JPH09225934A - Apparatus for interlocking wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily detect the reason of stopping of driving by means of interlocking when the driving is stopped by providing a driving situation displaying means which alarms and displays the driving situation which does not satisfy the driving condition when the driving situation which does not satisfy the driving condition is detected by an interlocking judging means. SOLUTION: An interlocking apparatus for a wire saw is constituted of a control part 100, a displaying monitor 70, an inputting part 102 and detecting parts arranged on each working part of the wire saw. In addition, the control part 100 inputs various detecting signals from each detector to detect the driving situation of each working part and whether or not this detected driving situation satisfies the driving situation inputted and set in advance from the inputting part 102 is judged. If it does not satisfy the driving situation, driving of each working part is stopped by means of an interlock through a control part for controlling the driving of each working part of the wire saw. In addition, the reason of the interlocking is alarmed and displayed on the displaying monitor 70.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw interlock device, and more particularly to a wire saw interlock device that stops the operation of the wire saw by an interlock when operating conditions are not satisfied.

[0002]

2. Description of the Related Art A wire saw is used in a cutting device for cutting a work such as a semiconductor ingot, ceramic, or glass into thin plate wafers. In this wire saw, a wire wound around a pair of wire reels is wound around a plurality of grooved rollers to form a wire row, and the work set on the work feed table is pressed against the wire row to thin the work sheet. The wafer is cut into a wafer.

By the way, the wire saw cuts the work into wafers by automatically controlling the cutting speed of the work and the traveling speed of the wire from the start to the end of the cutting work of the work based on preset operating conditions. Conventionally, when the wire saw does not satisfy the operating conditions when the automatic operation is started or during the operation (when a malfunction occurs, etc.), the automatic operation is started or stopped (interlocked).

[0004]

However, since the interlock is applied to each operating part of the wire saw, each sensor, and each parameter input, what is the cause when the operation is stopped by the interlock? Driving stopped, and it took a lot of labor to figure out what to correct.

The present invention has been made in view of such circumstances, and when the operation of the wire saw is stopped by the interlock, the cause of the interlock can be immediately detected. An object is to provide a locking device.

[0006]

In order to achieve the above-mentioned object, the present invention cuts a workpiece by running a wire between a pair of wire reels and pressing the workpiece against the wire. In the wire saw, a driving situation detecting unit that detects a driving situation of each operating unit of the wire saw, and an operating situation that does not satisfy a preset operating condition from the operating situation of each operating unit detected by the operating situation detecting unit, Interlock determining means for detecting, interlock means for stopping the operation of the wire saw when the operating condition not satisfying the operating conditions is detected by the interlock determining means, and the operating condition by the interlock determining means When a driving situation that does not satisfy the above conditions is detected, a driving situation that warns the driving situation that does not satisfy the driving condition It is characterized in that it consists of a Display means.

According to the present invention, the operating status of each operating part of the wire saw is detected by the operating status detecting means, and the operating condition preset from the operating status of each operating part detected by the operating status detecting means is set. The interlock determination means detects an operating condition that is not satisfied. When the interlock determination means detects an operating condition that does not satisfy the operating condition, the interlock means stops the operation of the wire saw, and
The driving status display means displays a warning of a driving status that does not satisfy the driving conditions.

With this, when the operation of the wire saw is stopped by the interlock, the cause of the interlock can be immediately detected.

[0009]

BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of an interlock device for a wire saw according to the present invention will be described in detail below with reference to the accompanying drawings. FIG. 1 is a configuration diagram showing an embodiment of a wire saw interlock device according to the present invention. First, the overall configuration of a wire saw to which the present invention is applied will be described with reference to FIG.

The wire 14 wound around one wire reel 12 passes through a wire guide device (traverser) 16A, a plurality of guide rollers 18 and 18, and a dancer roller 20A, and three grooved rollers (groove rollers) 22A. Two
After being sequentially wound around 2B and 22C to form the wire row 24, the wire row 24 is wound around the other wire reel 26 via the plurality of guide rollers 18 and 18, the dancer roller 20B, and the wire guiding device 16B.

A weight 44 having a predetermined weight is suspended from the dancer rollers 20A and 20B to constantly apply a constant tension to the traveling wire 14. A wire cleaning device 46 is provided in the middle of the wire traveling path.
The machining liquid 40 attached to the wire 14 is removed by 6. The wire reels 12 and 26 are respectively connected to drive motors 28 and 30 capable of rotating in the forward and reverse directions, and
One of the three grooved rollers 22A, 22B, and 22C is also connected to a grooved roller, and a drive motor (not shown) is connected to the wire roller 14 by synchronously driving the drive motors 28 and 30. Is a pair of wire reels 1
It reciprocates between 2 and 26.

The wire row 24 has abrasive grains (generally GC # 600 to # 100) stored in the machining fluid storage tank 38.
The working fluid 40 containing the working fluid of about 0 is supplied by the working fluid supply pump 60 to the working fluid supply nozzles 42, 4
Supplied from 2. The semiconductor ingot 54 is pressed against the wire row 24 and cut into a large number of wafers by the lapping action of the processing liquid 40.

A work 54 such as a semiconductor ingot is supported above the wire row 24 by a work feed table 48 via a slice base 58 and a work block 56. The work feed table 48 has a drive motor 5
It is provided so as to be able to move up and down by the action of a ball screw 52 that rotates at 0. By lowering the work feed table 48 and pressing the work 54 against the wire row 24 that travels at high speed, the work 54 is moved to a large number of wafers. Disconnect.

By the way, in the wire saw, detectors (details will be described later) are installed in the respective operating parts and the like, and when the detector detects an operating condition that does not satisfy the preset operating condition, The operation is stopped (interlocked) by an interlock device. The operating status of the wire saw detected by these detectors is displayed on the display monitor 70 shown in the external view of the wire saw in FIG. 2 and a warning is displayed so that the cause of the interlock can be identified at a glance. . The display monitor 70 is installed on the outer surface of the protective cover 60 that covers the peripheral portion of the wire saw. In the figure, a protective cover 60 for covering the periphery of the wire saw, and a wire reel 12, a traverser 16A, a guide roller 18, and a dancer roller 20 inside the protective cover 60.
A, the groove rollers 22A, 22B and 22C, the working liquid storage tank 38, the wire cleaning device 46, the work feed table 48, the work 54, and the warning light 55 are shown.

The interlock device for a wire saw according to the present invention will be described in detail below. As shown in FIG. 1, the wire saw interlock device according to the present invention includes a control unit 1.
00, a display monitor 70, an input unit 102, and a detector installed in each operating unit of the wire saw. The detector detects a rotation angle signal output from the drive motors 28 and 30 that rotate the wire reels 12 and 26 (for example, a pulse signal output at each predetermined rotation angle), and detects the rotation amount of the wire reels 12 and 26. Wire reel rotation amount detectors 104A and 104B that detect the position, traverser position detectors 106A and 106B that detect the position of the traverser (displacement amount from the lower limit), and the position of the dancer roller (displacement amount from the lower limit). Dancer roller position detectors 108A and 108B, a work tilting angle detector 110 that detects the tilting horizontal angle and vertical angle of the work installed on the work feed table, and a drive motor 50 that moves the work feed table in the vertical direction. Rotation angle signal output from (for example, a pulse signal output at each predetermined rotation angle) The rotation amount of the motor 50 is detected by the work feed table position detector 112 that detects the position of the work feed table from this rotation amount, and the groove roller displacement amount that detects the displacement amount of the groove rollers 22A and 22B in the rotation axis direction. Detectors 114A and 114B, load sensors 116A and 116B that detect the pressure applied to the guide rollers 18A and 18B from the wires, and wire diameter detectors 118A and 118B that detect the diameter of the wires are installed on the wire saw.

The control unit 100 inputs various detection signals from the above-mentioned detectors to detect the operating conditions of the respective operating units, and the detected operating conditions satisfy the operating conditions preset by the input unit 102. Determine if If the detected operating condition does not meet the preset operating conditions, the operation of each operating part of the wire saw is controlled by the interlock through the control unit (not shown) that controls the operation of each operating part of the wire saw. Stop. Then, the cause of the interlock is displayed as a warning on the display monitor 70.

FIG. 3 shows a screen displayed on the display monitor 70 by the control unit 100. On the screen shown in FIG. 3, information about the wire (wire information display unit 70A) and information about the position of the traverser (traverser information display unit 70).
B), information about the position of the dancer roller (dancer roller information display section 70C), information about the installation direction of the work (work information display section 70D), information about the descending speed of the work feed table (work) (work feed table information display section 70E). , Information about slurry (slurry information display portion 70F), information about groove rollers (groove roller information display portion 70G), and information about wafer cleaning liquid (wafer cleaning liquid information display portion 70H) are displayed.

The information about the wire in the wire information display section 70A includes the front side and the back side (the side supplying a new wire is called the front side, the supplied side is called the back side,
In FIG. 1, the wire reel 12 side is the front side and the wire reel 26 side is the back side. ), The remaining amount of wire, the winding capacity of the wire, the tension of the wire, the diameter of the wire (the wire diameter) are displayed, and the maximum value of the running speed of the wire (MAX speed) during the operation of the wire saw is displayed. .

The remaining wire amount is calculated from the winding diameter of the wire detected by the detection signals from the wire reel rotation amount detectors 104A and 104B. That is, the wire reel 12, 26
The winding diameter of the wire during the operation of the wire saw is calculated by adding the increment or decrement of the winding diameter according to the rotation amount. Then, after the winding diameter is calculated, the remaining amount of the wire wound around the wire reel is calculated from the value of the wire diameter detected by the wire diameter detectors 118A and 118B. That is, the winding diameter of the wire is _dr , and the bobbin diameter is d.
Assuming _{B 1} , the bobbin length 1 _B , the filling rate k, and the wire diameter d _wi , the remaining amount ANS of the wire is calculated by the following equation.

[0020] In addition, the winding diameter of the wire at the start of the operation is as follows with the rotation of the grooved rollers 22A, 22B and 22C stopped.
Each of the wire reels 12 and 26 is rotated by 90 ° in the wire winding direction, and the dancer roller position detector 108 is rotated.
The positions of the dancer rollers 20A and 20B are detected from A and 108B. From this displacement amount, the winding amount of the wire when the wire reel is rotated 90 ° can be detected,
The winding diameter of the wire is calculated from the winding amount of the wire.

The winding capacity of the wire is the wire reel 1
A value obtained by subtracting the remaining amount of the wire from the maximum winding capacity that can be wound on Nos. 2 and 26 is shown, and the remaining winding capacity that can be wound on the wire reels 12 and 26 is shown. The wire tension is calculated from the wire pressure detected by the load sensors 18A and 18B.

The MAX speed of the wire is calculated from the rotation speed of the wire reels 12 and 26 detected by the wire reel rotation amount detectors 104A and 104B and the winding diameter of the wire. When the control unit 100 detects the driving condition that does not satisfy the driving condition as described above, that is,
When the driving condition that causes the interlock is detected, the characters or numbers indicating the driving condition are displayed with a red mesh, and the operator is warned of the cause of the interlock.

For example, as an operating condition for the wire, when the remaining amount of the wire on the front side is smaller than a predetermined amount when the operation of the wire saw is started, it is set to be interlocked. If the amount of remaining wire on the front side is less than the predetermined amount, the operation of the wire saw is prohibited by the interlock and the number indicating the amount of remaining wire on the front side of the wire information display portion 70A is shaded in red. Is displayed. Similarly, regarding the winding capacity of the wire, the tension of the wire, the diameter of the wire, and the MAX speed of the wire, when a value outside the preset operating condition range is detected, the number displaying that value is shaded in red. Are overlaid.

The information on the position of the traverser in the traverser information display section 70B of FIG. 3 includes the current position of the traverser and the preset maximum elevation position (UP) of the traverser.
MAX) and traverser maximum descent position (DOWN M
AX) is the front and back traversers 16A, 1
Displayed for 6B. The current positions of the traversers 16A and 16B are the traverser position detectors 106A and 106A, respectively.
Detected by 106B.

As an operating condition relating to the position of the traverser, the current position of the traverser is the maximum position of the traverser (UP MAX) and the maximum position of the traverser (DO MAX) displayed on the traverser position information display section 70B.
It is set to interlock when the range of (WN MAX) is exceeded. When the current position of the traverser exceeds the range of the maximum traverser up position (UP MAX) and the maximum traverser down position (DOWN MAX),
Numerical value indicating the limit value (maximum position of traverser (UP MAX) or maximum position of traverser (DO)
WN MAX) is displayed in red).

In the information about the position of the dancer roller of the dancer roller information display portion 70C shown in FIG. 3, the positions of the front and back dancer rollers 20A and 20B are displayed. The positions of the dancer rollers 20A and 20B are detected by dancer roller position detectors 108A and 108B, respectively. The operating condition regarding the position of the dancer roller is set so that the current position of the dancer roller is interlocked when the current position exceeds a predetermined range. When the current position of the dancer roller exceeds the predetermined range, a red shade is displayed on the numerical value indicating the current position of the dancer roller.

The tilting angle (horizontal direction, vertical direction) of the work is displayed in the work information display section 70D of FIG. 3 for the information regarding the installation direction of the work. The tilting angle is detected by the work tilting angle detector 110. Then, as an operating condition regarding the installation direction of the work, it is set to interlock when the tilting angle of the work exceeds a predetermined angle range. When the tilting angle of the work exceeds the predetermined angle range, a red shading is displayed on the value exceeding the range.

Work feed table information display section 70 of FIG.
The information on the descending speed of the work feeding table (work) of E displays the descending speed at the beginning of descending the workpiece, the descending speed at the end of descending the workpiece, the minimum workpiece descending speed, and the current position of the workpiece. A preset value is displayed for the descending speed at the start of descending the workpiece, the descending speed at the end of descending the workpiece, and the minimum workpiece descending speed. When cutting the work, the work descending speed (work descending speed) is controlled as shown in FIG. 4, for example. In the figure, the vertical axis represents time and the horizontal axis represents the work descending speed. The work descending speed takes a value indicated by the curve g in the figure according to time. That is, as the cutting portion of the work progresses from the lower end of the work (work cutting start point A) to the center of the work (work cutting midpoint C), the work descending speed becomes slower, and becomes minimum at the work center (work cutting midpoint C). Becomes Further, the cutting portion of the work is from the center of the work (work cutting midpoint C) to the upper end of the work (work cutting end point B).
The work descending speed becomes faster as it goes to. The curve g at this time is the above-mentioned work descending speed at the three points of the work cutting start point A, the work cutting end point B, and the work cutting intermediate point C (the descending speed at the start of descending the work, the descending speed at the end of descending the work. And minimum work descending speed)
Then, it is derived from the work diameter by a predetermined curve function.

The current position of the work is detected by the work feed table position detector 112. As an operating condition related to the lowering speed of the work feed table, if the set value of the work lowering speed exceeds the settable range or the current position of the work feed table (work) exceeds the predetermined range, interlock is performed. Is set to. When these numerical values exceed a predetermined range, red numerical shading is displayed on the numerical values exceeding the range.

The number of effective shots of the slurry is displayed in the information about the slurry in the slurry information display section 70F of FIG. The number of effective shots is displayed in the form of a ratio between the number of times the slurry is used for cutting the work without exchanging the slurry and the preset number of times the slurry can be used. The operating condition regarding the slurry is set to interlock when the number of effective shots exceeds a predetermined number of shots (usable number of times). When the number of valid shots exceeds the usable number of times, a red shade is displayed on the numerical value indicating the number of valid shots.

The information about the groove roller in the groove roller information display portion 70G shown in FIG. 3 includes the groove roller 22.
The number of effective shots of A and 22B and the groove roller 22
The displacement amounts of A and 22B in the rotation axis direction are displayed as left (L) and right (R) groove rollers, respectively. The number of effective shots is displayed in the form of a ratio between the number of times the groove roller has been used for cutting a work without exchanging the groove roller and a preset number of times the groove roller can be used.

The displacement amount of the groove roller in the rotation axis direction is
The displacement detectors 114A and 114B detect the displacement amounts in the front-rear direction and display the displacement amounts of the front and back. The operating condition for the groove roller is set to interlock when the number of effective shots exceeds a predetermined number of shots (usable number of times) or when the displacement amount exceeds a predetermined amount. When these numerical values exceed the predetermined values, red shading is displayed on the numerical values.

The number of effective shots of the wafer cleaning liquid is displayed in the information on the wafer cleaning liquid in the wafer cleaning liquid information display portion 70H shown in FIG. The number of effective shots is displayed in the form of a ratio between the number of times the wafer cleaning liquid has been used for cleaning the work without exchanging the wafer cleaning liquid and the preset number of times the wafer cleaning liquid can be used. The operating condition regarding the wafer cleaning liquid is set to interlock when the number of effective shots exceeds a predetermined number of shots (usable number of times). When the number of valid shots exceeds the usable number of times, a red shade is displayed on the numerical value indicating the number of valid shots.

Although not shown in FIG. 1, each guide roller 18 is provided with a rotation amount detector for detecting the number of rotations, and the rotation of the guide roller detected by the rotation amount detector is detected. The ground fault of the wire (derailment of the wire) and wear of the guide roller are detected from the speed. If the ground fault of the wire and the wear of the guide roller are detected, the letters "ground fault" and "guide roller" displayed on the display monitor 70 are displayed in red.

Further, the dancer roller position detector 108A,
When 108B detects the dancer rollers 20A and 20B at the lowermost end, it is determined that the wire has broken, and the red broken character is displayed on the character of "broken wire" displayed on the display monitor 70. In addition, a protective cover 6 that covers the outer periphery of the wire saw
The 0 (Fig. 2) door has a door switch (door SW) that detects whether the door is open or closed. When the open state of the wire saw is detected when the wire saw starts operating or when the wire saw is operated, the interlock operates. Is stopped, and a red shading is displayed on the characters "door SW" displayed on the display monitor 70.

As described above, the control unit 100 displays the operating condition detected by each detector on the display monitor 70, and detects the operating condition that does not satisfy the operating condition as described above, that is, the cause of the interlock. When an operating condition that causes the above is detected, a red shade is superimposed on the letters or numbers indicating the operating condition, and the operator is warned of the cause of the interlock.

When the operation is stopped due to the interlock, the warning light 55 shown in FIG. 2 is switched from the green lighting in normal operation to the red lighting, and an alarm sound such as an alarm is generated. The interlock alerts the operator that the operation has stopped.

[0038]

As described above, according to the present invention, when an operating condition that does not satisfy the preset operating condition is detected and the operation of the wire saw is stopped by the interlock, the cause of the interlock is displayed as a warning. Therefore, when the operation of the wire saw is stopped by the interlock, the cause of the interlock can be easily detected, and the corrected portion can be immediately detected.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing an embodiment of an interlock device for a wire saw according to the present invention.

FIG. 2 is an external view of a wire saw.

FIG. 3 is a diagram showing a screen configuration displayed on a display monitor.

FIG. 4 is a diagram showing an example of the work descending speed with respect to time.

[Explanation of symbols]

 16A, 16B ... Traverser 20A, 20B ... Dancer roller 22A, 22B, 22C ... Grooved roller 24 ... Wire row 48 ... Work feed table 50 ... Drive motor 70 ... Display monitor 100 ... Control section 102 ... Input section

Claims (2)

[Claims] 1. A wire saw for cutting a workpiece by running the wire between a pair of wire reels and pressing the workpiece against the wire, and detecting the operating condition of each operating part of the wire saw. An operating condition detecting unit, an interlock determining unit that detects an operating condition that does not satisfy a preset operating condition from the operating conditions of the operation units detected by the operating condition detecting unit, and the interlock determining unit When an operating condition that does not satisfy the operating condition is detected, an interlock unit that stops the operation of the wire saw, and an operating condition that does not satisfy the operating condition are detected by the interlock determination unit, the operating condition And a driving status display means for displaying a warning of a driving status that does not satisfy the above condition. Over interlock device. 2. The operation status display means displays an item indicating the operation status of each operation part of the wire saw, and when the interlock determination means detects an operation status that does not satisfy the operation condition, An interlock device for a wire saw according to claim 1, wherein a warning is given by specially displaying an item indicating an operating condition that does not satisfy the operating condition.