JPH0921665A - Ultrasonic flow meter - Google Patents

Ultrasonic flow meter

Info

Publication number
JPH0921665A
JPH0921665A JP7169470A JP16947095A JPH0921665A JP H0921665 A JPH0921665 A JP H0921665A JP 7169470 A JP7169470 A JP 7169470A JP 16947095 A JP16947095 A JP 16947095A JP H0921665 A JPH0921665 A JP H0921665A
Authority
JP
Japan
Prior art keywords
ultrasonic
flow path
downstream
upstream
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7169470A
Other languages
Japanese (ja)
Inventor
Kenzo Ochi
謙三 黄地
Yukio Nagaoka
行夫 長岡
Motoyuki Nawa
基之 名和
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7169470A priority Critical patent/JPH0921665A/en
Publication of JPH0921665A publication Critical patent/JPH0921665A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To improve measurement accuracy of an ultrasonic flow meter. SOLUTION: A pair of ultrasonic vibrators 11, 12 covered by streamlined packages 13, 14 are provided oppositely to each other and symmetrically with respect to an axis upstream and downstream in a flow path 8. This constitution allows fluid flowing in the flow path 8 to flow along the packages 13, 14 and prevents an irregular eddy or stagnation from being formed. Therefore, a highly precise ultrasonic flow meter 6 can be obtained.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、超音波を利用してガス
・水などの流体の流量を計測する超音波流量計に関する
ものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic flowmeter for measuring the flow rate of fluids such as gas and water using ultrasonic waves.

【0002】[0002]

【従来の技術】従来のこの種の超音波流量計は、図7に
示すように、流路1の上流と下流とに直角に曲がる曲が
り部2、3とを設け、一対の超音波振動子4、5を曲が
り部の壁面の外側に固着させ、流体の流れ方向と平行に
超音波を伝搬させ、超音波流量計として動作させてい
た。なお、図中の矢印は流体の流れ方向を示す(特開昭
60−115810号公報参照)。
2. Description of the Related Art As shown in FIG. 7, a conventional ultrasonic flowmeter of this type has a pair of ultrasonic transducers provided with bent portions 2 and 3 which are bent at right angles upstream and downstream of a flow path 1. Nos. 4 and 5 are fixed to the outside of the wall surface of the curved portion, ultrasonic waves are propagated in parallel to the flow direction of the fluid, and they are operated as an ultrasonic flowmeter. The arrows in the figure indicate the flow direction of the fluid (see Japanese Patent Laid-Open No. 60-115810).

【0003】このような構成で、上流側の振動子4から
流れの方向に沿って超音波を発信し、この超音波を下流
側の振動子5で受信し、振動子4から5への超音波の伝
搬時間、Tdnを計測する。また、逆に下流側の振動子5
から流れに逆らって超音波を発信し、この超音波を上流
側の振動子4で受信し、振動子5から4への超音波の伝
搬時間、Tupを計測する。この2つの伝搬時間から流路
1を流れる流体の平均的な流速を演算し、あらかじめ解
っている流路1の断面積などから、流体の流量を計測し
ていた。
With such a configuration, an ultrasonic wave is transmitted from the vibrator 4 on the upstream side in the flow direction, and this ultrasonic wave is received by the vibrator 5 on the downstream side. The sound wave propagation time, Tdn, is measured. On the contrary, the oscillator 5 on the downstream side
To transmit an ultrasonic wave against the flow of the ultrasonic wave, the ultrasonic wave is received by the upstream transducer 4, and the propagation time of the ultrasonic wave from the transducers 5 to 4, Tup, is measured. The average flow velocity of the fluid flowing through the flow channel 1 is calculated from these two propagation times, and the flow rate of the fluid is measured from the cross-sectional area of the flow channel 1 which is known in advance.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、上記従
来の超音波流量計では、直角に曲がる曲がり部2、3な
どで流体中に、渦が不規則に発生したり、流路内に不規
則に淀み点などが発生し、流量計測の誤差要因となって
いた。また、流路内に送信された超音波が、管壁などで
反射を繰り返し、いつまでも残響波として残り、その残
響波が超音波振動子で受信され誤差の要因ともなってい
た。
However, in the above-mentioned conventional ultrasonic flowmeter, vortices are irregularly generated in the fluid at the bent portions 2 and 3 which are bent at right angles, or irregular in the flow path. A stagnation point etc. occurred, which was an error factor in flow rate measurement. Further, the ultrasonic waves transmitted in the flow path are repeatedly reflected by the wall of the pipe and the like, and remain as reverberation waves forever, and the reverberation waves are received by the ultrasonic transducers, which also causes an error.

【0005】本発明は上記課題を解決するもので、残響
波を減少させ高精度の流量計測ができる超音波流量計を
提供するものである。
The present invention solves the above problems, and provides an ultrasonic flowmeter capable of reducing reverberation waves and measuring flow with high accuracy.

【0006】[0006]

【課題を解決するための手段】上記目的を達成するため
に本発明の超音波流量計は、以下の構成とした。
In order to achieve the above object, the ultrasonic flowmeter of the present invention has the following constitution.

【0007】すなわち、流体の流れる管状の流路と、前
記流路内の上流と下流とに、外装部で覆われた一対の超
音波振動子を軸対称に対向して備えた構成とした。
That is, a tubular flow path through which a fluid flows and a pair of ultrasonic transducers covered by an exterior part are provided axially symmetrically in the upstream and downstream of the flow path.

【0008】また、流体の流れる管状の流路と、前記流
路内の上流と下流とに、内面に放物面状の超音波反射体
を有し、外面が外装部で覆われ、一対の超音波振動子を
軸対称に対向して備えた構成とした。
In addition, a tubular flow path through which a fluid flows, and parabolic ultrasonic reflectors on the inner surface are provided upstream and downstream of the flow path, and the outer surface is covered with an exterior part. The ultrasonic transducers are arranged so as to face each other in axial symmetry.

【0009】また、流体の流れる管状の流路と、前記流
路内の上流と下流とに、内面に放物面状の超音波反射体
を有し、外面が外装部で覆われ、かつ前面に流線型の超
音波透過膜を有する一対の超音波振動子を軸対称に対向
して備えた構成とした。
Further, a tubular flow path through which a fluid flows, and parabolic ultrasonic reflectors on the inner surface are provided upstream and downstream of the flow path, and the outer surface is covered with an exterior part and the front surface is provided. In addition, a pair of ultrasonic transducers having a streamlined ultrasonic transmission film are axially symmetrically opposed to each other.

【0010】また、流体の流れる管状の流路と、前記流
路内の上流と下流とに、内面に放物面状の超音波反射体
を有し、外面が流線型の導電性の外装部で覆われ、かつ
前面に導電性の超音波透過膜を有する一対の超音波振動
子を軸対称に対向して備えた構成とした。
In addition, a tubular flow path through which a fluid flows, and parabolic ultrasonic reflectors on the inner surface are provided upstream and downstream of the flow path, and the outer surface is a streamlined conductive exterior portion. A pair of ultrasonic transducers, which are covered and have a conductive ultrasonic transmission film on the front surface, are provided so as to face each other in axial symmetry.

【0011】また、流体の流れる管状の流路と、前記流
路内の上流と下流とに、内面に放物面状の超音波反射体
を有し、外面が外装部で覆われ、かつ前面に超音波透過
膜を有し、前記透過膜内に、指向性ホーンを有する一対
の超音波振動子を軸対称に対向して備えた構成とした。
Further, a tubular flow path through which the fluid flows, and parabolic ultrasonic reflectors on the inner surface are provided upstream and downstream in the flow path, and the outer surface is covered with an exterior part and the front surface. And a pair of ultrasonic transducers each having a directional horn, which are opposed to each other in axial symmetry.

【0012】また、流体の流れる、内壁面が粗面状の管
状の流路と、前記管状の流路内に超音波透過膜からなる
内筒を設け、かつ前記管状の流路内面前記流路内の上流
と下流とに、内面に放物面状の超音波反射体を有し、外
面が外装部で覆われ、かつ前面に超音波透過膜を有する
一対の超音波振動子を軸対称に対向して備えた構成とし
た。
[0012] Further, a tubular flow channel in which a fluid flows, the inner wall surface of which is rough, and an inner cylinder made of an ultrasonic wave permeable film are provided in the tubular flow channel. A pair of ultrasonic transducers having parabolic ultrasonic reflectors on the inner surface, an outer surface covered with an exterior part, and an ultrasonic transmission film on the front surface are axially symmetrical in the upstream and the downstream of the inside. It was configured to face each other.

【0013】また、流体の流れる、内壁面が粗面状の管
状の流路と、前記管状の流路内に超音波透過膜からなる
内筒を設け、かつ前記管状の流路内面前記流路内の上流
と下流とに、内面に放物面状の超音波反射体を有し、外
面が外装部で覆われ、かつ前面に超音波透過膜を有する
一対の超音波振動子を軸対称に対向して設け、かつ前記
一対の超音波振動子の上流と下流とに、前記超音波透過
膜よりも目の細かい流体透過膜を備えた構成とした。
In addition, a tubular flow channel having a rough inner wall surface, in which a fluid flows, and an inner cylinder made of an ultrasonic wave permeable film are provided in the tubular flow channel, and the tubular flow channel inner surface has the flow channel. A pair of ultrasonic transducers having parabolic ultrasonic reflectors on the inner surface, an outer surface covered with an exterior part, and an ultrasonic transmission film on the front surface are axially symmetrical in the upstream and the downstream of the inside. The pair of ultrasonic transducers are provided so as to face each other, and a fluid permeable membrane having a finer mesh than the ultrasonic permeable membrane is provided upstream and downstream of the pair of ultrasonic transducers.

【0014】[0014]

【作用】本発明は、流体の流れる管状の流路と、流路内
の上流と下流とに、外装部で覆われた一対の超音波振動
子を軸対称に対向して備えた構成としたので、流体中に
渦の発生や、淀み点などの発生が無くなる。
The present invention has a structure in which a tubular flow path through which a fluid flows and a pair of ultrasonic transducers covered by an exterior part are axially symmetrically opposed to each other upstream and downstream of the flow path. Therefore, generation of vortices and stagnation points in the fluid are eliminated.

【0015】また、流体の流れる管状の流路と、流路内
の上流と下流とに、内面に放物面状の超音波反射体を有
し、外面が外装部で覆われ、一対の超音波振動子を軸対
称に対向して備えた構成としたので、流体中に渦の発生
や、淀み点などの発生が無くなり、また、振動子近傍を
通過する超音波は、放物面状の反射面で反射するため、
反射した超音波は一点に収束し、容易に吸収、減衰させ
ることができ、残響波が少なくなる。
Further, a tubular flow path through which the fluid flows, and parabolic ultrasonic reflectors on the inner surface are provided upstream and downstream of the flow path, and the outer surface is covered with an exterior part. Since the acoustic wave oscillators are arranged so as to face each other in axial symmetry, the generation of vortices and stagnation points in the fluid is eliminated, and the ultrasonic waves passing near the oscillators are parabolic. Because it reflects on the reflective surface,
The reflected ultrasonic waves converge on one point, can be easily absorbed and attenuated, and reverberation waves are reduced.

【0016】また、流体の流れる管状の流路と、流路内
の上流と下流とに、内面に放物面状の超音波反射体を有
し、外面が外装部で覆われ、かつ前面に超音波透過膜を
有する一対の超音波振動子を軸対称に対向して備えた構
成としたので、流路を流れる流体は、振動子前面の超音
波透過膜に沿って流れるため、流体中に渦の発生や、淀
み点などの発生が無くなり、また超音波は、効率よく超
音波透過膜を透過する。
In addition, a tubular flow path through which a fluid flows, and parabolic ultrasonic reflectors on the inner surface are provided upstream and downstream of the flow path, and the outer surface is covered with an exterior part and the front surface is provided. Since a pair of ultrasonic transducers having ultrasonic transmission membranes are provided so as to be opposed to each other in axial symmetry, the fluid flowing in the flow path flows along the ultrasonic transmission membrane on the front surface of the transducer. Generation of vortices and stagnation points are eliminated, and ultrasonic waves are efficiently transmitted through the ultrasonic transmission film.

【0017】また、超音波透過膜を透過し、振動子近傍
を通過する超音波は、外装部内面の放物面状の反射面で
反射し、一点に収束するため、容易に吸収、減衰させる
ことができる。
Further, the ultrasonic waves that pass through the ultrasonic wave transmitting film and pass through the vicinity of the vibrator are reflected by the parabolic reflection surface on the inner surface of the exterior part and converge at one point, so that they are easily absorbed and attenuated. be able to.

【0018】また、流体の流れる管状の流路と、流路内
の上流と下流とに、内面に放物面状の超音波反射体を有
し、外面が導電性の外装部で覆われ、かつ、前面に導電
性の超音波透過膜を有する一対の超音波振動子を軸対称
に対向して備えた構成としたので、導電性の外装部と、
前記導電性の超音波透過膜とを接地することにより、電
磁波雑音に強い。
In addition, a tubular flow path through which the fluid flows, and parabolic ultrasonic reflectors on the inner surface are provided upstream and downstream of the flow path, and the outer surface is covered with a conductive exterior part. And, since it has a configuration in which a pair of ultrasonic transducers having a conductive ultrasonic transmission film on the front surface are provided axially symmetrically facing each other, a conductive exterior portion,
By grounding the conductive ultrasonic wave transmitting film, it is resistant to electromagnetic noise.

【0019】また、流体の流れる管状の流路と、流路内
の上流と下流とに、内面に放物面状の超音波反射体を有
し、外面が外装部で覆われ、かつ前面に超音波透過膜を
有し、透過膜内に、指向性ホーンを有する一対の超音波
振動子を軸対称に対向して備えた構成としたので、流路
内を送信される超音波は、ホーンで指向性が向上し、流
路の管壁での反射が、大幅に減少する。また、ホーン
は、振動子前面の超音波透過膜内に構成されているた
め、流体の流れを乱すことがない。従って、より高精度
の流量計測ができる超音波流量計を提供することができ
る。
Further, a tubular flow path through which the fluid flows, and parabolic ultrasonic reflectors on the inner surface are provided upstream and downstream of the flow path, and the outer surface is covered with the exterior part and the front surface is provided. Since the ultrasonic wave transmission film is provided and a pair of ultrasonic transducers having a directional horn are provided in the transmission film so as to face each other in axial symmetry, the ultrasonic wave transmitted in the flow channel is generated by the horn. The directivity is improved, and the reflection on the pipe wall of the flow channel is significantly reduced. Further, since the horn is formed inside the ultrasonic wave transmitting film on the front surface of the vibrator, it does not disturb the fluid flow. Therefore, it is possible to provide an ultrasonic flowmeter that can measure the flow rate with higher accuracy.

【0020】また、流体の流れる、内壁面が粗面状の管
状の流路と、前記管状の流路内に超音波透過膜からなる
内筒を設け、かつ管状の流路内面前記流路内の上流と下
流とに、内面に放物面状の超音波反射体を有し、外面が
外装部で覆われ、かつ前面に超音波透過膜を有する一対
の超音波振動子を軸対称に対向して備えたので、振動子
から送信された超音波は管状流路の内面に設けられた超
音波透過膜からなる内筒を透過し、直接粗面状の管状流
路の管壁に到達し、反射するため、大きく散乱するかも
しくは吸収される。このため残響波は少なくなる。
Further, a tubular flow channel having an inner wall surface in which a fluid flows and an inner cylinder made of an ultrasonic wave permeable film are provided in the tubular flow channel, and the tubular flow channel inner surface is provided in the flow channel. A pair of ultrasonic transducers having parabolic ultrasonic reflectors on the inner surface, an outer surface covered with an exterior, and an ultrasonic transmission film on the front surface are axially opposed to each other upstream and downstream of As a result, the ultrasonic waves transmitted from the vibrator penetrate the inner cylinder made of the ultrasonic wave transmission film provided on the inner surface of the tubular flow path and reach the tube wall of the rough tubular tube directly. , Is reflected, and thus is largely scattered or absorbed. Therefore, reverberation waves are reduced.

【0021】また、流体の流れる内壁面が粗面状の管状
の流路と、管状の流路内に超音波透過膜からなる内筒を
設け、かつ管状の流路内面前記流路内の上流と下流と
に、内面に放物面状の超音波反射体を有し、外面が外装
部で覆われ、かつ前面に超音波透過膜を有する一対の超
音波振動子を軸対称に対向して設け、かつ一対の超音波
振動子の上流と下流とに、超音波透過膜よりも目の細か
い流体透過膜を備えた構成としので、流路内に設けられ
た、より目の粗い超音波透過膜に、塵芥や水滴などが付
着することがなくなり、前記超音波透過膜の耐久性や耐
塵芥性が大幅に向上し信頼性が向上する。
Further, a tubular flow channel having an inner wall surface through which the fluid flows and an inner cylinder made of an ultrasonic wave permeable film are provided in the tubular flow channel, and the inner surface of the tubular flow channel is upstream of the flow channel. A pair of ultrasonic transducers having a parabolic ultrasonic reflector on the inner surface, an outer surface covered with an exterior portion, and an ultrasonic transmission film on the front surface are axially opposed to each other and downstream. Since a fluid permeable membrane with a finer mesh than the ultrasonic permeable membrane is provided on the upstream side and the downstream side of the pair of ultrasonic transducers, ultrasonic transmission with a coarser mesh provided in the flow path is performed. Dust, water droplets, etc. do not adhere to the film, and the durability and dust resistance of the ultrasonic wave transmissive film are greatly improved and the reliability is improved.

【0022】[0022]

【実施例】以下、本発明の第1の実施例を図面にもとづ
いて説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described below with reference to the drawings.

【0023】図1は、本発明の実施例を基づく超音波流
量計6であり、流体の流れる流路7は、流量を計測する
径20mm、長さ80mmの直管部8と、上流、下流の絞り
部9、10とから構成した。これらの流路は、内部の様
子が見えるようにアクリル樹脂で構成した。なお、図中
の矢印は流体の流れる方向を示す。流路の上流、下流に
対向させた一対の超音波振動子11、12は、径10mm
とした。超音波振動子を覆う流線型の外装部13、14
の外径は15mmとした。なお、外装部13、14の内側
は、超音波が減衰するようゴム、シリコン樹脂などを充
填した。また、絞り部9、10は前記外装部による流れ
の乱れが発生しない程度に広くとった。15、16は超
音波振動子駆動用の信号線を示し、流体の流れが乱れな
いように同軸状となるようにに配線した。用いた超音波
振動子の駆動周波数は、100〜500kHzとした。
FIG. 1 shows an ultrasonic flowmeter 6 according to an embodiment of the present invention, in which a flow path 7 through which a fluid flows has a straight pipe portion 8 with a diameter of 20 mm and a length of 80 mm for measuring the flow rate, and upstream and downstream. And the narrowed portions 9 and 10. These flow paths were made of acrylic resin so that the inside could be seen. The arrow in the figure indicates the direction of fluid flow. The pair of ultrasonic transducers 11 and 12 facing upstream and downstream of the flow path have a diameter of 10 mm.
And Streamlined exterior parts 13 and 14 covering the ultrasonic transducer
The outer diameter was 15 mm. The insides of the exterior parts 13 and 14 were filled with rubber, silicone resin, or the like so as to attenuate ultrasonic waves. Further, the narrowed portions 9 and 10 are wide enough to prevent the flow disturbance due to the exterior portion from occurring. Reference numerals 15 and 16 denote signal lines for driving the ultrasonic transducer, which are arranged so as to be coaxial so that the fluid flow is not disturbed. The drive frequency of the ultrasonic transducer used was 100 to 500 kHz.

【0024】この構成で流体中に煙を導入し、目視で流
れのようすを評価したところ、広い流量範囲にわたり渦
の発生や淀み点の発生などは認められなかった。従っ
て、再現性よく、流量計測のできる超音波流量計を実現
できた。
When smoke was introduced into the fluid with this configuration and the flow behavior was visually evaluated, no vortex or stagnation point was found over a wide flow rate range. Therefore, an ultrasonic flowmeter capable of measuring the flow rate with good reproducibility was realized.

【0025】図2は、本発明の第2の実施例を基づく超
音波流量計17を示す。図1で示した超音波流量計と同
じ構成であるが、超音波振動子の外装部13、14の内
側17、18を、送信されてきた超音波が反射するよう
放物面状に形成した。なお、その曲率は、反射した超音
波が振動子の背面部19、20に収束するように合わせ
た。
FIG. 2 shows an ultrasonic flowmeter 17 according to the second embodiment of the present invention. Although it has the same configuration as the ultrasonic flowmeter shown in FIG. 1, the insides 17 and 18 of the exterior parts 13 and 14 of the ultrasonic transducer are formed in a parabolic shape so that the transmitted ultrasonic waves are reflected. . The curvature was adjusted so that the reflected ultrasonic waves converge on the back surface portions 19 and 20 of the transducer.

【0026】外装部13、14の内部の振動子11、1
2の背面部にゴム、シリコン樹脂、ガラスウールなどを
充填し、反射、収束した超音波がよく減衰するようにし
た。この構成により、一度振動子の背面部に達した超音
波は、強く吸収されるようになった。従って、残響波の
少ない超音波流量計が実現できた。
The vibrators 11 and 1 inside the exterior parts 13 and 14
The back surface of No. 2 was filled with rubber, silicone resin, glass wool, etc. so that the reflected and converged ultrasonic waves were well attenuated. With this configuration, the ultrasonic waves once reaching the back surface of the vibrator are strongly absorbed. Therefore, an ultrasonic flowmeter with few reverberation waves was realized.

【0027】図3は、本発明の第3の実施例を基づく超
音波流量計21を示す。図2で示した超音波流量計と同
じ構成であるが、超音波振動子の前面に流線型の超音波
透過膜22、23を設け、外装部13、14が、流れに
対してより一層乱れが発生しないような構成とした。即
ち、超音波振動子11、12が、流線型の覆いで囲まれ
るようにした。なお、前記超音波透過膜22、23は厚
膜印刷に用いるスクリーンメッシュで構成した。用いた
スクリーンメッシュのメッシュ番号は#8.6〜#35
0であった。用いた超音波振動子の駆動周波数は、10
0〜500kHzであった。
FIG. 3 shows an ultrasonic flowmeter 21 according to the third embodiment of the present invention. It has the same configuration as the ultrasonic flowmeter shown in FIG. 2, but the streamlined ultrasonic transmission films 22 and 23 are provided on the front surface of the ultrasonic transducer, and the exterior portions 13 and 14 are further disturbed with respect to the flow. It is configured so that it does not occur. That is, the ultrasonic transducers 11 and 12 were surrounded by a streamlined cover. The ultrasonic transmission films 22 and 23 are composed of screen mesh used for thick film printing. The mesh numbers of the screen mesh used are # 8.6 to # 35.
It was 0. The driving frequency of the ultrasonic transducer used is 10
It was 0 to 500 kHz.

【0028】このような構成の超音波流量計21におい
て、超音波の伝搬特性を評価したところ、超音波透過膜
22、23を構成するスクリーンメメッシュの線径が、
用いる超音波の波長程度であると、大きく影響し伝搬損
失がやや大きかったが、線径が用いる超音波の波長の
(1/3)以下であると、超音波の透過率は、80%以
上となった。なお、スクリーンメッシュの空間率(単位
面積あたりのは光の透過面積)は、メッシュ番号にかか
わらず、ほぼ一定値を示し、約40%であった。超音波
の透過率が、80%以上と大きくなったのは、用いたス
クリーンメッシュの厚さが、超音波の波長に比べ非常に
薄いため、超音波が浸みだすために、超音波の透過率
が、光のそれよりも大きくなったと考えられる。また、
流路への影響を、流路8内部に煙を導入し、目視で評価
したところ、スクリーンメッシュに用いる線径が流路8
の径の(1/200)以下であれば、即ち線径が0.1
mm以下であれば、流体中に渦の発生や、淀み点の発生な
ど、流れへの影響はほとんど認められなかった。なお、
スクリーンメッシュの材料は、ナイロンと、SUSとを
用いたが、その差は認められなかった。この種の目的に
は、耐湿性、耐久性などの面から、SUSのほうが、適
していると考えられる。
When the ultrasonic wave propagation characteristics of the ultrasonic flowmeter 21 having such a structure were evaluated, the wire diameter of the screen meshes forming the ultrasonic wave transmission films 22 and 23 was found to be as follows.
If the wavelength of the ultrasonic wave to be used is large, the propagation loss was a little large and the propagation loss was a little large, but if the wire diameter is (1/3) or less of the wavelength of the ultrasonic wave to be used, the transmittance of the ultrasonic wave is 80% or more. Became. The porosity of the screen mesh (light transmission area per unit area) showed a substantially constant value regardless of the mesh number and was about 40%. The transmittance of ultrasonic waves increased to 80% or more because the thickness of the screen mesh used was very thin compared to the wavelength of ultrasonic waves. However, it is thought that it became larger than that of light. Also,
Smoke was introduced into the flow path 8 and the effect on the flow path was visually evaluated to find that the wire diameter used for the screen mesh was the flow path 8
If the wire diameter is less than (1/200), that is, the wire diameter is 0.1
If it is less than mm, almost no influence on the flow such as generation of vortex or stagnation point in the fluid is recognized. In addition,
Nylon and SUS were used as the material of the screen mesh, but no difference was observed. It is considered that SUS is more suitable for this kind of purpose from the viewpoint of moisture resistance and durability.

【0029】このように、流路径の約1/200以下の
線径のスクリーンメッシュからなる超音波透過膜22、
23で、超音波振動子11、12の前面を、覆うことに
より流路8を流れる流体に、不規則な渦の発生や淀み点
の発生もなく、滑らかな流れを実現できた。また、超音
波の波長の1/3以下の線径のスクリーンメッシュを用
いることにより、反射も少なく、良好な超音波透過特性
が得られた。従って、広範囲の流量域において、高精度
な超音波流量計が実現できる。
As described above, the ultrasonic wave permeable film 22 made of a screen mesh having a wire diameter of about 1/200 or less of the flow path diameter,
In 23, by covering the front surfaces of the ultrasonic transducers 11 and 12, the fluid flowing in the flow path 8 was able to realize a smooth flow without generation of irregular vortices or stagnation points. Further, by using a screen mesh having a wire diameter of ⅓ or less of the wavelength of ultrasonic waves, there was little reflection and good ultrasonic transmission characteristics were obtained. Therefore, a highly accurate ultrasonic flowmeter can be realized in a wide range of flow rate.

【0030】さらに、前記で説明した超音波流量計21
において、超音波透過膜22、23を構成するスクリー
ンメメッシュをSUSで構成し、かつ外装部13、14
を金属などの導電性材料で構成し、超音波透過膜と外装
部とを電気的に接続した。この構成により、超音波振動
子11、12は、電気的にシールドされることになり、
電磁波雑音に強い構成となった。これにより、電気的雑
音が大幅に低減し、超音波流量計の高安定化が実現でき
た。通常の場合、超音波振動子の送信側は、高電圧、高
周波のパルスで駆動される。従って、受信側の振動子に
電磁波としての電気的雑音が入りやすく、計測回路が複
雑になるなど微少な流量を高精度に計測することが困難
であった。しかし、本発明のように、送受信する超音波
振動子を電気的シールドする構成をとることにより、低
雑音が実現可能となり高精度な超音波流量計が実現でき
る。
Further, the ultrasonic flowmeter 21 described above is used.
In, the screen meshes forming the ultrasonic transmission films 22 and 23 are made of SUS, and the exterior parts 13 and 14
Was made of a conductive material such as metal, and the ultrasonic transmission film and the exterior part were electrically connected. With this configuration, the ultrasonic transducers 11 and 12 are electrically shielded,
The configuration is strong against electromagnetic noise. As a result, the electrical noise was greatly reduced and the ultrasonic flowmeter was highly stabilized. In the normal case, the transmitting side of the ultrasonic transducer is driven by high voltage, high frequency pulses. Therefore, it is difficult to measure a minute flow rate with high accuracy such that electric noise as an electromagnetic wave easily enters the vibrator on the receiving side and the measurement circuit becomes complicated. However, as in the present invention, low noise can be realized and a highly accurate ultrasonic flowmeter can be realized by adopting a configuration in which the ultrasonic transducer that transmits and receives is electrically shielded.

【0031】図4は、本発明の第4の実施例を基づく超
音波流量計24を示す。図3で示した超音波流量計と同
じ構成であるが、流線型外装部13、14と一体となっ
ている超音波透過膜22、23の内部に、超音波の指向
性を向上させる円筒状、もしくは円錐状のホーン25、
26を、超音波振動子の前面に設けた。この構成によ
り、超音波振動子11、12から送信された超音波は、
ホーン25、26により伝搬方向が規制され直進するた
め、流路8の管壁まで広がらないで伝搬する。
FIG. 4 shows an ultrasonic flowmeter 24 according to a fourth embodiment of the present invention. Although having the same configuration as the ultrasonic flowmeter shown in FIG. 3, a cylindrical shape for improving the directivity of ultrasonic waves is provided inside the ultrasonic transmission films 22 and 23 integrated with the streamlined exterior parts 13 and 14. Or a conical horn 25,
26 was provided on the front surface of the ultrasonic transducer. With this configuration, the ultrasonic waves transmitted from the ultrasonic transducers 11 and 12 are
The propagation direction is restricted by the horns 25 and 26, and the horn 25 travels straight, so that the propagation is performed without spreading to the pipe wall of the flow path 8.

【0032】従って、超音波を受信する振動子には、流
路8の管壁からの反射、時間遅れの超音波が到達しない
ため、高精度に超音波の伝搬時間を計測できる。また、
超音波振動子11、12の近傍を通過した超音波は、超
音波振動子11、12の外装部13、14の内側の放物
面で反射し、超音波振動子11、12の背面に収束し、
ゴム、シリコン樹脂、ガラスウールなどの吸収材で吸収
される。従って、残響波の少ない高精度な超音波流量計
が実現できる。
Therefore, since the ultrasonic waves reflected by the tube wall of the flow channel 8 and delayed by the ultrasonic waves do not reach the vibrator for receiving the ultrasonic waves, the propagation time of the ultrasonic waves can be measured with high accuracy. Also,
The ultrasonic waves that have passed the vicinity of the ultrasonic transducers 11 and 12 are reflected by the paraboloids inside the exterior portions 13 and 14 of the ultrasonic transducers 11 and 12 and converge on the back surfaces of the ultrasonic transducers 11 and 12. Then
It is absorbed by absorbent materials such as rubber, silicone resin and glass wool. Therefore, a highly accurate ultrasonic flowmeter with few reverberation waves can be realized.

【0033】図5は、本発明の第5の実施例を基づく超
音波流量計27を示す。図3で示した超音波流量計と同
じ構成であるが、流路8の内部に円筒状の超音波透過膜
28を設け、流路8の内壁面を用いる超音波の波長程度
の面粗さとなるよう粗した。
FIG. 5 shows an ultrasonic flowmeter 27 according to the fifth embodiment of the present invention. It has the same configuration as the ultrasonic flowmeter shown in FIG. 3, but a cylindrical ultrasonic transmission film 28 is provided inside the channel 8 and the surface roughness of the wavelength of ultrasonic waves using the inner wall surface of the channel 8 is set. It was coarse so that

【0034】即ち、この種の超音波流量計に用いられる
超音波の駆動周波数は100〜500kHzで、その波長
は約0.7〜3.4mm程度である。従って面粗さの振幅
は0.5〜2mm程度となるように粗した。
That is, the driving frequency of ultrasonic waves used in this type of ultrasonic flowmeter is 100 to 500 kHz, and the wavelength thereof is about 0.7 to 3.4 mm. Therefore, the amplitude of the surface roughness was adjusted to about 0.5 to 2 mm.

【0035】なお、前記円筒状の超音波透過膜28は、
前記実施例で説明したナイロン、SUSなどのスクリー
ンメッシュで構成した。この構成により、超音波振動子
から送信された超音波は、円筒状の超音波透過膜28を
通過し、流路8の内壁面に到達し、内壁面で散乱もしく
は減衰される。従って、超音波を受信する振動子には、
流路8の管壁から反射し、時間的に遅れた超音波が到達
しないため、高精度に超音波の伝搬時間を計測できる。
また、流路8内を流れる流体は、流路8内に設けられた
筒状の超音波透過膜28に沿って流れる。従って、流路
8の内壁面の面粗さは、流体の流れに影響することがな
く、不規則な渦の発生や、淀み点の発生は認められなか
った。従って、反射波の少ない高精度な超音波流量計が
実現できる。
The cylindrical ultrasonic transmission film 28 is
The screen mesh is made of nylon, SUS or the like described in the above embodiment. With this configuration, the ultrasonic waves transmitted from the ultrasonic transducer pass through the cylindrical ultrasonic transmission film 28, reach the inner wall surface of the flow path 8, and are scattered or attenuated by the inner wall surface. Therefore, in the transducer that receives ultrasonic waves,
Since ultrasonic waves reflected from the tube wall of the flow path 8 and delayed in time do not arrive, the propagation time of ultrasonic waves can be measured with high accuracy.
Further, the fluid flowing in the flow path 8 flows along the tubular ultrasonic transmission film 28 provided in the flow path 8. Therefore, the surface roughness of the inner wall surface of the flow path 8 did not affect the flow of the fluid, and neither irregular vortex nor stagnation point was observed. Therefore, a highly accurate ultrasonic flowmeter with few reflected waves can be realized.

【0036】図6は、本発明の第6の実施例を基づく超
音波流量計29を示す。図5で示した超音波流量計と同
じ構成であるが、流路8の超音波振動子11、12の上
流と下流とに、前記超音波振動子11、12の前面に用
いた超音波透過膜22、23および流路8の内面に用い
た前記円筒状の超音波透過膜28よりも、目の細かい流
体透過膜29、30を設けた。例えば、前記超音波透過
膜22、23および前記円筒状の超音波透過膜28に、
メッシュ番号#200のスクリーンメッシュを用いた場
合、流体透過膜29、30には、メッシュ番号#250
以上のスクリーンメッシュを用いることになる。この構
成により、超音波振動子の上流、下流に設けられたより
目の細かいスクリーンメッシュが、防塵、防滴の機能を
果たすため、より目の粗い前記超音波透過膜22、23
および前記円筒状の超音波透過膜28に塵芥、水滴など
が付着することがない。従って、信頼性の高い超音波流
量計が実現できる。なお、この種の目的には、耐湿性、
耐久性などの面から、ナイロンのものよりSUSのスク
リーンメッシュのほうが適している。
FIG. 6 shows an ultrasonic flowmeter 29 according to the sixth embodiment of the present invention. 5 has the same configuration as the ultrasonic flowmeter shown in FIG. 5, but the ultrasonic transmission used on the front surface of the ultrasonic transducers 11 and 12 is upstream and downstream of the ultrasonic transducers 11 and 12 in the flow path 8. Fluid permeable membranes 29 and 30 having finer mesh than the cylindrical ultrasonic permeable membrane 28 used on the inner surfaces of the membranes 22 and 23 and the channel 8 were provided. For example, in the ultrasonic wave transmissive films 22 and 23 and the cylindrical ultrasonic wave transmissive film 28,
When the screen mesh of mesh number # 200 is used, the fluid permeable membranes 29 and 30 have mesh number # 250.
The above screen mesh will be used. With this configuration, finer screen meshes provided on the upstream and downstream sides of the ultrasonic transducer perform dustproof and drip-proof functions.
Moreover, dust and water drops do not adhere to the cylindrical ultrasonic wave transmission film 28. Therefore, a highly reliable ultrasonic flowmeter can be realized. For this type of purpose, moisture resistance,
In terms of durability, SUS screen mesh is more suitable than nylon screen mesh.

【0037】[0037]

【発明の効果】以上の説明から明らかなように本発明の
超音波流量計によれば次の効果が得られる。
As is apparent from the above description, the ultrasonic flowmeter of the present invention has the following effects.

【0038】(1)流体中に不規則な渦の発生や淀み点
などの発生が無くなり、安定して流量計測のできる高精
度の超音波流量計を提供することができる。
(1) It is possible to provide a highly accurate ultrasonic flowmeter capable of stably measuring the flow rate by eliminating generation of irregular vortices and stagnation points in the fluid.

【0039】(2)流体中に不規則な渦の発生や淀み点
などの発生が無くなり、また、振動子近傍を通過する超
音波は、放物面状の反射面で反射するため、反射した超
音波は一点に収束し容易に吸収減衰させることができ残
響波が少なくなり、高精度の流量計測ができる超音波流
量計を提供することができる。
(2) Generation of irregular vortices and stagnation points in the fluid is eliminated, and ultrasonic waves passing near the oscillator are reflected by the parabolic reflection surface and are therefore reflected. It is possible to provide an ultrasonic flowmeter that can converge an ultrasonic wave to one point, easily absorb and attenuate it, reduce reverberation waves, and perform highly accurate flow rate measurement.

【0040】(3)流路を流れる流体は、振動子前面の
流線型をした超音波透過膜に沿って流れるため、流体中
に不規則な渦の発生や淀み点などの発生が無くなる。ま
た、超音波は、スクリーンメッシュからなる超音波透過
膜を効率よく、透過する。また、超音波透過膜を透過
し、振動子近傍を通過する超音波は、外装部内面の放物
面状の反射面で反射し、一点に収束し、容易に吸収、減
衰させることができるため残響波を少なくできる。従っ
て、より高精度の流量計測ができる超音波流量計を提供
することができる。
(3) Since the fluid flowing through the flow path flows along the streamlined ultrasonic wave permeable membrane on the front surface of the oscillator, the occurrence of irregular vortices and stagnation points in the fluid is eliminated. In addition, the ultrasonic waves are efficiently transmitted through the ultrasonic transmission film composed of the screen mesh. In addition, ultrasonic waves that pass through the ultrasonic transmission film and pass through the vicinity of the vibrator are reflected by the parabolic reflection surface on the inner surface of the exterior part, converge to a single point, and can be easily absorbed and attenuated. Reverberation waves can be reduced. Therefore, it is possible to provide an ultrasonic flowmeter that can measure the flow rate with higher accuracy.

【0041】(4)導電性の外装部と、導電性の超音波
透過膜とを接地することにより、電磁波雑音に強い、高
精度の流量計測ができる超音波流量計を提供することが
できる。
(4) By grounding the conductive exterior part and the conductive ultrasonic wave permeable film, it is possible to provide an ultrasonic flowmeter that is resistant to electromagnetic noise and can measure flow rate with high accuracy.

【0042】(5)流路内を送信される超音波は、ホー
ンで指向性が向上し、流路の管壁などでの反射が大幅に
減少する。また、ホーンは、振動子前面の超音波透過膜
内に構成されているため、流体の流れを乱すことがな
い。従って、より高精度の流量計測ができる超音波流量
計を提供することができる。
(5) The directivity of the ultrasonic waves transmitted in the channel is improved by the horn, and the reflection on the tube wall of the channel is greatly reduced. Further, since the horn is formed inside the ultrasonic wave transmitting film on the front surface of the vibrator, it does not disturb the fluid flow. Therefore, it is possible to provide an ultrasonic flowmeter that can measure the flow rate with higher accuracy.

【0043】(6)振動子から送信された超音波は管状
流路の内面に設けられた超音波透過膜からなる内筒を透
過し、直接粗面状の管状流路の管壁に到達し、反射する
ため大きく散乱もしくは吸収される。このため時間遅れ
の残響波のすくない、高精度の流量計測ができる超音波
流量計を提供することができる。
(6) The ultrasonic waves transmitted from the vibrator pass through the inner cylinder made of an ultrasonic wave transmitting film provided on the inner surface of the tubular flow path and directly reach the tube wall of the rough tubular tube flow path. , It is largely scattered or absorbed because it reflects. Therefore, it is possible to provide an ultrasonic flowmeter capable of highly accurate flow rate measurement with less time-delayed reverberation waves.

【0044】(7)流路内に設けられたより目の粗い超
音波透過膜に、塵芥、水滴などが付着することがなくな
り、超音波透過膜の耐久性、耐塵芥性が大幅に向上し信
頼性が高い。耐久性に優れた高精度の流量計測ができる
超音波流量計を提供することができる。
(7) Dust, water droplets, etc. will not adhere to the coarser ultrasonic wave transmission film provided in the flow path, and the durability and dust resistance of the ultrasonic wave transmission film will be greatly improved and reliability will be improved. It is highly likely. It is possible to provide an ultrasonic flowmeter that is highly durable and capable of highly accurate flow rate measurement.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1の実施例の超音波流量計の断面図FIG. 1 is a sectional view of an ultrasonic flowmeter according to a first embodiment of the present invention.

【図2】本発明の第2の実施例の超音波流量計の断面図FIG. 2 is a sectional view of an ultrasonic flowmeter according to a second embodiment of the present invention.

【図3】本発明の第3の実施例の超音波流量計の断面図FIG. 3 is a sectional view of an ultrasonic flowmeter according to a third embodiment of the present invention.

【図4】本発明の第4の実施例の超音波流量計の断面図FIG. 4 is a sectional view of an ultrasonic flowmeter according to a fourth embodiment of the present invention.

【図5】本発明の第5の実施例の超音波流量計の断面図FIG. 5 is a sectional view of an ultrasonic flowmeter according to a fifth embodiment of the present invention.

【図6】本発明の第6の実施例の超音波流量計の断面図FIG. 6 is a sectional view of an ultrasonic flowmeter according to a sixth embodiment of the present invention.

【図7】従来の超音波流量計の断面図FIG. 7 is a sectional view of a conventional ultrasonic flowmeter.

【符号の説明】[Explanation of symbols]

6 超音波流量計 8 流路 11、12 超音波振動子 13、14 外装部 6 Ultrasonic flowmeter 8 Flow path 11, 12 Ultrasonic transducer 13, 14 Exterior part

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】流体の流れる管状の流路と、前記流路内の
上流と下流とに、外装部で覆われた一対の超音波振動子
を軸対称に対向して備えた超音波流量計。
1. An ultrasonic flowmeter comprising a tubular flow path through which a fluid flows, and a pair of ultrasonic transducers covered by an exterior part, which are axially symmetrically opposed to each other upstream and downstream of the flow path. .
【請求項2】流体の流れる管状の流路と、前記流路内の
上流と下流とに、内面に放物面状の超音波反射体を有
し、外面が外装部で覆われ、一対の超音波振動子を軸対
称に対向して備えた超音波流量計。
2. A tubular flow path through which a fluid flows, and parabolic ultrasonic reflectors on the inner surface upstream and downstream of the flow path. An ultrasonic flowmeter equipped with ultrasonic transducers facing each other in axial symmetry.
【請求項3】流体の流れる管状の流路と、前記流路内の
上流と下流とに、内面に放物面状の超音波反射体を有
し、外面が外装部で覆われ、かつ、前面に超音波透過膜
を有する一対の超音波振動子を軸対称に対向して備えた
超音波流量計。
3. A tubular flow path through which a fluid flows, and parabolic ultrasonic reflectors on the inner surface upstream and downstream of the flow path, the outer surface being covered with an exterior part, and An ultrasonic flowmeter equipped with a pair of ultrasonic transducers having an ultrasonic transmitting film on the front surface, which are axially symmetrical to each other.
【請求項4】流体の流れる管状の流路と、前記流路内の
上流と下流とに、内面に放物面状の超音波反射体を有
し、外面が導電性の外装部で覆われ、かつ、前面に導電
性の超音波透過膜を有する一対の超音波振動子を軸対称
に対向して備えた超音波流量計。
4. A tubular flow path through which a fluid flows, and parabolic ultrasonic reflectors on the inner surface upstream and downstream of the flow path, the outer surface of which is covered with a conductive exterior part. And an ultrasonic flowmeter, which is provided with a pair of ultrasonic transducers having a conductive ultrasonic transmission film on the front surface thereof so as to be axially symmetrical to each other.
【請求項5】流体の流れる管状の流路と、前記流路内の
上流と下流とに、内面に放物面状の超音波反射体を有
し、外面が外装部で覆われ、かつ、前面に超音波透過膜
を有し、前記透過膜内に、指向性ホーンを有する一対の
超音波振動子を軸対称に対向して備えた超音波流量計。
5. A tubular flow path through which a fluid flows, and parabolic ultrasonic reflectors on its inner surface upstream and downstream of the flow path, and its outer surface covered with an exterior part, and An ultrasonic flowmeter having an ultrasonic wave transmissive film on its front surface, and a pair of ultrasonic wave oscillators having directional horns facing each other axially symmetrically in the transmissive film.
【請求項6】流体の流れる、内壁面が粗面状の管状の流
路と、前記管状の流路内に超音波透過膜からなる内筒を
設け、かつ、前記管状の流路内面前記流路内の上流と下
流とに、内面に放物面状の超音波反射体を有し、外面が
外装部で覆われ、かつ、前面に超音波透過膜を有する一
対の超音波振動子を軸対称に対向して備えた超音波流量
計。
6. A tubular flow channel in which a fluid flows, the inner wall surface of which is rough, and an inner cylinder made of an ultrasonic wave permeable membrane are provided in the tubular flow channel. A pair of ultrasonic transducers having a parabolic ultrasonic reflector on the inner surface, an outer surface covered with an exterior portion, and an ultrasonic transmission film on the front surface are provided upstream and downstream in the passage. An ultrasonic flow meter equipped symmetrically opposite.
【請求項7】流体の流れる、内壁面が粗面状の管状の流
路と、前記管状の流路内に超音波透過膜からなる内筒を
設け、かつ、前記管状の流路内面前記流路内の上流と下
流とに、内面に放物面状の超音波反射体を有し、外面が
外装部で覆われ、かつ、前面に超音波透過膜を有する一
対の超音波振動子を軸対称に対向して設け、かつ、前記
一対の超音波振動子の上流と、下流とに、前記超音波透
過膜よりも目の細かい流体透過膜を備えた超音波流量
計。
7. A tubular flow channel in which a fluid flows, the inner wall surface of which is rough, and an inner cylinder made of an ultrasonic wave permeable film are provided in the tubular flow channel. A pair of ultrasonic transducers having a parabolic ultrasonic reflector on the inner surface, an outer surface covered with an exterior portion, and an ultrasonic transmission film on the front surface are provided upstream and downstream in the passage. An ultrasonic flowmeter, which is provided so as to be symmetrically opposed to each other, and includes a fluid permeable film having a finer mesh than the ultrasonic permeable film upstream and downstream of the pair of ultrasonic transducers.
JP7169470A 1995-07-05 1995-07-05 Ultrasonic flow meter Pending JPH0921665A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7169470A JPH0921665A (en) 1995-07-05 1995-07-05 Ultrasonic flow meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7169470A JPH0921665A (en) 1995-07-05 1995-07-05 Ultrasonic flow meter

Related Child Applications (3)

Application Number Title Priority Date Filing Date
JP2002362067A Division JP3521906B2 (en) 2002-12-13 2002-12-13 Ultrasonic flow meter
JP2002362066A Division JP2003177042A (en) 2002-12-13 2002-12-13 Ultrasonic flowmeter
JP2002362068A Division JP3521907B2 (en) 2002-12-13 2002-12-13 Ultrasonic flow meter

Publications (1)

Publication Number Publication Date
JPH0921665A true JPH0921665A (en) 1997-01-21

Family

ID=15887161

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7169470A Pending JPH0921665A (en) 1995-07-05 1995-07-05 Ultrasonic flow meter

Country Status (1)

Country Link
JP (1) JPH0921665A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002538421A (en) * 1999-02-24 2002-11-12 ベルガミニ、ジオルジオ An improved measurement system for measuring gas flow by ultrasound.
KR101476534B1 (en) * 2013-04-29 2014-12-24 한국수자원공사 Ultra sonic Flow measuring Device
US11656109B2 (en) 2019-10-31 2023-05-23 Neptune Technology Group Inc. Interchangeable ultrasonic measuring element with reflector plate situated in an in-line piping system of a water meter

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002538421A (en) * 1999-02-24 2002-11-12 ベルガミニ、ジオルジオ An improved measurement system for measuring gas flow by ultrasound.
KR101476534B1 (en) * 2013-04-29 2014-12-24 한국수자원공사 Ultra sonic Flow measuring Device
US11656109B2 (en) 2019-10-31 2023-05-23 Neptune Technology Group Inc. Interchangeable ultrasonic measuring element with reflector plate situated in an in-line piping system of a water meter

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