JP3202527B2 - Wire saw equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION The present invention relates to, for example, semiconductor materials,
The present invention relates to a wire saw device for cutting a brittle material such as a magnetic material and a ceramic with a wire.

[0002]

2. Description of the Related Art In a wire saw device of this type, a wire is spirally wound many times between a plurality of processing rollers. The wire is run by the rotation of the processing roller, and the running wire is brought into contact with the work, and the slurry containing abrasive grains is supplied to the contact portion, and the work is sliced into a wafer by the wire. Is done.

[0003] In this type of apparatus, a reel mechanism having a reel for feeding out a wire to a processing roller side and a reel for winding up the cut wire is mounted on a frame.

[0004]

However, in the conventional wire saw apparatus, the operator recognizes the stored dose of the wire on the pay-out reel at the start of processing by visual observation of the worker. For this reason, in the processing of a large workpiece or continuous processing for a long time, the wire of the reel on the payout side is lost during the processing, and the running direction of the wire must be reversed to continue the processing.

[0005] Factors that affect the processing conditions of a workpiece in a wire saw device are complicatedly intertwined. One of the reasons is that the wire feeding direction may change, and there may be a large difference in the processing accuracy of the workpiece before and after the wire feeding direction changes. there were.

An object of the present invention is to provide a wire saw device capable of preventing a change in a wire feeding direction during cutting of one work. Another object of the present invention is to provide a wire saw device capable of selecting a work length or a work type corresponding to a remaining wire amount of a pay-out reel in order to perform efficient production.

[0007]

In order to achieve the above object, according to the first aspect of the present invention, at least the remaining wire amount of the pay-out reel is determined by comparing the remaining wire amount of the initial input pay-out reel with the wire feed amount. Calculated based on at least one of speed and traveling direction and machining time
Calculation means to output and the calculated remaining reel on the payout side
A discriminator that determines whether a workpiece can be cut based on the amount of wire
A step is provided .

[0008]

[0009] In the invention described in claim 2, calculation output means,
Instead of the calculation in claim 1, according to the weight of the reel
Calculating the remaining wire amount based on the output signal ,
Further, based on the calculated remaining wire amount of the payout reel,
And a determination means for determining whether or not the workpiece can be cut .

According to a third aspect of the present invention, in the second aspect , the reel is supported so that its central axis is oriented in a vertical direction, and the calculating means includes a strain gauge.
The strain gauge is provided so as to be disposed at a lower end portion of a bearing that supports a rotating shaft of the reel.

According to the fourth aspect of the present invention, the first to third aspects are provided.
In any one of the determining means, the remaining wire quantity, because on the basis of the set value by the setting means for setting a time required for the cutting ends of the cutting start to the workpiece also you determine whether the workpiece cutting is there.

According to the fifth aspect of the present invention, the first to fourth aspects are provided.
Storage means for storing the wire feeding speed and the processing time, and determining means for comparing the remaining wire amount of the payout reel and the data in the storage means to determine a workable work range. Is provided.

[0013]

According to the first aspect of the present invention, it is possible to calculate the remaining wire amount of the reel on the pay-out side, and to compare the calculated value with the wire amount necessary for processing the work. And when the payout speed of the wire is constant,
By the calculation based on the remaining wire amount of the pay-out reel and the processing time input at the beginning, the remaining wire amount of the pay-out reel at that time is calculated. Also, if there is a change in the wire feeding speed and running direction,
By the calculation taking these values into account, the remaining wire amount of the payout reel at that time is calculated. Soshi
The remaining reel on the payout side calculated by this calculation
Whether or not the workpiece can be cut is determined based on the wire amount.

[0014]

According to the second aspect of the present invention, the remaining wire amount of the pay-out reel is calculated by measuring the weight of the reel, and the remaining wire of the pay-out reel is calculated.
Whether the workpiece can be cut or not can be determined based on the amount . According to the third aspect of the present invention, the strain gauges included in the calculation means can be easily arranged, and the configuration is simplified. Then, the load in the thrust direction of the rotating shaft caused by mounting each reel can be detected without directly touching the rotating shaft. In addition, since the strain gauge is not in direct contact with each reel and the rotating shaft, the rotation state is not affected, and the weight of each reel can be continuously detected.

According to the fourth aspect of the present invention, the work required for cutting the work set and input by the setting means and the remaining wire amount of the pay-out reel calculated by the calculating means are used to calculate the work. Whether the disconnection is possible is automatically determined.

According to the fifth aspect of the present invention, the amount of wire remaining on the pay-out reel calculated by the calculation means, the type of work or the length and diameter of the work, or the wire feeding according to the required cutting distance. The speed and the processing time are compared to determine a work that can be processed.

[0018]

【Example】

(First Embodiment) Hereinafter, a first embodiment of the wire saw device of the present invention will be described.
An embodiment will be described in detail with reference to FIGS.

As shown in FIG. 4 and FIG.
Is mounted on an apparatus frame 12 composed of a bed 12c and a column 12b. The cutting mechanism 11 includes a driving groove roller 13 and a driven groove roller 14 extending in parallel, and a plurality of annular grooves 13a and 14
a are formed at a predetermined pitch. In the drawings, the number of grooves 13a and 14a is smaller than the actual number for easy understanding. One cutting wire 15 is continuously wound around each groove 13a, 14a of the groove rollers 13, 14. The wire running motor 16 is disposed on the apparatus frame 12, and the drive groove roller 13 is rotated by the motor 16 directly or via a belt and a pulley (not shown). Then, by the rotation of the groove rollers 13, 14, the wire 15 travels in one direction (saw motion) with one direction or partial backward movement. Work support mechanism 19
Is vertically movably supported by a column 12b erected on a frame 12 above the cutting mechanism 11, and a work 20 is detachably set below the column 12b. Then, while the wire 15 travels in one direction between the groove rollers 13 and 14 of the cutting mechanism 11, the work supporting mechanism 19
It is lowered toward. At this time, a slurry containing abrasive grains is supplied onto the wire 15 from a slurry supply device (not shown), and the work 20 is pressed against the wire 15 and the work 20 is wrapped by the abrasive grains.
Is sliced.

A reel mechanism 21 for feeding or winding the wire 15 is mounted on the frame 12. The reel mechanism 21 includes a pair of reels 22 and 23 for feeding and winding the wire 15. The two reels 22 and 23 alternately share the winding and feeding functions, but in the following description, one of the reels 22 will be referred to as a feeding reel as an example to simplify the description.
The other reel 23 is a take-up reel. A pair of reel rotation motors 41 and 42, which will be described later, are disposed on the frame 12, and the feed reel 22 and the take-up reel 23 are individually rotated by these motors 41 and 42 at a variable speed.

The traverse mechanism 25 is mounted on the bed 12c of the frame 12 adjacent to the reel mechanism 21. The traverse mechanism 25 traverses up and down the wire 15 from the pay-out reel 22 and the winding of the wire 15 to the take-up reel 23. I will guide you while doing. The rotation of both reels 22 and 23 of the reel mechanism 21 and the rotation of the groove roller cause the wire 15 to be wound from the payout reel 22 to the take-up reel 23 via the cutting mechanism 11. Feeding reel 2
Immediately before the wire 15 on the second 2 is completely wound on the take-up reel 23 via the cutting mechanism 11, the rotation directions of the two reels 22, 23 are switched, and the pay-out function and the take-up function of the reels 22, 23 are reversed. .

As shown in FIG. 4, the wire tension applying mechanism 2
Reference numeral 6 is provided between the reel mechanism 21 and the cutting mechanism 11. The tension applying mechanism 26 includes a pair of dancer arms 28 and 29 that are swingably supported, and a guide roller 30 and a weight 31 are attached to their ends.

A predetermined tension is applied to the wire 15 between the groove rollers 13 and 14 by the downward gravity of each weight 31 attached to the pair of dancer arms 28 and 29 of the wire tension applying mechanism 26.

The wire 15 is connected to the payout reel 22.
Roller 40 and the wire tension applying mechanism 26
Roller 30, one of a pair of guide rollers 38, and a set of guide rollers 3 of wire guide mechanism 36.
Through 7, the cutting mechanism 11 is reached. And the cutting mechanism 1
From 1 through the other set of guide rollers 37 of the wire guide mechanism 36, the other of the pair of guide rollers 38, the other roller 30 and the roller 40 of the wire tension applying mechanism 26 are taken up on the take-up reel 23.

As shown in FIGS. 1 and 3, the pair of motors 41 and 42, which can change the rotation direction and the rotation speed, are mounted on a cylindrical body 12a erected on the bed 12c. 41a and 42a are protrudingly provided. The rotating shaft 43 has an upper bearing 44 that supports loads in the thrust direction and the radial direction so as to correspond to each of the motors 41 and 42.
a, is rotatably supported in the cylindrical body 12a via the lower bearing 44b. As shown in FIG. 2, a strain gauge 50 is mounted in the cylindrical body 12a as a load detecting means abutting on the lower end surface of the outer race of the upper bearing 44a, and is generated by the weight of the pay-out reel 22 and the take-up reel 23. The load in the thrust direction of the rotating shaft 43 is detected. A large diameter portion 43a is formed integrally with the upper end of the rotating shaft 43. The coupling 45 includes a motor shaft 41a,
42a is mounted between the rotating shafts 43 so as to be connected thereto. The feed reel 22 and the take-up reel 23 are rotated by a drive pin 46 to each of the rotating shafts 43.
The screw 47 is fastened and fixed to the large-diameter portion 43a while being prevented from rotating on the large-diameter portion 43a.

Next, a control device of the wire saw device configured as described above will be described. As shown in FIG. 5 and FIG. 6, the control device 63 constituting the calculating means and the determining means
Is disposed near the frame 12, and has a central processing unit (CPU) 64 and a memory 65 mounted therein. The CPU 64 controls the operation of the entire apparatus. The memory 65 stores a program for controlling the operation of the apparatus, various input data, detection data, and the like. Control device 63
An operation panel 66 and a CRT 67 are provided on the front side. The CRT 67 displays various input data, detection data, and control status of the entire apparatus. Keyboard 6
Numeral 9 is arranged at the front of the control device 63, and various keys 70 are provided.

Here, at the start of the operation of the cutting apparatus, the type, size or shape of the work 20 is inputted by the key 70. The data is set and stored in the memory 65, and a new work 2 is stored in the CPU 64.
The amount of the wire 15 required for machining 0 is determined by the type, length, and size of the work 20 and the cutting speed of the work,
It is calculated from a cutting speed function of the work derived from the shape of the work 20 and a cutting time derived from the sectional shape of the work 20. On the other hand, the CPU 64 calculates the reel 22 or 23 from the detected value from the strain gauge 50.
Is calculated to calculate the remaining amount of wire usable for processing the work 20. These data are compared, and if the remaining wire amount on the reel 22 or 23 is an amount that can cut the work 20 to the end, the work supporting mechanism 19 descends to contact the wire 15 and Is run, and the processing on the work 20 is started. However, if the remaining wire amount of any of the reels 22 and 23 does not reach the amount capable of cutting the work 20 to the end, the work supporting mechanism 19 does not descend and the wire 15 is emptied to the take-up reel or the pay-out reel. Feeding is performed. Then, after the wire 15 is completely wound on one of the reels 22 or 23, the cutting of the work 20 is started again. In this way, the workpiece 20 can be cut under stable cutting conditions without reversal of the wire feeding direction due to running out of the remaining wire amount of the feeding-side reel during the cutting process.

In this embodiment, as shown in FIG. 1, the reels 22 and 23 are supported on the rotating shaft 43 so that the central axes O1 and O2 of the reels 22 and 23 are oriented parallel to each other and vertically. ing. As a result, the two reels 22 and 23 can be supported in a cantilever manner in the vertical direction. Therefore, when measuring the weight of the two reels 22 and 23, the strain gauge 50 abutting on the lower end surface of the upper bearing 44a is used. It is only necessary to provide them, and the configuration can be simplified.

Further, by employing the strain gauge 50 as a member for measuring the weight, it is possible to input the detected value as it is as an electric signal to the subsequent control device 63, which is convenient.

Further, the strain gauge 50 is provided on both reels 22 and 2.
3 and the rotating shaft 43 are not directly contacted.
Thus, the rotation of the reels 22 and 23 and the rotating shaft 43 is not affected, and the weights of the reels 22 and 23 can be continuously measured. (Second Embodiment) Next, a second embodiment of the present invention will be described.

The second embodiment differs from the first embodiment in the means for detecting the remaining wire amount of the pay-out reel. In this embodiment, the following control is performed without relying on the detection of the reel weight.

In FIG. 6, when the reels 22 and 23 are replaced, an initial value of the remaining wire amount of the reels 22 and 23 is inputted by the key 70 and stored in the memory 65. here,
In the cutting of each work 20, the feed speed, feed direction, and feed time (work time) of the wire 15 are determined from control data such as the number of rotations of the reel rotation motors 41 and 42.
Is detected, and the feeding amount of the wire 15 is calculated.
Then, the CPU 64 calculates the remaining wire amount on the reels 22 and 23 by subtracting or adding the feeding amount of the wire 15 at each time from the initial value.

In the memory 65 as setting means,
It stores the time required for processing according to the type and size of the work 20, that is, data from the start to the end of cutting.

Then, the CPU 64 determines whether or not cutting can be performed at the start of cutting based on the data in the memory 65 and the data on the remaining wire amount on the reels 22 and 23. Then, based on the determination, the operation of the cutting mechanism 11, the work support mechanism 19, and the like is controlled.

The present invention can be embodied as follows in addition to the above embodiment. (1) In the above embodiment, a bearing for supporting a load in the thrust and radial directions was used for the upper bearing 44a.
This is provided separately for the thrust bearing and the radial bearing, and the strain gauge 50 for measuring the weight of the reels 22, 23 is brought into contact with the lower end surface of the thrust bearing.

(2) Instead of the strain gauge 50, for example, a load cell, a piezoelectric element, a magnetostrictive tube or the like is employed. (3) A pair of reels 22 and 23 are arranged sideways, and for example, a strain gauge, a load cell, a piezoelectric element, a magnetostrictive tube, etc. are provided on the lower end surface of an outer race of a radial bearing that supports a rotating shaft on which the reels are mounted. Provision of reel weight measuring means.

(4) In the second embodiment, the wire 1
In the case where the feeding speed of No. 5 is always constant, the remaining wire amount on the reels 22 and 23 is calculated only from the feeding direction and the processing time.

(5) In the second embodiment, the wire 1
5 is always constant and the unwinding direction for processing is constant, the reel 2 is used only from the processing time.
2 and 23 are configured to calculate the remaining wire amount.

(6) In the second embodiment, the reel 2
At the start of cutting, the type and size of the work that can be cut are determined based on the data on the remaining wire amount on the lines 2 and 23 and the data on the wire feeding speed and the processing time in the memory 65. Is displayed on the CRT 67.

Next, technical ideas extracted from the above embodiment will be described. (1) The reel 22 according to any one of claims 2 to 5 ,
A wire saw device provided with a calculating means 64 for calculating a signal corresponding to the weight of 23 to the remaining wire amount on the reels 22 and 23.

According to this configuration, the amount of wires remaining on the reels 22 and 23 can be reliably and accurately grasped.
Moreover, it is convenient for inputting data to the determination means 63.

[0042]

As described in detail above, according to the present invention, the following excellent effects can be obtained. According to the first aspect of the present invention, when the remaining wire amount of the pay-out reel is calculated ,
In both cases, it is possible to determine whether or not the work can be cut, thereby preventing the reversal of the traveling direction of the wire during the processing of the work.

According to the second aspect of the present invention, by detecting the weight of the reel, the remaining wire amount of the pay-out reel is calculated, and whether or not the work can be cut is determined.
To reverse the direction of travel of the wire during machining of the workpiece
Can be prevented .

According to the third aspect of the present invention, the weight of each reel can be measured with a simple configuration, and the weight of each reel can be continuously detected without hindering the rotation of each reel and the rotating shaft.

According to the fourth aspect of the present invention, whether or not the work can be cut is automatically determined, and the reversal of the traveling direction of the wire during the processing of the work can be prevented. Claim 5
According to the invention described in (1), the work can be selected according to the applicable work range, and efficient production can be performed.

[Brief description of the drawings]

FIG. 1 is a partial sectional view of a main part of a wire saw device embodying the present invention.

FIG. 2 is a partially enlarged view of a main part of FIG. 1;

FIG. 3 is a side view of a reel mechanism and a traverse mechanism.

FIG. 4 is a front view of the wire saw device.

FIG. 5 is a plan view of the wire saw device.

FIG. 6 is a block diagram of a control device.

[Explanation of symbols]

11: cutting mechanism, 13: drive groove roller as a processing roller, 14: driven groove roller as a processing roller, 15
... Cutting wire as wire, 20 ... Work, 22,
23 ... reel, 43 ... rotary shaft, 44a ... upper bearing as bearing, 50 ... strain gauge, 63 ... setting means, discriminating means,
Storage device, control device as determination means, O1, O2...

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-4-135157 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) B24B 27/06

Claims (5)

(57) [Claims] 1. A single wire fed from a feeding reel is spirally wound between a plurality of processing rollers constituting a cutting mechanism, and the wire is wound on a winding reel. In a wire saw device in which the wire is run by the rotation of the processing roller and a cutting process is performed between the wire and the work by applying a cutting feed between the wire and the work, at least a remaining wire amount of the pay-out reel is determined by: Calculating means for calculating based on at least one of the remaining wire amount of the initial input payout side reel and at least one of the wire payout speed, the running direction, and the processing time;
The workpiece is cut based on the remaining wire amount on the
A wire saw device comprising a determination means for determining whether or not the wire saw is possible. 2. A single wire fed from a reel for feeding is spirally wound between a plurality of processing rollers constituting a cutting mechanism, and the wire is wound on a winding reel. In a wire saw device in which the wire is run by the rotation of the processing roller and a cutting process is performed between the wire and the work by applying a cutting feed between the wire and the work, at least a remaining wire amount of the pay-out reel is determined by: Calculation based on the signal output according to the reel weight
Means and the calculated remaining wire amount of the payout reel.
Determination means for determining whether or not the workpiece can be cut based on the
A wire saw device. 3. The reel according to claim 1, wherein a center axis of the reel is perpendicular to the reel.
And the calculating means is configured to
The strain gauge supports the rotation axis of the reel.
The bearing according to claim 2, wherein the bearing is disposed at the lower end of the bearing.
On-board wire saw device. 4. The apparatus according to claim 1, wherein the determining means includes :
The wire saw device according to any one of 請 Motomeko 1-3 you determine whether the workpiece cut on the basis of the set value by the setting means for setting a time required for the cutting ends of the cutting start to the workpiece. 5. A wire feeding speed and a processing time are stored.
Storage means to be executed, and the remaining wire amount of the payout side reel
And the data in the storage means, and
And a determining means for determining a working range.
Serial mounting of the wire saw device either.