JPH10128662A - Slurry stirring device for wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent a stirring blade from being captured by a deposition layer of abrasive grains, even in the case of stopping stirring of a slurry tank by the stirring blade, in a wire saw. SOLUTION: Relating to a vertical support part 21a and a vertical guide pole 35 protrusively provided in a support plate 21 constituting partly a cover unit of a slurry tank 33, a base seat unit 36 is vertically movably mounted. To a base seat unit 36, a stirring motor 31 operation connected to a stirring blade 32 is fixed. A screw member 38 screwed to the base seat unit 36 is turned by a lift motor 37, and the stirring motor 31 and the stirring blade 32 are lift moved together with the base seat unit 36. When operation of a wire saw is stopped, the base seat unit 36 is moved upward, and the stirring blade 32 is drawn upward from a deposition layer in slurry in the tank 33.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of supplying a slurry to a running wire from a slurry tank storing a slurry composed of abrasive grains and a dispersion liquid, and cutting the workpiece based on a lapping action of the wire and the abrasive grains. In particular, the present invention relates to an apparatus for stirring slurry in the tank used in the wire saw.

[0002]

2. Description of the Related Art Generally, a wire saw is provided with two to four rollers having a large number of grooves formed at a predetermined pitch. On these grooved rollers, a cutting wire fed from a pay-out reel is supported around the grooves at a predetermined pitch, and then wound up and collected by a take-up reel. During operation of the wire saw, the group of grooved rollers, the pay-out reel and the take-up reel are synchronously rotated, and the cutting wire is run at a constant linear speed or a linear speed according to a predetermined control program. Then, the slurry obtained by dispersing the abrasive grains in a water-based or oil-based dispersion liquid is supplied to the traveling wire to attach the abrasive grains to the wire surface, and the wire in this state has a columnar or prismatic shape. The work is pressed and cut into a number of slices based on the lapping action of the abrasive grains.

[0003] In such a wire saw, in order to make effective use of the slurry, the slurry supplied to the traveling wire is once collected in a slurry tank, and the recovered slurry is re-supplied to the traveling wire. It has a recycling system. In such a circulating system, since a considerable amount of slurry must be stored in a slurry tank in a state that can be used immediately, the slurry tank contains stirring blades that are operatively connected to a stirring motor. The slurry is constantly stirred to prevent the solid-liquid separation between the abrasive grains and the dispersion liquid, and to homogenize the slurry.

[0004]

However, if the stirring by the stirring blades is stopped for a long time due to the stoppage of the operation of the wire saw or the like, the slurry undergoes solid-liquid separation in the slurry tank, and the abrasive grains precipitate at the bottom of the tank. Then, a deposit layer rich in abrasive grains is gradually formed from the bottom of the tank, and the tip (lower end) of the stirring blade may be buried in this deposit layer. The deposit layer rich in abrasive grains is in the form of a hard paste, which catches the stirring blade and hinders its rotation. For this reason, even if the stirring motor is driven when the operation of the wire saw is restarted, the stirring blade cannot be easily rotated even if the stirring motor is driven. Burn-in will occur.

Therefore, in such a situation, the operator lifts the stirring blade or the stirring motor with a crane or the like, removes the stirring blade once from the layer of abrasive grains, and removes the entire stirring blade above the deposition layer. Immersed in the dispersion liquid separated in the above, and after the abrasive particles of the deposited layer are redispersed to some extent through the dispersion liquid stirring, the stirring blade and the stirring motor are repositioned to the original mounting position. Needed. Such work is not only difficult and cumbersome for workers, but also in securing work safety,
It should also be avoided in improving the operation rate of the wire saw.

The present invention has been made in view of the above circumstances, and an object thereof is to prevent the stirring blade from being caught by the deposited layer of abrasive grains even when stirring by the stirring blade in the slurry tank is stopped. Another object of the present invention is to provide a slurry stirring device for a wire saw that can easily restart the stirring blade.

[0007]

According to the first aspect of the present invention, the slurry is supplied to a traveling wire from a slurry tank storing a slurry composed of abrasive grains and a dispersion.
A slurry stirring device for a wire saw for cutting a workpiece based on a lapping action of the wire and abrasive grains, wherein the slurry stirring device includes a stirring blade for stirring the slurry in the slurry tank, and the slurry stirring device. And lifting means for raising and lowering the slurry tank with respect to the slurry tank.

According to this slurry stirring apparatus, when the operation of the wire saw is stopped, the slurry stirring means is pulled up from the inside of the slurry tank together with the stirring blades by using the elevating means, so that the stirring blades in the slurry are stopped in a state where the stirring of the slurry is stopped. The situation of being deeply immersed in water can be avoided in advance. Therefore, even if the abrasive particles of the slurry form a deposited layer on the bottom of the tank due to the suspension of stirring for a long time, a part of the stirring blade is not buried in the deposited layer, and Does not hinder restart. Further, since the raising and lowering movement of the slurry stirring means is performed by the raising and lowering means, it is advantageous from the viewpoint of safety and improvement of the operation rate of the wire saw.

According to a second aspect of the present invention, the slurry stirring means includes a stirring motor for rotating the stirring blade. According to this configuration,
The slurry stirring means can be constituted most simply.

According to the third aspect of the present invention, the elevating means includes a pedestal body on which the slurry agitating means is mounted, a supporting means for supporting the pedestal body so as to be able to move up and down, the slurry agitating means and the pedestal And a driving means for causing the body to move up and down.

According to this structure, the slurry stirring means is moved up and down by the driving means while being guided by the support means together with the pedestal body. That is, when the operation of the wire saw is stopped, the slurry stirring means can be pulled up from the slurry tank together with the stirring blade by using the driving means. On the other hand, when the operation of the wire saw is restarted, the stirring means can be re-entered into the slurry tank by the driving means. The driving means may be a manual driving mechanism in addition to the electric motor for lifting and lowering, the air cylinder and the hydraulic cylinder.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Various embodiments of the present invention will be described below in detail with reference to the drawings. (First Embodiment) As shown in FIG. 1, three mechanism frames 2, 3, and 4 are provided on a base 1 of a wire saw. A cutting mechanism 5 is mounted on the first mechanism frame 2, and a pair of reel mechanisms 6 and a traverse mechanism 7 are mounted on the third mechanism frame 4. A wire tension applying mechanism 8 is provided on the second mechanism frame 3 so as to be located between the cutting mechanism 5 and the reel mechanism 6. Also,
A work support mechanism 9 is provided on the second mechanism frame 3 so as to be located above the cutting mechanism 5.

The cutting mechanism 5 includes a grooved driving roller 11 and first and second grooved driven rollers 12 and 13. These rollers 11, 12, and 13 are arranged so that the figures that are parallel to each other and that connect the respective axes are in an isosceles triangle shape. A large number of annular grooves are formed at a predetermined pitch on the outer periphery of each of the rollers 11, 12, and 13. From the reel mechanism 6 to the traverse mechanism 7 and the wire tension applying mechanism 8
, A single cutting wire 14 made of a steel wire is provided to the cutting mechanism 5. The cutting wire 14 is sequentially and continuously wound around each of the annular grooves of the grooved rollers 11, 12, and 13, and the respective portions of the wire are arranged in parallel at intervals according to the groove pitch. The grooved drive roller 11 is rotated by a motor (not shown).
The wire 14 travels in a specific one-way or two-way while the driven rollers 12 and 13 are driven by the travel of the wire 4.

The reel mechanism 6 draws out the wire 14 from the payout reel 6a toward the cutting mechanism 5, and winds up the wire 14 from the cutting mechanism 5 on a take-up reel 6b. The traverse mechanism 7 is provided with the feeding reel 6
The wire 14 is guided out while being traversed up and down. The wire tension applying mechanism 8 includes a roller 11,
A predetermined tension is applied to the wire 14 traveling between 12 and 13. The work support mechanism 9 supports the work W so as to be able to move up and down, and also holds the work W at the time of the cutting operation.
And the first driven roller 12 is pressed against the wire 14 traveling. As the work W, a semiconductor material, a magnetic material,
Examples include ceramic and metal ingots.

Under the base 1 or adjacent to the base 1,
A movable slurry tank 33 is provided. Although the details of the slurry tank 33 and its attached mechanism will be described later, basically, the slurry tank 33 accommodates a stirring blade 32 operatively connected to the stirring motor 31. The slurry S obtained by dispersing the abrasive grains in a water-based or oil-based dispersion liquid is stored in the slurry tank 33. Casters 33 are provided at the bottom of the slurry tank 33.
a is attached, and only the slurry tank 33 can be separated and moved from the wire saw main body.
Incidentally, the stirring motor 31 and the stirring blade 32 constitute a slurry stirring means.

Above the wire 14 between the driving roller 11 and the first driven roller 12, a pair of front and rear slurry supply pipes 15 are provided. These supply pipes 15 extend in a direction orthogonal to the running direction of the wire 14. At the bottom side of each supply pipe 15, a hole or a groove for drop-supplying the slurry S onto the running wire 14 in a screen shape is formed. These slurry supply pipes 15
Is connected to the slurry tank 33 by a supply pipe 16. In the middle of the supply pipe 16, the valve 1
7 and a pump 18 are provided, and by operating the pump 18 with the valve 17 opened, the slurry S in the slurry tank 33 is supplied under pressure to each slurry supply pipe 15 via the supply pipe 16. .

Below the wire 14 connecting the driving roller 11 and the first driven roller 12, three rollers 11, 12, 1
A slurry receiver 19 is provided in a triangular area surrounded by 3. The bottom of the slurry receiver 19 is connected to the slurry tank 33 by a collection pipe 20. The slurry S dropped and supplied from the respective slurry supply pipes 15 onto the wire 14 passes between the parallel running portions of the wire and is received by the slurry receiver 19. The slurry S collected at the bottom of the slurry receiver 19
Is collected in the slurry tank 33 through the collection pipe 20.

As shown in FIG. 2, the support plate 21 which forms a part of the lid of the slurry tank 33 has a vertical support portion 21a.
And a vertically extending guide groove 34 is formed in the vertical support portion 21a. A guide pole 35 is vertically fixed to the support plate 21. The supporting means in the elevating means includes the supporting plate 21, the vertical supporting portion 21a, the guide groove 34, and the guide pole 35.

The stirring motor 31 is fixed on a base 36. The pedestal body 36 is fitted into the guide groove 34 and is vertically movable along the first slide guide portion 36a. The pedestal body 36 is penetrated by the guide pole 35 and is vertically movable along the same. And a second slide guide portion 36b. The pedestal body 36
Constitutes a part of the elevating means.

An elevating motor 37 is disposed at the upper end of the vertical support portion 21a, and an output shaft 37a of the elevating motor 37 is provided.
Is connected to a screw member 38 extending over substantially the entire area of the guide groove 34. The lower end of the screw member 38 is rotatably supported by the support plate 21. A screw hole corresponding to the screw of the screw member 38 is formed in the first slide guide portion 36a of the pedestal body 36, and the screw member 3 is inserted into the screw hole.
8 is screwed. Therefore, the pedestal body 36 is moved in the guide groove 3
4 and can move in the vertical direction while being guided by the guide pole 35. In this embodiment, the elevating motor 37 and the screw member 38 constitute driving means in the elevating means.

In the vicinity of the guide pole 35, the support plate 2
A scale plate 43 is erected at 1, and an indicator needle 44 provided at an end of the second slide guide portion 36 b indicates a scale (scale) on the scale plate 43.

The stirring blade 32 is operatively connected to the output shaft of the stirring motor 31. The stirring blade 32 includes an upper blade 32a, a middle blade 32b, and a lower blade 32c that are each branched in the horizontal direction. Each of these branch blades 32a-
32 c are formed at different heights on the main body of the stirring blade 32. Accordingly, the height of each of the branch blades 32a to 32c in the depth direction (vertical direction) of the slurry tank 33 can be changed in accordance with the vertical movement of the stirring motor 31 and the base 36.

When the wire saw shown in FIG. 1 is in normal operation, the upper, middle and lower blades 32a, 32b and 32c of the stirring blade 32 are all settled in the slurry S as shown in FIG. It is arranged at a position (referred to as an operation position) in the slurry tank 33 in which the slurry tank 33 fits. Stirring blade 32
Is located at the operation position, the lower blade 32c
3, the whole of the inside of the tank 33 is stirred by the rotation of the stirring blades 32, while the abrasive particles that tend to settle on the bottom of the tank 33 are wound up. Therefore, when the stirring motor 31 operates in the state of FIG. 3A, the stirring of the slurry S in the tank by the stirring blades 32 is performed efficiently, and the concentration of the slurry composed of the abrasive grains and the dispersion liquid is made uniform. Can be

When the operation of the wire saw is stopped, the stirring blade 32 is driven by driving the lifting motor
Together with the first retracted position as shown in FIG. 3 (B). Even when the stirring blade 32 is located at the first retracted position, the upper blade 32a is located above the slurry liquid level, but the middle and lower blades 32b and 32c remain in the slurry S. However, even in this case,
The middle and lower blades 32b and 32c are present in the liquid layer side region (region above the boundary B) when the slurry S undergoes solid-liquid separation and is separated into a deposited layer of abrasive grains and a liquid layer of the dispersion liquid. I do.

When cleaning the inside of the slurry tank 33 or replacing the worn or damaged stirring blade 32, as shown in FIG. 3C, the stirring blade 32 is further moved from the first retracted position. It is lifted to a high second retracted position. In the second retreat position, the entire stirring blade 32 is located completely above the slurry liquid level. In this case, the stirring blade 32 is entirely covered with the upper lid of the slurry tank 33 (not shown).
The agitating blade 32 is not damaged by the upper lid even when the upper lid is removed and placed outside since the upper lid is pulled up further than the upper surface. In addition, if the stirring blade 32 is disposed at the second retreat position, the stirring blade 32 can be removed without removing the upper lid of the tank or removing the stirring motor 31.
Can be replaced.

In each of FIGS. 3B and 3C,
A part of the stirring blade 32 will not be buried in the deposited layer for the abrasive grains that can be formed in the tank 33 by the solid-liquid separation of the slurry S. As described above, when the operation of the wire saw is stopped, the lowermost end of the stirring blade 32 is positioned above the boundary B between the deposited layer of the abrasive grains and the liquid layer of the dispersion liquid during the solid-liquid separation of the slurry S. And so on.

The characteristic effects of the first embodiment are as follows. (A) When the operation of the wire saw is stopped, the stirring blade 32 together with the stirring motor 31 can be retracted to the retracted position above the slurry tank 33. For this reason, the stirring blades 32 are not trapped by the deposited layer of abrasive grains that can be formed on the bottom of the slurry tank 33 due to the stirring stop, and the stirring blades 32 can be easily restarted even after a long stirring stop. be able to.

(B) The stirring motor 31 connected to the stirring blade 32 is fixed on a base 36, and the base 36 is moved up and down while being guided by the guide grooves 34 and the guide poles 35. Blade 32 and stirring motor 31
The operator can safely perform the positioning operation of the stirring blade 32 without any particular danger even during the vertical movement.

(C) The indicator needle 44 indicates the scale of the scale plate 43 in accordance with the arrangement (height) of the pedestal 36. With reference to this, the arrangement of the stirring blades 32, in particular, from the bottom of the tank 33 to the lower stage The height up to the blade 32c can be easily grasped, and the positioning operation becomes extremely easy.

(Second Embodiment) FIG.
1 shows a drive mechanism that can move up and down. As shown in FIG. 4, a first pulley 39 is mounted on the upper end of the screw member 38, and a second pulley 40 is rotatably mounted on the vertical support 21a. Double pulley 3
9 and 40 are interconnected by a belt 41, and a handle 42 is attached to the second pulley 40. According to this configuration, when the operator turns the handle 42, the first pulley 39 and the screw member 38
Can be rotated forward and reverse manually to move the pedestal body 36 and the motor 31 up and down manually. Therefore, the screw member 38, the first and second pulleys 39 and 40, the belt 41, and the handle 42 constitute a manual driving means in the elevating means.

The effects described in the above (A), (B) and (C) are also obtained by the slurry stirring device according to the second embodiment. In addition, according to the second embodiment, even in the event of a power failure, the operator can manually move the pedestal body 36 and the like by rotating the handle 42, so that in an emergency, This also has the advantage that the stirring blade 32 can be taken out of the slurry S.

As shown in FIG. 5, the drive motor 37 of the first embodiment and the manual drive mechanism of the second embodiment are combined to form a drive mechanism for both automatic and manual operation. Is also good.

(Third Embodiment) FIG. 6 shows a drive mechanism constituted by using an air cylinder 46 or the like which can move up and down the pedestal body 36 and the like. As shown in FIG.
An air cylinder 46 is provided at the upper end of “a”. An operating rod 47 extends downward from the air cylinder 46, and a lower end thereof is connected to a first slide guide portion 36 a of the base 36. The air cylinder 46 is connected to an air source (not shown), and causes the operating rod 47 to move up and down in a vertical direction in accordance with the air supply from the air source, and to move the stirring motor 31 and the stirring blade 32 together with the pedestal body 36 up and down. In this embodiment, the air cylinder 46 and the operating rod 47 constitute driving means in the elevating means.

According to this configuration, it is possible to design a system in which necessary air is guided from an accumulator or the like to the air cylinder 46 upon a power failure and the stirring motor 31 and the stirring blade 32 are forcibly pulled up. Becomes easier. Further, as compared with the electric motor system, the structure of the mechanism is simplified, for example, no screw is required, so that the maintenance management becomes easy.

Incidentally, as shown in FIG.
May be arranged adjacent to the side wall of the vertical support portion 21a, and the tip of the operating rod 47 extending upward may be connected to a part of the first slide guide portion 36a of the pedestal body 36.

The present invention is not limited to the first to third embodiments, but may be implemented in the following manner. (A) The air cylinder 46 shown in FIGS. 6 and 7 may be replaced with a hydraulic cylinder.

(B) In the first embodiment (FIG. 2), three limit switches are provided on the scale plate 43 to detect the operating position of the pedestal body 36, the first retracted position and the second retracted position, respectively. A lifting / lowering motor control circuit configured to stop driving of the lifting / lowering motor 37 when the pointing hand 44 comes into contact with any of the three limit switches in accordance with the vertical movement of the pedestal body 36. It may be added.

(C) Although the scale plate 43 with a scale is particularly provided in each of the above-described embodiments, a scale may be formed on the surface of the guide pole 35 to have the function of the scale plate 43.

[0039]

As described above in detail, according to the present invention, when the stirring by the stirring blade in the slurry tank is stopped, the stirring blade is retracted from the inside of the slurry tank by the elevating means. Therefore, the stirring blades are not trapped by the deposited layer of abrasive grains that can be formed at the bottom of the slurry tank by stopping the stirring. Therefore, the stirring blade can be easily restarted even after the stirring is stopped for a long time.

[Brief description of the drawings]

FIG. 1 is a front view showing the entire configuration of a wire saw.

FIG. 2 is a cross-sectional view of the slurry stirring device according to the first embodiment.

FIGS. 3A and 3B are schematic diagrams showing an arrangement state of a stirring blade, wherein FIG. 3A shows an operation position, FIG. 3B shows a first retreat position, and FIG. 3C shows a second retreat position.

FIG. 4 is a sectional view of a main part of a slurry stirring device according to a second embodiment.

FIG. 5 is a cross-sectional view of a main part of a slurry stirring device as another example of the second embodiment.

FIG. 6 is a sectional view of a main part of a slurry stirring device according to a third embodiment.

FIG. 7 is a sectional view of a main part of a slurry stirring device as another example of the third embodiment.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Base, 14 ... Cutting wire, 21 ... Support plate, 21a
... vertical support, 31 ... stirring motor, 32 ... stirring blade (3
1, 32 constitute a slurry stirring means), 33: slurry tank, 34: guide groove, 35: guide pole (2
Reference numerals 1, 21a, 34, and 35 constitute supporting means of the elevating means), 36 ... pedestal body (which constitutes elevating means), 3
7 ... Moving motor, 38 ... Screw member (37, 38)
Constitutes driving means in the lifting means), 39, 40
... first and second pulleys, 41 ... belt, 42 ... handle (38, 39, 40, 41, and 42 constitute driving means in the lifting / lowering means), 46 ... air cylinder, 47 ... operating rod, S ... slurry, W: Work.

Claims (3)

[Claims] A slurry for a wire saw for supplying a slurry to a traveling wire from a slurry tank storing a slurry composed of abrasive grains and a dispersion liquid, and cutting a workpiece based on a lapping action of the wire and the abrasive grains. A slurry for a wire saw, comprising: a slurry stirring means having stirring blades for stirring slurry in a slurry tank; and a lifting means for moving the slurry stirring means up and down with respect to the slurry tank. Stirrer. 2. The slurry stirring device according to claim 1, wherein said slurry stirring means includes a stirring motor for rotating said stirring blade. 3. The pedestal body on which the slurry stirring means is mounted, a support means for supporting the pedestal body so as to be able to move up and down, and a drive for causing the slurry stirring means and the pedestal body to move up and down. The slurry stirring device according to claim 1 or 2, further comprising means.