504A JP H09236504 A JPH09236504 A JP H09236504A JP 10639196 A JP10639196 A JP 10639196A JP 10639196 A JP10639196 A JP 10639196A JP H09236504 A JPH09236504 A JP H09236504A
Authority
JP
Japan
Prior art keywords
piezoelectric
shield
sensitive sensor
piezoelectric element
resin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10639196A
Other languages
Japanese (ja)
Inventor
Yoichi Kashiwa
陽一 柏
Toshiji Ishikawa
利治 石川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AMP Japan Ltd
Original Assignee
AMP Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AMP Japan Ltd filed Critical AMP Japan Ltd
Priority to JP10639196A priority Critical patent/JPH09236504A/en
Publication of JPH09236504A publication Critical patent/JPH09236504A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To obtain a piezoelectric pressure-sensitive sensor suitable for an automobile air bag activation system by tightly sealing a piezoelectric element part and a shield part by means of a cover part. SOLUTION: A shield part 50 acts as an electric shield for a piezoelectric element part 30. The shield part 50 has a resin plate and a shield conductive layer formed on the resin plate by printing, and is fixedly bonded to the piezoelectric element part 30 via an adhesive. A cover part 70 is constituted of a resin cover member and an adhesive layer, and fixedly bonded to the outside of the shield part 50. The resin cover member of the cover part 70 is formed larger in length and breadth than the piezoelectric element part 30 and shield part, 50, so that the piezoelectric element part 30 and shield part 50 are sealed both at upper and lower faces and side faces thereof. A piezoelectric pressure- sensitive sensor 10 is placed within a seat together with a substrate or a panel. When a man sits on the seat, the piezoelectric pressure-sensitive sensor 10 bends. A voltage generated at this time is detected by an external circuit.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は物体の押圧力を感知
する圧電式感圧センサに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric pressure-sensitive sensor that detects the pressing force of an object.

【0002】[0002]

【従来の技術】近年自動車業界では安全装置として多く
の車にエアバッグ装置を装備する傾向にある。特に最近
は運転席のフロント側だけでなく助手席のフロント側、
或いはサイド側にもエアバッグを取り付けることが望ま
れている。
2. Description of the Related Art In recent years, many automobiles in the automobile industry have a tendency to equip an airbag device as a safety device. Especially recently, not only the front side of the driver's seat but also the front side of the passenger seat
Alternatively, it is desired to attach an airbag to the side as well.

【0003】ところで複数のエアバッグ装置が装備され
た場合、事故発生時に不必要な位置のエアバッグが作動
することは安全上好ましくない。従って例えば助手席に
人が居るかどうかを検知して人が居る場合にのみ助手席
側のエアバッグ装置を作動させるようなシステムを構成
することが望まれており、このシステムに使われるため
の、人の存在を検知するセンサが必要とされる。この種
のセンサには検知を確実に行うための良好な感度と、自
動車部品として使用されるために十分なシール特性(防
水、防油特性)とが要求される。本発明はそのようなエ
アバッグ作動システムに適したセンサで、特に座席シー
ト内に埋め込まれてシート上に人が着席したときに生じ
る押圧力を感知する圧電式感圧センサを提供することを
目的とする。
In the case where a plurality of airbag devices are equipped, it is not preferable for safety that the airbags at unnecessary positions operate when an accident occurs. Therefore, for example, it is desired to configure a system that detects whether or not a passenger is present in the passenger seat and activates the airbag device on the passenger seat side only when the passenger is present. , A sensor to detect the presence of a person is needed. This type of sensor is required to have good sensitivity for reliable detection and sufficient sealing characteristics (waterproof and oilproof characteristics) for use as an automobile part. It is an object of the present invention to provide a sensor suitable for such an airbag operating system, and more particularly to provide a piezoelectric pressure sensitive sensor which is embedded in a seat and senses a pressing force generated when a person sits on the seat. And

【0004】[0004]

【課題を解決するための手段】本発明の圧電感圧センサ
は略矩形帯状の圧電樹脂フィルムと、前記圧電樹脂フィ
ルムの表裏面に沿って電気的に絶縁して置かれるシール
ド導電層と、前記圧電樹脂フィルム及び前記シールド導
電層の各々と電気的に導通する複数の接続部と、前記圧
電樹脂フィルム及び前記シールド導電層よりも長さ、幅
とも大寸法に形成された1対の樹脂板から構成され、前
記接続部を外部に延出させつつ前記圧電樹脂フィルム及
び前記シールド導電層を接着剤を介して全方向から密封
封止するカバー部材とを有することを特徴とする。
A piezoelectric pressure-sensitive sensor of the present invention comprises a piezoelectric resin film having a substantially rectangular band shape, a shield conductive layer which is electrically insulated along the front and back surfaces of the piezoelectric resin film, and From a plurality of connecting portions that are electrically connected to each of the piezoelectric resin film and the shield conductive layer, and a pair of resin plates that are larger in length and width than the piezoelectric resin film and the shield conductive layer And a cover member configured to hermetically seal the piezoelectric resin film and the shield conductive layer from all directions via an adhesive while extending the connection portion to the outside.

【0005】本発明の圧電式感圧センサは帯状の圧電樹
脂フィルムを含む。この圧電樹脂フィルムの両面には電
極が印刷形成される。各電極は圧電樹脂フィルムの長さ
方向の一端縁側で外部装置との電気的接続のための接続
部と結合する。これにより圧電樹脂フィルムに圧力が加
わったときに生じる電気信号を接続部を介して、外部装
置へと送ることができる。好ましくは両電極の外側には
シールド手段が提供される。シールド手段も外部装置と
電気的導通をとるための接続部を有する。圧電型感圧セ
ンサは更に圧電樹脂フィルム及びシールド手段の接続部
を除いて、全体をシールする、薄厚の板状樹脂カバー部
材及び接着剤層からなるカバー手段を有する。板状樹脂
カバー部材はポリエステル、ナイロン、ポリプロピレ
ン、テフロンポリイミド等の材料よりなる。カバー手段
の厚さは10μm乃至100μm程度が好ましい。板状
樹脂カバーは圧電式感圧センサの剛性を高め、センサの
感度を良好なものにする。
The piezoelectric pressure-sensitive sensor of the present invention includes a strip-shaped piezoelectric resin film. Electrodes are printed on both sides of the piezoelectric resin film. Each electrode is connected to a connection portion for electrical connection with an external device at one end side in the length direction of the piezoelectric resin film. Thus, an electric signal generated when pressure is applied to the piezoelectric resin film can be sent to the external device via the connecting portion. Shielding means are preferably provided on the outside of both electrodes. The shield means also has a connecting portion for establishing electrical connection with an external device. The piezoelectric pressure-sensitive sensor further has cover means composed of a thin plate-shaped resin cover member and an adhesive layer, which seals the whole except a connecting portion of the piezoelectric resin film and the shield means. The plate-shaped resin cover member is made of a material such as polyester, nylon, polypropylene or Teflon polyimide. The thickness of the cover means is preferably about 10 μm to 100 μm. The plate-shaped resin cover enhances the rigidity of the piezoelectric pressure-sensitive sensor and improves the sensitivity of the sensor.

【0006】[0006]

【発明の実施形態】以下に図面を参照して本発明の好適
実施形態となる圧電式感圧センサを詳細に説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A piezoelectric pressure-sensitive sensor which is a preferred embodiment of the present invention will be described in detail below with reference to the drawings.

【0007】図1には圧電式感圧センサの平面図。図2
には圧電式感圧センサの端部の拡大平面図、及び図3に
は線5ー5に沿う位置での部分断面の概略図が示され
る。
FIG. 1 is a plan view of a piezoelectric pressure sensitive sensor. FIG.
FIG. 3 shows an enlarged plan view of an end portion of the piezoelectric pressure-sensitive sensor, and FIG. 3 shows a schematic view of a partial cross section taken along a line 5-5.

【0008】図1及び図3によれば圧電式感圧センサ1
0は圧電素子部30、シールド部(シールド手段)5
0、及びカバー部(カバー手段)70を有する。図3に
示す如く圧電素子部30はPVDF(ポリフッ化ビニリ
デン)等の材料からなる圧電樹脂フィルム31及びその
両側の面上に形成される電極32、33を有する。電極
32、33は圧電樹脂フィルム31上に印刷して形成さ
れる。電極32、33は、図2の如く外部装置と接続さ
れるための端子(接続部)90の位置まで延びる延長部
32a、33aを含む。延長部32a、33aと端子9
0との接続方法については後述する。
According to FIGS. 1 and 3, a piezoelectric pressure sensitive sensor 1
Reference numeral 0 indicates the piezoelectric element portion 30 and the shield portion (shield means) 5
0, and a cover portion (cover means) 70. As shown in FIG. 3, the piezoelectric element portion 30 has a piezoelectric resin film 31 made of a material such as PVDF (polyvinylidene fluoride), and electrodes 32 and 33 formed on both sides of the piezoelectric resin film 31. The electrodes 32 and 33 are formed by printing on the piezoelectric resin film 31. The electrodes 32 and 33 include extensions 32a and 33a extending to the position of a terminal (connection portion) 90 for connecting to an external device as shown in FIG. Extensions 32a, 33a and terminal 9
The connection method with 0 will be described later.

【0009】シールド部50は図3の如く圧電素子部3
0の外側に位置して、圧電素子部30の電気的シールド
として作用する。シールド部50はポリエステル等によ
り形成される樹脂板51、52及びその上に印刷して形
成される。シールド導電層53、54を有し、図3の如
くアクリル系接着剤34、35を介して圧電素子部30
に接着固定される。樹脂板51及び52は板厚は同じで
も良いし、相違させても良いが、相違させた方が感圧特
性上好ましい。シールド導電層53、54は電極32、
33に沿ってこれらを覆う位置に置かれる。シールド導
電層53、54も電極32、33と同様に端子(接続
部)90の位置まで延びる延長部53a、54aを含
む。延長部53a、54aと端子90との接続方法につ
いては後述する。また、詳細は図示しないが、上下のシ
ールド導電層53、54は端子90とは逆側の端の近傍
に配置される貫通孔に嵌め込まれたアイレット金具80
により相互に導通される(図1参照)。
The shield portion 50 is a piezoelectric element portion 3 as shown in FIG.
It is located outside 0 and acts as an electrical shield for the piezoelectric element portion 30. The shield part 50 is formed by printing resin plates 51, 52 made of polyester or the like and the resin plates 51, 52 thereon. The piezoelectric element unit 30 has shield conductive layers 53 and 54, and acrylic adhesives 34 and 35 as shown in FIG.
Adhesively fixed. The resin plates 51 and 52 may have the same plate thickness or different plate thicknesses, but different plate thicknesses are preferable in terms of pressure-sensitive characteristics. The shield conductive layers 53 and 54 are electrodes 32,
Placed along 33 to cover them. Similarly to the electrodes 32 and 33, the shield conductive layers 53 and 54 also include extensions 53a and 54a extending to the positions of the terminals (connection portions) 90. A method of connecting the extension portions 53a and 54a to the terminal 90 will be described later. Further, although not shown in detail, the upper and lower shield conductive layers 53 and 54 are fitted in eyelet fittings 80 fitted in through holes arranged near the ends on the opposite side to the terminals 90.
Are electrically connected to each other (see FIG. 1).

【0010】カバー部70は樹脂カバー部材71及びそ
れを接着するための接着剤層72から構成されシールド
部50の外側に接着固定される。樹脂カバー部材71は
薄厚の板状部材であり、PET、PBT等のポリエステ
ル、ナイロン、ポリプロピレン、テフロン、ポリイミド
等の材料からなる。また接着剤層72は上述の樹脂カバ
ー部材71の材料の接着に適したものが選択され、例え
ばポリエチレン系及び酸コポリマーの接着剤が使用され
る。樹脂カバー部材71と接着剤層72とを合わせたカ
バー部70の厚さは10μm乃至100μmとされる。
The cover portion 70 is composed of a resin cover member 71 and an adhesive layer 72 for adhering the resin cover member 71, and is adhered and fixed to the outside of the shield portion 50. The resin cover member 71 is a thin plate member, and is made of a material such as polyester such as PET or PBT, nylon, polypropylene, Teflon, or polyimide. The adhesive layer 72 is selected to be suitable for adhering the material of the resin cover member 71 described above, and for example, an adhesive of polyethylene type and acid copolymer is used. The thickness of the cover portion 70 including the resin cover member 71 and the adhesive layer 72 is 10 μm to 100 μm.

【0011】カバー部70の樹脂カバー部材71は図1
及び図3から理解されるように、圧電素子部30及びシ
ールド部50よりも長さ、幅とも大寸法に形成される。
従ってカバー部70が材料71が図3の上下方向から張
り合わされるとき端縁では上下の樹脂カバー部材71同
士が接着剤を介して接着され、これにより圧電素子部3
0及びシールド部50は上下面だけでなく側面でもシー
ルされる。
The resin cover member 71 of the cover portion 70 is shown in FIG.
Further, as understood from FIG. 3, the length and width of the piezoelectric element portion 30 and the shield portion 50 are larger than those of the piezoelectric element portion 30 and the shield portion 50.
Therefore, when the material 71 of the cover portion 70 is adhered from the vertical direction in FIG. 3, the upper and lower resin cover members 71 are adhered to each other via the adhesive at the edge, whereby the piezoelectric element portion 3 is formed.
0 and the shield part 50 are sealed not only on the upper and lower surfaces but also on the side surfaces.

【0012】図2に示すように端部では延長部32a、
33a、53a、54aは略平行に延びるよう配置され
る。しかしながら図3から理解されるように電極32、
33及びシールド導電層53、54の延長に形成され
る。延長部32a、33a、53a,54aの各々は高
さ方向に相違した位置に置かれる。したがって、端子9
0とこれらの延長部32a、33a、53a、54aと
の電気的接触をとるべく、端子90はカバー部70の取
り付け前に図3中7の高さ位置から厚さ方向にピアシン
グ接続される。図2から理解されるように複数の端子9
0の各々は延長部32a、33a、53a、54aの各
々と独立に接続される。図示しないがこれにより端子9
0のタイン部91は高さ方向に位置をそろえて並列配置
される。タイン部91の延出部分92はカバー部70が
接着されるときにシールされる。
At the end, as shown in FIG. 2, the extension 32a,
33a, 53a, 54a are arranged so as to extend substantially in parallel. However, as can be seen from FIG. 3, the electrodes 32,
33 and the shield conductive layers 53 and 54 are formed by extension. Each of the extensions 32a, 33a, 53a, 54a is placed at different positions in the height direction. Therefore, terminal 9
The terminal 90 is piercingly connected in the thickness direction from the height position 7 in FIG. 3 before the cover portion 70 is attached so that the 0 and the extension portions 32a, 33a, 53a, 54a are electrically contacted. As can be seen from FIG. 2, the plurality of terminals 9
Each 0 is independently connected to each of the extensions 32a, 33a, 53a, 54a. Although not shown, this allows the terminal 9
The 0 tine portions 91 are arranged in parallel in the height direction. The extending portion 92 of the tine portion 91 is sealed when the cover portion 70 is bonded.

【0013】更に圧電式感圧センサ10は図1及び図2
の如く3個の貫通孔60を有する。貫通孔60は圧電式
感圧センサ10を基板又はパネルに取り付けるためのも
のである。この貫通孔内に、図示しないリベット金具又
は他の取付部材が配置され圧電式感圧センサ10が基板
又はパネルの所望の位置に支持固定される。圧電感圧セ
ンサ10は基板又はパネルと共にシート内に置かれる。
人がそのシートに着席したとき、圧電式感圧センサ10
は撓みを生じ、このとき生じる電圧が外部の回路によっ
て検知される。
Further, the piezoelectric pressure sensitive sensor 10 is shown in FIGS.
As described above, there are three through holes 60. The through hole 60 is for attaching the piezoelectric pressure sensitive sensor 10 to a substrate or a panel. A rivet metal fitting or other mounting member (not shown) is arranged in the through hole to support and fix the piezoelectric pressure sensitive sensor 10 at a desired position on the substrate or panel. The piezoelectric pressure sensitive sensor 10 is placed in a sheet with a substrate or panel.
When a person takes a seat, the piezoelectric pressure sensor 10
Causes bending, and the voltage generated at this time is detected by an external circuit.

【0014】以上の如く本発明の好適実施形態となる圧
電式感圧センサについて説明したがこれは本発明を制限
するものではなく当業者により様々な変形変更が可能で
ある。
Although the piezoelectric pressure-sensitive sensor which is a preferred embodiment of the present invention has been described above, this does not limit the present invention, and various modifications and changes can be made by those skilled in the art.

【0015】[0015]

【実施例】図1乃至図3に示す構成により圧電式感圧セ
ンサを構成した。まず長さ約170mm、幅約20m
m、厚さ約28μmのPVDF圧電フィルムの両面に銀
ペーストで電極を印刷し、その外側にアクリル系接着剤
でシールド手段を接着固定した。シールド手段は米国デ
ュポン社の登録商標である「Myler」なるPETフ
ィルム上にシールド導電層を銀ペーストで印刷したもの
を使用した。更にその外側に約12μm厚のPETフィ
ルムを接着してカバー部を構成した。具体的にはPET
フィルムの内側の面にアンカーコートを行い、これにポ
リエチレン系、酸コポリマー系の接着剤を約70μm積
層させ、その1対を圧電素子部の上下から押圧し加熱し
て接着した。これにより圧電素子部及びシールド手段が
全方向で密封封止された長さ約190mm、幅約60m
mの矩形帯状の圧電式感圧センサを得た。
EXAMPLE A piezoelectric pressure-sensitive sensor was constructed with the construction shown in FIGS. First, the length is about 170 mm and the width is about 20 m.
An electrode was printed with silver paste on both sides of a PVDF piezoelectric film having a thickness of m and a thickness of about 28 μm, and a shield means was adhesively fixed to the outer side of the electrode with an acrylic adhesive. As the shield means, a shield conductive layer printed with a silver paste on a PET film "Myler" which is a registered trademark of DuPont, USA was used. Further, a PET film having a thickness of about 12 μm was adhered to the outer side thereof to form a cover part. Specifically, PET
Anchor coat was applied to the inner surface of the film, and a polyethylene-based and acid-copolymer-based adhesive was laminated on the film by about 70 μm. As a result, the piezoelectric element portion and the shield means are hermetically sealed in all directions, with a length of about 190 mm and a width of about 60 m.
A rectangular piezoelectric piezoelectric pressure-sensitive sensor of m was obtained.

【0016】この圧電式感圧センサを水平に配置し、こ
の上に高さ200mmの位置から質量5.46gの球体
を落下させ、そのときに生じる電圧を測定したところ1
0個のサンプルの平均値が約2.43Vであった。同様
の方法でカバー部を有しないサンプルを比較のために測
定したところ10個のサンプルの平均値は約0.83V
であった。即ち本実施例の圧電式感圧センサはカバー部
を具えることでより良好な検出感度を有することが確認
された。
This piezoelectric pressure-sensitive sensor was arranged horizontally, and a sphere having a mass of 5.46 g was dropped from a position of 200 mm in height on this, and the voltage generated at that time was measured.
The average value of 0 samples was about 2.43V. When a sample having no cover portion was measured by the same method for comparison, the average value of 10 samples was about 0.83V.
Met. That is, it was confirmed that the piezoelectric pressure-sensitive sensor of this example has a better detection sensitivity by including the cover portion.

【0017】[0017]

【発明の効果】本発明の圧電式感圧センサは良好なシー
ル特性(防水、防油特性)を有すると共に、カバー部に
より適当な剛性が付与されて比較的良好な感度を有する
ので、エアバッグ作動のため自動車のシート内に取り付
けられる感圧センサとして好適である。
The piezoelectric pressure-sensitive sensor of the present invention has good sealing characteristics (waterproofing and oilproofing characteristics) and has a relatively good sensitivity due to the appropriate rigidity imparted by the cover portion. It is suitable as a pressure-sensitive sensor mounted in the seat of an automobile for operation.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の好適実施形態となる圧電式感圧セ
ンサの平面図。
FIG. 1 is a plan view of a piezoelectric pressure-sensitive sensor according to a preferred embodiment of the present invention.

【図2】 図1の圧電式感圧センサの端部の拡大図。FIG. 2 is an enlarged view of an end portion of the piezoelectric pressure sensitive sensor of FIG.

【図3】 図1中線5ー5の位置の断面を示す分解断
面概略図。
FIG. 3 is an exploded cross-sectional schematic view showing a cross section taken along the line 5-5 in FIG.

【符号の説明】[Explanation of symbols]

31 圧電樹脂フィルム 53、54 シールド部材 71 カバー部材 72 接着剤 90 接続部 31 piezoelectric resin film 53, 54 shield member 71 cover member 72 adhesive 90 connection part

─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───

【手続補正書】[Procedure amendment]

【提出日】平成8年9月20日[Submission date] September 20, 1996

【手続補正1】[Procedure amendment 1]

【補正対象書類名】図面[Document name to be amended] Drawing

【補正対象項目名】図6[Correction target item name] Fig. 6

【補正方法】削除[Correction method] Deleted

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 略矩形帯状の圧電樹脂フィルムと、前記
圧電樹脂フィルムの表裏面に沿って電気的に絶縁して置
かれるシールド導電層と、 前記圧電樹脂フィルム及び前記シールド導電層の各々と
電気的に導通する複数の接続部と、 前記圧電樹脂フィルム及び前記シールド導電層よりも長
さ、幅とも大寸法に形成された1対の樹脂板から構成さ
れ、前記接続部を外部に延出させつつ前記圧電樹脂フィ
ルム及び前記シールド導電層を接着剤を介して全方向か
ら密封封止するカバー部材とを有することを特徴とする
圧電式感圧センサ。
1. A substantially rectangular strip-shaped piezoelectric resin film, a shield conductive layer which is electrically insulated and placed along front and back surfaces of the piezoelectric resin film, and each of the piezoelectric resin film and the shield conductive layer. And a plurality of connecting portions that are electrically connected to each other, and a pair of resin plates that are formed to have a length and a width that are larger than the piezoelectric resin film and the shield conductive layer, and extend the connecting portions to the outside. At the same time, the piezoelectric pressure sensitive sensor is characterized by having a cover member that hermetically seals the piezoelectric resin film and the shield conductive layer from all directions via an adhesive.
JP10639196A 1996-02-29 1996-02-29 Piezoelectric pressure-sensitive sensor Pending JPH09236504A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10639196A JPH09236504A (en) 1996-02-29 1996-02-29 Piezoelectric pressure-sensitive sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10639196A JPH09236504A (en) 1996-02-29 1996-02-29 Piezoelectric pressure-sensitive sensor

Publications (1)

Publication Number Publication Date
JPH09236504A true JPH09236504A (en) 1997-09-09

Family

ID=14432403

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10639196A Pending JPH09236504A (en) 1996-02-29 1996-02-29 Piezoelectric pressure-sensitive sensor

Country Status (1)

Country Link
JP (1) JPH09236504A (en)

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JP2015034818A (en) * 2013-07-10 2015-02-19 積水化学工業株式会社 Piezoelectric sensor
WO2016027615A1 (en) * 2014-08-19 2016-02-25 株式会社村田製作所 Piezoelectric film sensor
JP2016075657A (en) * 2014-10-03 2016-05-12 財團法人工業技術研究院Industrial Technology Research Institute Pressure array sensor module and manufacturing method of the same
KR101845258B1 (en) * 2017-05-02 2018-04-04 주식회사 씨엔프런티어 Flexible-thin film type sensor structure
JP2018520340A (en) * 2015-04-30 2018-07-26 キストラー ホールディング アクチエンゲゼルシャフト Contact force test device, use of such contact force test device, and method of manufacturing such contact force test device
JP2020134445A (en) * 2019-02-25 2020-08-31 ロボセンサー技研株式会社 Piezoelectric sensor
JP2020134444A (en) * 2019-02-25 2020-08-31 ロボセンサー技研株式会社 Piezoelectric sensor
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Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2660577A4 (en) * 2011-01-31 2014-10-15 Mikuni Kogyo Kk Pressure sensor element
EP2660577A1 (en) * 2011-01-31 2013-11-06 Mikuni Corporation Pressure sensor element
JP2015034818A (en) * 2013-07-10 2015-02-19 積水化学工業株式会社 Piezoelectric sensor
JPWO2016027615A1 (en) * 2014-08-19 2017-06-01 株式会社村田製作所 Piezoelectric film sensor
WO2016027615A1 (en) * 2014-08-19 2016-02-25 株式会社村田製作所 Piezoelectric film sensor
US9784626B2 (en) 2014-10-03 2017-10-10 Industrial Technology Research Institute Pressure array sensor module and manufacturing method thereof
JP2016075657A (en) * 2014-10-03 2016-05-12 財團法人工業技術研究院Industrial Technology Research Institute Pressure array sensor module and manufacturing method of the same
JP2018520340A (en) * 2015-04-30 2018-07-26 キストラー ホールディング アクチエンゲゼルシャフト Contact force test device, use of such contact force test device, and method of manufacturing such contact force test device
US10753810B2 (en) 2015-04-30 2020-08-25 Kistler Holding, Ag Contact force testing apparatus, use of such a contact force testing apparatus and method for producing such a contact force testing apparatus
KR101845258B1 (en) * 2017-05-02 2018-04-04 주식회사 씨엔프런티어 Flexible-thin film type sensor structure
JP2020134445A (en) * 2019-02-25 2020-08-31 ロボセンサー技研株式会社 Piezoelectric sensor
JP2020134444A (en) * 2019-02-25 2020-08-31 ロボセンサー技研株式会社 Piezoelectric sensor
WO2023171354A1 (en) * 2022-03-09 2023-09-14 株式会社村田製作所 Sensor

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